CN219624694U - Reference mirror angle adjustment device and interferometer - Google Patents

Abstract

The utility model provides a reference mirror angle adjusting device and an interferometer, wherein the reference mirror angle adjusting device comprises a first support, a second support, a universal structure, a reference mirror and a driving structure, wherein the first support and the second support are arranged at intervals, two ends of the universal structure are respectively connected with the first support and the second support and used for realizing universal swing, the reference mirror is arranged on the second support, the mirror surface of the reference mirror is coplanar with the swing center point of the universal structure, and the driving structure is arranged on the first support and connected with the second support and used for driving the second support to swing universally relative to the first support. The interferometer comprises a light source, a light splitting element and a reference mirror angle adjusting device, wherein the light splitting element is used for splitting light rays emitted by the light source into reflected light and reference light, and the reference mirror is used for reflecting the reference light. The reference mirror angle adjusting device can ensure that the optical path of the reference light is unchanged, and the interferometer of the embodiment of the utility model can ensure the accuracy of optical interferometry.

Description

Reference mirror angle adjustment device and interferometer

technical field

The application belongs to the field of optical interferometry devices, and more specifically relates to a reference mirror angle adjustment device and an interferometer.

Background technique

Interferometer is a technology that uses the interference principle of light to generate interference fringes, and calculates the height or distance of the measured object according to the light and dark changes of the interference fringes. Usually, the interferometer should try to use a coherent light source with a single wavelength to ensure a sufficiently long coherence length. However, when a coherent light source with a single wavelength is used for interferometry, additional speckle noise will inevitably be introduced, which will affect the analysis of the final phase signal. Therefore, a coherent light source with a certain wavelength width has become the first choice, but this also shortens the coherence length of the system. The interferometer is divided into a sample arm light path for detecting the reflected light signal of the sample and a reference arm light path for forming reference light after being split by the light splitting element. There is usually an adjustable reference mirror at the end of the optical path of the reference arm. In the existing interferometer, the reference mirror rotates around the side of the reference mirror to achieve angle adjustment, which will cause the optical path of the reference arm to change, thus affecting the accuracy of the measurement results.

Utility model content

The purpose of the embodiment of the present application is to provide a reference mirror angle adjustment device and an interferometer to solve the problem in the prior art that the reference mirror rotates around the side of the reference mirror to achieve angle adjustment, which will cause the optical path of the reference arm to change. Technical problems that affect the accuracy of measurement results.

In order to achieve the above purpose, the technical solution adopted by this application is to provide a reference mirror angle adjustment device, including:

first bracket;

The second bracket is spaced apart from the first bracket;

The universal structure is arranged between the first bracket and the second bracket, and the two ends of the universal structure are connected to the first bracket and the second bracket respectively, so as to realize that the second bracket is opposite to each other. The first bracket swings universally;

A reference mirror, installed on the second bracket away from the side of the universal structure, the position of the reference mirror is set corresponding to the universal structure, the mirror surface of the reference mirror and the swing center point of the universal structure Coplanar;

The driving structure is installed on the first bracket, the driving structure is connected to the second bracket, and the driving structure is used to drive the second bracket to swing in a universal direction relative to the first bracket.

In one embodiment, the drive structure includes:

a first drive assembly, installed on the first bracket, connected to the second bracket, and used to drive the second bracket to rotate around the first direction;

The second drive assembly is installed on the second bracket, connected to the second bracket, and used to drive the second bracket to rotate around the second direction.

In one embodiment, the first drive assembly includes:

a first push assembly installed on the first bracket, the output end of the first push assembly abuts against the second bracket for pushing the second bracket to rotate around the first direction;

a first elastic member, two ends of the first elastic member are respectively connected to the first bracket and the second bracket, the first elastic member is located between the first pushing assembly and the universal structure, and The first elastic member is used to tension the second bracket and the first bracket.

The second drive assembly includes:

a second push assembly installed on the first bracket, the output end of the second push assembly abuts against the second bracket for pushing the second bracket to rotate around the second direction;

The second elastic member, the two ends of the second elastic member are respectively connected to the first bracket and the second bracket, and the second elastic member is located between the second pushing assembly and the universal structure, so The second elastic member is used to tension the second bracket and the first bracket.

