CN103898451B - A kind of laser beam automatic shift control device and method of operating - Google Patents
A kind of laser beam automatic shift control device and method of operating Download PDFInfo
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- CN103898451B CN103898451B CN201210580850.4A CN201210580850A CN103898451B CN 103898451 B CN103898451 B CN 103898451B CN 201210580850 A CN201210580850 A CN 201210580850A CN 103898451 B CN103898451 B CN 103898451B
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Abstract
A kind of laser beam automatic shift control device and method of operating thereof, device comprises brace table, transmission system and lens mount; Motor is fixed on brace table, and the output shaft of motor is axially vertical with brace table, its lower end welding one " ㄈ " shape brace, and this brace lower flat is parallel with brace table; In plane, have the stopper slot of controlling shift range, slide block is fixed on stopper slot by slide block axle; In slide block, have through hole; Slide bar is through through hole, and both are for being slidably matched; The axially parallel of slide bar is in brace table; Axle sleeve is fixed by bolts to brace table below, and axle sleeve bottom is with bearing connection rotating shaft; Rotating shaft middle part is connected with holding screw with slide bar, and rotating shaft is non-coaxial with slide bar; Rotating shaft lower end is connected with connecting rod; The pin rod of alignment pin is successively through lens clamp and limited block; Alignment pin is fixed on connecting rod end. This device coordinates the rotation of target, can ensure that laser focusing bundle, to target material surface Uniform Scanning, realizes the uniform deposition of film.
Description
Technical field
The present invention relates to laser beam automatic shift control device in vacuum laser plated film; Be specifically related to for realizing the laser beam automatic shift control device of laser focusing bundle to target material surface Uniform Scanning.
Background technology
Laser beam is passed through light path system by pulsed laser deposition technique (PLD), focus on the target in vacuum chamber, and strongly interact with target, produce the plasma plume brightness of high-temperature high-density, the directed isothermal of plasma plume brightness, adiabatic expansion, then arrive substrate surface, a kind of film forming method; Because PLD has good guarantor's composition; Sedimentation rate is high, and the test period is short; Technological parameter can regulate arbitrarily, and target kind is not limited; Less pollution, is easy to control; One of development potentiality is large, has the features such as great compatibility, has become semiconductive thin film, high-temperature superconducting thin film, and diamond and DLC film, ferroelectric, piezoelectricity and optoelectronic film, and the main method of bioceramic film preparation;
In thin film deposition, uniformity is very important parameter, but PLD is difficult to the uniform deposition of realization to large area film, because plumage brightness high directivity, in different directions, the particle rapidity in plumage brightness is not quite similar; And plasma local distributes, this becomes a large difficult point of restriction PLD development; Improving in the whole bag of tricks of uniformity of film, laser beam is moved at target material surface, strengthening deposition region is that reality is feasible; Therefore, be badly in need of a kind of laser beam automatic shift control device.
Summary of the invention
The object of this invention is to provide a kind of laser beam automatic shift control device, coordinate the rotation of target, can ensure that laser focusing bundle, to target material surface Uniform Scanning, realizes the uniform deposition of film, and improve the utilization rate of target, reduce costs.
For achieving the above object, the present invention includes following technical scheme:
A kind of laser beam automatic shift control device, comprises brace table 100, transmission system 200 and lens mount 300;
Brace table 100 is rectangular faceplates, has two perforates on it, is respectively used to motor 2 and the axle sleeve 12 of fixed conveyor system 200;
Transmission system 200 comprise motor 2, output shaft 5, " ㄈ " shape brace 6, slide block axle 8, slide block 9, slide bar 11, axle sleeve 12, rotating shaft 13 and connecting rod 15;
This motor 2 is fixed on brace table 100 by bolt 3, and the output shaft 5 of motor 2 bottoms is connected with bearing with brace table 100; Output shaft 5 axially vertical with brace table 100, its lower end welding one " ㄈ " shape brace 6, this brace bottom is plane, parallel with brace table 100, has the stopper slot 7 of control shift range in this plane; Slide block 9 is fixed on stopper slot 7 by slide block axle 8 use nuts 81; In slide block 9, have the circular through hole 10 that connects; Slide bar 11 is through through hole 10, and both are for being slidably matched, and the axially parallel of this slide bar 11 is in brace table 100; Its other end is fixed in rotating shaft 13 with lock-screw 141;
This axle sleeve 12 is fixed by bolts to brace table 100 belows, and axle sleeve 12 bottoms are with bearing connection rotating shaft 13; Rotating shaft 13 middle parts are connected with slide bar 11 use holding screws 141, and rotating shaft 13 is non-coaxial with slide bar 11; Rotating shaft 13 lower ends are connected with connecting rod 15 with holding screw 142;
Lens mount 300 is by alignment pin 16, and lens clamp 17 and limited block 18 form; The pin rod of alignment pin 16 is successively through lens clamp 17 and limited block 18; Alignment pin 16 is fixed on connecting rod 15 ends.
