CN105548052A - Testing cavity with continuously adjustable length applied to cavity ring-down spectroscope technology - Google Patents

Testing cavity with continuously adjustable length applied to cavity ring-down spectroscope technology Download PDF

Info

Publication number
CN105548052A
CN105548052A CN201610069954.7A CN201610069954A CN105548052A CN 105548052 A CN105548052 A CN 105548052A CN 201610069954 A CN201610069954 A CN 201610069954A CN 105548052 A CN105548052 A CN 105548052A
Authority
CN
China
Prior art keywords
cavity
tube
ring
external
spectroscopy technology
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610069954.7A
Other languages
Chinese (zh)
Other versions
CN105548052B (en
Inventor
张玥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Renmu Science And Technology Co Ltd
Original Assignee
Beijing Renmu Science And Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Renmu Science And Technology Co Ltd filed Critical Beijing Renmu Science And Technology Co Ltd
Priority to CN201610069954.7A priority Critical patent/CN105548052B/en
Publication of CN105548052A publication Critical patent/CN105548052A/en
Application granted granted Critical
Publication of CN105548052B publication Critical patent/CN105548052B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry

Abstract

The invention discloses a testing cavity with continuously adjustable length applied to a cavity ring-down spectroscope (CRDS) technology, wherein the internal length of the testing cavity is adjustable. By precise measurement and feedback and a precise feeding braking system, precise relative displacement between an inner cavity pipe and an outer cavity pipe, both of which are included in the testing cavity, is achieved, so that the adjustment of the internal length of a cavity body is achieved; therefore, one cavity can measure various gases of which the spectrums are apart form a great distance and the absorption strengths are different, and for each gas, the concentration measurement range can cover 1*10<-8> to 2%.