In one embodiment, a first chute is provided on the second bracket corresponding to the position of the output end of the first push assembly, and the output end of the first push assembly extends into the first chute, so The extending direction of the first chute is perpendicular to the first direction.

The second bracket is provided with a second chute corresponding to the position of the output end of the second push assembly, and the output end of the second push assembly extends into the second chute, and the output end of the second chute The extending direction is perpendicular to the second direction.

In one embodiment, the section of the first chute along the depth direction is V-shaped, the output end of the first push assembly is tapered, and the output end of the first push assembly abuts against the first slide bottom of the tank.

The section of the second chute along the depth direction is V-shaped, the output end of the second pushing assembly is tapered, and the output end of the second pushing assembly abuts against the bottom of the second chute.

In one embodiment, the first bracket is provided with a first through hole, the first pushing assembly includes a first push rod motor, and the output shaft of the first push rod motor passes through the first through hole abut against the second bracket.

The first bracket is provided with a second through hole, the second pushing assembly includes a second push rod motor, and the output shaft of the second push rod motor passes through the second through hole and abuts against the second push rod motor. stand.

In one embodiment, the universal structure includes a ball head and a ball seat, and the ball head is connected to the ball seat.

In one embodiment, the ball head is provided with a convex spherical surface, the ball seat is provided with a concave spherical surface, the convex spherical surface fits the concave spherical surface, and the surface area of the concave spherical surface is smaller than the surface area of the convex spherical surface .

In one embodiment, the first bracket includes a connected support plate and a fixed plate, the universal structure and the driving structure are installed on the support plate, and the fixed plate is provided with a slotted hole.

Another object of the present application is to provide an interferometer, which includes a light source, a spectroscopic element, and the reference mirror angle adjustment device, the light source is located on one side of the spectroscopic element, and the reference mirror is arranged on one side of the spectroscopic element. On the side, the light splitting element is used to divide the light emitted by the light source into reflected light and reference light, and the reference mirror is used to reflect the reference light.

The beneficial effect of the reference mirror angle adjustment device provided by the embodiment of the present application is that compared with the prior art, the reference mirror angle adjustment device of the embodiment of the present application is provided with a universal structure between the first bracket and the second bracket. The driving structure drives the second bracket to swing in a universal direction around the swing center point of the universal structure relative to the first bracket, and then drives the reference mirror to swing in a universal direction around the swing center point of the universal structure. The position of the reference mirror corresponds to the universal structure, and the mirror surface of the reference mirror Coplanar with the swing center point of the universal structure, the point on the reference mirror corresponding to the swing center point of the universal structure is the reference light incident point, and the optical path of the reference light can be guaranteed to remain unchanged during the universal swing process of the reference mirror.

The beneficial effect of the interferometer provided by the embodiment of the present application is: compared with the prior art, the interferometer of the embodiment of the present application uses the above-mentioned reference mirror adjustment device, the reference light is incident on the reference mirror, and the optical path of the reference light remains unchanged , which can guarantee the accuracy of optical interferometry.

Description of drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the accompanying drawings that need to be used in the descriptions of the embodiments or the prior art will be briefly introduced below. Obviously, the accompanying drawings in the following description are only for the present application For some embodiments, those of ordinary skill in the art can also obtain other drawings based on these drawings without paying creative efforts.

FIG. 1 is a schematic structural view of a reference mirror angle adjustment device provided in an embodiment of the present application;

Figure 2 is a schematic diagram of the exploded structure of the reference mirror angle adjustment device provided by the embodiment of the present application;

FIG. 3 is a schematic structural view of the first bracket and the ball seat of the reference mirror angle adjustment device provided by the embodiment of the present application;

FIG. 4 is a schematic structural diagram of the second bracket and the ball head of the reference mirror angle adjustment device provided by the embodiment of the present application.

Wherein, each reference sign in the figure:

1. The first bracket; 11. The support plate; 111. The first through hole; 112. The second through hole; 12. The fixed plate; 121. The slotted hole;

2. The second bracket; 21. The first chute; 22. The second chute;

3. Universal structure; 31. Ball head; 311. Convex spherical surface; 32. Ball seat; 321. Concave spherical surface;

4. Reference mirror;

5. Drive structure;

51. The first driving component; 511. The first pushing component; 512. The first elastic member;

52. The second driving component; 521. The second pushing component; 522. The second elastic member.

Detailed ways

In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.

