JP5144909B2 - Hole drilling method for plate - Google Patents

Hole drilling method for plate Download PDF

Info

Publication number
JP5144909B2
JP5144909B2 JP2006220521A JP2006220521A JP5144909B2 JP 5144909 B2 JP5144909 B2 JP 5144909B2 JP 2006220521 A JP2006220521 A JP 2006220521A JP 2006220521 A JP2006220521 A JP 2006220521A JP 5144909 B2 JP5144909 B2 JP 5144909B2
Authority
JP
Japan
Prior art keywords
drill
core drill
diameter
core
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2006220521A
Other languages
Japanese (ja)
Other versions
JP2008044178A (en
Inventor
剛 蓮野
Original Assignee
剛 蓮野
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 剛 蓮野 filed Critical 剛 蓮野
Priority to JP2006220521A priority Critical patent/JP5144909B2/en
Priority to TW096108909A priority patent/TWI329055B/en
Priority to KR1020070026700A priority patent/KR100845656B1/en
Priority to CN2007100894042A priority patent/CN101121285B/en
Publication of JP2008044178A publication Critical patent/JP2008044178A/en
Application granted granted Critical
Publication of JP5144909B2 publication Critical patent/JP5144909B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F1/00—Perforating; Punching; Cutting-out; Stamping-out; Apparatus therefor
    • B26F1/16—Perforating by tool or tools of the drill type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F2210/00—Perforating, punching, cutting-out, stamping-out, severing by means other than cutting of specific products
    • B26F2210/08—Perforating, punching, cutting-out, stamping-out, severing by means other than cutting of specific products of ceramic green sheets, printed circuit boards and the like

Description

本発明は、セラミックス基板、シリコン基板、ガラス基板等の脆性材料からなる板材に円形状の孔を穿設する加工方法に関する。   The present invention relates to a processing method for drilling circular holes in a plate made of a brittle material such as a ceramic substrate, a silicon substrate, or a glass substrate.

セラミックス基板、シリコン基板、ガラス基板等の脆性材料に円形の孔を穿設する方法としてダイヤモンドドリル等のコアドリルを用いて板材の片面から穿孔する方法が公知である。
しかし、板材の片面からコアドリルを用いて一気に貫通孔を穿設すると孔の周辺にカケや割れが発生しやすい。
そこで、板材の一の面から第１のコアドリルを用いて貫通しない凹部を穿設し、他の面から第２のコアドリルを用いて第１のコアドリルと同心対向して貫通孔を穿設する方法が各種提案されている。
例えば特開２０００−１５８３９５号公報には板材の下面に下穴を形成したのちに、上面から上穴を形成し連通させる際に上穴用のドリルに設けた拡径部が皿座ぐりしているときに穴が連通するように設定した加工方法を開示するが、上穴用ドリルが下穴に連通する際に連通部に割れが生じたり、心ずれによる段差部が生じる恐れがあった。
このような課題は、住宅分野や自動車分野における各種脆性板材に円形の孔を穿設する際にも共通するが、高速回転し、振動を受けるディスク基板においては、信頼性の観点から、さらに寸法精度が高く、孔周囲にカケ、割れが発生しない加工方法が求められている。 As a method of drilling a circular hole in a brittle material such as a ceramic substrate, a silicon substrate, or a glass substrate, a method of drilling from one side of a plate material using a core drill such as a diamond drill is known.
However, if a through-hole is drilled from one side of the plate material at once using a core drill, chipping and cracking are likely to occur around the hole.
Therefore, a method of drilling a recess not penetrating from one surface of the plate material using the first core drill and drilling a through hole concentrically facing the first core drill from the other surface using the second core drill. Various proposals have been made.
For example, in Japanese Patent Laid-Open No. 2000-158395, after forming a pilot hole on the lower surface of a plate material, when the upper hole is formed and communicated from the upper surface, the enlarged portion provided on the drill for the upper hole is countersunk. However, when the upper hole drill communicates with the lower hole, a crack may occur in the communication portion or a step portion due to misalignment may occur.
Such a problem is common when drilling circular holes in various brittle plate materials in the housing and automobile fields. However, disk substrates that rotate at high speed and receive vibrations are further dimensioned from the viewpoint of reliability. There is a need for a processing method that is highly accurate and does not cause chipping or cracking around the hole.

特開２０００−１５８３９５号公報JP 2000-158395 A

本発明は、板材に円形の孔を穿設する場合に円孔の周囲にカケ、割れ等が発生しにくく、生産性に優れた穿孔方法の提供を目的とする。   An object of the present invention is to provide a drilling method that is less prone to chipping, cracking, and the like around a circular hole when a circular hole is drilled in a plate material, and is excellent in productivity.

請求項１記載に係る穴加工方法は、板材に円孔を穿設する加工方法であって、先端部の外周が先端部に向けて縮径したテーパー部を有し、内周側に円筒状の空洞部を有する第１のコアドリルを用いて板材の一の面に第１の凹部を形成する工程と、内側に空洞部を有する円筒状の第２のコアドリルであって、当該第２のコアドリルは外径寸法が前記工程で形成した第１の凹部の表面縁部の径より小さいが、前記第１のコアドリルのテーパー部の先端外径よりも大きく設定してあるとともに、当該第２のコアドリルの内径は前記第１のコアドリルの空洞部の内径より小さく設定してあり、当該第２のコアドリルを用いて板材の他の面から前記第１のコアドリルと同心対向して貫通孔を穿設する工程と、を有することを特徴とする。
ここで、先端部にテーパー部を有する第１のコアドリルで第１の凹部を形成するとは、テーパー部で第１の凹部の外周を形成する趣旨である。 The hole drilling method according to claim 1 is a drilling method in which a circular hole is drilled in a plate material, and the outer periphery of the tip portion has a tapered portion whose diameter is reduced toward the tip portion, and is cylindrical on the inner periphery side. A step of forming a first recess on one surface of a plate using a first core drill having a hollow portion, and a cylindrical second core drill having a hollow portion on the inside, the second core drill The outer diameter is smaller than the diameter of the surface edge of the first recess formed in the step, but is set to be larger than the outer diameter of the tip of the tapered portion of the first core drill. The inner diameter of the first core drill is set to be smaller than the inner diameter of the hollow portion of the first core drill, and a through-hole is formed concentrically facing the first core drill from the other surface of the plate using the second core drill. And a process.
Here, forming the first concave portion with the first core drill having the tapered portion at the distal end portion is intended to form the outer periphery of the first concave portion with the tapered portion.

請求項２記載に係る穴加工方法は、板材に円孔を穿設する加工方法であって、円筒状のドリル部と当該ドリル部の外周に後端側に向けて拡径したテーパー部を有する第１のコアドリルを用いて板材の一の面に円形溝とテーパー面からなる第１の凹部を形成する工程と、円筒状のドリル部と当該ドリル部の後端部に先端部とは逆方向に拡径したテーパー部を有する第２のコアドリルであって、当該第２のコアドリルはドリル部の外径寸法が前記工程で形成した第１の凹部のテーパー面の表面縁部の径より小さいが前記第１のコアドリルの円筒状のドリル部外径より大きく設定してあるととともに当該第２のコアドリルのドリル部の内径は前記第１のコアドリルの円筒状のドリル部の内径より小さく設定してあり、当該第２のコアドリルを用いて板材の他の面から前記第１のコアドリルと同心対向して貫通孔を穿設する工程と、を有することを特徴とする。
この場合も、第１のコアドリルのテーパー部で第１の凹部の外周を形成することになる。 The hole processing method according to claim 2 is a processing method of drilling a circular hole in a plate material, and has a cylindrical drill portion and a tapered portion whose diameter is increased toward the rear end side on the outer periphery of the drill portion. The first core drill is used to form a first recess comprising a circular groove and a tapered surface on one surface of the plate material, and the cylindrical drill portion and the rear end portion of the drill portion are in the direction opposite to the tip portion. A second core drill having a tapered portion whose diameter is increased to a diameter of the first core drill, the outer diameter of the drill portion being smaller than the diameter of the surface edge portion of the tapered surface of the first recess formed in the step. The outer diameter of the cylindrical drill portion of the first core drill is set larger than that of the first core drill, and the inner diameter of the drill portion of the second core drill is set smaller than the inner diameter of the cylindrical drill portion of the first core drill. There, by using the second core drill A step of drilling the other from said surface of the first core drill concentric opposite to the through hole of the timber, and having a.
Also in this case, the outer periphery of the first recess is formed by the tapered portion of the first core drill.