Device as above, it is characterized in that, described alignment pin 16 and connecting rod 15, and lens clamp 17 and alignment pin 16 are and are rotatably connected, manually can make lens mount 300 rotate taking connecting rod 15 as axle, lens clamp 17 rotates taking the pin rod of alignment pin 16 as axle.
Device as above, is characterized in that, the average surface roughness of described slide bar 11 is less than 0.8 micron, and the average surface roughness of through hole 10 is less than 1.6 microns.
Device as above, is characterized in that, the each parts of described laser beam automatic shift control device are all made with stainless steel.
Device as above, is characterized in that, described laser beam automatic shift control device is placed on support or guide rail, and this device can horizontal positioned or is placed on support or guide rail with any angle of inclination.
On the other hand, the invention provides the method for operating of device described above, the method comprises the following steps:
A. according to concrete light path, hand rotation alignment pin 16 and lens clamp 17, determine the orientation of lens 19;
B. according to target size and optical path distance, adjustment slide block 9 is fixed on the position of stopper slot 7, selectes shift range, and selects transposition frequency by motor power;
C. open motor 2, the rotation of output shaft 5 is by each parts, and final drive lens 19 swings, and coordinates the rotation of target, realizes the Uniform Scanning of laser beam to the each region of target, realizes the uniform deposition of large area film.
Beneficial effect of the present invention is: this laser beam automatic shift control device motor output shaft 5 and slide block 9 disalignments, output is rotated thus, drive brace to rotate by motor output shaft 5, slide block 9 is circled around output shaft 5 axis, and slide block 9 circular motion radius are the distance of slide block set bolt 81 to motor output shaft 5 axis. Because fixing slide bar 11 one end, slide block 9 has relative displacement at diverse location and the slide bar 11 of circular motion, and slide block 9 is slidably reciprocated on slide bar 11, and is with moving slide-bar 11 to swing; Slide bar 11 swings to rotating shaft 13 1 moments, rotating shaft 13 is swung, and drive lens frame 300 swings. Its advantage is lower several aspect:
1. this device transmission to power by each parts, drive lens motion, has realized the control to laser beam automatic shift.
2. this device can be on demand and any entirety of lens package of light path system.
3. the diverse location that laser beam displacement range can be fixed on stopper slot by slide block axle regulates, and carries out free selection according to target size and optical path distance.
4. this device deft design, sound construction is stable, easy to operate, with low cost.
Brief description of the drawings
Fig. 1 is the perspective view of embodiment 1 laser beam automatic shift control device;
Fig. 2 is the perspective view of embodiment 1 lens mount;
Fig. 3 is the front view of embodiment 1 brace table;
Fig. 4 is the front view of embodiment 1 slide block;
Fig. 5 is the cutaway view of Fig. 4 along A-A ';
Fig. 6 is the front view of embodiment 1 axle sleeve and rotating shaft;
Fig. 7 is the cutaway view of Fig. 6 along B-B '.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments sons, the invention will be further described, and these embodiment are not limitations of the present invention, and any being equal to replaces or known change all belongs to protection domain of the present invention.
Embodiment 1 laser beam automatic shift control device
Figure 1 shows that the three-dimensional structure diagram of a kind of preferred embodiment of the present invention, this laser beam automatic shift control device is made up of brace table 100, transmission system 200 and lens mount 300 3 parts. Each parts are all made with stainless steel, have ensured intensity and machining accuracy.
