CN202187088U - Weighing device for single crystal furnace - Google Patents
Weighing device for single crystal furnace Download PDFInfo
- Publication number
- CN202187088U CN202187088U CN2011202430415U CN201120243041U CN202187088U CN 202187088 U CN202187088 U CN 202187088U CN 2011202430415 U CN2011202430415 U CN 2011202430415U CN 201120243041 U CN201120243041 U CN 201120243041U CN 202187088 U CN202187088 U CN 202187088U
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- single crystal
- silicon single
- support
- weighing device
- data transmission
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Abstract
The utility model relates to a weighing device, specifically to a weighing device for a single crystal furnace, comprising a scale and a support, wherein the support is fixed in a sealed chamber; the scale is fixed on the support; the scale is provided with a weighing sensor which is connected with a data transmission device arranged on the sealed chamber; a single crystal lifting device is arranged below the scale. After the structure is used, the weighing sensor transmits the measured weight data to a control system by the data transmission device such that the control system can precisely control the tail-in work on the silicon single crystal rod after the weight of the rest silicon is calculated by the control system.
Description
Technical field
The utility model relates to a kind of weighing device, particularly a kind of weighing device that is used in the single crystal growing furnace.
Background technology
In recent years, various crystalline materials particularly are the high-tech added value material of representative and the development of relevant hi-tech industry with silicon single crystal, become the pillar of contemporary IT industry, and make information industry become fastest-rising guiding industry in the global economy development.Silicon single crystal has potential as a kind of, and the high-tech resource of demanding urgently developing is just causing increasing concern and attention.
In the making processes of silicon single crystal rod, need silicon single crystal be elongated growth according to certain diameter dimension with silicon single crystal.Final stage silicon single crystal being elongated growth need finish up to silicon single crystal rod; The tailing in work of silicon single crystal rod is the accurately processes of control of needs; Need know the weight of excess silicon material in the single crystal growing furnace; This just need weigh to the silicon single crystal rod that has grown into, and could accurately control silicon single crystal tailing in work like this.
Summary of the invention
The utility model technical issues that need to address provide a kind of excess silicon material single crystal furnace weighing device in the single crystal growing furnace of monitoring constantly.
For solving above-mentioned technical problem, the single crystal furnace weighing device of the utility model comprises claims and support that said support is fixed in the airtight cavity, and said title is fixed on the support; Said deserving to be called is provided with LOAD CELLS, and said LOAD CELLS is connected with data transmission device on being located at airtight cavity; Said title below is connected with the silicon single crystal pulling apparatus.
Said data transmission device is an aviation plug.
After adopting said structure; The weight of the good silicon single crystal rod of having grown can be measured in title through the silicon single crystal pulling apparatus; LOAD CELLS is transferred to system with the weight data that measures through data transmission device then, and system calculates the tailing in work that just can accurately control silicon single crystal rod after the weight of excess silicon material like this.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the utility model is done further detailed explanation.
Fig. 1 is the structural representation of the utility model single crystal furnace weighing device.
Among the figure: 1 is cavity, and 2 is support, and 3 for claiming that 4 is LOAD CELLS, and 5 is aviation plug, and 6 is pulley, and 7 are the line wheel
Embodiment
Single crystal furnace weighing device as shown in Figure 1 comprises title 3 and support 2, and said support 2 is fixed in the airtight cavity 1, and the growth of silicon single crystal rod receives Effect of Environmental such as temperature, pressure easily, so need vacuum-tight environment.Said title 3 is fixed on the support 2, and said title 3 is provided with LOAD CELLS 4, and said LOAD CELLS 4 is connected with data transmission device on being located at airtight cavity 1.LOAD CELLS 4 is through claiming that 3 obtain the gravimetric value of silicon single crystal rod.
