CN101093843A - Electrode structure in flat panel display, and fabricating method - Google Patents
Electrode structure in flat panel display, and fabricating method Download PDFInfo
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- CN101093843A CN101093843A CN 200610082970 CN200610082970A CN101093843A CN 101093843 A CN101093843 A CN 101093843A CN 200610082970 CN200610082970 CN 200610082970 CN 200610082970 A CN200610082970 A CN 200610082970A CN 101093843 A CN101093843 A CN 101093843A
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Abstract
The structure of electrode includes basal plate of glass, common electrodes formed on basal plate of glass, grid line, data lines, pixel electrodes, and TFT device. The common electrodes are located under pixel electrodes. Character is that frame like structures of metal are prepared on the common electrodes. Through the frame like structures, electrical connections in transverse and longitudinal between adjacent common electrodes are implemented. The invention also discloses the method for manufacturing the structure of electrode. The method can raise speed for charging and discharging pixel common electrodes, and can omit metal lead wires in use for reducing voltage differences between each graph of common electrode outside active area so as to avoid parasitic capacitance formed between these metal lead wires and signal lines, scanning lines.
Description
Technical field
The present invention relates to a kind of new electrode structure in flat panel display field, be specifically related to a kind of new electrode structure and the manufacture method thereof of wide visual angle technology.
Background technology
General T N shape LCD has the shortcoming of narrow viewing angle, and in order to improve the visual angle of LCD, the method at some wide visual angles is suggested.
At present, at existing wide visual angle method (for example, fringing field effect's method of switching, be FFS) design in, with public electrode be made in the TFT device below, utilize the voltage between public electrode and the pixel electrode, change the distribution arrangement of liquid crystal molecule, reach display effect.In these methods,, make public electrode form figure by photoetching in order to prevent short circuit between the scan line.Like this in order to make public electrode charging when charging complete, need public electrode be coupled together the formation matrix structure with ITO, simultaneously, also to couple together by the figure of metal lead wire in addition in effective viewing area (Active area) with these public electrodes, can the voltage difference between the common pattern of electrodes of each pixel be reduced so as far as possible, improve the effect of charging.
Shown in Fig. 1 to 1f, the pixel matrix structure of prior art comprises the transparent insulation substrate, is formed on the public electrode 1 on the transparent insulation substrate, be formed on one group of grid line 2 and gate electrode on the transparent insulation substrate, be formed on one group of horizontal lead-in wire 11 that is connected public electrode on transparent insulation substrate and the public electrode 1, the horizontal lead-in wire 11 that connects public electrode is near the edge of grid lines 2 and parallel with grid line 2.Gate insulation layer 3 is positioned at the top of grid line and gate electrode, and active layer and ohmic contact layer 4 are formed on the gate insulation layer of gate electrode top.Source-drain electrode 5 and data wire are formed on active layer and the ohmic contact layer 4.Passivation protection layer 6 is formed on the top of source-drain electrode 5, and forms passivation protection layer via hole 7 above drain electrode, and pixel electrode 8 is formed on the passivation protection layer 6, and is connected with pixel electrode 8 by passivation protection layer via hole 7; Insulating barrier above public electrode up and down and passivation protection layer form near grid line 2 places and expose the public electrode and the horizontal via hole of lead-in wire 11, and are realized vertical connection 10 of public electrode by transparent conductive film by this via hole.Its technological process is as follows:
At first deposition ground floor transparent membrane (1st ITO) on glass substrate forms public electrode 1 figure by photoetching, as shown in Figure 1a again.
Then, depositing metal films on substrate, photoetching forms grid line 2 and gate electrode (Gate), forms the horizontal lead-in wire 11 that public electrode 8 is laterally linked together simultaneously, and this is in order to reduce the electrical potential difference between the horizontal public electrode, shown in Fig. 1 b.
Make gate insulation layer 3 films, active layer and ohmic contact layer 4 films and photoetching and form the silicon island, shown in Fig. 1 c.
Make metallic film and photoetching and form source-drain electrode 5 and data wire, wherein data wire and source electrode are one, shown in Fig. 1 d.