本発明においては、第１のコアドリルにテーパー部を設け、第１の凹部をこのテーパー部で形成するように穿設するので板材の凹部の表面縁部に面取りを兼ねたテーパー面が形成されるために、第２のコアドリルを用いて他の面から貫通孔を穿設する際に第２のコアドリルの先端はこのテーパー面で連通することになり、孔周囲にカケや割れが生じにくい。   In the present invention, the first core drill is provided with a tapered portion, and the first concave portion is formed so as to be formed by this tapered portion, so that a tapered surface that also serves as chamfering is formed at the surface edge portion of the concave portion of the plate material. Therefore, when the second core drill is used to drill a through hole from another surface, the tip of the second core drill communicates with this tapered surface, and it is difficult for cracks and cracks to occur around the hole.

本発明に係る穴加工方法の例として磁気ディスクに用いるガラス基板に適用した例を以下、図面に基づいて説明する。
図１にガラス基板１の穿孔部の断面図を示し、第１のコアドリル２及び第２のコアドリル３の外観を模式的に示す。
第１のコアドリル２は先端部に先端に向けて外周が縮径したテーパー部２ａを有し、内周側には円筒状の空洞部２ｂを有している。
第１のコアドリル２のテーパー部２ａ、先端部及び空洞部２ｂの内周面にはダイヤモンド粒子等の砥粒層を形成してある。
図１の（ａ）に示すように、第１の工程として、ガラス基板１の一の面（下面）から第１のコアドリル２を回転前進させ、ガラス基板１の厚みより浅い第１の凹部１ａを穿設する。
第１の凹部は第１のコアドリル２の形状を転写した形状になり、第１のコアドリルのテーパー部２ａによって第１の凹部１ａ外周にテーパー面ａが穿設される。
なお、テーパー面のガラス基板表面縁ｂの径は第１のコアドリルの穿孔深さによる。 An example applied to a glass substrate used for a magnetic disk as an example of the hole drilling method according to the present invention will be described below with reference to the drawings.
FIG. 1 shows a cross-sectional view of a perforated portion of the glass substrate 1 and schematically shows the appearance of the first core drill 2 and the second core drill 3.
The first core drill 2 has a tapered portion 2a whose outer periphery is reduced in diameter toward the distal end, and a cylindrical cavity 2b on the inner peripheral side.
Abrasive grain layers such as diamond particles are formed on the inner peripheral surfaces of the tapered portion 2a, the tip portion, and the cavity portion 2b of the first core drill 2.
As shown in FIG. 1A, as a first step, the first core drill 2 is rotated forward from one surface (lower surface) of the glass substrate 1, and the first recess 1a shallower than the thickness of the glass substrate 1 is obtained. To drill.
The first concave portion has a shape obtained by transferring the shape of the first core drill 2, and a tapered surface a is formed on the outer periphery of the first concave portion 1a by the tapered portion 2a of the first core drill.
The diameter of the glass substrate surface edge b of the tapered surface depends on the drilling depth of the first core drill.

第２の工程は図１（ｂ）に示すようにガラス基板１の他の面（上面）から第２のコアドリル３を用いて穿孔する。
第２のコアドリル３は、内側に空洞部３ａを有する円筒状のドリルであって、先端部及び内外周部に砥粒層を有している。
第２のコアドリル３の外径ｄ２は第１のコアドリルのテーパー部２ａの後端側外径ｄ５より小さく、かつ第１の工程で形成した第１の凹部１ａのガラス基板表面縁ｂの径ｄ１よりも小さい。
また、第２のコアドリル３の外径ｄ２は第１のコアドリル２の内径ｄ３よりも大きく、第２のコアドリル３の内径ｄ４は第１のコアドリル２の内径ｄ３より小さい方が好ましい。
第２のコアドリル３が穿孔し、孔が貫通すると図１（ｃ）に示すような形状になる。
この場合に第２のコアドリルの外径ｄ２がｄ１より小さく、ｄ３よりも大きいのでテーパー面ａで連通することになり、カケや割れが生じにくい。
なお、研削方法としてはコアドリルが上下動してもガラス基板が上下動してもよい。 In the second step, a second core drill 3 is used to drill from the other surface (upper surface) of the glass substrate 1 as shown in FIG.
The 2nd core drill 3 is a cylindrical drill which has the cavity part 3a inside, Comprising: It has an abrasive grain layer in a front-end | tip part and an inner peripheral part.
The outer diameter d 2 of the second core drill 3 of the glass substrate surface edge b of the first recess 1a formed in the first smaller than the rear end side outer diameter d 5 of the tapered portion 2a of the core drill, and a first step smaller than the diameter d 1.
Further, the outer diameter d 2 of the second core drill 3 larger than the first inner diameter d 3 of the core drill 2, the inner diameter d 4 of the second core drill 3 is smaller than the first inner diameter d 3 of the core drill 2 preferred .
When the second core drill 3 is drilled and the hole penetrates, the shape becomes as shown in FIG.
In this case, since the outer diameter d 2 of the second core drill is smaller than d 1 and larger than d 3 , the second core drill communicates with the tapered surface a and is less likely to cause chipping or cracking.
In addition, as a grinding method, even if a core drill moves up and down, a glass substrate may move up and down.

