CN102478420B - Weighing mechanism used for seed crystal driving device - Google Patents
Weighing mechanism used for seed crystal driving device Download PDFInfo
- Publication number
- CN102478420B CN102478420B CN 201010556150 CN201010556150A CN102478420B CN 102478420 B CN102478420 B CN 102478420B CN 201010556150 CN201010556150 CN 201010556150 CN 201010556150 A CN201010556150 A CN 201010556150A CN 102478420 B CN102478420 B CN 102478420B
- Authority
- CN
- China
- Prior art keywords
- expansion joint
- seed crystal
- weighing sensor
- flange
- weighing mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention discloses a weighing mechanism used for a seed crystal driving device and belongs to the technical field of vacuum equipment. The weighing mechanism comprises an outer frame, a weighing sensor, an adjusting support and an expansion joint component. The outer frame is fixed on a top flange of a seed crystal shaft. The expansion joint component is hermetically arranged on the lower end surface of the top flange of the seed crystal shaft. The support is fixed on the lower flange of the expansion joint component and positioned on one side of the seed crystal shaft. Adjusting screws that are mounted on the lower flange of the expansion joint component are in contact with the support, and the weighing sensor is fixed on the outer frame and the support respectively. During operation, a sample is connected at the other end of the seed crystal shaft. By adopting the expansion joint seal structure, the measurement range of the weighing sensor is properly selected according to the actual sample and the measurement range of the weighing sensor is effectively reduced; and besides, the weighing sensor that works in the air can accurately measure the weight of the sample in vacuum. The invention solves the problems that the selectivity of the weighing sensor is limited and the mechanism is heavy. The weighing mechanism is advantageous in simple structure and reasonable overall layout.
Description
Technical field
The invention belongs to the vacuum equipment technical field, particularly relate to a kind of Weighing mechanism for the seed crystal gearing.
Technical background
At present, heavy on the function implementation method of the Weighing mechanism in the known single crystal furnace equipment, in Weighing mechanism, because the LOAD CELLS under the atmosphere will measure the weight of sample in the vacuum, the methods of measuring whole mechanism that adopt make LOAD CELLS be far longer than the weight of actual sample in the selection of range more.
Summary of the invention
At the technical matters of above-mentioned existence, the invention provides a kind of Weighing mechanism for the seed crystal gearing.Its adopts expansion joint hermetically-sealed construction, makes the LOAD CELLS under the atmosphere can measure the weight of sample in the vacuum.
To achieve these goals, technical scheme of the present invention is as follows:
The present invention includes housing, LOAD CELLS, adjusting bearing and expansion joint assembly, described housing is fixed on the top flange of seed shaft, the flange lower surface, top of seed shaft is sealed and installed with the expansion joint assembly, bearing is fixed on the lower flange of seed shaft lateral expansion joint assembly, the set screw that is installed on the expansion joint assembly lower flange contacts with bearing, LOAD CELLS is separately fixed on housing and the bearing, during work, is connected with sample at the other end of seed shaft.
Described expansion joint assembly comprises expansion joint and is installed in the upper and lower flange at expansion joint two ends.Described upper flange is the structure that has ring groove on the periphery, and the end face that is connected with seed shaft is the structure that is mated.
The invention has the beneficial effects as follows:
The present invention has adopted the expansion joint hermetically-sealed construction, makes LOAD CELLS suitably select range according to actual sample, has effectively dwindled the range of LOAD CELLS; And make the LOAD CELLS under the atmosphere can accurately measure the weight of sample in the vacuum.
The present invention has not only solved the limitation that LOAD CELLS is selected, the problem of mechanism's heaviness, and office of simple in structure, whole portion is reasonable.
Description of drawings
Fig. 1 is structural representation of the present invention.
Among the figure: 1. housing, 2. LOAD CELLS, 3. seed shaft, 4. bearing, 5. upper flange, 6. expansion joint, 7. lower flange, 8. set screw, 9. sample.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in further detail.
Embodiment 1: as shown in Figure 1, the present invention includes housing 1, LOAD CELLS 2, regulate bearing and expansion joint assembly, described housing 1 is fixed on the top flange of seed shaft 3, lower end at seed shaft 3 top flanges is sealed and installed with the expansion joint assembly, bearing 4 is installed on the lower flange 7 of seed shaft 3 lateral expansion joint assembly by a plurality of set screw 8, LOAD CELLS 2 is separately fixed on housing 1 and the bearing 4, during work, is connected with sample 9 at the other end of seed shaft 3.
This routine described expansion joint assembly comprises expansion joint 6 and is installed in the upper and lower flange 5,7 at expansion joint 6 two ends.Described upper flange 5 is for having the structure of ring groove on the periphery, the end face that is connected with seed shaft 3 is the structure that is mated.Described adjusting bearing comprises bearing 4 and set screw 8, and described bearing 4 is between the lower flange 7 of seed shaft 3 side LOAD CELLS 2 and expansion joint assembly, and set screw 8 is installed on the lower flange 7.
The present invention is when work, sample 9 is connected to the end of seed shaft 3, regulate bearing 4 by some set screw 8 that transfer is connected on the lower flange 7, make LOAD CELLS 2 vertical with seed shaft 3, the deflection of regulating is absorbed by the expansion joint assembly fully, and at this moment LOAD CELLS can accurately be measured example weight.
