CN101118150A - Ultrashort baseline extensometer - Google Patents
Ultrashort baseline extensometer Download PDFInfo
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- CN101118150A CN101118150A CNA2007100530690A CN200710053069A CN101118150A CN 101118150 A CN101118150 A CN 101118150A CN A2007100530690 A CNA2007100530690 A CN A2007100530690A CN 200710053069 A CN200710053069 A CN 200710053069A CN 101118150 A CN101118150 A CN 101118150A
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Abstract
The present invention discloses an ultra short baseline extensometer, which relates to an extensometer. The present invention has the structure that one end of a baseline bar (130) is connected with a displacement sensor (110), which is connected with a first base rock (310) through a nulling device (120); the other end of the baseline bar (130) is connected with a calibrater (150) and then connected with a second base rock (320) through a fixed end (160); the displacement sensor (110) is respectively connected with a measurement and control system (200) through the calibrater (150); the displacement sensor (110) is a differential capacitance sensor (211) with an entire seal structure. The baseline of the present invention is not more than 100 cm, the resolving ability is superior to 1 is multiplied by 10 and then minus 10, the mechanical drive does not exist, the calibration is reliable; the extensometer can be arranged vertically; the volume is small, thus the extensometer is suitable for carrying, and adaptable to the flow of the forerunning effect of earthquake and the emergency monitoring; and the extensometer can be generalized to be used on a long baseline extensometer and other micro-displacement measuring devices.
Description
Technical Field
The invention relates to a telescopic instrument, in particular to an ultra-short baseline telescopic instrument.
Background
The extensometer is an instrument for precisely measuring the relative change of the distance between two points of the crustal rock mass, and has important functions in observing crustal strain and solid tide and researching the earthquake inoculation process. Through decades of observation by using a stretching instrument in China, a large amount of valuable data and typical earthquake cases are accumulated for earthquake prediction analysis: for example, in 1992, in 22.4-22-day Burma 6.2 grade earthquake, 40mm step anomaly map appears in 28 days before earthquake in Panzhihuatai telescope in Sichuan, the step amount is 3 × 10 -8 (ii) a The abnormal form of the Sichuan Guzan terrace has sudden jump and turning, the abnormal time is from a few hours to 5 days, and the maximum time is 38 days. Therefore, the ground surface tide horizontal plane strain state has a certain relation with the earthquake.
Since 1935 an american seismologist benioov (h.benioff) developed the first valuable quartz extensometer, america, english, former soviet union, japan, proportion, de, and the like developed high-sensitivity extensometers in succession. The sensitivity of the instrument is generally 10 -8 Therefore, the solid tide can be clearly recorded. In the observation of the strain solid tide of the underground cave, a quartz tube or a carbon wire is mostly used as a base line, the length is generally more than 20m, and the relative observation precision is 10 -9 Magnitude.
Since the year 1966, the earthquake prediction industry began to start. In the early 70 s, the visual extensometer was successfully developed in China and used as a first-generation observation instrument in a plurality of stations, which lays a preliminary foundation for researching the relation between strain and earthquake in China, but the sensitivity and the long-term stability of the visual extensometer are not high. In 1983, the earthquake research institute of the Chinese earthquake administration successfully developed a second generation of extensometer, SSY-II type horizontal quartz extensometer, the sensitivity of which was 3 x 10 -9 The method can clearly record the solid tide, and makes a contribution to the international advance in the field in China. In 1998 in the period of 'nine five' in China, a novel cave body strain observation instrument, namely an SS-Y type extensometer, is successfully introduced again by the local earthquake research institute of China. The instrument shortens the length of a base line (less than 10 m) while keeping high precision and high stability, and thoroughly solves the problem of base lineThe problems of wire explosion and mercury leakage of the mercury calibration expansion box are solved, the automation and intelligentization degree is improved, and the international advanced level is reached.