As shown in Figures 2 and 3, brace table 100 is for supporting a rectangular platform of other all parts, and Ge Kai mono-circular port in left and right on it, is used for fixing respectively axle sleeve 12 and motor 2.
As shown in Figure 1, transmission system 200 comprises motor 2, output shaft 5, " ㄈ " shape brace 6, slide block axle 8, slide block 9, slide bar 11, axle sleeve 12, rotating shaft 13 and connecting rod 15. On motor 2, with power line 4, below has motor output shaft 5, output shaft 5 below welding one " ㄈ " shape braces 6, and brace 6 bottoms are plane, parallel with brace table 100, its length direction has oval stopper slot 7.
As shown in Figure 4 and Figure 5, in the middle of slide block 9, have manhole 10, offer slide block shaft through-hole 82 with through hole 10 vertical direction, slide block 9 is fixed on stopper slot 7 by slide block axle 8 use nuts 81, by changing slide block axle 8 fixing position in stopper slot 7, shift range that can adjusting slider 9. One cylindricality slide bar 11 one end are through through hole 10, and the other end is connected with rotating shaft 13 with holding screw 141, and the axially parallel of slide bar 11 is in brace table 100. Through hole 10 and slide bar 11 and be to be slidably matched, both average surface roughness are less than respectively 0.8 micron and 1.6 microns.
As shown in Fig. 1, Fig. 6 and Fig. 7, axle sleeve 12 is fixed by bolts to the lower left of brace table 100, and rotating shaft 13 and axle sleeve 12 are connected for bearing. There are two holding screws 141 and 142 in the middle of in rotating shaft 13 and below, is used for fixing respectively slide bar 11 and connecting rod 15. Rotating shaft 13 is non-coaxial with slide bar 11.
As shown in Figure 2, lens mount 300 is by alignment pin 16, and lens clamp 17 and limited block 18 form. On the pin rod 161 of cylindricality alignment pin 16, pass successively lens clamp 17 and limited block 18. The pin rod latter end of alignment pin 16 has perforate, and for being fixed on connecting rod 15, lens 19 are arranged in the hole of lens clamp top. Leading portion screw thread by alignment pin pin rod 161 and alignment pin cap 162 are spirally connected can fastening whole lens mount system. Lens mount 300 and connecting rod 15, lens clamp 17 and alignment pin 16 are and are rotatably connected, and manually can make lens mount 300 rotate taking connecting rod as axle, and lens clamp 17 rotates taking the pin rod of alignment pin 16 as axle, has realized lens adjustable at space arbitrary orientation.
Device support 20 is used for supporting and firm whole system, can be designed to as required plane or guide rail shape.
When work, can operate as follows:
According to Fig. 1 and Fig. 2, according to concrete light path, hand rotation alignment pin 16 and lens clamp 17, determine the orientation of lens 19. According to target size and optical path distance, adjustment slide block 9 is fixed on the position of stopper slot 7, selectes shift range, and selects transposition frequency by motor power. In specific experiment, the rotation of motor output is by each parts, and final drive lens 17 swings, and coordinates the rotation of target, realizes the Uniform Scanning of laser beam to the each region of target, realizes the uniform deposition of large area film.
Claims (6)
1. a laser beam automatic shift control device, is characterized in that, it comprises brace table (100), transmission system (200) and lens mount (300);
Brace table (100) is a rectangular faceplate, has two perforates on it, is respectively used to motor (2) and the axle sleeve (12) of fixed conveyor system (200);
Transmission system (200) comprise motor (2), output shaft (5), " ㄈ " shape brace (6), slide block axle (8), slide block (9), slide bar (11), axle sleeve (12), rotating shaft (13) and connecting rod (15);
It is upper that this motor (2) is fixed on brace table (100) by bolt (3), and the output shaft (5) of motor (2) bottom is connected with bearing with brace table (100); Output shaft (5) axially vertical with brace table (100), its lower end welding one " ㄈ " shape brace (6), this brace bottom is plane, parallel with brace table (100), in this plane, have the stopper slot (7) of controlling shift range; Slide block (9) is fixed on stopper slot (7) with nut (81) by slide block axle (8); In slide block (9), have the circular through hole (10) that connects; Slide bar (11) is through through hole (10), and both are for being slidably matched, and the axially parallel of this slide bar (11) is in brace table (100); Its for other end lock-screw (141) be fixed in rotating shaft (13);
This axle sleeve (12) is fixed by bolts to brace table (100) below, and axle sleeve (12) bottom is with bearing connection rotating shaft (13); Rotating shaft (13) middle part is connected with holding screw (141) with slide bar (11), and rotating shaft (13) is non-coaxial with slide bar (11); Rotating shaft (13) holding screw for lower end (142) is connected with connecting rod (15);
Lens mount (300) is by alignment pin (16), and lens clamp (17) and limited block (18) form; The pin rod of alignment pin (16) is successively through lens clamp (17) and limited block (18); Alignment pin (16) is fixed on connecting rod (15) end.