Claims (2)
1. Weighing mechanism that is used for the seed crystal gearing, it is characterized in that: comprise housing, LOAD CELLS, adjusting bearing and expansion joint assembly, described housing is fixed on the top flange of seed shaft, the flange lower surface, top of seed shaft is sealed and installed with the expansion joint assembly, bearing is fixed on the lower flange of seed shaft lateral expansion joint assembly, the set screw that is installed on the expansion joint assembly lower flange contacts with bearing, LOAD CELLS is separately fixed on housing and the bearing, during work, be connected with sample at the other end of seed shaft; Described expansion joint assembly comprises expansion joint and is installed in the upper and lower flange at expansion joint two ends.
2. the Weighing mechanism for the seed crystal gearing according to claim 1, it is characterized in that: described upper flange is the structure that has ring groove on the periphery, and the end face that is connected with seed shaft is the structure that is mated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010556150 CN102478420B (en) | 2010-11-24 | 2010-11-24 | Weighing mechanism used for seed crystal driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010556150 CN102478420B (en) | 2010-11-24 | 2010-11-24 | Weighing mechanism used for seed crystal driving device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102478420A CN102478420A (en) | 2012-05-30 |
| CN102478420B true CN102478420B (en) | 2013-08-21 |
Family
ID=46091132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010556150 Active CN102478420B (en) | 2010-11-24 | 2010-11-24 | Weighing mechanism used for seed crystal driving device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102478420B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109160205B (en) * | 2018-08-23 | 2020-10-13 | 泰州芯源半导体科技有限公司 | Transportation detection device for electronic component production |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2503077Y (en) * | 2001-09-18 | 2002-07-31 | 中国科学院福建物质结构研究所 | Seed rod centering controller |
| JP2007277041A (en) * | 2006-04-06 | 2007-10-25 | Covalent Materials Corp | Single crystal pulling apparatus |
| CN101831692A (en) * | 2009-11-24 | 2010-09-15 | 成都东骏激光股份有限公司 | Automatic control device for use in Czochralski crystal growth |
| US20100242836A1 (en) * | 2009-03-31 | 2010-09-30 | Memc Electronic Materials, Inc. | Systems for weighing a pulled object |
| CN201864797U (en) * | 2010-11-24 | 2011-06-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Weighing mechanism for seed crystal transmission device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06116079A (en) * | 1992-09-30 | 1994-04-26 | Nippon Dempa Kogyo Co Ltd | Seed quarts crystal holder |
-
2010
- 2010-11-24 CN CN 201010556150 patent/CN102478420B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2503077Y (en) * | 2001-09-18 | 2002-07-31 | 中国科学院福建物质结构研究所 | Seed rod centering controller |
| JP2007277041A (en) * | 2006-04-06 | 2007-10-25 | Covalent Materials Corp | Single crystal pulling apparatus |
| US20100242836A1 (en) * | 2009-03-31 | 2010-09-30 | Memc Electronic Materials, Inc. | Systems for weighing a pulled object |
| CN101831692A (en) * | 2009-11-24 | 2010-09-15 | 成都东骏激光股份有限公司 | Automatic control device for use in Czochralski crystal growth |
| CN201864797U (en) * | 2010-11-24 | 2011-06-15 | 中国科学院沈阳科学仪器研制中心有限公司 | Weighing mechanism for seed crystal transmission device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102478420A (en) | 2012-05-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105242202B (en) | A kind of detection device for circuit breaker | |
| CN102749169A (en) | Simple and easy pressure calibration device of annular pressure sensor | |
| CN103630328B (en) | Be applied to the device of test model stressing conditions in analysis cycle tank | |
| CN102998254B (en) | Micro friction force measuring device | |
| CN203929494U (en) | A kind of for scleroscopic power sensor limiter mechanism | |
| CN102478420B (en) | Weighing mechanism used for seed crystal driving device | |
| CN201864797U (en) | Weighing mechanism for seed crystal transmission device | |
| CN206095404U (en) | Liftable weighing device | |
| CN104807592A (en) | Electric cylinder loading overlapping type force standard machine | |
| CN104357900A (en) | Crystal weighing apparatus applied to single crystal furnace | |
| CN202427729U (en) | Screwdown inspection and detection device for hydraulic rolling mill | |
| CN201607197U (en) | Bearing radial clearance measuring device | |
| CN216410083U (en) | Soft product thickness detection device | |
| CN115979485A (en) | Hyperbolic beam high-precision force sensor | |
| KR20120014605A (en) | Mechanical load tester of photovoltaic module | |
| CN2831097Y (en) | Floating pressure durable density transformer | |
| CN101806648A (en) | Electric digital micromanometer | |
| CN202166472U (en) | Automatic calibration device for hopper scale | |
| CN202350963U (en) | Device for testing coupling unbalanced force of rotors of magnetic transmission device | |
| CN104007032A (en) | Standard hardness machine with two high-precision force sensors | |
| CN201561904U (en) | Durometer loader | |
| CN204356439U (en) | Be applied to the crystals weighed device of single crystal growing furnace | |
| CN203551057U (en) | Weigh sensing module | |
| CN103434026B (en) | Powder weighing device for mixing plant and mixing plant | |
| CN208125563U (en) | A kind of novel device for measuring viscosity can be used for measuring oil viscosity under hyperbaric environment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Xinyuan street Shenyang Hunnan New District of 110168 cities in Liaoning province. Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |