CN101073171A - LiCoO2的沉积 - Google Patents
LiCoO2的沉积 Download PDFInfo
- Publication number
- CN101073171A CN101073171A CNA2005800423058A CN200580042305A CN101073171A CN 101073171 A CN101073171 A CN 101073171A CN A2005800423058 A CNA2005800423058 A CN A2005800423058A CN 200580042305 A CN200580042305 A CN 200580042305A CN 101073171 A CN101073171 A CN 101073171A
- Authority
- CN
- China
- Prior art keywords
- layer
- licoo
- substrate
- deposition
- described method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Abstract
Description
实施例# | 靶功率(kW) | 偏压功率(W) | 反向时间(μs) | 频率(kHz) | Ar(sccm) | O2(sccm) | 初始衬底温度(在沉积过程中的温度)(℃) | 沉积时间(秒) | 膜厚度(μm) |
1 | 2 | 0 | 1.6 | 250 | 80 | 0 | 30 | 10000 | 3.9 |
2 | 2 | 0 | 250 | 72 | 8 | 30 | 7200 | 1.7 | |
3 | 2 | 100 | 250 | 72 | 8 | 30 | 7200 | 1.34 | |
4 | 2 | 100 | 250 | 76 | 4 | 30 | 7200 | 1.57 | |
5 | 2 | 100 | 250 | 76 | 4 | 200 | 7200 | 1.3 | |
6 | 2 | 100 | 250 | 74 | 6 | 200 | 7200 | 1.3 | |
7 | 2 | 0 | 300 | 72 | 8 | 30 | 7200 | 1.58 | |
8 | 2 | 0 | 300 | 74 | 6 | 30 | 7200 | ||
9 | 2 | 100 | 300 | 74 | 6 | 30 | 7200 | ||
10 | 2 | 100 | 300 | 72 | 8 | 30 | 7200 | ||
11 | 2 | 100 | 300 | 70 | 10 | 30 | 7200 | ||
12 | 2 | 0 | 300 | 70 | 10 | 30 | 7200 | ||
13 | 2 | 0 | 300 | 72 | 8 | 30 | 7200 | 1.58 | |
14 | 2 | 0 | 300 | 74 | 6 | 30 | 7200 | ||
15 | 2 | 0 | 300 | 60 | 20 | 30 | 7200 |
16 | 2 | 0 | 300 | 50 | 30 | 30 | 7200 | ||
17 | 2 | 200 | 300 | 60 | 20 | 30 | 7200 | ||
18 | 2 | 50 | 300 | 60 | 20 | 30 | 7200 | ||
19 | 2 | 0 | 300 | 70 | 10 | 30 | 7200 | ||
20 | 2 | 0 | 300 | 65 | 15 | 30 | 7200 | ||
21 | 3 | 0 | 300 | 65 | 15 | 30 | 7200 | ||
22 | 2 | 0 | 1.6 | 250 | 60 | 20 | 30 | 7200 | |
23 | 3 | 0 | 1.6 | 250 | 60 | 20 | 30 | 7200 | |
24 | 2 | 0 | 1.6 | 250 | 60 | 20 | 30(NPH) | 7200 | |
25 | 2 | 0 | 1.6 | 250 | 60 | 20 | 10分钟加热30分钟冷却 | 7200 | |
26 | 2 | 0 | 1.6 | 250 | 60 | 20 | 没有预热 | 9000 | |
27 | 2 | 0 | 300 | 60 | 20 | 没有预热 | 7200 | ||
28 | 2 | 0 | 300 | 60 | 20 | 15分钟加热10分钟 | 7200 | ||
29 | 2 | 0 | 250 | 60 | 20 | 没有预热 | |||
30 | 2 | 0 | 250 | 60 | 20 | 10分钟,10分钟 |
31 | 2 | 0 | 1.3 | 300 | 60 | 20 | 30(220) | 7200 | 4.81 |
32 | 2 | 0 | 1.3 | 300 | 60 | 20 | 30(220) | 7200 | 4.74 |
33 | 2 | 0 | 1.3 | 300 | 22.5 | 7.5 | 30(220) | 7200 | 3.99 |
34 | 2 | 0 | 1.3 | 300 | 22.5 | 7.5 | 30(220) | 7200 | 3.93 |
35 | 2 | 0 | 1.3 | 300 | 37.5 | 12.5 | 30(220) | 7200 | 3.64 |
36 | 2 | 0 | 1.3 | 300 | 37.5 | 12.5 | 30(220) | 7200 | 3.54 |
37 | 2 | 100 | 1.3 | 300 | 60 | 20 | 30(220) | 7200 | 4.54 |
38 | 2 | 200 | 1.3 | 300 | 60 | 20 | 30(220) | 7200 | 4.84 |
39 | 2 | 100 | 1.3 | 300 | 37.5 | 12.5 | 30(220) | 7200 | 4.30 |
40 | 2 | 100 | 1.3 | 300 | 22.5 | 7.5 | 30(220) | 7200 | 3.77 |
41 | 2 | 200 | 1.3 | 300 | 37.5 | 12.5 | 30(220) | 7200 | 3.92 |
42 | 2 | 200 | 1.3 | 300 | 60 | 20 | 400 | 7200 | 3.77 |
43 | 2 | 0 | 1.3 | 300 | 22.5 | 7.5 | 30(220) | 7200 | 3.24 |
44 | 2 | 0 | 1.3 | 300 | 60 | 20 | 30(220) | 7200 | 3.88 |
45 | 2 | 0 | 1.3 | 300 | 60 | 20 | 30(220) | 3600 | 1.78 |
46 | 2 | 200 | 1.3 | 300 | 60 | 20 | 30(220) | 3600 | 1.87 |
47 | 2 | 200 | 1.3 | 300 | 22.5 | 7.5 | 30(220) | 3600 | 1.52 |
48 | 2 | 0 | 1.3 | 300 | 60 | 20 | 30(220) | 6000 | 1.12 |
49 | 2 | 0 | 1.3 | 300 | 60 | 20 | 30(220) | 10800 | 1.89 |
50 | 2 | 0 | 1.3 | 300 | 60 | 20 | 30(220) | 14400 | 2.52 |
51 | 2 | 100 | 1.3 | 300 | 60 | 20 | 30(220) | 10000 | 1.57 |
