CN102645259A - Weighing device for sapphire crystal growth - Google Patents
Weighing device for sapphire crystal growth Download PDFInfo
- Publication number
- CN102645259A CN102645259A CN2012101076691A CN201210107669A CN102645259A CN 102645259 A CN102645259 A CN 102645259A CN 2012101076691 A CN2012101076691 A CN 2012101076691A CN 201210107669 A CN201210107669 A CN 201210107669A CN 102645259 A CN102645259 A CN 102645259A
- Authority
- CN
- China
- Prior art keywords
- sensor
- crystal growth
- electric motor
- weighing
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention relates to a weighing device for sapphire crystal growth. In the weighing structure design of crystal growth, two structures are available, one structure is in the mode with an internally arranged sensor and a rotating electric motor, and the other structure is the structure with the externally arranged sensor and the rotating electric motor. The structure with the internally arranged sensor and the rotating electric motor is easy to generate vibration of a seed rod and is also easy to be affected by temperature in a vacuum chamber so that the failure rate is high and the overhaul is inconvenient. In the structure with the externally arranged sensor and the rotating electric motor, the initial loading of the sensor is too large, the detection resolution is reduced, and the weighing error is large. The weighing device for the sapphire crystal growth comprises the vacuum chamber, the seed rod, a bearing seat, a weighing sensor and the rotating electric motor. The weighing sensor is arranged in the vacuum chamber, and the rotating electric motor is arranged on the vacuum chamber by an electric motor support seat. In the weighing device, the sensor is internally arranged and the rotating electric motor is externally arranged, therefore, the weighing precision is greatly improved, crystal growth rate error is low, an actual value is close to a theoretical value, the process operation can be well realized, and the yield of crystal is improved.
Description
Technical field
The present invention relates to a kind of weighing device of sapphire crystal growth.
Background technology
At present in the weighing structure design of crystal growth, two kinds of structures are arranged, the one, sensor, the built-in form of electric rotating machine, another is sensor, revolve all external structure of the machine of conducting electricity.The former, the electric machine built-in vacuum chamber is easy to generate the seed crystal vibration of bar, also is subject to Influence of Temperature in the vacuum chamber, and failure rate is higher, and maintenance is also very inconvenient; The latter, the sensor initial stage loads too big, needs bigger transducer range, thus detection resolution reduces, that is has reduced sensor accuracy, and is unfavorable to system, simultaneously, receives the influence of external environment, system vacuum degree etc., and weighing error is also big.
Summary of the invention
The present invention provides a kind of weighing device of sapphire crystal growth in order to solve the weak point in the above-mentioned background technology, can improve weighing precision greatly; The crystal growth rate error is little; Actual value and theoretical value are approaching, can realize technological operation well, improve the yields of crystal.
For realizing above-mentioned purpose; The technical scheme that the present invention adopts is: a kind of weighing device of sapphire crystal growth; Comprise vacuum chamber, seed rod, bearing seat, LOAD CELLS, electric rotating machine; It is characterized in that: described LOAD CELLS is arranged in the vacuum chamber, and electric rotating machine is arranged on the vacuum chamber through the motor bearing.
Described electric rotating machine is connected on the active dial through shaft coupling.
Described LOAD CELLS lower end is provided with bearing seat.
The bottom of described vacuum chamber inner load cell is provided with cooling water pipe.
Described shaft coupling is the elasticity shaft joint.
Compared with prior art, advantage and effect that the present invention has are following: sensor of the present invention is built-in, electric rotating machine is external, has improved weighing precision greatly; The crystal growth rate error is little; Actual value and theoretical value are approaching, can realize technological operation well, improve the yields of crystal.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Among the figure, the 1-electric rotating machine, 2-motor bearing, the 3-shaft coupling, the 4-rotating seal, 5-is dial initiatively, the driven dial of 6-, 7-bearing seat, 8-seed rod, 9-corrugated tube, 10-cooling water pipe, 11-LOAD CELLS, 12-vacuum chamber.