However, the baseline of the existing telescopic instrument is longer (the shortest is about 5 m), the application range is limited, and the use in a small space (a shorter chamber) and in multiple directions (such as a vertical direction) cannot be met. China develops less vertical component strain observation and research, on one hand, because the cavity effect exists in the cave body, and more importantly, no good observation means exists. The development of the ultra-short baseline extensometer is beneficial to the development of multi-azimuth strain observation and research, the miniaturization is beneficial to the emergency and rapid arrangement of earthquake, the ultrashort baseline extensometer can also be arranged in underground rock stratum, the cost is much lower than that of excavation of the mountain cave, and the ultrashort baseline extensometer is not limited by terrain conditions.
At present, no report about a baseline extensometer with the length of not more than 1 meter exists at home and abroad. The resolution of strain observation is better than 1 × 10 -10 The base line is quartz (linear expansion coefficient 10) -7 ) Or indium steel (coefficient of linear expansion 2X 10) -7 ) The daily change of the temperature of the underground chamber installed by the instrument is not more than 0.03 ℃ to meet the requirement. However, the sensor adopts the current vortex displacement or differential transformer displacement sensor used by the existing extensometer, the resolution is not better than 0.001 μm, and the base line is not feasible when the base line is not more than 1m, so that a sensor with higher precision needs to be developed. The capacitance displacement sensor has high precision, the resolution can be better than 0.00001 μm, and the requirement of instrument observation sensitivity can be met. The capacitive sensor solution is feasible, but the moisture-proof problem must be solved. The extensometer of the capacitive sensor is developed by royal astronomical plateau long Bake doctor of the kingdom of Belgium in the last eighties, and the failure is caused because the moisture-proof problem is not solved.
The DZB type ultramicro calibration system is used in an SS-Y extensometer, but has poor load carrying capacity, is difficult to perform overall calibration (only sensor calibration) on the instrument and can only perform wide-range calibration (about 1000 times of solid tide), has a complex structure and higher cost, belongs to a mechanical transmission type calibrator, has larger self volume, is easy to cause mechanical failure due to friction, abrasion, corrosion and the like, and is usually required to be maintained. Therefore, it is necessary to develop a calibrator without mechanical transmission, small range (tidal range) and whole body (including baseline). The piezoelectric ceramic forms a precise controllable actuator, is a new technology developed in recent years, has the advantages of high displacement resolution, good linearity, small volume, light weight, no electromagnetic and oil pollution, no noise, no heat generation, easy control and no maintenance, and becomes a more ideal precise electrically driven actuator. Recently, a piezoelectric material based on a new principle is developed by japanese scientists, so that the electrostrictive effect of the piezoelectric material is improved by 40 times, and the piezoelectric material is equivalent to a giant magnetostrictive material, and the application of the piezoelectric material can greatly improve the performance of a micro-displacement actuator. The piezoelectric material is designed at the fixed end of the extensometer, so that the integral, precise and automatic calibration of the extensometer can be realized.
As shown in fig. 1, the conventional telescopic instrument comprises a body (100), a measurement and control system (200) and a surrounding bedrock (300);
the body (100) comprises a displacement sensor (110), a zero setting device (120), a baseline rod (130), a suspension system (140) consisting of a suspension wire (141) and a bracket (142), a calibrator (150) and a fixed end (160); the bedrock (300) includes a 1 st bedrock (310) and a 2 nd bedrock (320).
Disclosure of Invention
The present invention aims at overcoming the said demerits and shortcomings of available technology and providing one kind of ultrashort base line stretching instrument with short base line (not more than 100 cm) and high resolution (better than 1 × 10) -10 ) The ultrashort baseline extensometer has no mechanical transmission and reliable calibration; the vertical installation can be realized, which is beneficial to the development of the application range of the telescopic instrument and the development of multi-direction strain observation and hypertonicity; the volume is small, the portable earthquake early warning device is portable, and is suitable for the flow and emergency monitoring of earthquake precursors; and the method can be popularized and used in long baselines and other deformation instruments to improve the observation accuracy.
The key and difficulty of the invention is to develop a capacitance sensor with a full-sealing structure and a corresponding measuring system.