Description

For the continuously adjustabe length testing chamber of cavity ring down spectroscopy technology
Technical field
The present invention relates to the test chamber in a kind of cavity ring down spectroscopy technology field, be specifically related to a kind of continuously adjustabe length testing chamber for cavity ring down spectroscopy technology.
Background technology
Cavity ring down spectroscopy technology (hereinafter referred to as CRDS technology) is a kind of high-sensitive absorption spectroscopy techniques, is usually used as Trace gas detection and the measurement of lens reflecting rate.
The History Origin of CRDS technology was in 1961, and Jackson was by adding measuring accuracy by improved method Fabry-Perot-type cavity at that time.1973, Kastler measured after a branch of pulsed light enters Fabry-Perot-type cavity, due to the reflection loss of minute surface, the signal with exponential damping detected behind chamber.1980, along with the innovation of coating technique, specular reflectance constantly improved, and conventional art has been difficult to the requirement reaching albedo measurement, and Herbelin uses optics cavity phase-shifting technique accurately to obtain specular reflectance.1984, Anderson proposed to use cavity attenuation and vibration technique to measure specular reflectance first.By 1988, O ' Keefe and Deacon proposed CRDS technology first, and with pulsed laser measure O2 at 630nm place Absorption Line, but due to pulsed laser live width wide, frequency stability is poor, measures the resolution that obtains very low.D.Romanini in 1996 proposes the CRDS technology based on continuous wave laser, based on the high-repetition-rate of continuous wave laser, high stability and low noise, substantially increases detection sensitivity.
According to langbobier law, when the light that a beam intensity is I0 passes gas absorption medium, intensity can decay due to the absorption of medium, and the transmitted intensity detected will reduce, and light path is larger, and intensity reduces more obvious.Absorption spectroscopy techniques is exactly variation relation by comparing initial beam intensity and transmitted light intensity thus is finally inversed by the concentration of absorbing medium.Cavity ring down spectroscopy technology is by using two panels high reflective mirror as optics cavity, absorption light path is increased greatly, thus add detection sensitivity, light to enter after optics cavity roundtrip between two high reflective mirrors, reflect each time and all can decay due to the absorption of absorbing medium, transmitted light behind chamber will present the form of exponential damping, be obtained the absorbing medium concentration in chamber by the die-away time of measuring transmitted light intensity.As can be seen from above process, be different from other spectral techniques, what cavity ring down spectroscopy technology was measured is the time response of light intensity, instead of strength characteristics, so the fluctuating of light intensity is for measurement not impact, thus the dependence of laser light source stable is reduced to some extent.
Chamber length has vital role in cavity ring down spectroscopy technology, needs by adjustment chamber length in the design phase to determine the chamber long value being suitable for specific tested gas.The test chamber of regular length is mostly adopted in prior art, after having designed, be directed to the restriction that chamber that the kind of its tested gas of test chamber of regular length and the dynamic range of measurement all can be selected is long, cannot expand flexibly, and the long test chamber in chamber can be regulated also to there is a lot of weak point, especially its sealing property does not reach request for utilization, often causes the deficiency of result of use.
For above-mentioned reasons, the present inventor furthers investigate existing test chamber technology, to design the test chamber that can solve the problem.
Summary of the invention
In order to overcome the problems referred to above, present inventor has performed and study with keen determination, design the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology of adjustable in length in a kind of chamber, by measuring accurately and feeding back, and accurate feeding brake system, realize accurate relative displacement between lumen tube that test chamber comprises and external-cavity tube, thus the inner length realizing cavity regulates, thus complete the present invention.
Specifically, the object of the present invention is to provide following aspect:
(1) for a continuously adjustabe length testing chamber for cavity ring down spectroscopy technology, it is characterized in that, this test chamber comprises can the lumen tube 1 of relative sliding and external-cavity tube 2.
(2) the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to above-mentioned (1), is characterized in that, keeps sealing between described lumen tube 1 and external-cavity tube 2.
(3) the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to above-mentioned (1), is characterized in that, described lumen tube 1 and/or external-cavity tube 2 offer air intake opening and/or gas outlet.
(4) the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to above-mentioned (1), is characterized in that, be provided with the optical element for cavity ring down spectroscopy technology in lumen tube 1 and/or external-cavity tube 2.
(5) the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to above-mentioned (1), it is characterized in that, be also provided with the Control Component for controlling, measuring described lumen tube 1 and/or external-cavity tube 2 motion in described lumen tube 1 and/or external-cavity tube 2 outside.
(6) the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to above-mentioned (5), it is characterized in that, described Control Component comprises topworks 4, driver element 5, measuring unit 6 and control module 7.
(7) according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology one of above-mentioned (1)-(6) Suo Shu, it is characterized in that, between described lumen tube 1 and external-cavity tube 2, be provided with sealing unit 3.
(8) the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to above-mentioned (7), it is characterized in that, described sealing unit 3 comprises the first O-ring seal 31 and the second O-ring seal 32, all in the form of a ring, its cross section is all the U-shaped of one end open for described first O-ring seal 31 and the second O-ring seal 32;
Preferably, the first O-ring seal 31 is provided with trapezoidal groove 33 on the outer wall of described lumen tube 1 or external-cavity tube 2, the second O-ring seal 32 is provided with trapezoidal groove 33 on the outer wall of described lumen tube 1 or external-cavity tube 2.
