CN101092234A - 碳纳米管膜的生长装置及方法 - Google Patents
碳纳米管膜的生长装置及方法 Download PDFInfo
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- CN101092234A CN101092234A CN 200610061239 CN200610061239A CN101092234A CN 101092234 A CN101092234 A CN 101092234A CN 200610061239 CN200610061239 CN 200610061239 CN 200610061239 A CN200610061239 A CN 200610061239A CN 101092234 A CN101092234 A CN 101092234A
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- reative cell
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- 238000000034 method Methods 0.000 title claims abstract description 18
- 229910021392 nanocarbon Inorganic materials 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 239000002238 carbon nanotube film Substances 0.000 claims description 53
- 238000005452 bending Methods 0.000 claims description 10
- 239000003054 catalyst Substances 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 8
- 239000002041 carbon nanotube Substances 0.000 abstract description 6
- 239000012528 membrane Substances 0.000 abstract description 6
- 229910021393 carbon nanotube Inorganic materials 0.000 abstract 5
- 239000007789 gas Substances 0.000 description 16
- 238000000151 deposition Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000002086 nanomaterial Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003063 flame retardant Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- -1 pottery Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
Description
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2006100612395A CN101092234B (zh) | 2006-06-21 | 2006-06-21 | 碳纳米管膜的生长装置及方法 |
US11/608,612 US8900367B2 (en) | 2006-06-16 | 2006-12-08 | Apparatus and method for manufacturing large-area carbon nanotube films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2006100612395A CN101092234B (zh) | 2006-06-21 | 2006-06-21 | 碳纳米管膜的生长装置及方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101092234A true CN101092234A (zh) | 2007-12-26 |
CN101092234B CN101092234B (zh) | 2011-03-23 |
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Application Number | Title | Priority Date | Filing Date |
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CN2006100612395A Active CN101092234B (zh) | 2006-06-16 | 2006-06-21 | 碳纳米管膜的生长装置及方法 |
Country Status (1)
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CN (1) | CN101092234B (zh) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101605409A (zh) * | 2008-06-13 | 2009-12-16 | 清华大学 | 面热源 |
CN102092704A (zh) * | 2009-12-11 | 2011-06-15 | 北京富纳特创新科技有限公司 | 碳纳米管阵列的制备装置及制备方法 |
CN101636004B (zh) * | 2008-07-25 | 2012-06-13 | 清华大学 | 面热源 |
CN102517633A (zh) * | 2011-12-26 | 2012-06-27 | 彭鹏 | 一种生长石墨烯的支架及方法 |
CN101920955B (zh) * | 2009-06-09 | 2012-09-19 | 清华大学 | 碳纳米管膜保护结构及其制备方法 |
CN101636007B (zh) * | 2008-07-25 | 2012-11-21 | 清华大学 | 面热源 |
US8410676B2 (en) | 2007-09-28 | 2013-04-02 | Beijing Funate Innovation Technology Co., Ltd. | Sheet-shaped heat and light source, method for making the same and method for heating object adopting the same |
US8450930B2 (en) | 2007-10-10 | 2013-05-28 | Tsinghua University | Sheet-shaped heat and light source |
CN106185876A (zh) * | 2016-08-31 | 2016-12-07 | 无锡东恒新能源科技有限公司 | 一种带热处理的反应装置和制备碳纳米管的方法 |
CN106185871A (zh) * | 2016-08-31 | 2016-12-07 | 无锡东恒新能源科技有限公司 | 一种带有网格电极的反应装置和碳纳米管的制备方法 |
