CN212229172U

CN212229172U - Small-sized simple optical interval non-contact low-coherence measuring device

Info

Publication number: CN212229172U
Application number: CN202020324354.2U
Authority: CN
Inventors: 邢利娜; 高峰; 何益; 张欣; 陈一巍; 史国华
Original assignee: Suzhou Institute of Biomedical Engineering and Technology of CAS
Current assignee: Suzhou Institute of Biomedical Engineering and Technology of CAS
Priority date: 2020-03-16
Filing date: 2020-03-16
Publication date: 2020-12-25
Anticipated expiration: 2030-03-16

Abstract

The utility model discloses a small simple optical spacing non-contact low coherence measuring device, which is characterized in that the device comprises a box body, a computer, a measuring arm, an optical fiber interference detection box arranged in the box body, a sweep frequency light source, an indicating light source and a reference arm; the optical fiber interference detection box is internally provided with an optical fiber coupler, a circulator, a wavelength division multiplexer and a balance detector; the reference arm comprises a first collimator, a reflector and a reflector mounting seat which is used for mounting the reflector and can adjust the position of the reflector, and the measuring arm comprises a second collimator and a sample to be measured; the utility model can be used for non-contact measurement of the distance between the small optical surfaces, and has the advantages of simple and compact structure, easy adjustment and assembly, convenient movement, no damage to measurement and the like; the utility model discloses a convenient regulation of the position of speculum can be realized to the speculum mount pad to guarantee that the light that returns from the speculum can get into first collimator once more, make things convenient for the light path of device to adjust.

Description

Small-sized simple optical interval non-contact low-coherence measuring device

Technical Field

The utility model relates to an optical engineering technical field, in particular to small-size simple and easy optics interval non-contact low coherent measurement device.

Background

The distance between the optical surfaces in the optical system determines the relative position of each lens, the imaging quality of the optical system is seriously influenced by the error of the distance, along with the continuous progress of the optical technology, the imaging quality requirement is higher and higher, the measurement requirement on the distance between the centers of the optical surfaces is higher and higher, the traditional measurement method is generally contact measurement, the surface of a precise lens is easy to damage, the measurement of a single lens can only be realized, and the measurement of the whole system cannot be realized. The measuring device adopting the optical low-coherence measuring technology can well solve the two problems.

For example, chinese patent 2018104473568 discloses a non-contact type measuring apparatus and method for measuring the distance between optical surfaces, which can realize non-contact type measurement of the distance between optical surfaces, and when the apparatus has many complicated devices and is not easy to realize small-scale integration of the apparatus. A more reliable solution is now needed.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that to the not enough among the above-mentioned prior art, provide a small-size simple and easy optics interval non-contact low coherent measurement device.

The utility model adopts the technical proposal that: a small-sized simple optical interval non-contact low-coherence measuring device comprises a box body, a computer, a measuring arm, an optical fiber interference detection box, a sweep frequency light source, an indicating light source and a reference arm, wherein the optical fiber interference detection box, the sweep frequency light source, the indicating light source and the reference arm are arranged in the box body;

the optical fiber interference detection box is internally provided with an optical fiber coupler, a circulator, a wavelength division multiplexer and a balance detector;

the reference arm comprises a first collimator, a reflector and a reflector mounting seat which is used for mounting the reflector and can adjust the position of the reflector, and the measuring arm comprises a second collimator and a sample to be measured;

the light emitted by the sweep frequency light source enters the first interface of the circulator, is output to the wavelength division multiplexer through the second interface of the circulator and is combined with the light input to the wavelength division multiplexer by the indicating light source; light output by the wavelength division multiplexer is divided into two beams after entering the optical fiber coupler, and the two beams respectively enter the measuring arm and the reference arm; returning light of the reference arm and returning light of the measuring arm enter the optical fiber coupler again to interfere and then are divided into two beams, one beam enters the balance detector, the other beam enters a second interface of the circulator after passing through the wavelength division multiplexer, and then is output to the balance detector through a third interface of the circulator; the output signal of the balance detector is transmitted to the computer.

Preferably, the swept-frequency light source is arranged on a bottom plate of the box body, a support is further arranged on the bottom plate of the box body, and the optical fiber interference detection box and the reference arm are both arranged on the support.

Preferably, a measuring head is arranged on the outer wall of the front side plate of the box body, and the measuring head comprises an outer cover and the second collimator arranged in the outer cover;

and a sample rack for loading samples is arranged below the measuring head.

