CN101073014A - Relay connection member, inspection device and method of manufacturing relay connection member - Google Patents
Relay connection member, inspection device and method of manufacturing relay connection member Download PDFInfo
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- CN101073014A CN101073014A CNA2005800423113A CN200580042311A CN101073014A CN 101073014 A CN101073014 A CN 101073014A CN A2005800423113 A CNA2005800423113 A CN A2005800423113A CN 200580042311 A CN200580042311 A CN 200580042311A CN 101073014 A CN101073014 A CN 101073014A
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- connecting elements
- lamellar body
- body member
- wiring construction
- distribution
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
There is provided an inspection device capable of assuring electrical connection to an inspection object and internal electrical connection while coping with downsizing of a terminal of the inspection object. The inspection device includes probe (3), a probe holder (4) holding the probe (3), an inspection circuit (5) for outputting an inspection signal to an inspection object (1) via the probe (3), and a relay connection member (6) for electrically connecting the probe (3) to the inspection circuit (5). The relay connection member (6) includes a first connection member (8) having first wiring structures (11, 12) electrically connected to the probe (3), adjacent structures being formed on different layers, and a second connection member (8) having a second wiring structure (16) electrically connected to the wiring structure (7) arranged on the inspection circuit and formed on the same layer. The relay connection member (6) includes the first connection member (8) appropriate for connection to the probe (3) and the second connection member (9) appropriate for connection to the inspection circuit (5). Thus, it is possible to realize preferable electrical connection to both of them.
Description
Technical field
The present invention relates to when the inspection object of appointment is checked, with an end be formed on described inspection object on the contacted a plurality of probes of a plurality of terminals the other end, with the check circuit of output described inspection employed inspection signal between the relaying connecting elements, the manufacture method of having used the testing fixture and the relaying connecting elements of relaying connecting elements that are electrically connected.
Background technology
In the past, known a kind of being used for carried out the testing fixture that electrical characteristics are checked to electronic components such as liquid crystal panels.As such testing fixture, as shown in Figure 5, be to form by following components, that is: a plurality of probes 102 of the corresponding setting of terminal 101a that is possessed with inspection object 101 as electronic component; Keep the probe of a plurality of probes to keep tool (probe holder) 103; Carry out the check circuit 105 of output etc. of the inspection signal of appointment; And be used for relaying connecting elements 104 to being electrically connected between probe and the check circuit.By adopting such structure, the inspection signal of exporting by check circuit 105 during inspection, via the Wiring construction 106 and the probe 102 that form on the lamellar body member 107 that possesses at relaying connecting elements 104, be input to as the electronic component of checking object 101, be imported into check circuit 105 (for example, with reference to patent documentation 1) through the response signal after the processing of circuit in the electronic component via probe 102 and Wiring construction 106.
Though check circuit 105 also can adopt special-purpose electronic circuit, for example carrying out under the situations such as action test of electronic component preferred the use with the actual electronic circuit that uses when the electronic component actual installation is to product.For example, in the testing fixture that carries out the liquid crystal panel inspection, the TAB that possesses drive IC (Tape Automated Bonding) used when generally using actual installation is as check circuit 105.With the employed electronic circuit of product level be, preferably checking near under the condition of actual behaviour in service as the reason of check circuit 105, and the increase that can avoid making in addition the inspection cost of checking special-purpose electronic circuit and causing.
Patent documentation 1: Japanese kokai publication hei 8-222299 communique.
But testing fixture in the past but has such problem: can't get rid of relaying connecting elements 104 and probe 102 be electrically connected and bad possibility takes place with being electrically connected of check circuit 105 in relaying connecting elements 104.Below, describe at this problem.
The tendency of electronic components such as liquid crystal panel miniaturization in recent years is remarkable,, checks when checking aspect a plurality of terminals of input and output of signal that the tendency of narrow and smallization of terminal intervals of miniaturization and adjacency is also arranged along with such tendency.Corresponding to such tendency, in testing fixture, also produced necessity of narrow and smallization of interval of a plurality of Wiring constructions 106 that will form in the configuration space of probe 102 and the relaying connecting elements 104.Therefore, in testing fixture in the past, particularly, must between probe 102 and relaying connecting elements 104, carry out right as rain contraposition, make the making of the testing fixture difficulty that becomes at probe 102 be formed between the Wiring construction 106 in the relaying connecting elements 104 and be electrically connected.