(9) the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to above-mentioned (8), it is characterized in that, in the openend of the first O-ring seal 31 and the second O-ring seal 32, be all embedded with the support component for outwards supportting large described U-shaped opening;
Preferably, the support component be embedded at the openend of the first O-ring seal 31 is convex hold-down ring 34, and the support component be embedded at the openend of the second O-ring seal 32 is V-type spring 35.
(10) according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology one of above-mentioned (7)-(9) Suo Shu, it is characterized in that, described sealing unit 3 is arranged on lumen tube 1 and/or external-cavity tube 2;
Preferably, described sealing unit have one or two or multiple;
More preferably, described lumen tube 1 and/or external-cavity tube 2 offer the ring groove for holding described sealing unit.
The beneficial effect that the present invention has comprises:
(1) according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology provided by the invention, there is Control Component, lumen tube or external-cavity tube is driven by Control Component, make the chamber length of test chamber can flexible, increase and shorten chamber according to the needs of test long.
(2) long by the chamber of adjustment test chamber according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology provided by the invention, make single test chamber be applicable to the measurement of variety classes gas concentration.
(3) long by the chamber of adjustment test chamber according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology provided by the invention, add the dynamic range of measurement.
Accompanying drawing explanation
Fig. 1 illustrates the continuously adjustabe length testing cavity configuration schematic diagram for cavity ring down spectroscopy technology according to a kind of preferred implementation of the present invention;
Fig. 2 illustrates the continuously adjustabe length testing cavity configuration schematic diagram for cavity ring down spectroscopy technology of separately planting preferred implementation according to the present invention
Fig. 3 illustrates the sealing unit structural representation in the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology of separately planting preferred implementation according to the present invention
Fig. 4 illustrates the continuously adjustabe length testing cavity configuration schematic diagram for cavity ring down spectroscopy technology of planting again preferred implementation according to the present invention
Fig. 5 illustrates the concrete structure schematic diagram in the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to a kind of preferred implementation of the present invention.
Drawing reference numeral illustrates:
1-lumen tube
2-external-cavity tube
3-sealing unit
31-first O-ring seal
32-second O-ring seal
33-trapezoidal groove
34-convex hold-down ring
35-V type spring
4-topworks
5-driver element
6-measuring unit
7-control module
8-drive block
9-chamber mirror
10-piezoelectric ceramics
11-invar column sleeve
Embodiment
Below by drawings and Examples, the present invention is described in more detail.Illustrated by these, the features and advantages of the invention will become more explicit.
Word " exemplary " special here means " as example, embodiment or illustrative ".Here need not be interpreted as being better than or being better than other embodiment as any embodiment illustrated by " exemplary ".Although the various aspects of embodiment shown in the drawings, unless otherwise indicated, accompanying drawing need not be drawn in proportion.
According to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology provided by the invention, as shown in fig. 1, this test chamber comprises can the lumen tube 1 of relative sliding and external-cavity tube 2, and described lumen tube 1 and external-cavity tube 2 inside all have enough predetermined spaces, so that place miscellaneous part, as preferred embodiment, the profile of lumen tube 1 and external-cavity tube 2 is similar to, and size is slightly different, and lumen tube one end is embedded in external-cavity tube, the two can slide mutually, reaches length-adjustable effect.Preferably, described lumen tube 1 and external-cavity tube 2 all adopt the invar material preparation with low coefficient of thermal expansion, and on the end face of lumen tube 1 and external-cavity tube 2, design is equipped with the invar column sleeve 11 of hollow, wherein preferably, the invar column sleeve of external-cavity tube 2 studs with piezoelectric ceramics 10, for the fine setting of chamber mirror.
In one preferred embodiment, sealing is kept between described lumen tube and external-cavity tube, preferably, sealing unit 3 is provided with between lumen tube and external-cavity tube, to realize the sealing between lumen tube and external-cavity tube, in addition, convenient in order to slide between lumen tube and external-cavity tube, be also placed with lubricating system and lubricant between.
In one preferred embodiment, as shown in Fig. 2,3,4, described sealing unit 3 comprises the first O-ring seal 31 and the second O-ring seal 32, and all in the form of a ring, its cross section is all the U-shaped of one end open for described first O-ring seal 31 and the second O-ring seal 32;
Further preferably, if Fig. 2 is shown, the U-shaped open interior size of described O-ring seal is uneven, and it increases from inside to outside gradually, has certain gradient; O-ring seal described in the present invention refers to the first O-ring seal 31 and the second O-ring seal 32.
Preferably, first O-ring seal 31 is provided with trapezoidal groove 33 on the outer wall of described lumen tube 1 or external-cavity tube 2, second O-ring seal 32 is provided with trapezoidal groove 33 on the outer wall of described lumen tube 1 or external-cavity tube 2, and the degree of depth of described trapezoidal groove can change along with the distortion size of O-ring seal.Described O-ring seal is teflin ring, and namely sealing circle is made up of teflon, has certain elasticity.
In one preferred embodiment, in the openend of the first O-ring seal 31 and the second O-ring seal 32, be all embedded with the support component for outwards supportting large described U-shaped opening;
