CN219793191U - Crystal weighing device and system - Google Patents
Crystal weighing device and system Download PDFInfo
- Publication number
- CN219793191U CN219793191U CN202322365140.6U CN202322365140U CN219793191U CN 219793191 U CN219793191 U CN 219793191U CN 202322365140 U CN202322365140 U CN 202322365140U CN 219793191 U CN219793191 U CN 219793191U
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- magnetic fluid
- supporting seat
- weighing
- fluid sealing
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- 239000013078 crystal Substances 0.000 title claims abstract description 85
- 238000005303 weighing Methods 0.000 title claims abstract description 82
- 238000007789 sealing Methods 0.000 claims abstract description 51
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 46
- 230000007246 mechanism Effects 0.000 claims abstract description 9
- 238000012545 processing Methods 0.000 claims description 11
- 238000012544 monitoring process Methods 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000013079 quasicrystal Substances 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 230000020347 spindle assembly Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model belongs to the technical field of crystal growth furnaces, and discloses a crystal weighing device and a crystal weighing system. The crystal weighing device comprises a supporting seat, a bushing, a magnetic fluid sealing piece, a vacuum chamber, a rotary lifting mechanism and a weighing sensor, wherein the two bushings are respectively arranged at two ends of the supporting seat, and a guide shaft is connected in the bushing in a sealing sliding manner; the magnetic fluid sealing piece is arranged at intervals with the supporting seat and is connected with the guide shaft; the vacuum chamber is arranged at one side of the magnetic fluid sealing piece far away from the supporting seat; the rotary lifting mechanism comprises a rotary shaft assembly and a first driving piece, wherein the first end of the rotary shaft assembly penetrates through the supporting seat and penetrates through the center of the magnetic fluid sealing piece in a sealing mode and then stretches into the vacuum chamber, and crystals are arranged at the first end of the rotary shaft assembly; the weighing sensor is arranged between the supporting seat and the magnetic fluid sealing piece, and the weighing sensor is positioned on the inner side of the bushing. The crystal weighing system provided by the utility model comprises the crystal weighing device, so that the weighing precision is improved.
Description
Technical Field
The utility model relates to the technical field of crystal growth furnaces, in particular to a crystal weighing device and a crystal weighing system.
Background
The crystal is a structure with a large number of microscopic substance units orderly arranged according to a certain rule, so that the arrangement rule and crystal form can be researched and judged according to the size of the structural units, the crystal can be divided into four types according to the difference of structural particles and acting forces, and the ion crystal, the atomic crystal, the molecular crystal and the metal crystal, and the solid can be divided into three types of crystals, amorphous and quasi-crystals.
The crystal growth furnace is equipment for artificially synthesizing crystal, and the artificially synthesized crystal growth refers to the process of forming crystal with specific linear size through the transformation of matter from gas phase, liquid phase and solid phase under certain temperature, pressure, concentration, medium, pH and other conditions, and the weight in the furnace body is the most important data information during the crystal growth.
In the prior art, a weighing mechanism is generally used for measuring the real-time weight of crystal growth, and information on the crystal growth efficiency and the like is obtained through the weighing mechanism. However, the weighing mechanism in a general crystal growth furnace is not accurately weighed and is often influenced by external interference conditions.
Disclosure of Invention
The utility model aims to provide a crystal weighing device and a crystal weighing system, and aims to solve the problems that an existing weighing device is inaccurate in weighing and easy to interfere with external conditions, and improve the measurement accuracy of the crystal weighing device.
To achieve the purpose, the utility model adopts the following technical scheme:
a crystal weighing apparatus comprising:
a support base;
the two bushings are respectively arranged at two ends of the supporting seat, and the bushings are internally connected with a guide shaft in a sealing sliding manner;
the magnetic fluid sealing piece is arranged at intervals with the supporting seat and is connected with the guide shaft;
the vacuum chamber is arranged at one side of the magnetic fluid sealing piece far away from the supporting seat;
the rotary lifting mechanism comprises a rotary shaft assembly and a first driving piece, wherein a first end of the rotary shaft assembly penetrates through the supporting seat and penetrates through the center of the magnetic fluid sealing piece in a sealing mode and then stretches into the vacuum chamber, a crystal is arranged at the first end of the rotary shaft assembly, the rotary shaft assembly is configured to drive the crystal to rotate, and the first driving piece is configured to drive the rotary shaft assembly to slide along the supporting seat and the magnetic fluid sealing piece;
the weighing sensors are arranged between the supporting seat and the magnetic fluid sealing piece, the two weighing sensors are symmetrically arranged at two ends of the magnetic fluid sealing piece, and the weighing sensors are positioned at the inner side of the lining.
