CN219624694U - Reference mirror angle adjusting device and interferometer - Google Patents
Reference mirror angle adjusting device and interferometer Download PDFInfo
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- CN219624694U CN219624694U CN202320570643.4U CN202320570643U CN219624694U CN 219624694 U CN219624694 U CN 219624694U CN 202320570643 U CN202320570643 U CN 202320570643U CN 219624694 U CN219624694 U CN 219624694U
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Abstract
The utility model provides a reference mirror angle adjusting device and an interferometer, wherein the reference mirror angle adjusting device comprises a first support, a second support, a universal structure, a reference mirror and a driving structure, wherein the first support and the second support are arranged at intervals, two ends of the universal structure are respectively connected with the first support and the second support and used for realizing universal swing, the reference mirror is arranged on the second support, the mirror surface of the reference mirror is coplanar with the swing center point of the universal structure, and the driving structure is arranged on the first support and connected with the second support and used for driving the second support to swing universally relative to the first support. The interferometer comprises a light source, a light splitting element and a reference mirror angle adjusting device, wherein the light splitting element is used for splitting light rays emitted by the light source into reflected light and reference light, and the reference mirror is used for reflecting the reference light. The reference mirror angle adjusting device can ensure that the optical path of the reference light is unchanged, and the interferometer of the embodiment of the utility model can ensure the accuracy of optical interferometry.
Description
Technical Field
The utility model belongs to the field of optical interferometry devices, and particularly relates to a reference mirror angle adjusting device and an interferometer.
Background
The interferometer is a technology for generating interference fringes by utilizing the interference principle of light and calculating the height or distance of a measured object according to the brightness change of the interference fringes. In general, interferometers should use a single wavelength coherent light source to ensure a sufficiently long coherence length. However, when a single-wavelength coherent light source is used for interferometry, extra speckle noise cannot be introduced, and analysis of a final phase signal is not affected. A coherent light source with a certain wavelength width is therefore preferred, but this also shortens the coherence length of the system. The interferometer is split by the beam splitting element into a sample arm light path for detecting a reflected light signal of the sample and a reference arm light path for forming a reference light. The reference arm light path end will typically have a reference mirror that can adjust the angle. In the existing interferometer, the reference mirror rotates around the side edge of the reference mirror to realize angle adjustment, so that the optical path of the reference arm optical path is changed, and the accuracy of a measurement result is affected.
Disclosure of Invention
The embodiment of the utility model aims to provide a reference mirror angle adjusting device and an interferometer, which are used for solving the technical problem that in the prior art, the optical path length of a reference arm optical path is changed when a reference mirror rotates around the side edge of the reference mirror to realize angle adjustment, so that the accuracy of a measurement result is affected.
In order to achieve the above purpose, the utility model adopts the following technical scheme: there is provided a reference mirror angle adjustment device comprising:
a first bracket;
the second bracket is arranged at intervals with the first bracket;
the universal structure is arranged between the first bracket and the second bracket, and two ends of the universal structure are respectively connected with the first bracket and the second bracket and are used for realizing universal swing of the second bracket relative to the first bracket;
the reference mirror is arranged on one side, far away from the universal structure, of the second bracket, the position of the reference mirror is arranged corresponding to the universal structure, and the mirror surface of the reference mirror is coplanar with the swing center point of the universal structure;
the driving structure is arranged on the first support and connected with the second support, and the driving structure is used for driving the second support to swing universally relative to the first support.
In one embodiment, the driving structure includes:
the first driving assembly is arranged on the first bracket and connected with the second bracket and is used for driving the second bracket to rotate around a first direction;
and the second driving assembly is arranged on the second bracket and connected with the second bracket and used for driving the second bracket to rotate around a second direction.
In one embodiment, the first drive assembly includes:
the output end of the first pushing component is abutted against the second bracket and used for pushing the second bracket to rotate around the first direction;
the first elastic piece, first elastic piece both ends are connected respectively first support with the second support, first elastic piece is located first pushing component with between the universal structure, first elastic piece is used for taut the second support with the first support.