Preferably, the reflector mounting base comprises a base, a reflector barrel base rotatably arranged on the base, and a reflector barrel rotatably arranged in the reflector barrel base, and the reflector is arranged in the reflector barrel;

the reflector cylinder base can drive the reflector to rotate around a Z axis relative to the base, and the reflector cylinder can drive the reflector to rotate around a Y axis relative to the reflector cylinder base.

Preferably, the middle part of the base is provided with a shaft hole along the Z axis, and the bottom of the reflector barrel seat is connected with a rotating shaft which is rotatably arranged in the shaft hole;

the lateral part of base seted up with the screw locking hole of shaft hole intercommunication, the downthehole cooperation of screw locking is provided with locking screw.

Preferably, the middle part of the reflector cylinder seat is provided with a mounting through hole for mounting the reflector cylinder along an X axis;

a spring hole is formed in the rotating shaft in a penetrating mode along the Z axis, a spring pressing ring is fixedly arranged at the bottom of the spring hole, a jacking ball is arranged at the top of the spring hole, and a spring is arranged between the jacking ball and the spring pressing ring;

the bottom of the reflector cylinder seat is provided with a ball ejecting hole which is communicated with the spring hole and the mounting through hole, and the upper part of the ball ejecting can extend out of the ball ejecting hole to be ejected against the bottom of the reflector cylinder arranged in the mounting through hole;

the diameter of the knob is larger than that of the knob hole.

Preferably, the upper end of the reflector barrel seat is provided with two adjusting threaded holes which are arranged at intervals along the X axis and penetrate through the mounting through hole, and the adjusting threaded holes are internally provided with adjusting screws with the inner ends pressed against the reflector barrel in a matching manner;

two fixing threaded holes which are symmetrical relative to the Z axis are formed in two sides of the reflecting lens barrel seat, and fixing screws with inner ends pressed against the reflecting lens barrel are arranged in the fixing threaded holes in a matched mode.

Preferably, a reflector pressing ring for pressing the reflector is further disposed in the reflector tube.

Preferably, the bottom surface of the reflector cylinder seat is provided with an annular sliding ring at the position of the periphery of the rotating shaft, the upper end surface of the base is provided with an annular sliding groove matched with the annular sliding ring, and the annular sliding ring can rotate in the annular sliding groove in a matched manner.

Preferably, the section of the annular sliding ring is circular or elliptical, and the inside of the annular sliding ring is hollow;

an annular locking groove for inserting the inner end of the locking screw is formed in the periphery of the rotating shaft; the upper part of the inner wall of the annular locking groove is a horizontal plane, and the lower part of the inner wall of the annular locking groove is provided with an arc-shaped inclined plane.

The utility model has the advantages that: the small simple optical interval non-contact low coherence measuring device can be used for small optical surface interval non-contact measurement, and has the advantages of simple and compact structure, easy adjustment and assembly, convenient movement, no damage in measurement and the like; the utility model discloses a convenient regulation of the position of speculum can be realized to the speculum mount pad to guarantee that the light that returns from the speculum can get into first collimator once more, make things convenient for the light path of device to adjust.

Drawings

FIG. 1 is a schematic diagram of the internal structure of a compact simple optical spacing non-contact low coherence measuring device of the present invention;

FIG. 2 is a schematic diagram of the external structure of the compact simple optical pitch non-contact low coherence measuring device of the present invention;

FIG. 3 is a schematic block diagram of a compact, simple optical spacing, non-contact, low coherence measurement apparatus of the present invention;

FIG. 4 is a schematic connection diagram of the internal components of the optical fiber interference detection box of the present invention;

fig. 5 is a schematic structural view of the reflector mounting base of the present invention;

fig. 6 is a schematic cross-sectional structural view of the reflector mounting base of the present invention along the X-axis direction;

fig. 7 is a schematic cross-sectional structural view of the reflector mounting base along the Y-axis direction according to the present invention;

fig. 8 is a schematic structural view of the reflector mounting base and the base of the present invention;

fig. 9 is an exploded view of the reflector mounting base and the base according to the present invention;

fig. 10 is a schematic cross-sectional view of a reflector mounting base and a base in another embodiment of the present invention;

fig. 11 is a schematic view of a partial enlarged structure at a in fig. 10 according to the present invention;

fig. 12 is a schematic diagram of a partially enlarged structure at B in fig. 10 according to the present invention.