The via hole at close grid line place on passivation protection layer via hole 7 on making passivation protection layer 6 and the photoetching formation drain electrode, the public electrode is shown in Fig. 1 e
Make transparent electrode thin film, use the reticle of pixel electrode again, make pixel electrode 8 and the vertical of public electrode and be connected 10, the connection between the public electrode is longitudinally finished (utilizing the via hole of previous step that this connection is finished), shown in Fig. 1 f.
Although adopt above-mentioned project organization and manufacture method to reduce voltage difference between the common pattern of electrodes, improve the effect of charging.But She Ji shortcoming is like this, and public electrode resistance is still bigger, and the speed of charging and discharge is still slower.In addition, outside the effective viewing area of this structure (Active area), must connect to reduce the voltage difference between each common pattern of electrodes with metal lead wire, these metal lead wires and holding wire and scan line all exist the place of overlapping, can form some parasitic capacitances, cause the delay of scan line and holding wire.
Summary of the invention
The objective of the invention is in order to overcome the defective of prior art, electrode structure and manufacture method thereof in a kind of flat-panel monitor are provided, thereby can improve the speed of pixel charging and discharge, can omit the outer metal lead wire that is used for reducing the voltage difference between each common pattern of electrodes in effective viewing area (Active area), avoid because the parasitic capacitance that forms between these metal lead wires and holding wire and the scan line.
To achieve these goals, the invention provides the electrode structure in a kind of flat-panel monitor, comprise: glass substrate, be formed at public electrode, grid line, data wire, pixel electrode and TFT device on the glass substrate, public electrode is positioned at the below of pixel electrode, and be manufactured with metal frame shape structure on the public electrode, and realize the electrical connection on horizontal and vertical between the adjacent public electrode by this frame shape structure.
Wherein, the metal frame shape physical dimension on the described public electrode is in the size range of corresponding with it black matrix lightproof part.Described public electrode is electrically connected with the public electrode on the adjacent pixel in the horizontal and connects by the metal connecting line, metal connecting line and be positioned at the below of data wire, and between data wire, separate by insulating barrier.The connection in the vertical of metal structure on the described public electrode connects by conductive film, and metal lead wire is positioned at the top of grid line, and separates by insulating barrier in grid line, and the two ends of lead-in wire link to each other with metal frame shape structure on the public electrode by via hole.
To achieve these goals, the present invention also provides the manufacture method of the electrode structure in a kind of flat-panel monitor simultaneously, comprising:
The present invention, can reduce each 1st ITO public electrode resistance effectively, thereby improve the charging and the velocity of discharge of each pixel effectively owing to increased the metal structure of frame shape or strip on public electrode with respect to prior art.In addition, the present invention is owing to adopted metal frame shape structure on the public electrode, can omit the outer metal lead wire that is used for reducing the voltage difference between each common pattern of electrodes in effective viewing area (Active area), avoid because the parasitic capacitance that forms between these metal lead wires and holding wire and the scan line.The structure of metal frame shape of the present invention or strip can be positioned at black matrix below, and size can not have influence on effective display area (being aperture opening ratio) in the lighttight scope of black matrix.
Description of drawings
Fig. 1 is the pixel region schematic diagram (for outstanding invention part, pixel electrode and semiconductor active layer incomplete structure) of prior art;
Fig. 1 a is that prior art is finished the schematic cross-section that public electrode is made the A1-A1 place;
Fig. 1 b is that prior art is finished the metal lead wire that grid line, gate electrode and public electrode laterally link together and made the schematic cross-section at A1-A1 place;
Fig. 1 c is that prior art is finished the schematic cross-section that the silicon island makes the A1-A1 place;
Fig. 1 d is that prior art is finished the schematic cross-section that source, drain electrode 5 and data wire are made the A1-A1 place;
Fig. 1 e be prior art finish passivation layer and on via hole make the schematic cross-section at A1-A1 place;
Fig. 1 f is vertical schematic cross-section of making the A1-A1 place that is connected that prior art is finished pixel electrode and public electrode;
Fig. 2 is pixel region schematic diagram among the present invention (for outstanding invention part, pixel electrode and semiconductor active layer incomplete structure);
Fig. 3 is along the sectional view of B1-B1 direction among Fig. 2;
Fig. 3 a finishes the schematic cross-section that public electrode is made the B1-B1 place for the present invention;
Fig. 3 b finishes the frame shape structure on grid line, gate electrode and the public electrode for the present invention and laterally is connected the schematic cross-section at making B1-B1 place;
Fig. 3 c finishes the schematic cross-section that the silicon island makes the B1-B1 place for the present invention;
Fig. 3 d finishes the schematic cross-section that source, drain electrode and data wire are made the B1-B1 place for the present invention;
Fig. 3 e for the present invention finish passivation layer and on via hole make the schematic cross-section at B1-B1 place;
Fig. 3 f finishes vertical schematic cross-section of making the B1-B1 place that is connected of pixel electrode and public electrode for the present invention;
Fig. 4 is positioned at the schematic diagram of the black matrix of color film glass substrate below for metal frame assembling structure of the present invention.