The second driving assembly includes:
the second pushing assembly is arranged on the first bracket, and the output end of the second pushing assembly is abutted against the second bracket and used for pushing the second bracket to rotate around the second direction;
the second elastic piece, second elastic piece both ends are connected respectively first support with the second support, the second elastic piece is located the second promotes the subassembly with between the universal structure, the second elastic piece is used for taut the second support with the first support.
In one embodiment, a first chute is disposed on the second support corresponding to the output end of the first pushing assembly, the output end of the first pushing assembly extends into the first chute, and the extending direction of the first chute is perpendicular to the first direction.
The second support is provided with a second chute corresponding to the output end of the second pushing assembly, the output end of the second pushing assembly stretches into the second chute, and the extending direction of the second chute is perpendicular to the second direction.
In one embodiment, the cross section of the first chute along the depth direction is in a V shape, the output end of the first pushing component is in a conical shape, and the output end of the first pushing component abuts against the bottom of the first chute.
The section of the second sliding groove along the depth direction is V-shaped, the output end of the second pushing component is conical, and the output end of the second pushing component is abutted to the bottom of the second sliding groove.
In one embodiment, a first through hole is formed in the first support, the first pushing assembly comprises a first push rod motor, and an output shaft of the first push rod motor passes through the first through hole to abut against the second support.
The first bracket is provided with a second through hole, the second pushing assembly comprises a second push rod motor, and an output shaft of the second push rod motor passes through the second through hole to be abutted against the second bracket.
In one embodiment, the gimbal structure includes a ball head and a ball seat, the ball head being coupled to the ball seat.
In one embodiment, the ball head is provided with a convex spherical surface, the ball seat is provided with a concave spherical surface, the convex spherical surface is attached to the concave spherical surface, and the surface area of the concave spherical surface is smaller than that of the convex spherical surface.
In one embodiment, the first bracket comprises a supporting plate and a fixing plate which are connected, the universal structure and the driving structure are installed on the supporting plate, and a long slot hole is formed in the fixing plate.
Another object of the present utility model is to provide an interferometer, which includes a light source, a beam splitting element, and the reference mirror angle adjusting device, where the light source is located at one side of the beam splitting element, the reference mirror is located at one side of the beam splitting element, the beam splitting element is used to split light emitted by the light source into reflected light and reference light, and the reference mirror is used to reflect the reference light.
The reference mirror angle adjusting device provided by the embodiment of the utility model has the beneficial effects that: compared with the prior art, the angle adjusting device for the reference mirror is characterized in that the universal structure is arranged between the first support and the second support, the driving structure is arranged to drive the second support to swing around the swing center point of the universal structure in a universal mode relative to the first support, and further drive the reference mirror to swing around the swing center point of the universal structure in a universal mode, the position of the reference mirror corresponds to the universal structure, the mirror surface of the reference mirror is coplanar with the swing center point of the universal structure, the point of the position, corresponding to the swing center point of the universal structure, on the reference mirror is the reference light incident point, and the optical path of the reference light can be ensured to be unchanged in the universal swing process of the reference mirror.
The interferometer provided by the embodiment of the utility model has the beneficial effects that: compared with the prior art, the interferometer provided by the embodiment of the utility model uses the reference mirror adjusting device, the reference light is incident to the reference mirror, the optical path of the reference light is unchanged, and the accuracy of optical interferometry can be ensured.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a reference mirror angle adjusting device according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of an exploded structure of a reference mirror angle adjusting device according to an embodiment of the present utility model;
FIG. 3 is a schematic view of a first support and ball seat of a reference mirror angle adjustment device according to an embodiment of the present utility model;
fig. 4 is a schematic structural view of a second bracket and a ball of the reference mirror angle adjusting device according to the embodiment of the present utility model.
