CN101093793B - 用于制造平板显示器的设备 - Google Patents

用于制造平板显示器的设备 Download PDF

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Publication number
CN101093793B
CN101093793B CN2007101381918A CN200710138191A CN101093793B CN 101093793 B CN101093793 B CN 101093793B CN 2007101381918 A CN2007101381918 A CN 2007101381918A CN 200710138191 A CN200710138191 A CN 200710138191A CN 101093793 B CN101093793 B CN 101093793B
Authority
CN
China
Prior art keywords
loam cake
chamber
link
vacuum chamber
drive unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007101381918A
Other languages
English (en)
Chinese (zh)
Other versions
CN101093793A (zh
Inventor
李荣钟
崔浚泳
曺生贤
安贤焕
孙石民
安成一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Display Process Engineering Co Ltd
ADP Engineering Co Ltd
Original Assignee
ADP Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020040083843A external-priority patent/KR100648403B1/ko
Priority claimed from KR1020040094230A external-priority patent/KR100700292B1/ko
Priority claimed from KR1020040102975A external-priority patent/KR100856679B1/ko
Priority claimed from KR1020040111693A external-priority patent/KR100596339B1/ko
Application filed by ADP Engineering Co Ltd filed Critical ADP Engineering Co Ltd
Publication of CN101093793A publication Critical patent/CN101093793A/zh
Application granted granted Critical
Publication of CN101093793B publication Critical patent/CN101093793B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
CN2007101381918A 2004-10-06 2005-09-30 用于制造平板显示器的设备 Expired - Fee Related CN101093793B (zh)

Applications Claiming Priority (15)

Application Number Priority Date Filing Date Title
KR10-2004-0079416 2004-10-06
KR1020040079416A KR100622846B1 (ko) 2004-10-06 2004-10-06 평판표시소자 제조장치
KR1020040079416 2004-10-06
KR10-2004-0083843 2004-10-20
KR1020040083843 2004-10-20
KR1020040083843A KR100648403B1 (ko) 2004-10-20 2004-10-20 플라즈마 처리장치
KR1020040094230 2004-11-17
KR10-2004-0094230 2004-11-17
KR1020040094230A KR100700292B1 (ko) 2004-11-17 2004-11-17 평판표시소자 제조장치 유지/보수용 탑재장치
KR1020040102975A KR100856679B1 (ko) 2004-12-08 2004-12-08 평판표시소자 제조장치
KR10-2004-0102975 2004-12-08
KR1020040102975 2004-12-08
KR1020040111693 2004-12-24
KR10-2004-0111693 2004-12-24
KR1020040111693A KR100596339B1 (ko) 2004-12-24 2004-12-24 평판표시소자 제조장치 유지/보수용 개폐장치

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB2005101079806A Division CN100550283C (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备

Publications (2)

Publication Number Publication Date
CN101093793A CN101093793A (zh) 2007-12-26
CN101093793B true CN101093793B (zh) 2010-10-13

Family

ID=36788349

Family Applications (5)

Application Number Title Priority Date Filing Date
CNB2005101079806A Expired - Fee Related CN100550283C (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备
CNA2007101381922A Pending CN101093794A (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备
CN2007101381918A Expired - Fee Related CN101093793B (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备
CNB2007101381903A Expired - Fee Related CN100511582C (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备
CNB2007101381890A Expired - Fee Related CN100521080C (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备

Family Applications Before (2)

Application Number Title Priority Date Filing Date
CNB2005101079806A Expired - Fee Related CN100550283C (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备
CNA2007101381922A Pending CN101093794A (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备

Family Applications After (2)

Application Number Title Priority Date Filing Date
CNB2007101381903A Expired - Fee Related CN100511582C (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备
CNB2007101381890A Expired - Fee Related CN100521080C (zh) 2004-10-06 2005-09-30 用于制造平板显示器的设备

Country Status (2)