Description of reference numerals:

1, a box body; 2-sweep frequency light source; 3-indicating light source; 4-optical fiber interference detection box; 5-a measuring arm; 6-reference arm; 7-a computer; 8, a sample frame; 10-a base plate; 11-a scaffold; 12-a measuring head; 13-a housing; 14-a cover plate; 15-side plate; 16-a wiring port; 17-mounting a plate; 40-a circulator; 41-wavelength division multiplexer; 42-a fiber coupler; 43-balanced detector; 44-indicating light source interface; 45-swept source interface; 46 — reference arm interface; 47 — measurement arm interface; 48 — detector output port; 50-a second collimator; 51, a sample to be detected; 60 — a first collimator; 61-a reflector; 62-reflector mount; 620 — a base; 621-reflector cylinder seat; 622 — reflection lens barrel; 6200-axial hole; 6201-thread locking hole; 6202 — locking screw; 6203-an annular chute; 6210-a rotating shaft; 6211-mounting through holes; 6212-spring bore; 6213-spring clamping ring; 6214 — heading; 6215-spring; 6216-top ball 6214 hole; 6217-adjusting the threaded hole; 6218-fixing the threaded hole; 6219-a toroidal runner; 6220-mirror clamping ring; 62020 — tapered end; 62100-annular locking groove; 62101-horizontal plane; 62102-arc inclined plane; 62170-adjusting screw; 62180-set screw.

Detailed Description

The present invention is further described in detail below with reference to examples so that those skilled in the art can implement the invention with reference to the description.

It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.

As shown in fig. 1-4, the small-sized simple optical pitch non-contact low coherence measuring device of the present embodiment includes a box 1, a computer 7, a measuring arm 5, and a fiber-optic interferometric detection box 4, a sweep light source 2, an indicating light source 3 and a reference arm 6 disposed inside the box 1;

the optical fiber interference detection box 4 is internally provided with an optical fiber coupler 42, a circulator 40, a wavelength division multiplexer 41 and a balance detector 43;

the reference arm 6 comprises a first collimator 60, a reflector 61 and a reflector mounting seat 62 for mounting the reflector 61 and adjusting the position of the reflector 61, and the measuring arm 5 comprises a second collimator 50 and a sample 51 to be measured;

the light emitted by the sweep frequency light source 2 enters a first interface of the circulator 40, is output to the wavelength division multiplexer 41 through a second interface of the circulator 40, and is combined with the light input to the wavelength division multiplexer 41 by the indicating light source 3; the light output by the wavelength division multiplexer 41 enters the optical fiber coupler 42 and is divided into two beams, which respectively enter the measuring arm 5 and the reference arm 6; returning light of the reference arm 6 and returning light of the measurement arm 5 enter the optical fiber coupler 42 again to interfere and then are divided into two beams, one beam enters the balance detector 43, the other beam enters the second interface of the circulator 40 after passing through the wavelength division multiplexer 41, and then is output to the balance detector 43 through the third interface of the circulator 40, so that balance detection is realized; the output signal of the balance detector 43 is transmitted to the computer 7 to realize the measurement. Wherein, the indicating light source 3 functions as: since the swept-frequency light source generally adopts infrared light with a central wavelength of 1310nm which is invisible to naked eyes, the adjustment of the light path is extremely inconvenient. The indicating light source adopts visible light, can select red light with the wavelength of 650nm, is used for guiding the light path to be adjusted and aligned, is convenient for judging whether the light path returns to enter the collimator or not, and can be closed in the testing process and when the adjustment is not needed.

The system realizes measurement by a sweep frequency optical coherence tomography (SSOCT) principle, which is the prior art and can refer to Chinese patents: 2018104473568A non-contact measurement device and method for measuring the distance between optical surfaces, the solution of the patent requires a guide rail for moving the reflector of a reference arm to realize interference, and the measurement accuracy depends on the accuracy of the guide rail; or 201910155886.X large-range contactless optical distance measuring system and measuring method thereof, and the like, and the scheme has a complex structure and is troublesome to adjust and difficult to realize.

It should be understood that the principle of the system is not an improvement of the present invention, and therefore, the principle is only briefly described: the coherent interference of frequency domain is essentially composed of a Michelson interferometer, light emitted by a light source is divided into two parts by a beam splitter, wherein one part of light enters a reference arm 6, the other part of light enters a sample arm, and interference occurs when the optical path difference between back scattering or reflected light of the sample arm and the reference light is smaller than the coherent length of the light source. The light source adopted by the frequency domain coherent interference is a fast tunable laser with narrow pulse and wide spectrum, and can periodically output a section of wide-spectrum light wave, and in each period, the light source sequentially outputs a narrow-band light beam which can be regarded as single wavelength approximately according to time, which is equivalent to that the light source carries out time coding on the output light wave. Therefore, the interference signal of the light is a function of time, the interference signal of different times can be detected by using a point detector, and the sample depth information carried in the signal is obtained by Fourier transform.