Wherein, each reference sign in the figure:
1. a first bracket; 11. a support plate; 111. a first through hole; 112. a second through hole; 12. a fixing plate; 121. a long slot;
2. a second bracket; 21. a first chute; 22. a second chute;
3. a universal structure; 31. ball head; 311. a convex spherical surface; 32. a ball seat; 321. a concave spherical surface;
4. a reference mirror;
5. a driving structure;
51. a first drive assembly; 511. a first pushing assembly; 512. a first elastic member;
52. a second drive assembly; 521. a second pushing assembly; 522. and a second elastic member.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the utility model is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are merely for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the utility model.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
Reference in the specification to "one embodiment," "some embodiments," or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the utility model. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," and the like in the specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments" unless expressly specified otherwise. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
Referring to fig. 1 and 2 together, a reference mirror angle adjusting device and an interferometer according to an embodiment of the utility model will now be described. The reference mirror angle adjusting device comprises a first support 1, a second support 2, a universal structure 3, a reference mirror 4 and a driving structure 5, wherein the first support 1 and the second support 2 are arranged at intervals. The universal structure 3 is located between the first support 1 and the second support 2, and the first support 1 and the second support 2 are connected respectively to universal structure 3 both ends, and universal structure 3 is used for realizing the universal swing of second support 2 relative to first support 1. The reference mirror 4 is mounted on the second support 2 and is located on one side, far away from the universal structure 3, of the second support 2, the position of the reference mirror 4 is corresponding to the universal structure 3, and the mirror surface of the reference mirror 4 is coplanar with the swing center point of the universal structure 3. The reference mirror 4 can be glued directly to the second support 2 or can be connected to the second support 2 at intervals by other means, for example by means of a piezo-ceramic for phase shifting. The driving structure 5 is arranged on the first bracket 1 and connected with the second bracket 2 for driving the second bracket 2 to swing universally relative to the first bracket 1.
According to the reference mirror angle adjusting device provided by the embodiment of the utility model, the universal structure 3 is arranged between the first bracket 1 and the second bracket 2, and the driving structure 5 is arranged to drive the second bracket 2 to swing around the swing center point of the universal structure 3 in a universal manner relative to the first bracket 1, so that the reference mirror 4 is driven to swing around the swing center point of the universal structure 3 in a universal manner. The position of the reference mirror 4 corresponds to the universal structure 3, the mirror surface of the reference mirror 4 is coplanar with the swinging center point of the universal structure 3, the point of the position of the reference mirror 4 corresponding to the swinging center point of the universal structure 3 is a reference light incident point, and the optical path of the reference light can be ensured not to change in the universal swinging process of the reference mirror 4.
In one embodiment, referring to fig. 1 and 2, the drive structure 5 includes a first drive assembly 51 and a second drive assembly 52. The first driving assembly 51 is mounted on the first bracket 1, the first driving structure 5 is connected to the second bracket 2, and the first driving structure 5 is used for driving the second bracket 2 to rotate around the first direction. The second driving component 52 is mounted on the second bracket 2, the second driving component 52 is connected to the second bracket 2, and the second driving component 52 is used for driving the second bracket 2 to rotate around the second direction. The first driving component 51 is arranged to drive the second bracket 2 to rotate around the first direction, the second driving component 52 drives the second bracket 2 to rotate around the second direction, the first driving component 51 and the second driving component 52 can work simultaneously, and the second bracket 2 rotates around the first direction and the second direction simultaneously. The first driving component 51 and the second driving component 52 drive the second bracket 2 to realize universal rotation, so that the universal rotation of the reference mirror 4 is realized.
In one embodiment, referring to fig. 1, 2 and 3, the first driving assembly 51 includes a first pushing assembly 511 and a first elastic member 512. The first pushing component 511 is mounted on the first bracket 1, an output end of the first pushing component 511 abuts against the second bracket 2, and the first pushing component 511 is used for pushing the second bracket 2 to rotate around a first direction. The two ends of the first elastic element 512 are respectively connected with the first bracket 1 and the second bracket 2, and the first elastic element 512 is located between the first pushing component 511 and the universal structure 3 and is used for tensioning the first bracket 1 and the second bracket 2. The first pushing component 511 pushes the second support 2 to rotate, the universal structure 3 is connected with the first support 1 and the second support 2, the second support 2 rotates around the first direction, and the first elastic piece 512 tightens the second support 2, so that structural stability is guaranteed. The first elastic element 512 is arranged between the first pushing component 511 and the universal structure 3, when the output end of the first pushing component 511 retreats, the first elastic element 512 can also tighten the second bracket 2, so that the universal structure 3 is stably connected with the first bracket 1 and the second bracket 2, and the driving stability of the first driving component 51 is ensured.