第２の実施例を図２に示す。
第１のコアドリル１２は円筒状のドリル部１２ｂとこのドリル部１２ｂの外周に後端側に向けて拡径したテーパー部１２ａを有している。
第１のコアドリル１２は先端部、外周面（１２ａ，１２ｂ）及び空洞部１２ｃの内周面に砥粒層を有している。
図２（ａ）に示すように第１の工程として、ガラス基板１の下面から第１のコアドリル１２にて第１の凹部１１ａを穿設する。
第１の凹部１１ａは、ドリル部１２ｂで形成した円形溝とテーパー部１２ａで形成したテーパー面ａを有している。
次に第２の工程として、図２（ｂ）に示すようにガラス基板１の上面から第２のコアドリル１３にて穿孔する。
第２のコアドリル１３はドリル部１３ａの後端部に先端部とは逆方向に拡径したテーパー部１３ｂを有している。
第２のコアドリル１３の外径ｄ１２は、第１のコアドリルで形成した第１の凹部１１ａのテーパー面ａの表面縁ｂの径ｄ１１よりも小さい。
また、第２のコアドリル１３の外径ｄ１２は第１のコアドリル内径ｄ１３よりも大きければ第１のコアドリルのドリル部１２ｂの外径ｄ１７より必ずしも大きい必要はないがｄ１２がｄ１７より大きい場合には図２（ｃ）に示すように孔の内周面に連通段差が生じることはない。
図２に示した実施例の場合にはガラス基板の下面及び上面の両面に面取り部が形成される。 A second embodiment is shown in FIG.
The first core drill 12 has a cylindrical drill portion 12b and a tapered portion 12a whose diameter is increased toward the rear end on the outer periphery of the drill portion 12b.
The 1st core drill 12 has an abrasive grain layer in the front-end | tip part, an outer peripheral surface (12a, 12b), and the internal peripheral surface of the cavity part 12c.
As shown in FIG. 2A, as the first step, the first recess 11 a is drilled from the lower surface of the glass substrate 1 with the first core drill 12.
The 1st recessed part 11a has the taper surface a formed with the circular groove | channel formed with the drill part 12b, and the taper part 12a.
Next, as a second step, a second core drill 13 is used to drill from the upper surface of the glass substrate 1 as shown in FIG.
The 2nd core drill 13 has the taper part 13b expanded in the reverse direction to the front-end | tip part at the rear-end part of the drill part 13a.
The outer diameter d 12 of the second core drill 13 is smaller than the diameter d 11 of the surface edges b of the tapered surface a first recess 11a formed in the first core drill.
Further, from the outer diameter d 12 is the first core drill inner diameter is not necessarily great need than the outer diameter d 17 of the first core drill of the drill portion 12b is larger than d 13 d 12 is d 17 of the second core drill 13 If it is large, there will be no communication step on the inner peripheral surface of the hole as shown in FIG.
In the case of the embodiment shown in FIG. 2, chamfered portions are formed on both the lower surface and the upper surface of the glass substrate.

本発明に係る穴加工方法の第１の実施例を示す。1 shows a first embodiment of a hole drilling method according to the present invention. 本発明に係る穴加工方法の第２の実施例を示す。2 shows a second embodiment of the hole drilling method according to the present invention.