In this embodiment, the box body 1 includes a bottom plate 10, a cover plate 14 and a side plate 15, the sweep light source 2 is disposed on the bottom plate 10 of the box body 1, a support 11 is further disposed on the bottom plate 10 of the box body 1, the optical fiber interference detection box 4 and the reference arm 6 are both disposed on the support 11, the first collimator 60 and the reflector 61 are both disposed on the mounting plate 17, and the mounting plate 17 is further fixedly connected to the support 11. A side plate 15 at the back of the box body 1 is provided with a wire routing port 16 for routing output cables of the sweep light source 2, the indicating light source 3 and the balance detector 43.

Wherein, a measuring head 12 is arranged on the outer wall of the front side plate 15 of the box body 1, and the measuring head 12 comprises an outer cover 13 and a second collimator 50 arranged in the outer cover 13;

below the measuring head 12 there is also arranged a sample holder 8 for holding a sample. The position of the sample holder 8 is adjustable (by means of a conventional multi-dimensional adjustment mechanism) for placing and adjusting the sample 51 to be measured so that it is directly below the second collimator 50.

Referring to fig. 4, the fiber-optic interference detection box 4 is provided with an indication light source interface 44, a sweep light source interface 45, a reference arm interface 46, a measurement arm interface 47 and a detector output port 48. The indication light source 3 (in the embodiment, a red light indication light source 3 is adopted) is connected with the wavelength division multiplexer 41 through an indication light source interface 44; the swept source 2 is connected with a first interface of the circulator 40 through a swept source interface 45, a second interface of the circulator 40 is connected with a wavelength division multiplexer 41, a second interface of the circulator 40 is connected with a balanced detector 43, the wavelength division multiplexer 41 and the balanced detector 43 are connected with two first ports of a coupler (2 × 2 coupler), and the other two second ports of the coupler are respectively connected with a first collimator 60 and a second collimator 50; the balance detector 43 is connected to the external computer 7 via a detector output port 48 by a cable.

The mirror mount 62 is used to mount the mirror 61 and adjust the position of the mirror 61 to ensure that the light returning from the mirror 61 can enter the first collimator 60 again. The mirror 61 is mainly required to achieve fine adjustment of the azimuth angle (rotation angle about the Z axis) and the pitch angle (rotation angle about the Y axis), and is illustrated with reference to directions in fig. 5 to 7. In a preferred embodiment, this is achieved by the following structure. Reference is made to fig. 5-9.

The reflector mounting base 62 comprises a base 620, a reflector barrel base 621 rotatably arranged on the base 620 and a reflector barrel 622 rotatably arranged in the reflector barrel base 621, and the reflector 61 is arranged in the reflector barrel 622; the reflector barrel holder 621 can drive the reflector 61 to rotate around the Z axis relative to the base 620, and the reflector barrel 622 can drive the reflector 61 to rotate around the Y axis relative to the reflector barrel holder 621.

The middle part of the base 620 is provided with an axial hole 6200 along the Z axis, and the bottom of the reflector cylinder seat 621 is connected with a rotating shaft 6210 which is rotatably arranged in the axial hole 6200;

the lateral part of base 620 is seted up the thread locking hole 6201 with shaft hole 6200 intercommunication, and thread locking hole 6201 fit in is provided with locking screw 6202.

A mounting through hole 6211 for mounting the reflecting lens barrel 622 is formed in the middle of the reflecting lens barrel base 621 along the X axis;

a spring hole 6212 is formed in the rotating shaft 6210 in a penetrating manner along the Z axis, a spring 6215 pressing ring 6213 is fixedly arranged at the bottom of the spring hole 6212, a jacking ball 6214 is arranged at the top of the spring hole 6212, and a spring 6215 is arranged between the jacking ball 6214 and the spring 6215 pressing ring 6213;

the bottom of the reflector barrel seat 621 is provided with a ball ejecting hole 6216 communicating with the spring hole 6212 and the mounting through hole 6211, and the upper part of the ball ejecting 6214 can extend out of the ball ejecting hole 6216 to be pressed against the bottom of the reflector barrel 622 arranged in the mounting through hole 6211;

the diameter of the top ball 6214 is greater than the diameter of the top ball aperture 6216.