The second driving assembly 52 includes a second pushing assembly 521 and a second elastic member 522. The second pushing component 521 is mounted on the first bracket 1, an output end of the second pushing component 521 abuts against the second bracket 2, and the second pushing component 521 is used for pushing the second bracket 2 to rotate around the second direction. The two ends of the second elastic piece 522 are respectively connected with the first bracket 1 and the second bracket 2, the second elastic piece 522 is positioned between the second pushing component 521 and the universal structure 3, and the second elastic piece 522 is used for tensioning the first bracket 1 and the second bracket 2. The second pushing component 521 pushes the second support 2 to rotate, the universal structure 3 is connected with the first support 1 and the second support 2, the second support 2 rotates around the second direction, and the second elastic piece 522 tightens the second support 2, so that the structural stability is guaranteed. The second elastic piece 522 is arranged between the second pushing component 521 and the concave spherical surface 321, when the output end of the second pushing component 521 retreats, the second elastic piece 522 can also tighten the second bracket 2, so that the universal structure 3 is stably connected with the first bracket 1 and the second bracket 2, and the driving stability of the second driving component 52 is ensured.
In one embodiment, referring to fig. 1, 2, 3 and 4, the second bracket 2 is provided with a first chute 21, the first chute 21 is disposed corresponding to the output end of the first pushing component 511, the output end of the first pushing component 511 extends into the first chute 21, and the extending direction of the first chute 21 is perpendicular to the first direction. When the first pushing component 511 works, the output end of the first pushing component 511 slides in the first sliding groove 21, the first sliding groove 21 can limit the output end of the first pushing component 511, and the problem that the output end of the first pushing component 511 slides on the second bracket 2 to cause failure of angle adjustment of the second bracket 2 is avoided. When the first pushing component 511 works, the output end of the first pushing component 511 slides in the first sliding groove 21, the extending direction of the first sliding groove 21 is perpendicular to the first direction, and the first pushing component 511 is guaranteed to push the second bracket 2 to rotate around the first direction.
The second bracket 2 is provided with a second chute 22, the second chute 22 is arranged corresponding to the output end position of the second pushing component 521, the output end of the second pushing component 521 extends into the second chute 22, and the extending direction of the second chute 22 is perpendicular to the second direction. When the second pushing component 521 works, the output end of the second pushing component 521 slides in the second sliding groove 22, and the second sliding groove 22 can limit the output end of the second pushing component 521, so that the output end of the second pushing component 521 is prevented from sliding on the second bracket 2, and the angle adjustment of the second bracket 2 fails. When the second pushing component 521 works, the output end of the second pushing component 521 slides in the second sliding groove 22, and the extending direction of the second sliding groove 22 is perpendicular to the second direction, so that the second pushing component 521 is ensured to push the second bracket 2 to rotate around the second direction.
In one embodiment, referring to fig. 1, 2, 3 and 4, the cross section of the first chute 21 along the depth direction is V-shaped, the output end of the first pushing component 511 is tapered, and the output end of the first pushing component 511 abuts against the bottom of the first chute 21. The output end of the first pushing component 511 abuts against the bottom of the first sliding groove 21, and the output end of the first pushing component 511 is in point contact with the first sliding groove 21. The output end of the first pushing assembly 511 is ensured to stably slide in the first sliding chute 21. In a certain movement range, when the second pushing component 521 pushes the second bracket 2, the output end of the first pushing component 511 does not abut against the sidewall of the first chute 21. Not only can the angle of the second bracket 2 be adjusted, but also the stability of the second bracket 2 in the angle adjusting process can be ensured.