The purpose of the invention is realized as follows:
(1) Providing basic conditions
(1) Because the baseline is ultrashort, the existing eddy current displacement and differential transformer displacement sensors cannot be used, and a sensor with higher precision needs to be provided. When the base line is less than 100cm, the resolution of the instrument is better than 1 × 10 -10 The resolution of the displacement sensor is better than 0.0001 μm to meet the requirement of the observation sensitivity of the instrument. The invention adopts the capacitance sensor, the design resolution is better than 0.0001 μm, the requirement is higher, and the feasibility of the scheme is ensured. The theory that the royal kingdom astronomical platform van long beck doctor of Belgian fails to develop the extensometer of the capacitance sensor is combined, the key problem of good moisture resistance is solved, and the differential capacitance sensor with small resistance and a fully-closed structure is designed.
(2) A high-stability signal source and a related low-noise and high-precision phase-locked amplifier are provided, and the observation precision and the grid value stability of the instrument are improved.
(3) The positioning and adjusting device of the capacitive sensor and the mechanical structure of the instrument have good stability and are precise.
(4) The base line is made of materials with low expansion coefficient, such as indium steel, quartz and the like.
(5) The electrostriction material (piezoelectric ceramic) is provided to form a precise controllable actuator, the whole instrument is explored, and the mechanical transmission-free, reliable, precise and automatic calibration is realized.
(6) A full-digital automatic or remote control zero setting, calibration and data recording and processing system is developed.
(2) Key problems to be solved
(1) Sensitivity and stability problems after instrument miniaturization
When the instrument is miniaturized, a series of problems are brought, such as the reduction of the strain transmission amount, higher requirements on the structural stability and the like. The reduction of mechanical magnification and the improvement of instrument sensitivity by electronic magnification are also a trend in the development of precision measurement nowadays. The sensitivity improves the stability problem and is obvious, the mechanical displacement transmission stability can be ensured from materials, structures and installation, and the stability of an electronic system is improved by adopting a related receiving technology to design a measuring circuit, an aging process processing component and the like.
(2) How to solve the problems of good moisture resistance and interference resistance
The high-precision capacitive sensor can improve the sensitivity of the instrument. If the capacitance sensor is in open air, when the humidity changes, the capacitance medium changes, so that the sensor cannot work normally. In addition, the open capacitive sensor is easily interfered by external electromagnetic waves, so that the measurement precision of the instrument is influenced, and the instrument cannot work normally even if the open capacitive sensor is used, so that a full-sealing structure of the metal capacitive sensor needs to be designed, and the open capacitive sensor can be damp-proof and anti-interference. After the sensor adds the seal structure, resistance can be produced. However, since the strain transmission is a slow variation in rigidity, the influence of the ripple sealing structure is negligible in consideration of the reduction in resistance generation when designing the sensor.
(3) Solves the problems of coupling of the calibrator and improving the repeated precision of calibration
The whole calibration needs to be realized, the calibrator is arranged at the fixed end and is connected with the base line rod, and the calibration precision is influenced and the instrument stability is influenced if the connection is good or bad. The problem is solved by adopting a sleeve rigid connection. The problem of calibrating the repeated precision can be solved by selecting a piezoelectric ceramic material with good performance and designing a precise and stable control power supply.
Specifically, the invention is an improvement of the existing extensometer: its suspension system is omitted; the fixed end (160) is a double fixed end; the displacement sensor (110) is a differential capacitive sensor (111) of a fully sealed construction.