Optionally, the rotation shaft assembly includes second driving piece and axis body, the axis body set up in the output of second driving piece, the axis body wears to locate the supporting seat with stretch into after the magnetic fluid sealing piece in the vacuum chamber, the crystal set up in on the axis body.
Optionally, the shaft body is made of metal.
Optionally, a first mounting seat for mounting the second driving piece and a second mounting seat for mounting the first driving piece are arranged on the supporting seat, the first mounting seat is in sliding connection with the supporting seat, and the first mounting seat is connected with the output end of the first driving piece.
Optionally, the second driving member is configured as a motor.
Optionally, the first driving member is provided as a cylinder.
Optionally, the magnetic fluid seal and the vacuum chamber are connected in a sealed manner by a bellows.
A crystal weighing system comprising a crystal weighing apparatus according to any one of the above aspects, the crystal weighing system further comprising a data processing component electrically connected to the weighing sensor.
Optionally, the crystal weighing system further comprises a position sensor for monitoring the position of the first end of the rotating shaft assembly.
Optionally, the crystal weighing system further comprises a pressure sensor for monitoring the pressure within the vacuum chamber.
The utility model has the beneficial effects that: according to the crystal weighing device provided by the utility model, the bushing and the guide shaft are arranged between the supporting seat and the magnetic fluid sealing piece, the guide shaft is in sealing sliding connection in the bushing, the magnetic fluid sealing piece and the weighing sensor receive a certain lateral component force in the process that the rotary shaft assembly drives the crystal to rotate, and the guide shaft and the bushing are matched, so that the lateral component force received by the weighing sensor can be effectively born, the interference of external interference factors on the weighing sensor is counteracted, and the weighing precision of the weighing sensor is improved.
The crystal weighing system provided by the utility model comprises the data processing component and the crystal weighing device, wherein the data processing component is electrically connected with the weighing sensor and is used for receiving and processing the output data of the weighing sensor, so that the data processing efficiency is improved.
Drawings
FIG. 1 is a schematic view of a crystal weighing apparatus in one state according to an embodiment of the present utility model;
fig. 2 is a schematic structural diagram of a crystal weighing apparatus in another state according to an embodiment of the present utility model.
In the figure:
100. a support base; 200. a bushing; 300. a guide shaft; 400. a magnetic fluid seal; 500. a vacuum chamber; 611. a shaft body; 700. a crystal; 800. a weighing sensor; 900. a bellows.
Detailed Description
The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
The embodiment provides a crystal weighing device, and aims to solve the problems that an existing weighing device is inaccurate in weighing and easy to be interfered by external conditions, and improve the measurement accuracy of the crystal weighing device. The crystals mentioned in this embodiment are generally grown by sublimation or liquid phase processes, such as single crystal silicon crystals, silicon carbide crystals, and the like.
As shown in fig. 1 and 2, the crystal weighing device comprises a supporting seat 100, a bushing 200, a magnetic fluid sealing member 400, a vacuum chamber 500, a rotary lifting mechanism and a weighing sensor 800, wherein the two bushings 200 are respectively arranged at two ends of the supporting seat 100, a guide shaft 300 is connected in the bushing 200 in a sealing sliding manner, for example, the bushing 200 can be arranged as a linear bearing; the magnetic fluid sealing piece 400 is arranged at intervals with the supporting seat 100, and the magnetic fluid sealing piece 400 is connected with the guide shaft 300; the vacuum chamber 500 is arranged on one side of the magnetic fluid sealing piece 400 away from the supporting seat 100; the rotary lifting mechanism comprises a rotary shaft assembly and a first driving piece, wherein a first end of the rotary shaft assembly penetrates through the supporting seat 100 and penetrates through the center of the magnetic fluid sealing piece 400 in a sealing mode and then stretches into the vacuum chamber 500, a crystal 700 is arranged at the first end of the rotary shaft assembly, the rotary shaft assembly is configured to drive the crystal 700 to rotate, and the first driving piece is configured to drive the rotary shaft assembly to slide along the supporting seat 100 and the magnetic fluid sealing piece 400; the weighing sensors 800 are arranged between the supporting seat 100 and the magnetic fluid sealing piece 400, the two weighing sensors 800 are symmetrically arranged at two ends of the magnetic fluid sealing piece 400, and the weighing sensors 800 are positioned at the inner side of the bushing 200.