In addition, in testing fixture in the past, being connected of Wiring construction 106 in probe 102 and the relaying connecting elements 104, be not to utilize scolding tin etc. to fix and realize, but, when Wiring construction 106 is applied given load, carry out contacting of physical property and realize with Wiring construction 106 by the probe 102 that forms respectively with Wiring construction 106.Therefore, contact with Wiring construction 106 under the situation that the position, back just is offset when probe 102 contacts with Wiring construction 106 under the state that the position has been offset or at probe 102, the shape of Wiring construction 106 because and the friction force that produces between the probe 102 and changing, be created in new problems such as electrical short takes place between adjacent Wiring construction.
Moreover testing fixture in the past also has problem aspect being electrically connected between relaying connecting elements 104 and check circuit 105.As shown in Figure 5, check that the terminal 101a that object 101 is possessed realizes being electrically connected by probe 102 with state in opposite directions with Wiring construction 106, the result, the same with the reason of shining upon in mirror, be exactly pattern on the Wiring construction 106 about the pattern after the Pareto diagram upset of a plurality of terminal 101a of paper vertical direction among Fig. 5.Therefore, check circuit 105 must be electrically connected with the relaying connecting elements 104 that Pareto diagram has overturn, and as shown in Figure 5, relaying connecting elements 104 and check circuit 105 are necessary to connect with the shape of " ㄑ " word.Because such connection sample attitude is very forced structure on physical property, can take place for example to produce new problems such as broken string in low part Wiring construction 106 grades of physical strength.
Summary of the invention
The present invention In view of the foregoing proposes, narrow and smallization of the terminal that purpose is to realize that but the correspondence proving object has can fully be guaranteed and check being electrically connected and testing fixture, the relaying connecting elements of formation testing fixture and the manufacture method of relaying connecting elements of inner electrical connection of object simultaneously.
In order to solve above-mentioned problem, reach purpose of the present invention, the relaying connecting elements of first invention, when the inspection object of regulation is checked, described relaying connecting elements is to an end and the other end that is formed on a plurality of probes of a plurality of termination contact on the described inspection object, be electrically connected between the check circuit of the inspection signal that uses with the described inspection of output, described relaying connecting elements is characterised in that, have: first connecting elements, it is formed with a plurality of first Wiring constructions, described first Wiring construction is electrically connected with the other end of a plurality of described probes at an end separately, described first Wiring construction of adjacency is positioned on the different layers each other, and the other end is exposed to the surface with the length more than the specified length; And second connecting elements, it is formed with a plurality of second Wiring constructions on one deck, and described second Wiring construction at one end contacts with the other end that only is exposed to described first Wiring construction on surface with specified length, is electrically connected with described check circuit at the other end.
According to this first invention, because possessing has: be formed at different layers upward with the interval of expansion by making the first adjacent Wiring construction, and can fully guarantee first connecting elements that conducts between the probe and first Wiring construction element with first Wiring construction on one deck; And go up and can fully guarantee and second connecting elements that is electrically connected of check circuit by being formed at second Wiring construction that first connecting elements is electrically connected with check circuit with one side, therefore can fully guarantee conducting between probe and the check circuit.
In addition, the relaying connecting elements of second invention is characterised in that, in above-mentioned invention, described first connecting elements has had the structure of a plurality of lamellar body members stacked, described lamellar body member is formed by insulating component, upper surface at described lamellar body member is formed with more than one described first Wiring construction, and adjacent described first Wiring construction is formed on the mutually different lamellar body member.
In addition, the testing fixture of the 3rd invention, inspection object for regulation, the a plurality of terminals that possessed by this inspection object carry out input and output to electric signal, to check, it is characterized in that having: a plurality of probes, an end of described a plurality of probes contacts respectively with a plurality of described terminal on being formed on described inspection object; Probe keeps tool, and it accommodates a plurality of described probes in the position corresponding with described terminal; First connecting elements, it is formed with a plurality of first Wiring constructions, described first Wiring construction is electrically connected with the other end of a plurality of described probes at an end separately, and described first Wiring construction of adjacency is positioned on the different layers each other, and the other end is exposed to the surface with the length more than the specified length; Second connecting elements, it is formed with a plurality of second Wiring constructions on one deck, and described second Wiring construction at one end contacts with the other end that only is exposed to described first Wiring construction on surface with specified length, is electrically connected with described check circuit at the other end; And check circuit, it is electrically connected with described second connecting elements, to described second connecting elements outgoing inspection signal at least.
In addition, the manufacture method of the relaying connecting elements of the 4th invention, when the inspection object of regulation is checked, described relaying connecting elements pair and a plurality of probes that are formed on a plurality of termination contact on the described inspection object, be electrically connected between the check circuit of the inspection signal that uses with the described inspection of output, the manufacture method of described relaying connecting elements is characterised in that, comprise: distribution forms operation, on the surface of single lamellar body member, formation extends near a plurality of first distributions of central authorities from a side end, and extend near the central authorities from the opposing party's end and near central authorities between adjacent described first distribution and second distribution of formation; The lamellar body segmentation process, by on the direction of described first distribution and the extension of described second distribution, described lamellar body member is divided into: only be formed with the first area of described first distribution, only be formed with the second area of described second distribution and be formed with described first distribution and described second these both sides' of distribution the 3rd zone, form the first lamellar body member, the second lamellar body member and the 3rd lamellar body member; Stacked operation is carried out stackedly to the described first lamellar body member and the described second lamellar body member, make that the Pareto diagram of described first distribution and described second distribution and the Pareto diagram in described the 3rd lamellar body member are roughly the same; And fixing operation, with the end of described first distribution in the lit-par-lit structure of described first lamellar body member and the described second lamellar body member and described second distribution, with described the 3rd lamellar body member in described first distribution and the state that has been electrically connected of the end of described second distribution under, the mutual position relation of described first, second and third lamellar body member is fixed.
According to the 4th invention, owing on single lamellar body member, form first distribution and second distribution of regulation continuously across first to the 3rd zone, therefore needn't be to the independent respectively Wiring pattern that forms of each member of first, second and third lamellar body member, and can suppress to separate the problem of back in the skew of wiring closet occurrence positions, can make and conduct good relaying connecting elements.
In addition, the manufacture method of the relaying connecting elements of the 5th invention is characterised in that, in above-mentioned invention, comprise that also sign forms operation, before described stacked operation, on the either party at least of described first lamellar body member and the described second lamellar body member, be formed for carrying out the contraposition sign of contraposition with the opposing party, in described stacked operation, use described contraposition sign, in the contraposition of carrying out between described first lamellar body member and the described second lamellar body member, carry out stacked.
Relaying connecting elements of the present invention and testing fixture, owing to have: be formed on the different layers by making the first adjacent Wiring construction, expansion is with the interval of first Wiring construction on one deck, and can fully guarantee first connecting elements that conducts between the probe and first Wiring construction; And by being formed at second connecting elements that fully to guarantee to be electrically connected with simultaneously going up, so have the effect that conducts that fully to guarantee between probe and the check circuit to second Wiring construction that first connecting elements is electrically connected with check circuit with check circuit.
In addition, the manufacture method of relaying connecting elements of the present invention, owing on single lamellar body member, form first distribution and second distribution of regulation continuously across first to the 3rd zone, therefore needn't be to the independent respectively Wiring pattern that forms of each member of first, second and third lamellar body member, and can suppress to separate the problem of back in the skew of wiring closet occurrence positions, conduct good relaying connecting elements effect thereby have to make.
Description of drawings
Fig. 1 is the integrally-built mode chart of the testing fixture of expression embodiment;
Fig. 2 is near the structural model figure partly of probe of first connecting elements of the testing fixture of expression formation in detail;
Fig. 3 is the mode chart that is used to illustrate the connection form that first connecting elements, second connecting elements and the check circuit that constitute testing fixture is mutual;
Fig. 4 is the mode chart that is used to illustrate the manufacture method of the relaying connecting elements that constitutes testing fixture;
Fig. 5 is a mode chart of representing the structure of testing fixture in the past.
Among the figure,
1,101-checks object; 2,101a-terminal; 3,102-probe; 4, the 103-probe is supported tool; 5,105-check circuit; The 5a-IC chip; 6,104-relaying connecting elements; 7,7a～7d, 105a, 106-Wiring construction; 8-first connecting elements; 9-second connecting elements; The 10-stiffener; 11,11a～11d-first Wiring construction; 12,12a～12d-first Wiring construction; 13,14,15,21,107-lamellar body member; 16,16a～16d-second Wiring construction; 18a～18d, 19a～19d-connection pads; The 21a-middle section; 21b, the 21c-end regions; 22a～22h-first distribution; 23a～23i-second distribution; 24a～24h, 25a～25i-pad (pad); The 26-alignment mark; S, S
11, S
11a, S
11b, S
12, S
12a, S
12b, S
16a, S
16b, S
16c, S
16d, T
7, T
7a, T
7b, T
7c, T
7d, T
16a, T
16b, T
16c, T
16d-dot-and-dash line zone.