Mark among the figure:
1, public electrode; 2, grid line; 3, gate insulation layer; 4, active layer and ohmic contact layer; 5, source-drain electrode; 6, passivation protection layer; 7, passivation protection layer via hole; 8, pixel electrode; 9, metal frame shape structure; 10, vertically go between; 11, laterally go between; 12, the via hole at close grid line place on the public electrode; 13, color film glass substrate; 14, black matrix (Black matrix); 15, glass substrate.
Embodiment
As Fig. 2, shown in Fig. 3 and Fig. 3 a to 3f, pixel matrix structure of the present invention comprises transparent insulation substrate (glass substrate), be formed on the public electrode 1 on the transparent insulation substrate, be formed on one group of grid line 2 and gate electrode on the transparent insulation substrate, be formed on the metal frame shape structure 9 on the public electrode 1, metal frame shape structure 9 links to each other by horizontal lead-in wire 11 with adjacent metal frame shape, the edge of horizontal lead-in wire 11 close grid lines 2 and parallel with grid line 2, laterally lead-in wire 11 with the data wire infall laterally lead-in wire 11 be positioned at data wire below, and between data wire, separate by insulating barrier.Gate insulation layer 3 is positioned at the top of grid line 2 and gate electrode, and active layer and ohmic contact layer 4 are formed on the gate insulation layer of gate electrode top.Source-drain electrode 5 and data wire are formed on active layer and the ohmic contact layer 4, and data wire and drain electrode are structure as a whole.Passivation protection layer 6 is formed on the top of source-drain electrode 5, and forms passivation protection layer via hole 7 above drain electrode, and pixel electrode 8 is formed on the passivation protection layer 6, and is connected with pixel electrode 8 by passivation protection layer 7; Insulating barrier and passivation protection layer place near grid line 2 above public electrode up and down form the via hole that exposes metal frame shape structure 9; and by of the vertical connection of this via hole by transparent conductive film realization public electrode; its connecting line is vertically to go between 10; vertically lead-in wire 10 and grid line 2 infalls, 10 tops that are positioned at grid line 2 vertically go between.
As shown in Figure 4, the size Control that the present invention is formed on the metal frame shape structure 9 on the public electrode preferably is controlled in the size range of black matrix 14 lightproof parts of corresponding with it color film glass substrate 13 (among the figure part-structure being omitted), can not have influence on effective display area (being aperture opening ratio) like this.
Above-mentioned provide be the preferred forms of structure of the present invention, the present invention also can carry out following accommodation except that said mechanism, as changing metal frame shape structure 9 into two parallel metal wires, with 10 connections that become metallic film that vertically go between, suchlike accommodation all should be considered as category of the present invention.
Form a metal frame shape structure 9 at each public electrode among the present invention, reduce the resistance of each public electrode 1, can improve the charging and the velocity of discharge of each pixel portion effectively.In addition, the present invention is owing to adopted metal frame shape structure on the public electrode, can omit the outer metal lead wire that is used for reducing the voltage difference between each common pattern of electrodes in effective viewing area (Active area), avoid owing to form the new electrode structure and the manufacture method thereof of parasitic capacitance between these metal lead wires and holding wire and the scan line.
Below in conjunction with manufacturing process steps shown in Fig. 2, structure shown in Figure 3 and Fig. 3 a to 3f, the manufacture method of structure of the present invention is described.
At first deposition ground floor transparent membrane (1st ITO) on glass substrate forms public electrode 1 figure by photoetching again, and each pixel graphics does not interconnect after current photoetching, shown in Fig. 3 a.