It should be noted that when an element is referred to as being “fixed” or “disposed on” another element, it may be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

It is to be understood that the terms "length", "width", "top", "bottom", "front", "rear", "left", "right", "vertical", "horizontal", "top" , "bottom", "inner", "outer" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the application and simplifying the description, rather than indicating or implying No device or element must have a particular orientation, be constructed, and operate in a particular orientation, and thus should not be construed as limiting the application.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present application, "plurality" means two or more, unless otherwise specifically defined.

Reference to "one embodiment," "some embodiments," or "an embodiment" in the specification of this application means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the application. . Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in other embodiments," etc. in various places in this specification are not necessarily All refer to the same embodiment, but mean "one or more but not all embodiments" unless specifically stated otherwise. Furthermore, the particular features, structures or characteristics may be combined in any suitable manner in one or more embodiments.

Please refer to FIG. 1 and FIG. 2 together, and now describe the reference mirror angle adjustment device and the interferometer provided by the embodiment of the present application. The reference mirror angle adjustment device includes a first bracket 1 , a second bracket 2 , a universal structure 3 , a reference mirror 4 and a driving structure 5 , and the first bracket 1 and the second bracket 2 are arranged at intervals. The universal structure 3 is located between the first bracket 1 and the second bracket 2, and the two ends of the universal structure 3 are respectively connected to the first bracket 1 and the second bracket 2, and the universal structure 3 is used to realize that the second bracket 2 is opposite to the first bracket. 1 universal swing. The reference mirror 4 is installed on the second support 2, and is located on the second support 2 on the side away from the universal structure 3, the position of the reference mirror 4 is set corresponding to the universal structure 3, and the mirror surface of the reference mirror 4 and the universal structure 3 The centers of swing are coplanar. The reference mirror 4 can be pasted directly on the second support 2, or can be connected to the second support 2 through other objects at intervals, for example, it can be connected through piezoelectric ceramics to realize phase shift. The driving structure 5 is installed on the first bracket 1 and connected to the second bracket 2 for driving the second bracket 2 to swing in a universal direction relative to the first bracket 1 .

In the reference mirror angle adjustment device of the embodiment of the present application, a universal structure 3 is set between the first bracket 1 and the second bracket 2, and a driving structure 5 is set to drive the second bracket 2 to swing around the universal structure 3 relative to the first bracket 1 The center point swings universally, and then drives the reference mirror 4 to swing universally around the swing center point of the universal structure 3 . The position of the reference mirror 4 corresponds to the universal structure 3, the mirror surface of the reference mirror 4 is coplanar with the swing center point of the universal structure 3, and the point on the reference mirror 4 corresponding to the swing center point of the universal structure 3 is the reference light incident point, During the universal swing process of the reference mirror 4, the optical path of the reference light can be guaranteed to remain unchanged.

In one embodiment, referring to FIG. 1 and FIG. 2 , the driving structure 5 includes a first driving assembly 51 and a second driving assembly 52 . The first driving assembly 51 is installed on the first bracket 1 , the first driving structure 5 is connected to the second bracket 2 , and the first driving structure 5 is used to drive the second bracket 2 to rotate around the first direction. The second driving assembly 52 is installed on the second bracket 2 , the second driving assembly 52 is connected to the second bracket 2 , and the second driving assembly 52 is used to drive the second bracket 2 to rotate around the second direction. The first driving assembly 51 is set to drive the second bracket 2 to rotate around the first direction, the second driving assembly 52 drives the second bracket 2 to rotate around the second direction, and the first driving assembly 51 and the second driving assembly 52 can work simultaneously, the second The two brackets 2 rotate around the first direction and the second direction at the same time. The second bracket 2 is driven by the first driving assembly 51 and the second driving assembly 52 to realize the universal rotation, and then the universal rotation of the reference mirror 4 is realized.