Embodiment
Below, describe in detail with reference to accompanying drawing and to be used to the best mode (hereinafter referred to as " embodiment ") implementing testing fixture of the present invention and constitute the relaying connecting elements of testing fixture.But, should notice that accompanying drawing is a mode chart, the ratio of the relation of each several part thickness and width, the thickness of various piece etc. are variant with the meeting of reality, and accompanying drawing also includes mutual size relationship or the different part of ratio each other certainly.
Fig. 1 is the integrally-built mode chart of the testing fixture of expression embodiment.As shown in Figure 1, the testing fixture of present embodiment possesses: the probe 3 that an end contacts with the terminal 2 that inspection object 1 is possessed; The probe that probe 3 is remained on assigned position keeps tool 4; By probe 3 to checking object 1 check circuit 5 of outgoing inspection signal at least; And be used for relaying connecting elements 6 that probe 3 is electrically connected with check circuit 5.
Probe keeps tool 4 to be used for a plurality of probes 3 are remained on the position of regulation.That is to say, probe 3 by respectively be formed on a plurality of terminals 2 of checking on the object 1 and contact and conduct with terminal 2, probe keeps tool 4 to have the function that a plurality of probes 3 of maintenance are positioned at predetermined position, makes a plurality of probes 3 can form good conducting state.Concrete hold mode is, probe keeps tool 4 to be formed by for example tabular body, make probe 3 in being formed at the openings of this tabular body and two ends slightly outstanding from the surface of tabular body, keep probe 3 in this way.
Below, describe at relaying connecting elements 6.As shown in Figure 1, relaying connecting elements 6 is by constituting as the lower part, is used for first connecting elements 8 that is electrically connected with probe 3 that is:; Be used for second connecting elements 9 to being electrically connected between first connecting elements 8 and the check circuit 5; And the stiffener 10 that is used to prevent the bending etc. of first connecting elements 8.
First connecting elements 8 has at the other end and is electrically connected with corresponding probe 3 respectively, and is formed on first Wiring construction 11,12 on the mutually different layer.Particularly, as shown in Figure 1, first connecting elements 8 has the structure with lamellar body member 13,14 stacked above one another, by on the surface separately of lamellar body member 13,14, being pre-formed first Wiring construction 11,12 respectively, and realize that first Wiring construction 11,12 is formed on the structure on the different layers.
Lamellar body member 13,14 is very thin by thickness, the good sheet insulating component of flexibility forms.Particularly, lamellar body member the 13, the 14th is for example being that material forms as the polyimide of FPC (Flexible Printed Circuit) base material etc.In addition, as shown in Figure 1, the structure that is positioned at the lamellar body member 13 of lit-par-lit structure lower floor is, for first Wiring construction 11 that makes formation can be electrically connected with probe 3 grades, and have the structure that on the bearing of trend of first Wiring construction 11,12, exceeds lamellar body member 14 and extend, and has the structure of the part that first Wiring construction 11 is extended to exceed lamellar body member 14 and extend.
Second connecting elements 9 is used for first Wiring construction 11,12 that constitutes first connecting elements 8 is electrically connected with check circuit 5.Particularly, second connecting elements 9 has the structure that is formed with a plurality of second Wiring constructions 16 on lamellar body member 15, and has the function of utilizing second Wiring construction 16 and first Wiring construction 11,12 being electrically connected with check circuit 5.Also have, a plurality of second Wiring constructions 16 have be formed on the same lamellar body member 15 respectively, promptly with the structure on one deck.
Below, in first Wiring construction 11,12 that constitutes first connecting elements 8, the structure that contacts the end of a side with probe 3 is elaborated.Fig. 2 is the planimetric map of a part that contacts the end of a side in expression first connecting elements 8 with probe 3.In addition, Fig. 2 has schematically represented the planar configuration of first connecting elements 8 seen from probe 3 sides, can't directly visual part dot.And, in Fig. 2 etc., for a plurality of first Wiring constructions 11,12 that make existence are distinguished mutually, subfixs such as additional a, b according to need.In addition, about the number of first Wiring construction 11,12, there is no need obviously is defined in the example of Fig. 2 etc. and explained.
