The hole forming method of sheet material
Technical field
The present invention relates to a kind of processing method that on the sheet material that forms by fragile materials such as ceramic substrate, silicon substrate, glass substrate, wears circular port.
Background technology
As the processing method that wears circular port on fragile materials such as ceramic substrate, silicon substrate, glass substrate, core drills such as use spark are well-known in the method for boring a hole from sheet material one side.
Yet,, on the periphery in hole, produce breach or crackle easily if use core drill to wear out through hole always from sheet material one surface.
Thereby, proposed various about using first core drill from not wearing out recess from sheet material one side surface with connecting, using second core drill from the concentric method that wears out through hole opposite to each other of the sheet material another side and first core drill.
For example the spy opens the 2000-158395 communique and has introduced a kind of method, and promptly under forming on the lower surface of sheet material behind the hole, hole and it is communicated with following hole from the top formation at this moment, is arranged on the hole and the hole is communicated with when the formation countersinking with the wide diameter portion on the brill; But,, might on interconnecting part, crack when drilling through down the hole in last hole, or because of the eccentric stage portion that produces.
Often occur when wearing circular port on the various friable plate materials of such problem in building field and automotive field, in high speed rotating and bear on the disk-shaped substrate of vibration, from viewpoint of reliability, pursue a kind of dimensional accuracy height, do not produce the hole forming method of breach, crackle around in the hole.
Patent documentation 1 spy opens the 2000-158395 communique
Summary of the invention
The object of the present invention is to provide a kind ofly when on sheet material, wearing circular port, around circular hole, be difficult to produce the method for punching of breach, crackle and highly productive.
The processing method in hole of the present invention is a kind of processing method that wears circular hole on sheet material, it is characterized in that, comprise: the operation that forms first recess, it uses first core drill to form first recess on a surface of sheet material, and described first core drill has cylindric blank part, has from the periphery of the leading section tapering towards the leading section undergauge at outer circumferential side in interior all sides; Wear the operation of through hole, it uses second core drill to wear with concentric the perforation opposite to each other of first core drill from another surface of sheet material, wherein, this second core drill is cylindric, has blank part in the inboard, the outside dimension of this second core drill is bigger than the internal diameter of first core drill, and littler than the diameter of the surface edges portion of first recess that forms in the above-mentioned operation, the internal diameter size of this second core drill is littler than the internal diameter of first core drill.
At this moment, to form the main effect of first recess be the periphery that forms first recess by this tapering to first core drill that uses leading section to have the tapering.
The processing method in hole of the present invention is a kind of processing method that wears circular hole on sheet material, it is characterized in that, comprise: form the operation of first recess, its use has bit head cylindraceous and forms first recess that is made of the circular trough and the conical surface at the periphery of this bit head first core drill towards the tapering of rear end side hole enlargement on a surface of sheet material; Wear the operation of through hole, it uses second core drill to wear with concentric the perforation opposite to each other of first core drill from another surface of sheet material, wherein, described second core drill the rearward end of bit head cylindraceous have with the leading section rightabout on the tapering of hole enlargement, the outside dimension of the bit head of this second core drill is littler than the diameter of the surface edges of the conical surface of first recess that forms in above-mentioned operation, the external diameter of the bit head of ratio first core drill is big, and the bit head internal diameter is littler than the internal diameter of first core drill simultaneously.
At this moment, form the periphery of first recess by the tapering of first core drill.
In the present invention, because first core drill is provided with the tapering, wear by this tapering and to form first recess, thereby in the surface edges portion of the recess of sheet material, formed the conical surface with chamfering, thereby using second core drill when another side wears through hole, the front end of second core drill is communicated with this conical surface, thereby is difficult to produce breach or crackle around the hole.
Description of drawings
Fig. 1 represents first embodiment of hole forming method of the present invention;
Fig. 2 represents second embodiment of hole forming method of the present invention.
Symbol description
The specific embodiment
As the example of hole forming method of the present invention, hereinafter will be with reference to the accompanying drawings to being applicable to that the example as the glass substrate of disk describes.
Fig. 1 represents the cutaway view of the perforated portion of glass substrate 1, schematically shows the outward appearance of first core drill 2 and second core drill 3.
First core drill 2 has from periphery towards the tapering of front end undergauge 2a at leading section, has blank part 2b cylindraceous in interior all sides.
On the inner peripheral surface of tapering 2a, leading section and the blank part 2b of first core drill 2, be formed with the abrasive grain layer of diamond particles etc.
Shown in Fig. 1 (a), as first operation, first core drill 2 is advanced from a surface (lower surface) rotation of glass substrate 1, wear out the first recess 1a littler than the thickness of glass substrate 1.
First recess is and the corresponding shape of the shape of first core drill 2, utilizes the tapering 2a of first core drill 2, processes conical surface a on the periphery of the first recess 1a.
And the diameter of the glass substrate surface edge b of the conical surface is relevant with the drilling depth of first core drill.
Second operation uses second core drill 3 to bore a hole from another surface (upper surface) of glass substrate 1 shown in Fig. 1 (b).
Second core drill 3 is cylindric drill bits that the inboard has blank part 3a, has abrasive grain layer at leading section and interior peripheral part.
The tapering 2a rear end side outside diameter d 5 of outside diameter d 2 to the first core drills 2 of second core drill 3 is little, and, littler than the diameter d 1 of the glass substrate surface edge b of the first recess 1a that forms in first operation.
And the inner diameter d 3 of outside diameter d 2 to the first core drills 2 of best second core drill 3 is big, and the inner diameter d 3 of inner diameter d 4 to the first core drills 2 of second core drill 3 is little.
When second core drill 3 is bored a hole and after the hole connects, shape shown in Fig. 1 (c) then occurred.
At this moment, bigger because the outside diameter d 2 of second core drill 3 is littler than d1 than inner diameter d 3, thereby, then be difficult to produce breach, crackle in conical surface a connection.
In addition,, core drill is moved up and down, glass substrate is moved up and down as Ginding process.
Fig. 2 represents second embodiment.
First core drill 12 have bit head 12b cylindraceous and in the periphery of this bit head 12b towards the tapering of rear end hole enlargement 12a.
(12a 12b) and on the inner peripheral surface of blank part 12c has abrasive grain layer to first core drill 12 at leading section, outer peripheral face.
Shown in Fig. 2 (a),, wear the first recess 11a from the lower surface of glass substrate 1 by first core drill 12 as first operation.
The first recess 11a has by the formed circular trough of bit head 12b and by the formed conical surface a of tapering 12a.
Shown in Fig. 2 (b),, bore a hole from the upper surface of glass substrate 1 then by second core drill 13 as second operation.
Second core drill 13 the rearward end of bit head 13a have with the leading section rightabout on the tapering 13b of hole enlargement.
Outside diameter d 12 ratios of second core drill 13 are little by the diameter d 11 of the surface edges b of the conical surface a of the formed first recess 11a of first core drill.
And, if the inner diameter d 13 of outside diameter d 12 to the first core drills of second core drill 13 is big, the outside diameter d 17 that then need not certain bit head 12b than first core drill is big, still when d12 is bigger than d17, then shown in Fig. 2 (c), on the inner peripheral surface in hole, can not produce the step-like of connection.
Under situation embodiment illustrated in fig. 2, on the two sides of the lower surface of glass substrate and upper surface, all be formed with chamfered section.