Preferably, the support component be embedded at the openend of the first O-ring seal 31 is convex hold-down ring 34, and the support component be embedded at the openend of the second O-ring seal 32 is V-type spring 35.Wherein, not easily there is deformation in described convex hold-down ring 34, can be made up of the material that rigidity is stronger, and the profile of described convex hold-down ring 34 and the U-shaped opening shape of O-ring seal match, and further, described convex hold-down ring 34 can move left and right; Specifically, convex hold-down ring 34 can be embedded in the U-shaped opening of described O-ring seal, and a segment distance can be forced out when the U-shaped opening of O-ring seal is oppressed owing to having the predetermined gradient, namely convex hold-down ring 34 can when there being ambient pressure a protruding segment distance, equally, under the effect of ambient pressure, described convex hold-down ring 34 also can move inward, and is namely pressed in the U-shaped opening of O-ring seal;
Described V-type spring 35 has larger elastic force, can to greatest extent to the U-shaped opening of O-ring seal described in outer support.
Preferably, as shown in Figure 2, described first O-ring seal 31 and the second O-ring seal 32 arranged in series, namely the first O-ring seal 31 is consistent with the opening direction of the second O-ring seal 32, and all towards right side, and described first O-ring seal is on a left side, and the second O-ring seal is on the right side.
In one preferred embodiment, described sealing unit 3 is arranged on lumen tube 1 and/or external-cavity tube 2; Preferably, described sealing unit have one or two or multiple;
More preferably, as shown in Figure 4, described lumen tube 1 and/or external-cavity tube 2 offer the ring groove for holding described sealing unit.
Make pressure medium higher according to sealing unit provided by the invention, sealing peak stress is larger, realizes high pressure sealing.
In one preferred embodiment, described lumen tube and/or external-cavity tube offer air intake opening and/or gas outlet, so that the air pressure in adjustment test chamber, described air intake opening and gas outlet are connected to draft tube and escape pipe, so that the gas componant in control chamber.
In one preferred embodiment, the optical element for cavity ring down spectroscopy technology is provided with in lumen tube and/or external-cavity tube, described optical element comprises chamber mirror etc. can with optical element in a lumen, to realize the experimental implementation such as the measurement of cavity ring-down spectroscopy.Preferentially, as shown in Figure 5, described chamber mirror 9 is arranged on the end of lumen tube, is arranged on the invar column sleeve of hollow further, and described chamber mirror is the plano-concave spherical reflector with high reflectance, and reflectivity is greater than 99.9%.
In one preferred embodiment, the Control Component for controlling, measuring described lumen tube and/or external-cavity tube motion is also provided with in described lumen tube and/or external-cavity tube outside, described Control Component comprises topworks 4, driver element 5, measuring unit 6 and control module 7, according to the absorption line position of tested gas, absorption intensity and required measurement range, lumen tube and/or external-cavity tube accurately move to assigned address under the drive of Control Component.Preferentially, described topworks 4 comprises air-float guide rail, between this guide rail two sides, have air cavity, after gas enters air cavity, form the gas mould that one deck is very thin between two guide pass, and gas mould thickness keeps invariable substantially.Air-float guide rail can make cavity obtain nothing friction and vibrationless level and smooth movement, has Panel-corrected Model simultaneously, can ensure high-precision relative motion between cavity.
Further preferably, one of lumen tube or external-cavity tube is fixing, another one is linked together by drive block 8 and the slide block in topworks, topworks 4 can adopt high precision guide rail leading screw, measuring unit 6 can adopt high precision grating scale, driver element 5 coordinates accurate retarding machine and piezoelectric ceramics two parts to form by stepper motor can adopt stepper motor cooperation accurate retarding machine, stepper motor coordinates accurate retarding machine to be used for realizing displacement coarse adjustment, piezoelectric ceramics is used for realizing micrometric displacement, can compensate and revise the non-linear of material and mechanism defect and system, control module 7 can adopt embedded-type ARM microprocessor, the drive mechanism of guide rail leading screw can ensure the right alignment that lumen tube 1 and external-cavity tube 2 move, high precision grating scale can the length of Measurement accuracy displacement thus the measurement cavity length after calculating adjustment, the driving design that stepper motor coordinates accurate retarding machine and piezoelectric ceramics 10 to combine can the capable trickle regulating and controlling of contraposition shift-in, embedded-type ARM microprocessor is by measuring the position data control step electric machine rotation of grating scale feedback, as preferred embodiment, lumen tube can be made to fix, control external-cavity tube and move, external-cavity tube also can be made to fix, control lumen tube and move, two lumens can also be controlled and move simultaneously.
Multiple different gas can be measured by use cavity in continuously adjustabe length testing chamber for cavity ring down spectroscopy technology provided by the invention, the spectrum a good distance off of these gases, and absorption intensity is different, for often kind of gas, measurement of concetration scope can cover from 1 × 10 -8to 2%.
The beneficial effect that the present invention has comprises:
(1) according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology provided by the invention, there is Control Component, lumen tube or external-cavity tube is driven by Control Component, make the chamber length of test chamber can flexible, increase and shorten chamber according to the needs of test long.
(2) long by the chamber of adjustment test chamber according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology provided by the invention, make single test chamber be applicable to the measurement of variety classes gas concentration.
(3) long by the chamber of adjustment test chamber according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology provided by the invention, add the dynamic range of measurement.
More than combine and preferred embodiment describe the present invention, but these embodiments are only exemplary, only play illustrative effect.On this basis, can carry out multiple replacement and improvement to the present invention, these all fall within the scope of protection of the present invention.