As shown in Figure 2, be formed on first Wiring construction 11a～11d on the lamellar body member 13 and be formed on first Wiring construction 12a～12d on the lamellar body member 14, its planar configuration has the structure of interlaced configuration.Particularly, when probe 3 sides are seen first connecting elements 8, be the first Wiring construction 11a, 12a, 11b, 12b ... arrange like this, from probe 3 sides, the first adjacent Wiring construction is to form in the mode that is positioned on the mutually different layer (lamellar body member 13 or lamellar body member 14).By adopting such structure, as shown in Figure 2, compare with the situation that on simple layer, has formed first Wiring construction, being formed on is about 2 times value with first Wiring construction on one deck at interval.
In addition, end at first Wiring construction 11a～11d and first Wiring construction 12a～12d, be formed with connection pads (pad) 18a～18d and connection pads 19a～19d respectively, these connection pads 18a～18d and connection pads 19a～19d, on the direction vertical, have the width wideer, and the mode that disposes with the staggered trellis of what is called respectively forms than first Wiring construction with bearing of trend.Particularly, the situation of connection pads 18a～18d for example, on the bearing of trend of first Wiring construction 11, connection pads 18a, 18c are formed on identical position, on the other hand, connection pads 18b, 18d, then be formed on the position different with connection pads 18a etc.That is, connection pads 18a～18d and connection pads 19a～19d on the bearing of trend of first Wiring construction, form in the different mode in position between the connection pads of adjacency respectively.
Below, describe at first connecting elements 8, second connecting elements 9 and check circuit 5 mutual electrical connections.Fig. 3 is the mode chart that is used to illustrate the connected mode that first connecting elements 8, second connecting elements 9 and check circuit 5 are mutual.Below, with reference to Fig. 3 connected mode is described.
At first, connected mode between first connecting elements 8 and second connecting elements 9 is described.Being electrically connected between first connecting elements 8 and second connecting elements 9, particularly be following realization: be under the state that contacted of the end of second Wiring construction 16 that possessed of end and second connecting elements 9 by first Wiring construction 11,12 that possessed at first connecting elements 8, position between first connecting elements 8 and second connecting elements 9 relation is fixed and realized.In addition, based on the viewpoint that the contact resistance between first Wiring construction 11,12 and second Wiring construction 16 is suppressed to the no problem degree of practical application, in the present embodiment, need guarantee that part that first Wiring construction 11,12 and second Wiring construction 16 are in contact with one another only has the distribution length d of regulation
1
In order in first Wiring construction 11, to guarantee this distribution length d
1, in the present embodiment, first connecting elements 8 has the structure that lamellar body member 13 exceeds lamellar body member 14 and extend in a side that is connected with second connecting elements 9.As mentioned above, first Wiring construction 11 forms as base material with lamellar body member 13, and is formed at the lower floor of lamellar body member 14.Therefore, in order to be connected, need to form the distribution length d with second Wiring construction 16
1Scope be exposed to structure on the surface of first connecting elements 8, in order to ensure this distribution length d
1, adopt the lamellar body member 13 that makes as base material to exceed lamellar body member 14 and the structure of extension.In addition; in the present embodiment; though first Wiring construction 12 has the whole lip-deep structure that all is exposed to first connecting elements 8; if even but when adopting the structure that is covered by protective seam etc.; also preferably the same with the situation of first Wiring construction 11, adopt and only expose the distribution length d in the end of a side that is connected with second connecting elements 9
1Structure.
With respect to second Wiring construction 16 that first connecting elements, 8, the second connecting elements 9 of above-mentioned structure are possessed, need and be equivalent to the distribution length d
1About 2 times distribution length d
2Scope as the zone that contacts with first Wiring construction 11,12.As mentioned above, the structure that first connecting elements 8 has is, is exposed to the surface in order to make first Wiring construction 11 that is positioned at lower layer side, makes lamellar body member 13 exceed lamellar body member 14 and extends.Herein, because lamellar body member 14 works as the base material of first Wiring construction 12, therefore as shown in Figure 3, being formed on the structure that first Wiring construction 11 on the lamellar body member 13 has is also only to have extended and the distribution length d towards second connecting elements, 9 one sides than first Wiring construction 12 that is formed on the lamellar body member 14
1Length about equally.In addition, a plurality of second Wiring constructions 16 need respectively to contact with either party of first Wiring construction 11,12, but no matter contact with which side, for the structure of realizing can both contacting for any one party, contact required distribution length d
2Need be the distribution length d
1About 2 times value.