Embodiment
Referring to Fig. 1: the present invention includes vacuum chamber 12, seed rod 8, bearing seat 7, LOAD CELLS 11, electric rotating machine 1, corrugated tube 9; Vacuum chamber 12 is hollow cavity; Vacuum chamber 12 communicates with main furnace chamber through corrugated tube 9; Driven dial 6, seed rod 8 are connected with LOAD CELLSs 11 in being fixed on vacuum chamber 12 through bearing seat 7, and bearing seat 7 is arranged at the lower end of LOAD CELLS 11 left parts, and electric rotating machine 1 is installed on the vacuum chamber 12 through motor bearing 2; Electric rotating machine 1 is connected on the active dial 5 through spring coupling 3, and initiatively dial 5 links to each other with vacuum chamber 12 through rotating seal 4; The bottom of LOAD CELLS 11 is provided with cooling water pipe 10 near the lower wall of vacuum chamber 12.
The present invention is specifically designed to the sapphire crystal growth control diameter of weighing; The method built-in through sensor, that electric rotating machine is external has solved the accuracy of crystal growing process weighing well, owing to have only the weight of seed rod and bearing seat thereof to add on the sensor; This part weight is fixed value; In whole crystal growing process, sensor only obtains the weight of crystal, has changed the influence of symmetrical tuple value such as electric rotating machine, corrugated tube and negative pressure of vacuum, cooling water pressure variation in the past; Can obtain accurate growth rate data, realize the diameter control of crystal growth.
Device described in the invention selects high-precision sensor resolution 1/50000, the about 15Kg of deadweight such as existing apparatus seed rod, electric rotating machine, bearing seat; After the extracting vacuum, the load that corrugated tube imposes on sensor is approximately 20Kg, and adding the weight of measuring crystal is 35Kg; Therefore, the range of sensor to choose 100Kg more greatly, like this; The minimum sensibility reciprocal 100x1000g/50000=2g of weighing system, this value precision is lower, simultaneously; Receive the influence of factors such as the pressure surge of seed rod water-cooled, fluctuation vacuum, electric rotating machine vibration easily, cause the crystal weight of measurement to produce stochastic error; This device, sensor have only been born weight 2Kg, and the weight 35Kg of tested crystal of seed rod, optional sensor 50Kg than lower range; Like this; The minimum sensibility reciprocal 50x1000g/50000=1g of weighing system has improved the resolution of weighing, simultaneously greatly; This value does not receive the influence of extraneous factor, can satisfy the crystal growth technique requirement well.
Clearly, more than be detailed description to the specific embodiment of the invention, do not represent protection domain to be confined to this, conceive any change of being made down in the present invention and all will fall into protection domain of the present invention.
Claims (5)
1. the weighing device of a sapphire crystal growth; Comprise vacuum chamber (12), seed rod (8), bearing seat (7), LOAD CELLS (11), electric rotating machine (1); It is characterized in that: described LOAD CELLS (11) is arranged in the vacuum chamber (12), and electric rotating machine (1) is arranged on the vacuum chamber (12) through motor bearing (2).
2. the weighing device of a kind of sapphire crystal growth according to claim 1 is characterized in that: described electric rotating machine (1) is connected to initiatively on the dial (5) through shaft coupling (3).
3. the weighing device of a kind of sapphire crystal growth according to claim 1, it is characterized in that: described LOAD CELLS (11) lower end is provided with bearing seat (7).
4. the weighing device of a kind of sapphire crystal growth according to claim 1, it is characterized in that: the bottom of described vacuum chamber (12) inner load cell (11) is provided with cooling water pipe (10).