52 | 2 | 100 | 1.3 | 300 | 60 | 20 | 30(220) | 10000 | 2.11 |
53 | 2 | 100 | 1.3 | 300 | 60 | 20 | 30(220) | 6000 | 2.70 |
54 | 2 | 100 | 1.3 | 300 | 60 | 20 | 30(220) | 6000 | 2.70 |
实施例# | 相 | 晶格 | 晶体结构 | d101[] | 2θ[°] | 晶粒大小 |
15 | LiCoO2 | 菱形 | 强[101] | 2.376(1) | 37.83 | ~1300 |
16 | LiCoO2 | 菱形 | 强[101] | 2.375(1) | 37.85 | ~750 |
17 | Co | 立方形 | 随机 | -- | -- | <50 |
18 | Co | 立方形 | 随机 | -- | -- | <50 |
19 | LiCoO2 | 菱形 | 强[101] | 2.370(1) | 37.93 | ~1400 |
20 | LiCoO2 | 菱形 | 强[101] | 2.372(1) | 37.90 | ~1500 |
21 | LiCoO2 | 菱形 | 强[101] | 2.370(1) | 37.92 | ~1700 |
LiCoO2 | 菱形 | 随机 | 2.408(1) | 37.31 | -- |
Claims (43)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US63481804P | 2004-12-08 | 2004-12-08 | |
US60/634,818 | 2004-12-08 | ||
US65136305P | 2005-02-08 | 2005-02-08 | |
US60/651,363 | 2005-02-08 | ||
PCT/US2005/044781 WO2006063308A2 (en) | 2004-12-08 | 2005-12-07 | DEPOSITION OF LICoO2 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010101615170A Division CN101931097B (zh) | 2004-12-08 | 2005-12-07 | LiCoO2的沉积 |
CN2007101940048A Division CN101255545B (zh) | 2004-12-08 | 2005-12-07 | LICoO2的沉积 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101073171A true CN101073171A (zh) | 2007-11-14 |
CN101073171B CN101073171B (zh) | 2010-09-22 |
Family
ID=38899503
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005800423058A Expired - Fee Related CN101073171B (zh) | 2004-12-08 | 2005-12-07 | LiCoO2的沉积 |
CN2007101940048A Active CN101255545B (zh) | 2004-12-08 | 2005-12-07 | LICoO2的沉积 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007101940048A Active CN101255545B (zh) | 2004-12-08 | 2005-12-07 | LICoO2的沉积 |
Country Status (1)
Country | Link |
---|---|
CN (2) | CN101073171B (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102037586A (zh) * | 2008-05-21 | 2011-04-27 | 应用材料股份有限公司 | 薄膜电池及其制造方法 |
CN102738516A (zh) * | 2011-04-15 | 2012-10-17 | 株式会社半导体能源研究所 | 正极及蓄电装置的制造方法 |
CN104508175A (zh) * | 2012-07-26 | 2015-04-08 | 应用材料公司 | 以低温退火进行的电化学装置制造工艺 |
US9136569B2 (en) | 2008-05-21 | 2015-09-15 | Applied Materials, Inc. | Microwave rapid thermal processing of electrochemical devices |
CN109402562A (zh) * | 2014-01-08 | 2019-03-01 | 爱利卡技术有限公司 | 用于制造含锂薄膜层状结构的气相沉积方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8728285B2 (en) | 2003-05-23 | 2014-05-20 | Demaray, Llc | Transparent conductive oxides |
US8636876B2 (en) | 2004-12-08 | 2014-01-28 | R. Ernest Demaray | Deposition of LiCoO2 |
EP4153797A1 (en) * | 2020-05-20 | 2023-03-29 | Hrl Laboratories, Llc | Method of growing crystalline optical films on si substrates which may optionally have an extremely small optical loss in the infra-red spectrum with hydrogenation of the crystalline optical films |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5110696A (en) * | 1990-11-09 | 1992-05-05 | Bell Communications Research | Rechargeable lithiated thin film intercalation electrode battery |
JPH08236105A (ja) * | 1995-02-28 | 1996-09-13 | Nissin Electric Co Ltd | リチウム二次電池正極の製造方法 |
US6379835B1 (en) * | 1999-01-12 | 2002-04-30 | Morgan Adhesives Company | Method of making a thin film battery |
US6558836B1 (en) * | 2001-02-08 | 2003-05-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Structure of thin-film lithium microbatteries |
US20050079418A1 (en) * | 2003-10-14 | 2005-04-14 | 3M Innovative Properties Company | In-line deposition processes for thin film battery fabrication |