The upper end of the reflector barrel seat 621 is provided with two adjusting threaded holes 6217 which are arranged at intervals along the X axis and penetrate through the mounting through hole 6211, and an adjusting screw 62170 with the inner end pressed against the reflector barrel 622 is arranged in the adjusting threaded hole 6217 in a matching way;

two fixing threaded holes 6218 symmetrical about the Z axis are formed in two sides of the reflector barrel holder 621, and fixing screws 62180 with inner ends pressed against the reflector barrel 622 are disposed in the fixing threaded holes 6218 in a matching manner.

A reflector clamping ring 6220 for pressing the reflector 61 is further disposed in the reflector barrel 622, and the reflector 61 is mounted in the reflector barrel 622 and then fixed by the reflector clamping ring 6220.

Under the elastic force of the spring 6215, the top ball 6214 always keeps pressing against the bottom of the reflector barrel 622, and the reflector barrel 622 can be stably arranged in the reflector barrel seat 621 by matching with the pressing of the two adjusting screws 62170 at the upper part and the two fixing screws 62180 at the two sides. Since the two adjusting screws 62170 are disposed on two sides of the top ball 6214, and the top ball 6214 acts as a fulcrum, the adjustment of the pitch angle of the reflection lens barrel 622 can be realized by adjusting the screwing depth of the two adjusting screws 62170.

The adjustment principle of the reflector mount 62 is:

adjustment of azimuth angle (rotation angle around Z axis): loosening the locking screw 6202, then rotating the reflector barrel base 621 to make the reflector barrel base 621 rotate around the Z axis relative to the base 620, thereby realizing the adjustment of the azimuth angle of the reflector 61, after the adjustment is completed, tightening the locking screw 6202, pressing the inner end of the locking screw 6202 against the outer wall of the rotating shaft 6210 to realize locking, and making the reflector barrel base 621 fixed relative to the base 620;

adjustment of pitch angle (rotation angle about Y axis): by rotating the screwing depth of the two adjusting screws 62170, the reflecting lens barrel 622 can rotate around the Y axis, and the pitch adjustment is realized. Because the pitching angle is adjusted by three-point positioning realized by the lower spring 6215, the top ball 6214 and the two adjusting screws 62170, the spring 6215 may deform to cause unstable structure in long-term use, so the two fixing screws 62180 at the lower part are added, and after the pitching angle is adjusted, the reflection lens barrel 622 is fixed by the two fixing screws 62180 and the two adjusting screws 62170 at the upper part.

On the other hand, by adjusting the screwing depth of the two fixing screws 62180, the position of the reflecting mirror 61 in the ZY plane can be adjusted. For example, by decreasing the screwing depth of the fixing screw 62180 and increasing the screwing depth of the two adjusting screws 62170, the top ball 6214 can be pressed to move downward, and the reflection lens barrel 622 can move downward along the Z-axis.

Through the above-mentioned structural setting of speculum mount pad 62, can conveniently realize the position angle of speculum 61, the regulation of every single move angle and position in the ZY plane, and this structure is small and exquisite simple, convenient operation.

Referring to fig. 10-12, in a further preferred embodiment, an annular sliding ring 6219 is disposed at a position of the bottom surface of the mirror cylinder base 621 at the periphery of the rotating shaft 6210, an annular sliding groove 6203 engaged with the annular sliding ring 6219 is disposed on the upper end surface of the base 620, and the annular sliding ring 6219 can rotate in the annular sliding groove 6203. The engagement of the annular runner 6219 with the annular chute 6203 reduces friction between the mirror cylinder base 621 and the base 620, facilitating rotation of the mirror cylinder base 621. The annular chute 6203 is sized to fit the annular runner 6219. The annular sliding ring 6219 is preferably made of a material having a certain elasticity, such as stainless steel or hard plastic having a certain elasticity.

The section of the annular sliding ring 6219 is circular or elliptical, and the interior thereof is hollow; the outer periphery of the rotating shaft 6210 is provided with an annular locking groove 62100 for inserting the inner end of the locking screw 6202; the upper part of the inner wall of the annular locking groove 62100 is a horizontal plane 62101, and the lower part of the inner wall thereof is provided with an arc-shaped inclined plane 62102. The inner end of the locking screw 6202 has a tapered end 62020, and the size of the tapered end is smaller than the upper and lower width of the annular locking groove 62100, so that the inner end of the locking screw 6202 can penetrate into the annular locking groove 62100 for a certain distance.