As shown in figure 2, the invention comprises a body (100), a measuring and controlling system (200) and also comprises three major parts of a peripheral environment bedrock (300);
the body (100) comprises a displacement sensor (110), a zero setting device (120), a baseline rod (130), a calibrator (150) and a fixed end (160);
the measurement and control system (200) comprises a capacitance displacement measurement system (210) and a data acquisition control system (220):
the bedrock (300) comprises a 1 st bedrock (310) and a 2 nd bedrock (320);
the position and connection relation is as follows:
one end of the baseline rod (130) is connected with the displacement sensor (110), and the displacement sensor (110) is connected with the 1 st bedrock (310) through the zero setting device (120); the other end of the baseline rod (130) is connected with the calibrator (150) and then is connected with the 2 nd bedrock (320) through the fixed end (160);
the displacement sensor (110) and the calibrator (150) are respectively connected with the measurement and control system (200);
the fixed end (160) is a double fixed end;
the displacement sensor (110) is a differential capacitance sensor (211) with a fully sealed structure;
the measurement and control system (200) is a system for measuring and controlling the displacement sensor (110) and the calibrator (150).
The working principle is as follows:
when the position of the sun, moon and earth changes, the earth's crust stress and solid tide changes, which are regular changes, are caused. Before an earthquake happens, the change of crustal stress is often caused, which is commonly called non-tidal change. The extensometer is an instrument for measuring the relative change of the distance (stress) between two points of the crustal rock mass, and provides data for researching the stress change rule in the earthquake inoculation process.
Micro-displacement is generated between two points of the bedrock (300), the micro-displacement is transmitted to a displacement sensor (110) through a base line rod (130), the displacement change is converted into the differential change of capacitance, an alternating current bridge formed by the sensor converts the capacity change into an alternating current voltage signal to be output, the signal is converted into an analog signal through phase-locked amplification, and one path of the signal can be directly recorded by an analog recorder through a low-pass filter; the other path is sent to an analog-to-digital conversion variable digital signal, and the digital signal is stored and transmitted by a single chip computer.
Wherein: l is the base length;
Δ L is the baseline variation;
ε is the amount of strain, i.e., the relative amount of change per unit length.
According to the regulations: compression is positive and extension is negative.
The invention has the following advantages and positive effects:
(1) the novel extensometer with the ultra-short baseline of not more than 1 meter is created for the first time, the limit and the cost of the installation environment are reduced, and the application range is widened;
(2) the device can be vertically installed to create conditions for multi-azimuth strain observation and research;
(3) the innovative integrated structure is convenient for earthquake flow and emergency monitoring;
(4) a high-precision capacitance sensor with a sealing structure (the precision is more than two orders of magnitude higher than that of the existing extensometer sensor, and the high-precision capacitance sensor can also be applied to other micro-displacement measurement);
(5) the integrated mechanical-transmission-free reliable integral calibrator can provide nanoscale calibration displacement of resolution step pitch, and has qualitative leap in control precision compared with the conventional mechanical-transmission calibrator.
Drawings
FIG. 1 is a schematic view of a prior art extensometer configuration;
FIG. 2 is a schematic structural view of the present invention;
FIG. 3 is a schematic (in cross-section) view of a capacitive sensor configuration;
FIG. 4 is a schematic block diagram of a capacitance displacement measurement system;
fig. 5 is a schematic block diagram of a data acquisition control system.
Wherein:
110-a displacement sensor;
111-metal outer drums; 112-front sealing film; 113-measuring rod;
114-leading pole plate; 115-moving pole plate; 116-rear fixed pole plate;
117-rear sealing film; 118-insulating fixed terminal.
120-zero setting device.
130-baseline pole.
140-a suspension system; 141-a suspension wire; 142-bracket.
150-calibrator.
160-fixed end.
200-measurement and control system;
210-a capacitance displacement measurement system;
211-differential capacitive sensor of full seal structure, abbreviated capacitive sensor;
212-an amplifier; 213-synchronous detector; 214-a low-pass filter;
215-oscillator; 216-a phase shifter; 217-analog recorder;
218-an analog-to-digital converter;
220-a data acquisition control system;
221-an analog-to-digital converter; 222-a motor drive amplifier;
223-calibrating a drive controller; 224-a single-chip computer; 225-a keyboard;
226-a display; 227-interface circuit.
300-bedrock; 310-bedrock 1; 320-2 nd bedrock.