2. device as claimed in claim 1, it is characterized in that, described alignment pin (16) and connecting rod (15), and lens clamp (17) and alignment pin (16) are and are rotatably connected, manually can make lens mount (300) rotate taking connecting rod (15) as axle, lens clamp (17) rotates taking the pin rod of alignment pin (16) as axle.
3. device as claimed in claim 1, is characterized in that, the average surface roughness of described slide bar (11) is less than 0.8 micron, and the average surface roughness of through hole (10) is less than 1.6 microns.
4. device as claimed in claim 1, is characterized in that, the each parts of described laser beam automatic shift control device are all made with stainless steel.
5. device as claimed in claim 1, is characterized in that, described laser beam automatic shift control device is placed on support or guide rail, this device horizontal positioned or be placed on support or guide rail with any angle of inclination.
6. the method for operating of installing described in any one in claim 1-5, is characterized in that, the method comprises the following steps:
A. according to concrete light path, hand rotation alignment pin (16) and lens clamp (17), determine the orientation of lens (19);
B. according to target size and optical path distance, adjustment slide block (9) is fixed on the position of stopper slot (7), selectes shift range, and selects transposition frequency by motor power;
C. open motor (2), the rotation of output shaft (5) is by each parts, and final drive lens (19) swings, and coordinates the rotation of target, realize the Uniform Scanning of laser beam to the each region of target, realize the uniform deposition of large area film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210580850.4A CN103898451B (en) | 2012-12-27 | 2012-12-27 | A kind of laser beam automatic shift control device and method of operating |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210580850.4A CN103898451B (en) | 2012-12-27 | 2012-12-27 | A kind of laser beam automatic shift control device and method of operating |
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| CN103898451A CN103898451A (en) | 2014-07-02 |
| CN103898451B true CN103898451B (en) | 2016-05-18 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104773957B (en) * | 2015-04-07 | 2018-07-06 | 中国原子能科学研究院 | A kind of glass for adulterating gold nano grain and preparation method thereof and Gold Films Irradiated by Femtosecond Laser system |
| CN108179386B (en) * | 2017-12-27 | 2020-04-17 | 上海超导科技股份有限公司 | Pulse laser coating device |
| CN114413767B (en) * | 2022-01-24 | 2023-06-13 | 中国工程物理研究院机械制造工艺研究所 | Precise rotary positioning and adjusting device for laser transmission |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101751947A (en) * | 2008-12-15 | 2010-06-23 | 三星电子株式会社 | Optical pickup actuator and optical recording/reproducing apparatus having the same |
| CN203034086U (en) * | 2012-12-27 | 2013-07-03 | 北京有色金属研究总院 | Laser beam automatic shifting control device |
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- 2012-12-27 CN CN201210580850.4A patent/CN103898451B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101751947A (en) * | 2008-12-15 | 2010-06-23 | 三星电子株式会社 | Optical pickup actuator and optical recording/reproducing apparatus having the same |
| CN203034086U (en) * | 2012-12-27 | 2013-07-03 | 北京有色金属研究总院 | Laser beam automatic shifting control device |
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Effective date of registration: 20190626 Address after: 101407 No. 11 Xingke East Street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Research Institute of engineering and Technology Co., Ltd. Address before: No. 2, Xinjie street, Xicheng District, Beijing, Beijing Patentee before: General Research Institute for Nonferrous Metals |
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