The cross section of the second chute 22 along the depth direction is V-shaped, the output end of the second pushing component 521 is conical, and the output end of the second pushing component 521 abuts against the bottom of the second chute 22. The output end of the second pushing component 521 is abutted against the bottom of the second chute 22, and the output end of the second pushing component 521 is in point contact with the second chute 22. Ensuring that the output end of the second pushing assembly 521 slides stably in the second chute 22. In a certain movement range, when the first pushing component 511 pushes the second bracket 2, the output end of the second pushing component 521 does not abut against the side wall of the second chute 22. Not only can the angle of the second bracket 2 be adjusted, but also the stability of the second bracket 2 in the angle adjusting process can be ensured.
In one embodiment, referring to fig. 1, 2, 3 and 4, the first bracket 1 is provided with a first through hole 111 and a second through hole 112. The first pushing assembly 511 includes a first push rod motor, and an output shaft of the first push rod motor passes through the first through hole 111 to abut against the second bracket 2. The second pushing assembly 521 includes a second push rod motor, and an output shaft of the second push rod motor passes through the second through hole 112 to abut against the second bracket 2. The output shaft of the first push rod motor passes through the first through hole 111, and the output shaft of the second push rod motor passes through the second through hole 112, so that space can be saved, the distance between the supporting plate 11 and the second bracket 2 can be reduced, the lengths of the first elastic piece 512 and the second elastic piece 522 are reduced, cost is saved, and the installation is simple.
In one embodiment, referring to fig. 1, 2, 3 and 4, the first bracket 1 includes a support plate 11 and a fixing plate 12, the support plate 11 is vertically connected with the fixing plate 12, and the gimbal structure 3 and the driving structure 5 are mounted on the support plate 11. The fixed plate 12 is connected to the lower end of the supporting plate 11, and the fixed plate 12 is provided with a long slot 121, and the long slot 121 is used for conveniently installing the first bracket 1.
The second bracket 2 comprises a movable plate, the movable plate is L-shaped, a convex spherical surface 311 is arranged in the middle of the movable plate, and a first chute 21 and a second chute 22 are respectively arranged at two ends of the movable plate.
In one embodiment, referring to fig. 1, 2, 3 and 4, the gimbal structure 3 includes a ball head 31 and a ball seat 32, and the ball head 31 is connected to the ball seat 32. The ball head 31 and the ball seat 32 are hinged to realize a universal swinging function, so that the driving structure 5 can drive the second bracket 2 to swing around the center of the ball head 31 in a universal manner relative to the first bracket 1, and further drive the reference mirror 4 to swing around the center of the ball head 31 in a universal manner.
The ball 31 can be arranged on the second bracket 2, and the corresponding ball seat 32 is arranged on the first bracket 1, and the center of the ball 31 is coplanar with the mirror surface of the reference mirror 4. Alternatively, the ball 31 is disposed on the first bracket 1, and the corresponding ball seat 32 is disposed on the second bracket 2, and the center of the ball 31 is coplanar with the mirror surface of the reference mirror 4. The center of the ball head 31 is the swing center point of the universal structure 3.
In one embodiment, referring to fig. 1, 2, 3 and 4, a convex spherical surface 311 is provided on the ball head 31, a concave spherical surface 321 is provided on the ball seat 32, and the convex spherical surface 311 is fitted with the concave spherical surface 321. The surface area of concave sphere 321 is smaller than the surface area of convex sphere 311. When the concave spherical surface 321 and the convex spherical surface 311 rotate, the surface area of the convex spherical surface 311 is larger, the swing allowance of the ball head 31 can be ensured, the ball seat 32 can be prevented from being limited by the edge of the convex spherical surface 311, the concave spherical surface 321 and the convex spherical surface 311 are prevented from sliding off, the surface area of the concave spherical surface 321 is smaller than that of the convex spherical surface 311, and the rotating stability of the second bracket 2 can be ensured.
The first elastic member 512 is disposed between the universal structure 3 and the first pushing component 511, so as to ensure that the convex spherical surface 311 is firmly attached to the concave spherical surface 321. The second elastic member 522 is disposed between the universal structure 3 and the second pushing component 521, so as to ensure that the convex spherical surface 311 is firmly attached to the concave spherical surface 321.
It is another object of the present utility model to provide an interferometer that includes a light source, a light splitting element, and a reference mirror angle adjustment device. The light source is located on the spectroscopic element side, and the reference mirror 4 is arranged on the spectroscopic element side. The light-splitting element splits the light emitted from the light source into reflected light and reference light, and the reference mirror 4 is used for reflecting the reference light.