CN106185875A (zh) * | 2016-08-31 | 2016-12-07 | 无锡东恒新能源科技有限公司 | 一种碳纳米管的制备装置和制备方法 |
CN106185872A (zh) * | 2016-08-31 | 2016-12-07 | 无锡东恒新能源科技有限公司 | 一种带升降基底的反应装置及碳纳米管制备的方法 |
CN113046719A (zh) * | 2021-03-16 | 2021-06-29 | 江苏集萃脑机融合智能技术研究所有限公司 | 确定二维材料生长合金催化剂中金属原子最佳配比的方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1312033C (zh) * | 2005-07-01 | 2007-04-25 | 清华大学 | 一种大批量制备超长碳纳米管阵列的方法 |
-
2006
- 2006-06-21 CN CN2006100612395A patent/CN101092234B/zh active Active
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8410676B2 (en) | 2007-09-28 | 2013-04-02 | Beijing Funate Innovation Technology Co., Ltd. | Sheet-shaped heat and light source, method for making the same and method for heating object adopting the same |
US8450930B2 (en) | 2007-10-10 | 2013-05-28 | Tsinghua University | Sheet-shaped heat and light source |
CN101605409A (zh) * | 2008-06-13 | 2009-12-16 | 清华大学 | 面热源 |
CN101605409B (zh) * | 2008-06-13 | 2012-11-21 | 清华大学 | 面热源 |
CN101636004B (zh) * | 2008-07-25 | 2012-06-13 | 清华大学 | 面热源 |
CN101636007B (zh) * | 2008-07-25 | 2012-11-21 | 清华大学 | 面热源 |
CN101920955B (zh) * | 2009-06-09 | 2012-09-19 | 清华大学 | 碳纳米管膜保护结构及其制备方法 |
CN102092704B (zh) * | 2009-12-11 | 2013-11-06 | 北京富纳特创新科技有限公司 | 碳纳米管阵列的制备装置及制备方法 |
CN102092704A (zh) * | 2009-12-11 | 2011-06-15 | 北京富纳特创新科技有限公司 | 碳纳米管阵列的制备装置及制备方法 |
CN102517633A (zh) * | 2011-12-26 | 2012-06-27 | 彭鹏 | 一种生长石墨烯的支架及方法 |
CN106185876A (zh) * | 2016-08-31 | 2016-12-07 | 无锡东恒新能源科技有限公司 | 一种带热处理的反应装置和制备碳纳米管的方法 |
CN106185871A (zh) * | 2016-08-31 | 2016-12-07 | 无锡东恒新能源科技有限公司 | 一种带有网格电极的反应装置和碳纳米管的制备方法 |
CN106185875A (zh) * | 2016-08-31 | 2016-12-07 | 无锡东恒新能源科技有限公司 | 一种碳纳米管的制备装置和制备方法 |
CN106185872A (zh) * | 2016-08-31 | 2016-12-07 | 无锡东恒新能源科技有限公司 | 一种带升降基底的反应装置及碳纳米管制备的方法 |
CN113046719A (zh) * | 2021-03-16 | 2021-06-29 | 江苏集萃脑机融合智能技术研究所有限公司 | 确定二维材料生长合金催化剂中金属原子最佳配比的方法 |
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Publication number | Publication date |
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CN101092234B (zh) | 2011-03-23 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CI01 | Correction of invention patent gazette | ||
CI01 | Correction of invention patent gazette |
Correction item: Patentee|Address|Co-patentee Correct: Tsinghua University|Hung Fujin Precision Industrial (Shenzhen) Co., Ltd. False: Hongfujin Precision Industry (Shenzhen) Co., Ltd.|518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Number: 12 Volume: 27 |
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CI02 | Correction of invention patent application | ||
CI02 | Correction of invention patent application |
Correction item: Patentee|Address|Co-patentee Correct: Tsinghua University|100084 Department of Physics, Tsinghua University, Haidian District, Beijing|Hung Fujin Precision Industrial (Shenzhen) Co., Ltd. False: Hongfujin Precision Industry (Shenzhen) Co., Ltd.|518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Number: 12 Page: The title page Volume: 27 |
|
ERR | Gazette correction |
Free format text: CORRECT: PATENTEE; ADDRESS; CO-PATENTEE; FROM: HONGFUJIN PRECISION INDUSTRY (SHENZHEN) CO., LTD.;518109 NO. 2, EAST RING 2ND ROAD, YOUSONG 10TH INDUSTRIAL ZONE, LONGHUA TOWN, BAOAN DISTRICT, SHENZHEN CITY, GUANGDONG PROVINCE TO: TSINGHUA UNIVERSITY;100084 DEPARTMENT OF PHYSICS, TSINGHUA UNIVERSITY, HAIDIAN DISTRICT, BEIJING; HONGFUJIN PRECISION INDUSTRY (SHENZHEN) CO., LTD. |