5. the weighing device of a kind of sapphire crystal growth according to claim 1, it is characterized in that: described shaft coupling (3) is the elasticity shaft joint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101076691A CN102645259A (en) | 2012-04-13 | 2012-04-13 | Weighing device for sapphire crystal growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012101076691A CN102645259A (en) | 2012-04-13 | 2012-04-13 | Weighing device for sapphire crystal growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102645259A true CN102645259A (en) | 2012-08-22 |
Family
ID=46658227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012101076691A Pending CN102645259A (en) | 2012-04-13 | 2012-04-13 | Weighing device for sapphire crystal growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102645259A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102928055A (en) * | 2012-11-22 | 2013-02-13 | 无锡鼎晶光电科技有限公司 | Weighing sensor for measuring weight of grown crystals |
| CN102953121A (en) * | 2012-11-14 | 2013-03-06 | 吴江亿泰真空设备科技有限公司 | Novel seed crystal chamber of sapphire crystal growth furnace |
| CN102978703A (en) * | 2012-12-04 | 2013-03-20 | 苏州工业园区杰士通真空技术有限公司 | Novel seed crystal mechanism for sapphire crystal growing furnace |
| CN105177704A (en) * | 2015-10-23 | 2015-12-23 | 苏州晶特晶体科技有限公司 | High-stability crystal weighing unit for crystal growth furnaces |
| CN109338468A (en) * | 2018-11-21 | 2019-02-15 | 南京晶升能源设备有限公司 | A kind of crystals weighed device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102392295A (en) * | 2011-11-18 | 2012-03-28 | 无锡鼎晶光电科技有限公司 | Weighing device for sapphire single crystal furnace |
-
2012
- 2012-04-13 CN CN2012101076691A patent/CN102645259A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102392295A (en) * | 2011-11-18 | 2012-03-28 | 无锡鼎晶光电科技有限公司 | Weighing device for sapphire single crystal furnace |
Non-Patent Citations (1)
| Title |
|---|
| 耀飞黔 等: "晶体生长控制中的高分辨力称重系统", 《传感器技术》, vol. 22, no. 1, 31 December 2003 (2003-12-31) * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102953121A (en) * | 2012-11-14 | 2013-03-06 | 吴江亿泰真空设备科技有限公司 | Novel seed crystal chamber of sapphire crystal growth furnace |
| CN102928055A (en) * | 2012-11-22 | 2013-02-13 | 无锡鼎晶光电科技有限公司 | Weighing sensor for measuring weight of grown crystals |
| CN102928055B (en) * | 2012-11-22 | 2014-07-23 | 无锡鼎晶光电科技有限公司 | Weighing sensor for measuring weight of grown crystals |
| CN102978703A (en) * | 2012-12-04 | 2013-03-20 | 苏州工业园区杰士通真空技术有限公司 | Novel seed crystal mechanism for sapphire crystal growing furnace |
| CN105177704A (en) * | 2015-10-23 | 2015-12-23 | 苏州晶特晶体科技有限公司 | High-stability crystal weighing unit for crystal growth furnaces |
| CN109338468A (en) * | 2018-11-21 | 2019-02-15 | 南京晶升能源设备有限公司 | A kind of crystals weighed device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102645259A (en) | Weighing device for sapphire crystal growth | |
| CN102022965B (en) | Device for measuring axial internal clearance of matched angular contact ball bearing | |
| CN107860504B (en) | Accurate dynamic thrust of appearance accuse engine measures calibration integrated device | |
| CN102507369B (en) | Electromagnetic excitation detection-based resonant tuning fork liquid density sensor | |
| CN202141554U (en) | Ceramic structure metal sensitive diaphragm capacitance pressure transducer | |
| CN204202812U (en) | The caliberating device of simple and easy force cell | |
| CN204694201U (en) | Non-contact displacement transducer | |
| CN202903392U (en) | Bayonet type polished rod dynamic load sensor | |
| CN111413026B (en) | On-line detection device of multifunctional pressure measurement monitoring system | |
| CN104568261A (en) | Digital strain torque sensor on basis of multifunctional signal conditioning system | |
| CN202187088U (en) | Weighing device for single crystal furnace | |
| CN206618636U (en) | Sponge stress test device | |
| CN102392295B (en) | Weighing device for sapphire single crystal furnace | |
| CN206281566U (en) | A kind of vibration-testing apparatus | |
| CN202853556U (en) | Rotating equipment concentricity adjusting device | |
| CN202471834U (en) | Vacuum film resistance tester | |
| CN201772828U (en) | Large curved plate measuring jig frame | |
| CN102778185A (en) | Comprehensive gauge for measuring shape and position errors of series of taper holes | |
| CN204301910U (en) | Two display pressure transmitter | |
| CN202582433U (en) | Stroke measurement assembly of oil injector | |
| CN206038210U (en) | Hydraulic torque spanner high accuracy metering device | |
| CN201583238U (en) | Coaxiality inspecting instrument of ultra-thin wall dry cylinder jacket | |
| CN205246044U (en) | Measurement device for asymmetric value of synchronous ware | |
| CN202994280U (en) | Electronic belt scale frame | |
| CN106225974B (en) | Shaft dynamic bearing capacity measurement test device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120822 |