In one embodiment, referring to FIG. 1 , FIG. 2 and FIG. 3 , the first driving assembly 51 includes a first pushing assembly 511 and a first elastic member 512 . The first pushing assembly 511 is installed on the first bracket 1 , the output end of the first pushing assembly 511 abuts against the second bracket 2 , and the first pushing assembly 511 is used to push the second bracket 2 to rotate around the first direction. Both ends of the first elastic member 512 are respectively connected to the first bracket 1 and the second bracket 2, and the first elastic member 512 is located between the first push assembly 511 and the universal structure 3, and is used for tensioning the first bracket 1 and the second bracket 2. The first push assembly 511 pushes the second bracket 2 to rotate, the universal structure 3 connects the first bracket 1 and the second bracket 2, the second bracket 2 rotates around the first direction, and the first elastic member 512 tightens the second bracket 2 to ensure stable structure. The first elastic member 512 is arranged between the first push assembly 511 and the universal structure 3. When the output end of the first push assembly 511 retreats, the first elastic member 512 can also tighten the second bracket 2 to ensure the universal structure 3. The connection with the first support 1 and the second support 2 is stable, ensuring the driving stability of the first drive assembly 51.

The second driving assembly 52 includes a second pushing assembly 521 and a second elastic member 522 . The second pushing assembly 521 is installed on the first bracket 1 , the output end of the second pushing assembly 521 abuts against the second bracket 2 , and the second pushing assembly 521 is used to push the second bracket 2 to rotate around the second direction. Both ends of the second elastic member 522 are respectively connected to the first support 1 and the second support 2, the second elastic member 522 is located between the second push assembly 521 and the universal structure 3, and the second elastic member 522 is used to tension the first support 1 and the second bracket 2. The second push assembly 521 pushes the second bracket 2 to rotate, the universal structure 3 connects the first bracket 1 and the second bracket 2, the second bracket 2 rotates around the second direction, and the second elastic member 522 tightens the second bracket 2 to ensure stable structure. The second elastic member 522 is arranged between the second push assembly 521 and the concave spherical surface 321. When the output end of the second push assembly 521 retreats, the second elastic member 522 can also tighten the second bracket 2 to ensure that the universal structure 3 The stable connection with the first bracket 1 and the second bracket 2 ensures the driving stability of the second driving assembly 52 .

In one embodiment, referring to FIG. 1 , FIG. 2 , FIG. 3 and FIG. 4 , the second bracket 2 is provided with a first chute 21 , and the first chute 21 is set corresponding to the position of the output end of the first push assembly 511 , the second An output end of a push assembly 511 extends into the first chute 21 , and the extending direction of the first chute 21 is perpendicular to the first direction. When the first push assembly 511 is working, the output end of the first push assembly 511 slides in the first chute 21, and the first chute 21 can limit the output end of the first push assembly 511, preventing the first push assembly 511 from The output end of the second bracket 2 slipped off, causing the angle adjustment of the second bracket 2 to fail. When the first push assembly 511 is working, the output end of the first push assembly 511 slides in the first chute 21, and the extension direction of the first chute 21 is set to be perpendicular to the first direction, so as to ensure that the first push assembly 511 pushes the second bracket 2 Rotate around the first direction.

The second support 2 is provided with a second chute 22, the second chute 22 is set corresponding to the output end position of the second push assembly 521, the output end of the second push assembly 521 extends into the second chute 22, the second chute 22 The extending direction of the groove 22 is perpendicular to the second direction. When the second push assembly 521 works, the output end of the second push assembly 521 slides in the second chute 22, and the second chute 22 can limit the output end of the second push assembly 521, preventing the second push assembly 521 from The output end of the second bracket 2 slipped off, causing the angle adjustment of the second bracket 2 to fail. When the second push assembly 521 works, the output end of the second push assembly 521 slides in the second chute 22, and the extension direction of the second chute 22 is set to be perpendicular to the second direction, so as to ensure that the second push assembly 521 pushes the second bracket 2 Turn around the second direction.

In one embodiment, referring to FIG. 1 , FIG. 2 , FIG. 3 and FIG. 4 , the section of the first chute 21 along the depth direction is V-shaped, the output end of the first pushing component 511 is tapered, and the first pushing component 511 The output end abuts against the bottom of the first chute 21 . The output end of the first pushing component 511 abuts against the bottom of the first chute 21 , and the output end of the first pushing component 511 is in point contact with the first chute 21 . It is ensured that the output end of the first pushing component 511 slides stably in the first sliding groove 21 . Within a certain range of motion, when the second pushing component 521 pushes the second bracket 2 , the output end of the first pushing component 511 will not abut against the side wall of the first sliding slot 21 . Not only can the angle of the second bracket 2 be adjusted, but also the stability of the second bracket 2 can be guaranteed during the angle adjustment process.

The cross section of the second chute 22 along the depth direction is V-shaped, the output end of the second pushing component 521 is tapered, and the output end of the second pushing component 521 abuts against the bottom of the second chute 22 . The output end of the second pushing component 521 abuts against the bottom of the second chute 22 , and the output end of the second pushing component 521 is in point contact with the second chute 22 . It is ensured that the output end of the second pushing component 521 slides stably in the second slide groove 22 . Within a certain range of motion, when the first pushing component 511 pushes the second bracket 2 , the output end of the second pushing component 521 will not abut against the side wall of the second sliding groove 22 . Not only can the angle of the second bracket 2 be adjusted, but also the stability of the second bracket 2 can be guaranteed during the angle adjustment process.

In one embodiment, referring to FIG. 1 , FIG. 2 , FIG. 3 and FIG. 4 , the first bracket 1 is provided with a first through hole 111 and a second through hole 112 . The first push assembly 511 includes a first push rod motor, and the output shaft of the first push rod motor passes through the first through hole 111 and abuts against the second bracket 2 . The second push assembly 521 includes a second push rod motor, and the output shaft of the second push rod motor passes through the second through hole 112 and abuts against the second bracket 2 . The output shaft of the first push rod motor passes through the first through hole 111, and the output shaft of the second push rod motor passes through the second through hole 112, which can save space and reduce the distance between the support plate 11 and the second bracket 2 , reduce the length of the first elastic member 512 and the second elastic member 522, save cost and be easy to install.

In one embodiment, referring to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, the first bracket 1 includes a support plate 11 and a fixed plate 12, the support plate 11 and the fixed plate 12 are vertically connected, the universal structure 3 and the driving structure 5 Installed on the support plate 11. The fixing plate 12 is connected to the lower end of the supporting plate 11 , and the fixing plate 12 is provided with a slotted hole 121 , and the slotted hole 121 is used for conveniently installing the first bracket 1 .

The second bracket 2 includes a movable plate, which is L-shaped, with a convex spherical surface 311 located in the middle of the movable plate, and the first chute 21 and the second chute 22 are respectively located at two ends of the movable plate.

In one embodiment, referring to FIG. 1 , FIG. 2 , FIG. 3 and FIG. 4 , the universal structure 3 includes a ball head 31 and a ball seat 32 , and the ball head 31 is connected to the ball seat 32 . The spherical joint of ball head 31 and ball seat 32 realizes the universal swing function, ensuring that the driving structure 5 can drive the second bracket 2 to swing around the ball center of the ball head 31 relative to the first bracket 1, and then drive the reference mirror 4 around the ball head 31 The center of the ball swings in all directions.

The ball head 31 can be arranged on the second support 2 , and the corresponding ball seat 32 is arranged on the first support 1 , and the center of the ball head 31 is coplanar with the mirror surface of the reference mirror 4 . Alternatively, the ball head 31 is arranged on the first support 1 , and the corresponding ball seat 32 is arranged on the second support 2 , and the center of the ball head 31 is coplanar with the mirror surface of the reference mirror 4 . The center of the ball head 31 is the swing center of the universal structure 3 .

In one embodiment, referring to FIG. 1 , FIG. 2 , FIG. 3 and FIG. 4 , the ball head 31 is provided with a convex spherical surface 311 , and the ball seat 32 is provided with a concave spherical surface 321 , and the convex spherical surface 311 is attached to the concave spherical surface 321 . The surface area of the concave spherical surface 321 is smaller than that of the convex spherical surface 311 . When the concave spherical surface 321 and the convex spherical surface 311 rotate, the surface area of the convex spherical surface 311 is larger, which can ensure the swing margin of the ball head 31 and prevent the edge of the convex spherical surface 311 from restricting the ball seat 32, thereby causing the concave spherical surface 321 and the convex spherical surface 311 to slip , the surface area of the concave spherical surface 321 is smaller than the surface area of the convex spherical surface 311, which can ensure the stability of the rotation of the second bracket 2.

The first elastic member 512 is disposed between the universal structure 3 and the first push assembly 511 , which can ensure that the convex spherical surface 311 fits firmly on the concave spherical surface 321 . The second elastic member 522 is disposed between the universal structure 3 and the second pushing assembly 521 , which can ensure that the convex spherical surface 311 fits firmly on the concave spherical surface 321 .

Another object of the present application is to provide an interferometer, which includes a light source, a light splitting element, and a reference mirror angle adjustment device. The light source is located on one side of the light splitting element, and the reference mirror 4 is arranged on one side of the light splitting element. The light splitting element divides the light emitted by the light source into reflected light and reference light, and the reference mirror 4 is used to reflect the reference light.

The interferometer of the embodiment of the present application uses the above-mentioned adjusting device for the reference mirror 4, the reference light is incident on the reference mirror 4, and the optical path of the reference light remains unchanged, which can ensure the accuracy of optical interferometry.

The above descriptions are only preferred embodiments of the application, and are not intended to limit the application. Any modifications, equivalent replacements and improvements made within the spirit and principles of the application should be included in the protection of the application. within range.

Claims (10)

1. A reference mirror angle adjustment device, comprising:

a first bracket;

the second bracket is arranged at intervals with the first bracket;

the universal structure is arranged between the first bracket and the second bracket, and two ends of the universal structure are respectively connected with the first bracket and the second bracket and are used for realizing universal swing of the second bracket relative to the first bracket;

the reference mirror is arranged on one side, far away from the universal structure, of the second bracket, the position of the reference mirror is arranged corresponding to the universal structure, and the mirror surface of the reference mirror is coplanar with the swing center point of the universal structure;

the driving structure is arranged on the first support and connected with the second support, and the driving structure is used for driving the second support to swing universally relative to the first support.

2. The reference mirror angle adjustment device of claim 1, wherein the drive structure comprises:

the first driving assembly is arranged on the first bracket and connected with the second bracket, and the first driving assembly is used for driving the second bracket to rotate around a first direction;

the second driving assembly is installed on the second support, the second driving assembly is connected with the second support, and the second driving assembly is used for driving the second support to rotate around the second direction.

3. The reference mirror angle adjustment device of claim 2, wherein the first drive assembly comprises:

the first pushing component is arranged on the first bracket, the output end of the first pushing component is abutted against the second bracket, and the first pushing component is used for pushing the second bracket to rotate around the first direction;

the first elastic piece, first elastic piece both ends are connected respectively first support with the second support, first elastic piece is located first pushing component with between the universal structure, first elastic piece is used for taut the second support with the first support.

4. The reference mirror angle adjustment device of claim 3, wherein a first chute is disposed on the second bracket at a position corresponding to the output end of the first pushing assembly, the output end of the first pushing assembly extends into the first chute, and the extending direction of the first chute is perpendicular to the first direction.

5. The reference mirror angle adjustment device of claim 4, wherein the first runner is V-shaped in cross-section in a depth direction, the output end of the first pushing assembly is tapered, and the output end of the first pushing assembly abuts against the bottom of the first runner.

6. The reference mirror angle adjustment device of claim 3, wherein the first bracket is provided with a first through hole, and the first pushing assembly comprises a first push rod motor, and an output shaft of the first push rod motor passes through the first through hole to abut against the second bracket.

7. The reference mirror angle adjustment device of any one of claims 1-6, wherein the gimbal structure comprises a ball head and a ball seat, the ball head being coupled to the ball seat.

8. The reference mirror angle adjustment device of claim 7, wherein a convex spherical surface is provided on the ball head, a concave spherical surface is provided on the ball seat, the convex spherical surface conforms to the concave spherical surface, and the surface area of the concave spherical surface is smaller than the surface area of the convex spherical surface.

9. The reference mirror angle adjustment device of any one of claims 1-6, wherein the first bracket comprises a support plate and a fixed plate connected to each other, the gimbal structure and the drive structure being mounted on the support plate, the fixed plate being provided with a slotted hole.

10. An interferometer comprising a light source, a light splitting element and a reference mirror angle adjusting device according to any of claims 1-9, wherein the light source is located at one side of the light splitting element, the reference mirror is located at one side of the light splitting element, the light splitting element is used for splitting light emitted by the light source into reflected light and reference light, and the reference mirror is used for reflecting the reference light.