CN101097162A - 紫外线监测系统及紫外线照射装置 - Google Patents

紫外线监测系统及紫外线照射装置 Download PDF

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Publication number
CN101097162A
CN101097162A CNA2007101082437A CN200710108243A CN101097162A CN 101097162 A CN101097162 A CN 101097162A CN A2007101082437 A CNA2007101082437 A CN A2007101082437A CN 200710108243 A CN200710108243 A CN 200710108243A CN 101097162 A CN101097162 A CN 101097162A
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CN
China
Prior art keywords
ultraviolet
sensor
chamber
ultraviolet ray
ray
Prior art date
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Pending
Application number
CNA2007101082437A
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English (en)
Chinese (zh)
Inventor
橘武史
林和志
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Kobe Steel Ltd
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Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of CN101097162A publication Critical patent/CN101097162A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/123—Ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
CNA2007101082437A 2006-06-30 2007-06-04 紫外线监测系统及紫外线照射装置 Pending CN101097162A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006181794 2006-06-30
JP2006181794A JP2008008848A (ja) 2006-06-30 2006-06-30 紫外線モニタリングシステム及び紫外線照射装置

Publications (1)

Publication Number Publication Date
CN101097162A true CN101097162A (zh) 2008-01-02

Family

ID=39011155

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007101082437A Pending CN101097162A (zh) 2006-06-30 2007-06-04 紫外线监测系统及紫外线照射装置

Country Status (4)

Country Link
JP (1) JP2008008848A (ja)
KR (1) KR100868162B1 (ja)
CN (1) CN101097162A (ja)
TW (1) TW200803975A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102243100A (zh) * 2011-04-20 2011-11-16 东南大学 紫外线照射量的检测器及检测方法
CN102901561A (zh) * 2011-07-25 2013-01-30 台湾积体电路制造股份有限公司 动态、实时紫外线辐射强度监控器
CN106796903A (zh) * 2014-10-14 2017-05-31 科磊股份有限公司 用于沿着制造工艺线测量晶片的辐射及温度暴露的方法及系统
CN108168693A (zh) * 2018-01-16 2018-06-15 汕头东风印刷股份有限公司 一种uv能量检测装置
CN110160645A (zh) * 2019-05-13 2019-08-23 郑州大学 一种基于金刚石的紫外探测预警装置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8398816B1 (en) 2006-03-28 2013-03-19 Novellus Systems, Inc. Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
JP4830878B2 (ja) * 2007-02-01 2011-12-07 ウシオ電機株式会社 真空紫外線モニタ及びそれを用いた真空紫外線照射装置
CN102397573B (zh) * 2010-09-17 2014-08-06 上海广茂达光艺科技股份有限公司 用于紫外消毒装置的紫外辐射剂量的在线监测装置
KR102055014B1 (ko) * 2011-03-23 2020-01-22 노벨러스 시스템즈, 인코포레이티드 자외선 경화 툴의 동-위치 자외선 강도 측정
CN104157321B (zh) * 2014-08-04 2017-02-15 大连民族学院 低能大流强材料辐照装置
JP6401628B2 (ja) * 2015-02-23 2018-10-10 リョービＭｈｉグラフィックテクノロジー株式会社 印刷機
US10388546B2 (en) 2015-11-16 2019-08-20 Lam Research Corporation Apparatus for UV flowable dielectric
JP6828822B2 (ja) * 2017-09-04 2021-02-10 株式会社島津製作所 高周波電源ｕｖランプモニタおよびこれを用いた全有機炭素計
DE102021003128A1 (de) * 2021-06-17 2022-12-22 Rausch Rehab GmbH Vorrichtung und Verfahren zur Intensitätsmessung von der durch eine UV-Strahlungsquelle erzeugten UV-Strahlung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3733482B2 (ja) * 2002-02-13 2006-01-11 千代田工販株式会社 紫外線照射装置
JP3964863B2 (ja) * 2003-12-22 2007-08-22 株式会社キーエンス 紫外線照射装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102243100A (zh) * 2011-04-20 2011-11-16 东南大学 紫外线照射量的检测器及检测方法
CN102901561A (zh) * 2011-07-25 2013-01-30 台湾积体电路制造股份有限公司 动态、实时紫外线辐射强度监控器
CN106796903A (zh) * 2014-10-14 2017-05-31 科磊股份有限公司 用于沿着制造工艺线测量晶片的辐射及温度暴露的方法及系统
CN108168693A (zh) * 2018-01-16 2018-06-15 汕头东风印刷股份有限公司 一种uv能量检测装置
CN110160645A (zh) * 2019-05-13 2019-08-23 郑州大学 一种基于金刚石的紫外探测预警装置

Also Published As

Publication number Publication date
KR100868162B1 (ko) 2008-11-12
TW200803975A (en) 2008-01-16
JP2008008848A (ja) 2008-01-17
KR20080003210A (ko) 2008-01-07

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Open date: 20080102