According to the crystal weighing device provided by the embodiment, the bushing 200 and the guide shaft 300 are arranged between the supporting seat 100 and the magnetic fluid sealing piece 400, the guide shaft 300 is connected in the bushing 200 in a sealing and sliding mode, the magnetic fluid sealing piece 400 and the weighing sensor 800 are subjected to certain lateral component force in the process that the rotary shaft assembly drives the crystal 700 to rotate, the guide shaft 300 and the bushing 200 are matched, the lateral component force received by the weighing sensor 800 can be effectively born, interference of external interference factors on the weighing sensor 800 is counteracted, and weighing precision of the weighing sensor 800 is improved.
Optionally, the rotating shaft assembly includes a second driving member and a shaft body 611, the shaft body 611 is disposed at an output end of the second driving member, the shaft body 611 penetrates through the supporting seat 100 and the magnetic fluid sealing member 400 and then extends into the vacuum chamber 500, and the crystal 700 is disposed on the shaft body 611. When the magnetic fluid is injected into the gap of the magnetic field, the magnetic fluid fills the gap of the whole magnetic fluid sealing piece 400 to form a liquid O-shaped sealing ring, the shaft body 611 is in sealing connection with the magnetic fluid sealing piece 400, and the magnetic fluid sealing piece 400 transmits the rotary motion into the vacuum chamber 500 and plays a role in rotary sealing. In the present embodiment, the shaft body 611 is made of a metal material with a certain strength.
In this embodiment, the supporting seat 100 is provided with a first mounting seat for mounting the second driving member and a second mounting seat for mounting the first driving member, the first mounting seat is slidably connected with the supporting seat 100, and the first mounting seat is connected with the output end of the first driving member. When the crystal 700 needs to move along the direction perpendicular to the supporting seat 100, the first driving piece drives the first installation seat to slide along the supporting seat 100, the first installation seat drives the second driving piece and the shaft body 611 to move, and the shaft body 611 drives the crystal 700 to slide along the supporting seat 100 and the magnetic fluid sealing piece 400, so that the operation is stable and reliable. For example, the first drive member may be provided as a cylinder and the second drive member as a motor.
As shown in fig. 1 and 2, the magnetic fluid seal 400 and the vacuum chamber 500 are hermetically connected by a bellows 900, and the bellows 900 is used for isolating vacuum and performing a sealing function. Second, the bellows 900 is generally provided as a flexible metal tube that can be extended and contracted, and when the shaft body 611 moves in a direction perpendicular to the support base 100, the bellows 900 can effectively buffer the forces of the vacuum chamber 500 and the magnetic fluid seal 400 to improve the reliability of the use of the vacuum chamber 500 and the magnetic fluid seal 400.
Illustratively, the load cell 800 in this embodiment is provided as a load cell comprised of three components, including: the bridge circuit (such as a Wheatstone bridge) is composed of one or more elastic bodies capable of deforming after being stressed and resistance strain gauges capable of sensing the deformation, an adhesive capable of fixedly adhering the resistance strain gauges to the elastic bodies and capable of conducting the strain gauges and a sealant for protecting electronic circuits. The load cell 800 may weigh the magnetic fluid seal 400, shaft 611, and crystal 700.
The present embodiment further provides a crystal weighing system, including the crystal weighing device, where the crystal weighing system further includes a data processing component, and the data processing component is electrically connected to the weighing sensor 800.
In the crystal weighing system provided by the embodiment, the data processing component can directly receive and process the output data of the weighing sensor 800, so that the data processing efficiency is improved.
Optionally, the crystal weighing system further comprises a position sensor for monitoring the position of the first end of the rotating shaft assembly. From the positional information of the bellows 900, the pushing force or pulling force F of the bellows 900 can be calculated Wave-guide KX, where K is the elastic coefficient, which can be measured by tensile or compressive tests; x is the stroke of the first end of the spindle assembly, i.e. the stroke of the end of the shaft body 611 away from the support 100, and can be positive or negative.