Then, depositing metal films on substrate, photoetching form grid line 2 and gate electrode (Gate) metal frame shape structure 9 and laterally go between 11, and wherein metal frame shape structure is positioned at the edge, surrounding on the public electrode, laterally lead-in wire 11 transversely connects the public electrode of neighbor, shown in Fig. 3 b.
On the glass substrate shown in Fig. 3 b, make gate insulation layer 3 films, active layer and ohmic contact layer 4 films and photoetching formation silicon island, shown in Fig. 3 c.
Make metallic film and photoetching formation source-drain electrode 5 and data wire on the glass substrate shown in Fig. 3 c, wherein data wire and source electrode are structure as a whole, shown in Fig. 3 d.
The via hole 12 at close grid line place on the passivation protection layer via hole 7 on making passivation protection layer 6 on the glass substrate shown in Fig. 3 d and the photoetching formation drain electrode, public electrode; wherein passivation protection layer via hole 7 exposes the grid metal on the grid line; the metal that exposes metal frame shape structure on the public electrode near the via hole 12 at grid line place is shown in Fig. 3 e
On the glass substrate shown in Fig. 3 e, make second layer transparent membrane; use the reticle of pixel electrode again; make pixel electrode 8 and the vertical of public electrode and be connected 10; wherein pixel electrode 8 couples together by passivation protection layer via hole 7 and drain electrode; vertically connect 10 via holes 12 by close grid line place on the public electrode; to couple together between the public electrode longitudinally, shown in Fig. 3 f.
More than explanation and accompanying drawing illustrate specific implementations of the present invention, but self-evident, the present invention can carry out various distortion by those skilled in the art and implement, and as the shape of conversion metal frame shape, change material horizontal or vertically lead-in wire etc.Execution mode that has been out of shape like that etc. can not break away from technological thought of the present invention individually to be understood, and must regard apparatus of the present invention as and manufacture method comprises in the scope.
Claims (5)
1, the electrode structure in a kind of flat-panel monitor, comprise: glass substrate, be formed at public electrode, grid line, data wire, pixel electrode and TFT device on the glass substrate, public electrode is positioned at the below of pixel electrode, it is characterized in that: be manufactured with metal frame shape structure on the public electrode, pass through the horizontal and vertical electrical connection of this metal frame shape structure between the adjacent public electrode.
2, pixel electrode structure according to claim 1 is characterized in that: the metal frame shape physical dimension on the described public electrode is in the size range of corresponding with it black matrix lightproof part.
3, electrode structure according to claim 1 and 2, it is characterized in that: described public electrode is electrically connected with the public electrode on the adjacent pixel in the horizontal and connects by the metal connecting line, metal connecting line and be positioned at the below of data wire, and between data wire, separate by insulating barrier.
4, electrode structure according to claim 1 and 2, it is characterized in that: the connection in the vertical of the metal structure on the described public electrode connects by conductive film, metal lead wire is positioned at the top of grid line, and separate by insulating barrier in grid line, the two ends of lead-in wire link to each other with metal frame shape structure on the public electrode by via hole.
5, the manufacture method of the electrode structure in a kind of flat-panel monitor is characterized in that, comprising:
Step 1, deposition ground floor transparent membrane forms common pattern of electrodes by photoetching again on dielectric substrate;
Step 2, depositing metal films on the substrate of completing steps one, photoetching forms metal frame shape structure on grid line and gate electrode, the public electrode, and transversely is connected the horizontal lead-in wire of the public electrode of neighbor;
Step 3 is made gate insulation layer film, active layer and ohmic contact layer film on the substrate of completing steps two and photoetching forms the silicon island;
Step 4 is made metallic film on the substrate of completing steps three and photoetching forms source, drain electrode and data wire;
Step 5, make on the substrate of completing steps four passivation protection layer and photoetching form passivation protection layer via hole on the drain electrode, and public electrode near the via hole at grid line place, make passivation protection layer via hole expose grid metal on the grid line, make the metal that exposes metal frame shape structure on the public electrode near the via hole at grid line place;
Step 6; making second layer transparent membrane and photoetching formation pixel electrode and the vertical of public electrode on the substrate of completing steps five is connected; pixel electrode couples together by passivation protection layer via hole and drain electrode; vertical connection of public electrode is by the via hole at close grid line place on the public electrode, and public electrode couples together longitudinally.
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