Country Link
KR (1) KR100622846B1 (ko)
CN (5) CN100550283C (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009007897A1 (de) * 2009-02-08 2010-08-12 Oerlikon Trading Ag, Trübbach Vakuumkammer für Beschichtungsanlagen und Verfahren zum Herstellen einer Vakuumkammer für Beschichtungsanlagen
JP5526988B2 (ja) * 2010-04-28 2014-06-18 東京エレクトロン株式会社 基板処理装置及び基板処理システム
JP5560909B2 (ja) * 2010-05-31 2014-07-30 東京エレクトロン株式会社 蓋体保持治具
JP5482500B2 (ja) * 2010-06-21 2014-05-07 東京エレクトロン株式会社 基板処理装置
KR101985006B1 (ko) * 2010-11-30 2019-06-03 주식회사 탑 엔지니어링 평판 디스플레이 셀의 보강 실링 장치
PL2574903T3 (pl) * 2011-09-30 2016-01-29 Mettler Toledo Gmbh Przyrząd pomiarowy do grawimetrycznego oznaczania wilgotności
CN103021910B (zh) * 2012-11-30 2015-09-09 北京七星华创电子股份有限公司 可移动式密封装置
CN103552107B (zh) * 2013-11-05 2016-03-09 金龙机电（东莞）有限公司 一种触摸屏和液晶显示屏的拆解装置及拆解方法
CN104451581B (zh) * 2014-12-29 2017-02-22 中国科学院长春光学精密机械与物理研究所 磁控溅射镀膜真空箱体
CN106898535B (zh) * 2015-12-21 2018-11-20 中微半导体设备(上海)有限公司 半导体处理设备、系统与半导体处理设备的顶盖开启方法
CN107978695B (zh) * 2017-12-04 2020-06-02 万金芬 一种oled模组阶段用制造设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6009667A (en) * 1997-09-30 2000-01-04 Tokyo Electron Limited Hinge mechanism for supporting the open-close cover of a vacuum-process apparatus
US6609877B1 (en) * 2000-10-04 2003-08-26 The Boc Group, Inc. Vacuum chamber load lock structure and article transport mechanism

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5830272A (en) * 1995-11-07 1998-11-03 Sputtered Films, Inc. System for and method of providing a controlled deposition on wafers
JP2839478B2 (ja) 1996-10-16 1998-12-16 日本電熱計器株式会社 開閉装置
US6359775B1 (en) * 1999-08-11 2002-03-19 Micron Technology, Inc. Accessible desktop computer
KR100372147B1 (ko) * 1999-10-15 2003-02-14 두산중공업 주식회사 질소산화물 저감형 미분탄 버너
KR100458889B1 (ko) * 2003-03-12 2004-12-03 주식회사 에이디피엔지니어링 Ｆｐｄ 제조장치
KR100515955B1 (ko) * 2003-11-18 2005-09-23 주식회사 에이디피엔지니어링 상부 커버를 개폐할 수 있는 개폐장치가 구비된평판표시소자 제조장치의 공정챔버

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6009667A (en) * 1997-09-30 2000-01-04 Tokyo Electron Limited Hinge mechanism for supporting the open-close cover of a vacuum-process apparatus
US6609877B1 (en) * 2000-10-04 2003-08-26 The Boc Group, Inc. Vacuum chamber load lock structure and article transport mechanism

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP平10-89482A 1998.04.07
US 6009667 A,全文.

Also Published As

Publication number Publication date
CN101093794A (zh) 2007-12-26
CN101093792A (zh) 2007-12-26
KR20060030584A (ko) 2006-04-11
CN100550283C (zh) 2009-10-14
CN100511582C (zh) 2009-07-08
KR100622846B1 (ko) 2006-09-19
CN101093793A (zh) 2007-12-26
CN101101862A (zh) 2008-01-09
CN1790611A (zh) 2006-06-21
CN100521080C (zh) 2009-07-29

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Granted publication date: 20101013

Termination date: 20180930

CF01 Termination of patent right due to non-payment of annual fee