符号の説明Explanation of symbols

１ ガラス基板
１ａ 第１の凹部
１ｂ 穿孔
２ 第１のコアドリル
３ 第２のコアドリル DESCRIPTION OF SYMBOLS 1 Glass substrate 1a 1st recessed part 1b Drilling 2 1st core drill 3 2nd core drill

Claims (2)

板材に円孔を穿設する加工方法であって、
先端部の外周が先端部に向けて縮径したテーパー部を有し、内周側に円筒状の空洞部を有する第１のコアドリルを用いて板材の一の面に第１の凹部を形成する工程と、
内側に空洞部を有する円筒状の第２のコアドリルであって、当該第２のコアドリルは外径寸法が前記工程で形成した第１の凹部の表面縁部の径より小さいが、前記第１のコアドリルのテーパー部の先端外径よりも大きく設定してあるとともに、当該第２のコアドリルの内径は前記第１のコアドリルの空洞部の内径より小さく設定してあり、
当該第２のコアドリルを用いて板材の他の面から前記第１のコアドリルと同心対向して貫通孔を穿設する工程と、
を有することを特徴とする板材の穴加工方法。 A processing method for drilling a circular hole in a plate material,
The first concave portion is formed on one surface of the plate using a first core drill having a tapered portion whose outer periphery of the distal end portion is reduced in diameter toward the distal end portion and having a cylindrical hollow portion on the inner peripheral side. Process,
A cylindrical second core drill having a hollow portion inside, wherein the second core drill has an outer diameter smaller than the diameter of the surface edge of the first recess formed in the step . The inner diameter of the second core drill is set to be smaller than the inner diameter of the hollow portion of the first core drill,
Forming a through hole concentrically facing the first core drill from the other surface of the plate using the second core drill;
A method of drilling a plate material, comprising: 板材に円孔を穿設する加工方法であって、
円筒状のドリル部と当該ドリル部の外周に後端側に向けて拡径したテーパー部を有する第１のコアドリルを用いて板材の一の面に円形溝とテーパー面からなる第１の凹部を形成する工程と、
円筒状のドリル部と当該ドリル部の後端部に先端部とは逆方向に拡径したテーパー部を有する第２のコアドリルであって、当該第２のコアドリルはドリル部の外径寸法が前記工程で形成した第１の凹部のテーパー面の表面縁部の径より小さいが前記第１のコアドリルの円筒状のドリル部外径より大きく設定してあるととともに当該第２のコアドリルのドリル部の内径は前記第１のコアドリルの円筒状のドリル部の内径より小さく設定してあり、
当該第２のコアドリルを用いて板材の他の面から前記第１のコアドリルと同心対向して貫通孔を穿設する工程と、
を有することを特徴とする板材の穴加工方法。 A processing method for drilling a circular hole in a plate material,
A first recess having a circular groove and a tapered surface is formed on one surface of a plate using a cylindrical drill portion and a first core drill having a tapered portion whose diameter is increased toward the rear end on the outer periphery of the drill portion. Forming, and
The second core drill has a cylindrical drill portion and a tapered portion whose diameter is increased in the opposite direction to the tip portion at the rear end portion of the drill portion, and the second core drill has an outer diameter dimension of the drill portion described above. It is smaller than the diameter of the surface edge of the tapered surface of the first recess formed in the process, but larger than the outer diameter of the cylindrical drill portion of the first core drill, and the drill portion of the second core drill The inner diameter is set smaller than the inner diameter of the cylindrical drill portion of the first core drill,
Forming a through hole concentrically facing the first core drill from the other surface of the plate using the second core drill;
A method of drilling a plate material, comprising:
JP2006220521A 2006-08-11 2006-08-11 Hole drilling method for plate Active JP5144909B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006220521A JP5144909B2 (en) 2006-08-11 2006-08-11 Hole drilling method for plate
TW096108909A TWI329055B (en) 2006-08-11 2007-03-15 Boring method for board material
KR1020070026700A KR100845656B1 (en) 2006-08-11 2007-03-19 Hole drilling method for plate material
CN2007100894042A CN101121285B (en) 2006-08-11 2007-03-21 Method for processing hole of plate material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006220521A JP5144909B2 (en) 2006-08-11 2006-08-11 Hole drilling method for plate

Publications (2)

Publication Number Publication Date
JP2008044178A JP2008044178A (en) 2008-02-28
JP5144909B2 true JP5144909B2 (en) 2013-02-13