Claims (10)

1. for a continuously adjustabe length testing chamber for cavity ring down spectroscopy technology, it is characterized in that, this test chamber comprises can the lumen tube (1) of relative sliding and external-cavity tube (2).
2. the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to claim 1, is characterized in that, keeps sealing between described lumen tube (1) and external-cavity tube (2).
3. the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to claim 1, is characterized in that, described lumen tube (1) and/or external-cavity tube (2) offer air intake opening and/or gas outlet.
4. the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to claim 1, is characterized in that, is provided with the optical element for cavity ring down spectroscopy technology in lumen tube (1) and/or external-cavity tube (2).
5. the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to claim 1, it is characterized in that, be also provided with the Control Component moved for controlling, measuring described lumen tube (1) and/or external-cavity tube (2) in described lumen tube (1) and/or external-cavity tube (2) outside.
6. the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to claim 5, it is characterized in that, described Control Component comprises topworks (4), driver element (5), measuring unit (6) and control module (7).
7., according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology one of claim 1-6 Suo Shu, it is characterized in that, between described lumen tube (1) and external-cavity tube (2), be provided with sealing unit (3).
8. the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to claim 7, it is characterized in that, described sealing unit (3) comprises the first O-ring seal (31) and the second O-ring seal (32), all in the form of a ring, its cross section is all the U-shaped of one end open for described first O-ring seal (31) and the second O-ring seal (32);
Preferably, on the outer wall of described lumen tube (1) or external-cavity tube (2), be provided with trapezoidal groove (33) the first O-ring seal (31) is upper, on the outer wall of described lumen tube (1) or external-cavity tube (2), be provided with trapezoidal groove (33) the second O-ring seal (32) is upper.
9. the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology according to claim 8, it is characterized in that, in the openend of the first O-ring seal (31) and the second O-ring seal (32), be all embedded with the support component for outwards supportting large described U-shaped opening;
Preferably, the support component be embedded at the openend of the first O-ring seal (31) is convex hold-down ring (34), and the support component be embedded at the openend of the second O-ring seal (32) is V-type spring (35).
10. according to the continuously adjustabe length testing chamber for cavity ring down spectroscopy technology one of claim 7-9 Suo Shu, it is characterized in that, described sealing unit (3) is arranged on lumen tube (1) and/or external-cavity tube (2);
Preferably, described sealing unit have one or two or multiple;
More preferably, described lumen tube (1) and/or external-cavity tube (2) offer the ring groove for holding described sealing unit.
CN201610069954.7A 2015-02-13 2016-02-01 Continuously adjustable length testing chamber for cavity ring down spectroscopy technology Expired - Fee Related CN105548052B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610069954.7A CN105548052B (en) 2015-02-13 2016-02-01 Continuously adjustable length testing chamber for cavity ring down spectroscopy technology

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN2015100811449 2015-02-13
CN201510081144 2015-02-13
CN201610069954.7A CN105548052B (en) 2015-02-13 2016-02-01 Continuously adjustable length testing chamber for cavity ring down spectroscopy technology

Publications (2)

Publication Number Publication Date
CN105548052A true CN105548052A (en) 2016-05-04
CN105548052B CN105548052B (en) 2018-10-12

Family

ID=55827393

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201610069954.7A Expired - Fee Related CN105548052B (en) 2015-02-13 2016-02-01 Continuously adjustable length testing chamber for cavity ring down spectroscopy technology
CN201620100253.0U Expired - Fee Related CN205506673U (en) 2015-02-13 2016-02-01 A continuously adjustable length test chamber that is used for optical cavity to decline swinging spectral technique

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201620100253.0U Expired - Fee Related CN205506673U (en) 2015-02-13 2016-02-01 A continuously adjustable length test chamber that is used for optical cavity to decline swinging spectral technique

Country Status (1)

Country Link
CN (2) CN105548052B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108444947A (en) * 2018-03-02 2018-08-24 湖北理工学院 A kind of CRDS devices of included wavelength calibration