Detailed Description
The following detailed description is made with reference to the accompanying drawings and examples:
1. overall structure
The installation is as per fig. 2. The invention not only maintains the existing structure, but also designs an innovative structure, omits a suspension system (140), is integrated and easy to install, and can also be vertically installed. The fixed end (160) is a double fixed end, which is beneficial to increasing the horizontal supporting force (vertical installation is not needed) of the base line rod (130). The sealing of the capacitance sensor (211) is different from the existing structure (when the existing suspension system structure is used, the sealing can be made of flexible materials such as rubber and the like), and a double-sided symmetrical differential pressure structure made of constant elastic materials (corrugated membranes, corrugated pipes and the like) is adopted, so that the change influence of air pressure is eliminated, the transmission of axial force is flexible, the stress transmission resistance is reduced, the radial direction is rigid, the capacitance sensor can support the baseline rod (130), and the suspension system (140) is replaced.
2. Related part
1. Base line pole (130)
The base rod (130) is made of a material with a low expansion coefficient (such as indium steel, quartz and the like) and is not more than 100cm.
2. Capacitance sensor (211)
As shown in fig. 3, the capacitive sensor (211) comprises a metal outer cylinder (111), a front sealing film (112), a measuring rod (113), a front fixed pole plate (114), a movable pole plate (115), a rear fixed pole plate (116), a rear sealing film (117) and an insulating fixed terminal (118);
the position and connection relation is as follows:
the front sealing film (112), the metal outer barrel (111) and the rear sealing film (117) are sequentially connected to form a closed container;
a measuring rod (113) is arranged on the central axis of the metal outer barrel (111), and the measuring rod (113) is sequentially connected with a front sealing film (112), a movable electrode plate (115) and a rear sealing film (117) and then connected with a base line rod (130) to play a role in transferring displacement;
a front fixed polar plate (114) and a rear fixed polar plate (116) are arranged in front of and behind the movable polar plate (115) to jointly form a differential capacitor, an alternating current bridge is formed by the differential capacitor and an external circuit, an oscillator provides a constant amplitude reference alternating current signal to the two fixed polar plates, and when displacement changes, a voltage signal is output; the front fixed pole plate (114) and the rear fixed pole plate (116) are fixed with the metal outer barrel (111) through 6 symmetrical insulating fixed terminals (118).
The front sealing film (112) and the rear sealing film (117) are made of metal corrugated films (circular) or metal corrugated pipes, and can play a role in damp-proof sealing to ensure the stability of media in the capacitive sensor (211); meanwhile, the front sealing film (112), the metal outer barrel (111) and the rear sealing film (117) are sequentially connected to form a closed container which can also play a role in electrostatic shielding; since the strain transmission is rigid, no resistance is generated to the strain transmission.
3. Capacitance displacement measuring system (210)
As shown in fig. 4, the capacitance displacement measurement system (210) includes a capacitance sensor (211), an amplifier (212), a synchronous detector (213), a low-pass filter (214), an oscillator (21), a phase shifter (216), an analog recorder (217), and an analog-to-digital converter (218);
the connection relation is as follows:
the oscillator (21) is connected with the capacitance sensor (211);
the oscillator (21), the phase shifter (216) and the synchronous detector (213) are connected in sequence;
the capacitance sensor (211), the amplifier (212), the synchronous detector (213) and the low-pass filter (214) are connected in sequence;
the low-pass filter (214) is connected with the analog recorder (217) and the analog-to-digital converter (218) respectively.
The working principle is as follows: and the tiny signals measured by the capacitance sensor (211) are amplified, recorded in an analog mode and converted into analog signals. Here, a lock-in amplifier is used, which is the most effective method to filter out noise and improve the signal-to-noise ratio.
An amplifier (212) comprising a preamplifier and a frequency selective amplifier, allowing only the measurement frequency signal to pass;
the synchronous detector (213) converts the alternating current signal into a direct current signal;
the low-pass filter (214) is composed of two-stage second-order active filters and filters high-frequency component signals;
the oscillator (21) is a digital oscillator, consists of a clock, a counter, an EPROM, a DAC and a filter, and generates a frequency-stabilizing amplitude-stabilizing sine wave signal;
the analog recorder (217) is used for recording the real-time change curve of the instrument.