Since the mirror cylinder base 621 needs to rotate relative to the base 620 when adjusting, the friction is preferably smaller when rotating, and the structure of the annular sliding ring 6219 and the annular sliding groove 6203 is provided. But when locking, the friction force needs to be increased as much as possible to ensure the locking to be firm. In this embodiment, when the mirror cylinder base 621 is locked, the locking screw 6202 is screwed in, and the tapered end 62020 of the locking screw 6202 pushes the annular locking groove 62100, so that friction force can be increased, and the locking is firmer. Furthermore, because the upper part of the inner wall of the annular locking groove 62100 is the horizontal plane 62101, and the lower part of the inner wall of the annular locking groove 62100 is provided with the arc-shaped inclined surface 62102, when the locking screw 6202 is pushed into the annular locking groove 62100, the conical end 62020 is matched with the arc-shaped inclined surface 62102 and can push against the arc-shaped inclined surface 62102 at the lower part of the inner wall of the annular locking groove 62100, so that a downward vertical pulling force can be formed on the rotating shaft 6210 while a horizontal pushing force is applied to the rotating shaft 6210, and therefore the rotating shaft 6210 is driven to generate a downward moving trend, and the annular sliding ring 62; because the interior cavity of annular sliding ring 6219, annular sliding ring 6219 has certain compressibility, and annular sliding ring 6219 produces the deformation, extrudees each other with annular spout 6203, and frictional force between the two improves greatly to frictional force between speculum cylinder seat 621 and the base 620 improves greatly when making locking, makes locking more firm, prevents to adjust the back speculum cylinder seat 621 and appears becoming flexible.

While the embodiments of the invention have been disclosed above, it is not limited to the applications listed in the description and the embodiments, which are fully applicable in all kinds of fields where the invention is suitable, and further modifications may readily be made by those skilled in the art, and the invention is therefore not limited to the specific details without departing from the general concept defined by the claims and the scope of equivalents.

Claims

1. A small-sized simple optical interval non-contact low-coherence measuring device is characterized by comprising a box body, a computer, a measuring arm, an optical fiber interference detection box, a sweep frequency light source, an indicating light source and a reference arm, wherein the optical fiber interference detection box, the sweep frequency light source, the indicating light source and the reference arm are arranged in the box body;

2. The compact, simplified optical pitch, non-contact, low coherence measurement apparatus of claim 1, where the swept-frequency light source is located on a floor of the housing, where a support is also located, and where the fiber optic interferometric detection box and the reference arm are both located on the support.

3. The compact, simple optical spacing, non-contact, low coherence measurement device of claim 2, wherein a measurement head is disposed on an outer wall of a front side plate of the housing, the measurement head comprising a housing and the second collimator disposed within the housing;

and a sample rack for loading samples is arranged below the measuring head.

4. The compact, simple optical pitch, non-contact, low coherence measurement device of claim 1, wherein said mirror mount comprises a base, a mirror cylinder rotatably disposed on said base, and a mirror barrel rotatably disposed within said mirror cylinder, said mirror disposed within said mirror barrel;

5. The small-sized simple optical spacing non-contact low coherence measuring device according to claim 4, wherein a shaft hole is formed in the middle of the base along the Z axis, and a rotating shaft rotatably arranged in the shaft hole is connected to the bottom of the reflector barrel base;

6. The small-sized simple optical spacing non-contact low coherence measuring device according to claim 5, wherein a mounting through hole for mounting the reflecting lens barrel is formed in the middle of the reflecting lens barrel base along an X axis;

the diameter of the knob is larger than that of the knob hole.

7. The small-sized simple optical interval non-contact low coherence measuring device according to claim 6, wherein the upper end of the reflector barrel base is provided with two adjusting threaded holes which penetrate through the mounting through hole and are arranged at intervals along an X axis, and the adjusting threaded holes are internally provided with adjusting screws with inner ends pressed against the reflector barrel in a matching manner;

8. The small-scale simple optical spacing non-contact low coherence measurement device according to claim 7, wherein a reflector pressing ring for pressing the reflector is further disposed in the reflector barrel.

9. The small-sized simple optical interval non-contact low coherence measuring device according to claim 6, wherein an annular sliding ring is disposed on the bottom surface of the reflector holder at the periphery of the rotating shaft, an annular sliding groove matched with the annular sliding ring is disposed on the upper end surface of the base, and the annular sliding ring can rotate in the annular sliding groove in a matched manner.

10. The compact simplified optical pitch non-contact low coherence measurement device of claim 9, wherein the cross-section of the annular runner is circular or elliptical and its interior is hollow;