Further, the crystal weighing system also includes a pressure sensor for monitoring the pressure within the vacuum chamber 500. From the pressure within the vacuum chamber 500, a vacuum suction or thrust force F may be calculated True sense = (P0-P1) S, wherein: p0 is atmospheric pressure; p1 is the internal pressure of the vacuum chamber 500; s is the cross-sectional area of the corrugated pipe 900, F True sense May be positive or negative.
Illustratively, based on the above data, the measured effects of bellows 900 and vacuum chamber 500 pressure on the weight of crystal 700 can be eliminated by algorithmic compensation. For example, crystal 700 weight t=t0-T1-F Wave-guide -F True sense . Wherein T0 is an indication of the load cell 800, which may be positive or negative; t1 is the weight of the structure other than the crystal 700.
It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.
Claims (10)
1. Crystal weighing device, its characterized in that includes:
a support base (100);
the two bushings (200) are respectively arranged at two ends of the supporting seat (100), and a guide shaft (300) is connected in the bushings (200) in a sealing sliding manner;
the magnetic fluid sealing piece (400) is arranged at intervals with the supporting seat (100), and the magnetic fluid sealing piece (400) is connected with the guide shaft (300);
a vacuum chamber (500) arranged on one side of the magnetic fluid sealing piece (400) far away from the supporting seat (100);
the rotary lifting mechanism comprises a rotary shaft assembly and a first driving piece, wherein a first end of the rotary shaft assembly penetrates through the supporting seat (100) and penetrates through the center of the magnetic fluid sealing piece (400) in a sealing mode and then stretches into the vacuum chamber (500), a crystal (700) is arranged at the first end of the rotary shaft assembly, the rotary shaft assembly is configured to drive the crystal (700) to rotate, and the first driving piece is configured to drive the rotary shaft assembly to slide along the supporting seat (100) and the magnetic fluid sealing piece (400);
the weighing sensors (800) are arranged between the supporting seat (100) and the magnetic fluid sealing piece (400), the two weighing sensors (800) are symmetrically arranged at two ends of the magnetic fluid sealing piece (400), and the weighing sensors (800) are positioned at the inner side of the lining (200).
2. The crystal weighing device according to claim 1, wherein the rotary shaft assembly comprises a second driving member and a shaft body (611), the shaft body (611) is arranged at the output end of the second driving member, the shaft body (611) penetrates through the supporting seat (100) and the magnetic fluid sealing member (400) and then stretches into the vacuum chamber (500), and the crystal (700) is arranged on the shaft body (611).
3. Crystal weighing apparatus according to claim 2, characterized in that the shaft body (611) is provided in a metallic material.
4. Crystal weighing apparatus according to claim 2, characterized in that the support base (100) is provided with a first mounting base for mounting the second driving element and a second mounting base for mounting the first driving element, the first mounting base being in sliding connection with the support base (100) and the first mounting base being connected with the output end of the first driving element.
5. A crystal weighing apparatus as claimed in claim 2, wherein the second drive member is provided as a motor.
6. A crystal weighing apparatus as claimed in claim 1, wherein the first drive member is provided as a cylinder.
7. Crystal weighing device according to claim 1, characterized in that the magnetic fluid seal (400) and the vacuum chamber (500) are sealingly connected by means of a bellows (900).
8. Crystal weighing system, characterized in that it comprises a crystal weighing device according to any one of claims 1-7, said crystal weighing system further comprising a data processing component, said data processing component being electrically connected to said load cell (800).
9. The crystal weighing system of claim 8 further comprising a position sensor for monitoring the position of the first end of said rotatable shaft assembly.
10. The crystal weighing system of claim 9, further comprising a pressure sensor for monitoring the pressure within said vacuum chamber (500).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322365140.6U CN219793191U (en) | 2023-09-01 | 2023-09-01 | Crystal weighing device and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322365140.6U CN219793191U (en) | 2023-09-01 | 2023-09-01 | Crystal weighing device and system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219793191U true CN219793191U (en) | 2023-10-03 |
Family
ID=88156729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322365140.6U Active CN219793191U (en) | 2023-09-01 | 2023-09-01 | Crystal weighing device and system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219793191U (en) |
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2023
- 2023-09-01 CN CN202322365140.6U patent/CN219793191U/en active Active
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