All the components are common components and parts, and are products on the market.
4. Data acquisition control system (220)
As shown in fig. 5, the data acquisition control system (220) includes a single chip computer (224), and an analog-to-digital converter (221), a motor driver amplifier (222), a calibration driver controller (223), a keyboard (225), a display (226) and an interface circuit (227) respectively connected to the single chip computer (224).
The working principle is as follows:
the analog-to-digital converter (221) converts the analog signal into a digital signal;
the motor driving amplifier (222) controls a motor to drive the zero setting device (120) to zero the capacitance sensor (211);
a calibration driving controller (223) drives the piezoelectric actuator to generate a standard displacement to perform overall calibration on the instrument;
the single chip computer (224) comprises a CPU, a ROM, an anti-power-off RAM, a Watching dog circuit, a calendar clock and the like;
the interface circuit (227) has an RS-232C serial interface and an RJ45 network interface, and can perform wired or wireless digital communication. The system carries out data sampling and storage on the output of the instrument at regular time under the control of a clock, and automatically identifies and adjusts zero position; calibrating the instrument periodically; the remote reset and restart, remote communication and control functions are provided.
All the components are common components and parts, and are products on the market.
5. Zero setting device (120)
The zero setting device (120) is a universal zero setting device, and consists of a motor, a speed changer, a percentage gauge, a sliding block and the like, and drives a capacitance sensor (211). When the displacement of the instrument exceeds the measuring range, the instrument is subjected to precise zero adjustment.
6. Demarcator (150)
The calibrator (150) is a general-purpose calibrator.
In order to realize integral calibration, the calibrator (150) is arranged at the fixed end (160) and is connected with the baseline rod (130), and the calibration precision and the instrument stability are influenced if the connection is good or bad. The rigid connection of the sleeve is adopted. Piezoelectric ceramic materials with good performance are selected, a precise and stable control power supply is designed for calibration, and the repetition precision is improved.
3. Through tests, the invention achieves the following indexes:
* Base length: not more than 1m
* Instrumental resolution: is superior to 1 x 10 -10
* Displacement sensor resolution: is better than 0.0001 μm (0.1 nm)
* Short-term stability: 1X 10 -8 Day/day
* Long-term stability: 1X 10 -7 Year after year
* Change of ambient temperature: < 1 ℃/year
* Data storage: greater than 30 days (minute value)
* Calibrating repeatability: is better than 5 percent.
Claims (5)
1. An ultrashort baseline extensometer, characterized in that:
one end of the baseline rod (130) is connected with the displacement sensor (110), and the displacement sensor (110) is connected with the 1 st bedrock (310) through the zero setting device (120); the other end of the baseline rod (130) is connected with the calibrator (150) and then is connected with the 2 nd bedrock (320) through the fixed end (160);
the displacement sensor (110) and the calibrator (150) are respectively connected with the measurement and control system (200);
the fixed end (160) is a double fixed end;
the displacement sensor (110) is a differential capacitance sensor (211) with a fully sealed structure;
the measurement and control system (200) is a system for measuring and controlling the displacement sensor (110) and the calibrator (150).
2. The ultra short baseline extensometer as claimed in claim 1, wherein:
the base rod (130) is made of a material with a low expansion coefficient and has a length of not more than 100cm.
3. Ultrashort baseline extensometer as claimed in claim 1, wherein the capacitive sensor (211) is structured as:
the front sealing film (112), the metal outer barrel (111) and the rear sealing film (117) are sequentially connected to form a closed container;
a measuring rod (113) is arranged on the central axis of the metal outer barrel (111), and the measuring rod (113) is sequentially connected with a front sealing film (112), a movable pole plate (115) and a rear sealing film (117) and then connected with a base line rod (130) to play a role in transferring displacement;
a front fixed polar plate (114) and a rear fixed polar plate (116) are arranged in front of and behind the movable polar plate (115) to jointly form a differential capacitor, an alternating current bridge is formed by the differential capacitor and an external circuit, an oscillator provides a stable amplitude reference alternating current signal to the two fixed polar plates, and when displacement changes, a voltage signal is output; the front fixed pole plate (114) and the rear fixed pole plate (116) are fixed with the metal outer barrel (111) through symmetrical insulating fixed terminals (118).