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108627477A (en) * 2017-03-15 2018-10-09 中国计量科学研究院 A kind of optical cavity structure
CN116448718B (en) * 2023-04-19 2023-12-05 河北子曰机械设备有限公司 Cavity ring-down tuning unit and cavity ring-down spectroscopy device
CN116660166B (en) * 2023-07-31 2023-09-22 中国科学院空天信息创新研究院 Gas cavity structure for cavity-assisted gas concentration measurement

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1062335A (en) * 1996-08-14 1998-03-06 Fuji Electric Co Ltd Measurement cell of infrared gas analyzer
CN2385157Y (en) * 1998-10-19 2000-06-28 袁进军 High and medium pressure two-lip sealing ring
CN103562704A (en) * 2011-03-25 2014-02-05 弗吉尼亚大学专利基金委员会 Adaptable cell design for a spectroscopy apparatus
CN203880095U (en) * 2014-05-27 2014-10-15 北京裕泰行新材料科技有限公司 Pressure resisting type U-shaped spring energy accumulation lip-shaped sealing ring
CN104141792A (en) * 2014-07-24 2014-11-12 昆山禾信质谱技术有限公司 Sealing device based on cavity ring-down spectroscopy technology

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1062335A (en) * 1996-08-14 1998-03-06 Fuji Electric Co Ltd Measurement cell of infrared gas analyzer
CN2385157Y (en) * 1998-10-19 2000-06-28 袁进军 High and medium pressure two-lip sealing ring
CN103562704A (en) * 2011-03-25 2014-02-05 弗吉尼亚大学专利基金委员会 Adaptable cell design for a spectroscopy apparatus
CN203880095U (en) * 2014-05-27 2014-10-15 北京裕泰行新材料科技有限公司 Pressure resisting type U-shaped spring energy accumulation lip-shaped sealing ring
CN104141792A (en) * 2014-07-24 2014-11-12 昆山禾信质谱技术有限公司 Sealing device based on cavity ring-down spectroscopy technology

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108444947A (en) * 2018-03-02 2018-08-24 湖北理工学院 A kind of CRDS devices of included wavelength calibration

Also Published As

Publication number Publication date
CN105548052B (en) 2018-10-12
CN205506673U (en) 2016-08-24

Similar Documents

Publication Publication Date Title
CN105548052A (en) Testing cavity with continuously adjustable length applied to cavity ring-down spectroscope technology
JP6157240B2 (en) Refractive index measuring method, refractive index measuring apparatus, and optical element manufacturing method
KR940022054A (en) 3D measurement probe
CN101048648B (en) Optical delay
JP5193490B2 (en) Measuring method using tracking laser interferometer
CN107152941B (en) A kind of long controllable fiber F-P cavity constituent apparatus of chamber
CN103499496B (en) Bendind rigidity proving installation under deep cooling hot environment
CN207197480U (en) A kind of calibrating device for displacement sensor based on air floating platform
CN109798883B (en) High-precision two-dimensional translation table perpendicularity detection method and device
CN210720729U (en) Distance measurement imaging device and analysis detection system
CN116086361B (en) Straightness measuring device for large-stroke guide rail and error obtaining method
RU71163U1 (en) MOBILE LASER HYDROPHONE
JP2017198613A (en) Refractive index measurement method, refractive index measurement device, and optical element manufacturing method
JP5704150B2 (en) White interference device and position and displacement measuring method of white interference device
US10948334B2 (en) Non-contact displacement sensor
KR102008253B1 (en) Multi channel optical profiler based on interferometer
WO2016084195A1 (en) White light interference device and method of detecting position and displacement by means of white light interference device
RU58216U1 (en) LASER-INTERFERENCE HYDROPHONE
TW200804756A (en) A system for detecting errors of a one-dimensional five degrees of freedom(DOF) system
RU2281471C1 (en) Reflectometer of multiple reflection based on plane mirrors
US20230324282A1 (en) Optical measuring cell
RU186321U1 (en) WIDE-BAND MULTI-CHANNEL NON-MAGNIFICENT INTERFEROMETER FOR MEASURING TIME DEPENDENCE OF OBJECT SPEED
Alekseenko et al. Measurements of the liquid-film thickness by a fiber-optic probe
KR102634125B1 (en) Photo-induced force microcscope having optics module causing total reflection
Yatsyshyn et al. Calibration of the Ultrasonic Sensor-Range Finder by the Laser Interferometer

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20181012