Family

ID=39083881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006220521A Active JP5144909B2 (en) 2006-08-11 2006-08-11 Hole drilling method for plate

Country Status (4)

Country Link
JP (1) JP5144909B2 (en)
KR (1) KR100845656B1 (en)
CN (1) CN101121285B (en)
TW (1) TWI329055B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100878113B1 (en) * 2008-10-17 2009-01-14 김동욱 Manufacturing method for car's steering part's input shaft and thereof product
CN102152408B (en) * 2010-12-13 2013-12-25 深圳顺络电子股份有限公司 Mold, device and method for punching chip component ceramic diaphragm
JP2015138952A (en) * 2014-01-24 2015-07-30 株式会社ディスコ Processing method
JP6379379B2 (en) * 2014-09-19 2018-08-29 住友電工焼結合金株式会社 Drilling method and parts with holes
WO2017165772A1 (en) 2016-03-24 2017-09-28 Corning Incorporated Laminated glass article with aperture formed therein and methods for forming the same
KR20200002793U (en) 2019-06-18 2020-12-29 이미옥 Cover coupling device of lighting fixture
KR102334372B1 (en) * 2020-11-10 2021-12-03 김다애 Hole punching device for heat insulation materials of different materials

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3138320B2 (en) * 1992-03-04 2001-02-26 旭硝子株式会社 Countersunk drilling machine for plate-shaped members
JPH079396A (en) * 1993-06-29 1995-01-13 Hideo Ikeda Rotary drilling tool
KR0177974B1 (en) * 1995-09-25 1999-02-18 윤종용 Drill machine of glass
JP4352437B2 (en) * 1998-12-01 2009-10-28 旭硝子株式会社 Drilling method for plate-like body
JP2003305693A (en) 2002-04-11 2003-10-28 Mitsui High Tec Inc Hole boring device
JP4272908B2 (en) * 2003-03-25 2009-06-03 中島硝子工業株式会社 Glass plate drilling method and DPG construction glass plate
CN1227100C (en) * 2003-06-26 2005-11-16 雷特国际股份有限公司 Method for drilling hole on plate material
JP2005246818A (en) * 2004-03-05 2005-09-15 Okamoto Glass Co Ltd Method and apparatus for boring brittle material

Also Published As

Publication number Publication date
CN101121285B (en) 2011-09-28
TW200808503A (en) 2008-02-16
CN101121285A (en) 2008-02-13
KR100845656B1 (en) 2008-07-10
KR20080014585A (en) 2008-02-14
TWI329055B (en) 2010-08-21
JP2008044178A (en) 2008-02-28

Similar Documents

Publication Publication Date Title
JP5144909B2 (en) Hole drilling method for plate
JP4079152B2 (en) How to make a donut glass substrate
KR101332242B1 (en) Method for scribing brittle material substrate
JP2008302435A (en) Cutting blade and blade manufacturing method
JPWO2018061408A1 (en) Cutting tools
US7374472B2 (en) Method for manufacturing decorative stone
JP2007152440A (en) Method for machining hard and brittle material
JP2007005520A (en) Chamfering method and cutting method of rectangular flat plate
JP5310005B2 (en) Substrate division method
KR101077840B1 (en) Method for forming a through hole in a substrate made of brittle material
KR102234880B1 (en) Shaft support bearing with reduced friction
JP2003260611A (en) Method for drilling inclined hole
JP2011111370A (en) Apparatus and method for manufacturing glass plate
JP6091108B2 (en) Silicon tube manufacturing method
JP2003080410A (en) Hole machining method of plate type member and plate type member on which hole is machined under this method
JPH071218Y2 (en) Core drill
US11673385B2 (en) Method for machining synthetic quartz glass substrate
JP2005246818A (en) Method and apparatus for boring brittle material
JP2003225818A (en) Core drill
JP2002018623A (en) Cutting tool with level difference
JPH11149669A (en) Simultaneously grinding method for inside diameter and outside diameter of substrate for recording medium
JP2006231488A (en) Supersonic processing tool for boring work
KR101287785B1 (en) Scribing wheel
JP2003311734A (en) Manufacturing method for ceramic part
TWM459933U (en) Ultra-micro drill bit

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090706

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110725

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110801

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110922

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120321

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20121119

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20121126

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151130

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 5144909

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250