Said title 3 belows are connected with the silicon single crystal pulling apparatus; Said silicon single crystal pulling apparatus comprises pulley 6 and line wheel 7; Claim that 3 connect with pulley 6 mutually, will lift online the wheel on 7 of wire-wound of usefulness, so just can constantly silicon single crystal rod be lifted up through the rotation of pulley 6.
Said data transmission device is an aviation plug 5, and aviation plug 5 is more sturdy and durable.
It is to elongate according to certain diameter that silicon single crystal rod is made, silicon wafer is elongated to bar-shaped, but can not be time terminal once with the silicon single crystal rod disconnection, ending that be slowly.The ending of silicon single crystal rod also needs accurate control, need know when begin silicon single crystal rod is finished up, and this silicon single crystal rod of having processed of will seeking knowledge has multiple, also remaining what raw material in the single crystal growing furnace.LOAD CELLS 4 is through claiming that 3 measure the value of silicon single crystal rod, and this gravimetric value is passed to master control system, and master control system compares the raw material weight of median and adding just can know the weight of remaining raw material in the single crystal growing furnace.When the weight of remaining raw material reaches the ending gravimetric value of setting, silicon single crystal rod is finished up with regard to system.
Certainly, described data transmission device can adopt other devices that is suitable for, and such conversion all drops within the scope of the utility model protection.
Claims (2)
1. a single crystal furnace weighing device comprises and claims and support that it is characterized in that: said support is fixed in the airtight cavity, and said title is fixed on the support; Said deserving to be called is provided with LOAD CELLS, and said LOAD CELLS is connected with data transmission device on being located at airtight cavity; Said title below is connected with the silicon single crystal pulling apparatus.
2. according to the described single crystal furnace weighing device of claim 1, it is characterized in that: said data transmission device is an aviation plug.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202430415U CN202187088U (en) | 2011-07-12 | 2011-07-12 | Weighing device for single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202430415U CN202187088U (en) | 2011-07-12 | 2011-07-12 | Weighing device for single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202187088U true CN202187088U (en) | 2012-04-11 |
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ID=45918549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202430415U Expired - Fee Related CN202187088U (en) | 2011-07-12 | 2011-07-12 | Weighing device for single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202187088U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102392295A (en) * | 2011-11-18 | 2012-03-28 | 无锡鼎晶光电科技有限公司 | Weighing device for sapphire single crystal furnace |
| CN102691098A (en) * | 2012-05-30 | 2012-09-26 | 苏州晶昇光电科技有限公司 | Growing method of sapphire crystal prepared by Kyropoulos method |
| CN102953121A (en) * | 2012-11-14 | 2013-03-06 | 吴江亿泰真空设备科技有限公司 | Novel seed crystal chamber of sapphire crystal growth furnace |
| CN103911653A (en) * | 2014-03-27 | 2014-07-09 | 中山大学 | Czochralski method intraocular lens growing device |
-
2011
- 2011-07-12 CN CN2011202430415U patent/CN202187088U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102392295A (en) * | 2011-11-18 | 2012-03-28 | 无锡鼎晶光电科技有限公司 | Weighing device for sapphire single crystal furnace |
| CN102392295B (en) * | 2011-11-18 | 2014-03-26 | 无锡鼎晶光电科技有限公司 | Weighing device for sapphire single crystal furnace |
| CN102691098A (en) * | 2012-05-30 | 2012-09-26 | 苏州晶昇光电科技有限公司 | Growing method of sapphire crystal prepared by Kyropoulos method |
| CN102953121A (en) * | 2012-11-14 | 2013-03-06 | 吴江亿泰真空设备科技有限公司 | Novel seed crystal chamber of sapphire crystal growth furnace |
| CN103911653A (en) * | 2014-03-27 | 2014-07-09 | 中山大学 | Czochralski method intraocular lens growing device |
| CN103911653B (en) * | 2014-03-27 | 2016-08-24 | 中山大学 | A kind of device of Czochralski grown artificial intraocular lenses |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120411 Termination date: 20140712 |
|
| EXPY | Termination of patent right or utility model |