-
2005
- 2005-12-07 CN CN2005800423058A patent/CN101073171B/zh not_active Expired - Fee Related
- 2005-12-07 CN CN2007101940048A patent/CN101255545B/zh active Active
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102037586A (zh) * | 2008-05-21 | 2011-04-27 | 应用材料股份有限公司 | 薄膜电池及其制造方法 |
US9136569B2 (en) | 2008-05-21 | 2015-09-15 | Applied Materials, Inc. | Microwave rapid thermal processing of electrochemical devices |
US9828669B2 (en) | 2008-05-21 | 2017-11-28 | Applied Materials, Inc. | Microwave rapid thermal processing of electrochemical devices |
CN102738516A (zh) * | 2011-04-15 | 2012-10-17 | 株式会社半导体能源研究所 | 正极及蓄电装置的制造方法 |
CN102738516B (zh) * | 2011-04-15 | 2016-03-30 | 株式会社半导体能源研究所 | 正极及蓄电装置的制造方法 |
CN104508175A (zh) * | 2012-07-26 | 2015-04-08 | 应用材料公司 | 以低温退火进行的电化学装置制造工艺 |
CN109402562A (zh) * | 2014-01-08 | 2019-03-01 | 爱利卡技术有限公司 | 用于制造含锂薄膜层状结构的气相沉积方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101073171B (zh) | 2010-09-22 |
CN101255545B (zh) | 2013-05-15 |
CN101255545A (zh) | 2008-09-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101931097B (zh) | LiCoO2的沉积 | |
US7959769B2 (en) | Deposition of LiCoO2 | |
CN101073171B (zh) | LiCoO2的沉积 | |
CN101511493B (zh) | 用于介电应用的钙钛矿和其它化合物陶瓷膜的沉积 | |
JP5129530B2 (ja) | LiCoO2の堆積 | |
KR101010716B1 (ko) | 비전도성 타겟을 사용하는 스퍼터링에 의한 세라믹 박막의증착 방법 및 그를 위한 장치 | |
Solovyev et al. | Application of PVD methods to solid oxide fuel cells | |
Hayashi et al. | Preparation of positive LiCoO2 films by electron cyclotron resonance (ECR) plasma sputtering method and its application to all-solid-state thin-film lithium batteries | |
Lee et al. | Effect of silver co-sputtering on amorphous V2O5 thin-films for microbatteries | |
EP1900845B1 (en) | Deposition of LiCoO2 | |
Meunier et al. | Pulsed laser deposition of superionic ceramic thin films: deposition and applications in electrochemistry | |
Na et al. | A solid-state thin-film electrolyte, lithium silicon oxynitride, deposited by using rf sputtering for thin-film batteries | |
KR101200306B1 (ko) | 음극 성능이 개선된 박막전지 및 이의 제조방법 | |
US20220407043A1 (en) | Method of manufacturing crystalline material from different materials | |
US20230220539A1 (en) | Method of depositing a material | |
JP2004183078A (ja) | 積層薄膜とその製造方法ならびにそれを用いた全固体リチウムイオン二次電池 | |
TWI719346B (zh) | 反應性陰極電弧蒸鍍系統鍍製鋰化合物薄膜之裝置與方法 | |
JPH0243357A (ja) | 超伝導薄膜の製造方法 | |
Ziebert et al. | Magnetron sputtered thin film solid state electrolytes in the materials system Li-V-Si-O with increased ionic conductivity |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SPRINGWORKS, LLC Free format text: FORMER OWNER: SYMMORPHIX INC. Effective date: 20130515 Owner name: R. ERNEST. DEMALY Free format text: FORMER OWNER: SPRINGWORKS, LLC Effective date: 20130515 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130515 Address after: American California Patentee after: R. Ennest de Mare Address before: The University of Minnesota Patentee before: Spring Waxman LLC Effective date of registration: 20130515 Address after: The University of Minnesota Patentee after: Spring Waxman LLC Address before: American California Patentee before: SYMMORPHIX, Inc. |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100922 Termination date: 20181207 |
|
CF01 | Termination of patent right due to non-payment of annual fee |