The interferometer provided by the embodiment of the utility model uses the reference mirror 4 adjusting device, the reference light is incident to the reference mirror 4, the optical path of the reference light is unchanged, and the accuracy of optical interferometry can be ensured.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (10)
1. A reference mirror angle adjustment device, comprising:
a first bracket;
the second bracket is arranged at intervals with the first bracket;
the universal structure is arranged between the first bracket and the second bracket, and two ends of the universal structure are respectively connected with the first bracket and the second bracket and are used for realizing universal swing of the second bracket relative to the first bracket;
the reference mirror is arranged on one side, far away from the universal structure, of the second bracket, the position of the reference mirror is arranged corresponding to the universal structure, and the mirror surface of the reference mirror is coplanar with the swing center point of the universal structure;
the driving structure is arranged on the first support and connected with the second support, and the driving structure is used for driving the second support to swing universally relative to the first support.
2. The reference mirror angle adjustment device of claim 1, wherein the drive structure comprises:
the first driving assembly is arranged on the first bracket and connected with the second bracket, and the first driving assembly is used for driving the second bracket to rotate around a first direction;
the second driving assembly is installed on the second support, the second driving assembly is connected with the second support, and the second driving assembly is used for driving the second support to rotate around the second direction.
3. The reference mirror angle adjustment device of claim 2, wherein the first drive assembly comprises:
the first pushing component is arranged on the first bracket, the output end of the first pushing component is abutted against the second bracket, and the first pushing component is used for pushing the second bracket to rotate around the first direction;
the first elastic piece, first elastic piece both ends are connected respectively first support with the second support, first elastic piece is located first pushing component with between the universal structure, first elastic piece is used for taut the second support with the first support.
4. The reference mirror angle adjustment device of claim 3, wherein a first chute is disposed on the second bracket at a position corresponding to the output end of the first pushing assembly, the output end of the first pushing assembly extends into the first chute, and the extending direction of the first chute is perpendicular to the first direction.
5. The reference mirror angle adjustment device of claim 4, wherein the first runner is V-shaped in cross-section in a depth direction, the output end of the first pushing assembly is tapered, and the output end of the first pushing assembly abuts against the bottom of the first runner.
6. The reference mirror angle adjustment device of claim 3, wherein the first bracket is provided with a first through hole, and the first pushing assembly comprises a first push rod motor, and an output shaft of the first push rod motor passes through the first through hole to abut against the second bracket.
7. The reference mirror angle adjustment device of any one of claims 1-6, wherein the gimbal structure comprises a ball head and a ball seat, the ball head being coupled to the ball seat.
8. The reference mirror angle adjustment device of claim 7, wherein a convex spherical surface is provided on the ball head, a concave spherical surface is provided on the ball seat, the convex spherical surface conforms to the concave spherical surface, and the surface area of the concave spherical surface is smaller than the surface area of the convex spherical surface.
9. The reference mirror angle adjustment device of any one of claims 1-6, wherein the first bracket comprises a support plate and a fixed plate connected to each other, the gimbal structure and the drive structure being mounted on the support plate, the fixed plate being provided with a slotted hole.
10. An interferometer comprising a light source, a light splitting element and a reference mirror angle adjusting device according to any of claims 1-9, wherein the light source is located at one side of the light splitting element, the reference mirror is located at one side of the light splitting element, the light splitting element is used for splitting light emitted by the light source into reflected light and reference light, and the reference mirror is used for reflecting the reference light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320570643.4U CN219624694U (en) | 2023-03-14 | 2023-03-14 | Reference mirror angle adjusting device and interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320570643.4U CN219624694U (en) | 2023-03-14 | 2023-03-14 | Reference mirror angle adjusting device and interferometer |
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| CN219624694U true CN219624694U (en) | 2023-09-01 |
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| CN202320570643.4U Active CN219624694U (en) | 2023-03-14 | 2023-03-14 | Reference mirror angle adjusting device and interferometer |
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