4. Ultrashort baseline extensometer as claimed in claim 1, wherein the capacitive displacement measuring system (210) is structured as:
the device comprises a capacitance sensor (211), an amplifier (212), a synchronous detector (213), a low-pass filter (214), an oscillator (21), a phase shifter (216), an analog recorder (217) and an analog-to-digital converter (218);
the oscillator (21) is connected with the capacitance sensor (211);
the oscillator (21), the phase shifter (216) and the synchronous detector (213) are connected in sequence;
the capacitance sensor (211), the amplifier (212), the synchronous detector (213) and the low-pass filter (214) are connected in sequence;
the low-pass filter (214) is connected with the analog recorder (217) and the analog-to-digital converter (218) respectively.
5. The ultra short baseline extensometer as claimed in claim 1, wherein the data acquisition control system (220) is configured to:
the system comprises a single chip computer (224), and an analog-to-digital converter (221), a motor drive amplifier (222), a calibration drive controller (223), a keyboard (225), a display (226) and an interface circuit (227) which are respectively connected with the single chip computer (224).
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| CNB2007100530690A CN100501310C (en) | 2007-08-30 | 2007-08-30 | Ultrashort baseline extensometer |
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| CNB2007100530690A CN100501310C (en) | 2007-08-30 | 2007-08-30 | Ultrashort baseline extensometer |
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| CN100501310C CN100501310C (en) | 2009-06-17 |
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| CN102348957A (en) * | 2009-03-11 | 2012-02-08 | 瑞尼斯豪公司 | Apparatus and method for digitising impedance |
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| CN103363888A (en) * | 2013-06-18 | 2013-10-23 | 浙江工业大学 | Capacitance sensor-based upper grinding disc floating distance on-line measuring device |
| CN103631396A (en) * | 2013-11-29 | 2014-03-12 | 深圳超多维光电子有限公司 | Three-dimensional interaction operation rod |
| CN107388955A (en) * | 2017-08-18 | 2017-11-24 | 武汉地震科学仪器研究院有限公司 | A kind of Four component seismic technology probe |
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| CN102348957A (en) * | 2009-03-11 | 2012-02-08 | 瑞尼斯豪公司 | Apparatus and method for digitising impedance |
| US8890546B2 (en) | 2009-03-11 | 2014-11-18 | Renishaw Plc | Apparatus and method for digitising impedance |
| CN102348957B (en) * | 2009-03-11 | 2015-05-06 | 瑞尼斯豪公司 | Apparatus and method for digitising impedance |
| CN102927924A (en) * | 2012-10-10 | 2013-02-13 | 哈尔滨工程大学 | Short-base-line differential laser strain measuring instrument |
| CN103363888A (en) * | 2013-06-18 | 2013-10-23 | 浙江工业大学 | Capacitance sensor-based upper grinding disc floating distance on-line measuring device |
| CN103631396A (en) * | 2013-11-29 | 2014-03-12 | 深圳超多维光电子有限公司 | Three-dimensional interaction operation rod |
| CN103631396B (en) * | 2013-11-29 | 2017-06-06 | 深圳超多维光电子有限公司 | A kind of three-dimensional interaction operation rod |
| CN107388955A (en) * | 2017-08-18 | 2017-11-24 | 武汉地震科学仪器研究院有限公司 | A kind of Four component seismic technology probe |
| CN115790355A (en) * | 2023-01-31 | 2023-03-14 | 华新水泥技术管理(武汉)有限公司 | Rotary cement kiln deviation detection device and detection method |
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| CN100501310C (en) | 2009-06-17 |
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