Like this, guarantee to have first Wiring construction 11,12 of the distribution length of regulation just and second Wiring construction, 16, the first connecting elements 8 and second connecting elements 9 to be electrically connected by the zone that adopt to connect usefulness.Promptly, under first Wiring construction 11,12 and second Wiring construction 16 state (being that second connecting elements 9 is positioned at the paper vertical direction with respect to first connecting elements 8 in the example at Fig. 3) in opposite directions, first connecting elements 8 overlaps with the end of second connecting elements 9, and by using for example ACF (Anisotropic Conductive Film: the anisotropic conductive cementing agent) both position relations are fixed.
More particularly, under the state that first connecting elements 8 and second connecting elements 9 have interfixed, contact each other, conduct according to the dot-and-dash line zone that connects by the both sides arrow among Fig. 3.That is the dot-and-dash line region S of the first Wiring construction 11a for example,
11a, in the dot-and-dash line region S of itself and the second Wiring construction 16a
16aBe fixed under the state that has contacted, by this contact condition, between the first Wiring construction 11a and the second Wiring construction 16a in the distribution length d
1Scope contact, fully reduced contact resistance, realized good conducting.In addition, the dot-and-dash line region S of the first Wiring construction 12a
12a, in the dot-and-dash line region S of itself and the second Wiring construction 16b
16bBe fixed the dot-and-dash line region S of the first Wiring construction 11b under the state that has contacted
11b, in the dot-and-dash line region S of itself and the second Wiring construction 16c
16cBe fixed the dot-and-dash line region S of the first Wiring construction 12b under the state that has contacted
12b, in the dot-and-dash line region S of itself and the second Wiring construction 16d
16dBe fixed under the state that has contacted.So, be formed at the first all Wiring construction of first connecting elements 8,, in the zone of each correspondence, realize good conducting with the second all Wiring construction that is formed at second connecting elements 9.
Below, the connected mode between second connecting elements 9 and the check circuit 5 is described.Being electrically connected between second connecting elements 9 and the check circuit 5 particularly, is that the end of the Wiring construction 7 that possessed of end and the check circuit 5 of second Wiring construction 16 that possessed by second connecting elements 9 contacts and realizes.
Under the contacted situation in the end of end that makes second Wiring construction 16 and Wiring construction 7, in order to reduce contact resistance, and make it in whole distribution length d
1Zone contact.Therefore, second Wiring construction 16 is guaranteed the distribution length d in the end that contacts a side with check circuit 5
1The zone as contact area, Wiring construction 7 guarantees that too the distribution length d is arranged
1The zone.Then, utilize ACF etc. to fix position relation between second connecting elements 9 and the check circuit 5, make above-mentioned zone of guaranteeing contact each other, realize conducting.Particularly, by making the dot-and-dash line zone T of the end that is positioned at the second Wiring construction 16a respectively
16aDot-and-dash line zone T with the end that is positioned at Wiring construction 7a
7aContact, make the dot-and-dash line zone T of the end that is positioned at the second Wiring construction 16b
16bDot-and-dash line zone T with the end that is positioned at Wiring construction 7b
7bContact, make the dot-and-dash line zone T of the end that is positioned at the second Wiring construction 16c
16cDot-and-dash line zone T with the end that is positioned at Wiring construction 7c
7cContact, make the dot-and-dash line zone T of the end that is positioned at the second Wiring construction 16d
16dDot-and-dash line zone T with the end that is positioned at Wiring construction 7d
7dContact realizes being electrically connected of second connecting elements 9 and check circuit 5.
Below, the example of manufacture method of the testing fixture of present embodiment is described.Below, constituting among the member of testing fixture, describe at the manufacture method of the relaying connecting elements 6 that is constituted by first connecting elements 8 and second connecting elements 9.
Fig. 4 is the mode chart that is used to illustrate the manufacture method of first connecting elements 8 that constitutes the relaying connecting elements and second connecting elements 9.As shown in Figure 4, at first on single lamellar body member 21, form the Wiring pattern of regulation.Lamellar body member 21 is made of middle section 21a (corresponding to the 3rd zone of claim), the end regions 21b (corresponding to the first area of claim) that is arranged in both ends and the end regions 21c (corresponding to the second area of claim) that are arranged in central authorities, and forms distribution with different patterns respectively at middle section 21a and end regions 21b, 21c.
Particularly, on lamellar body member 21, form first distribution 22a～22h, and form second distribution 23a～23i from middle section 21a to end regions 21c from middle section 21a to end regions 21b.First distribution 22a～22h and second distribution 23a～23i have the structure that almost parallel extends respectively, on the other hand, form first distribution and second distribution at middle section 21a in staggered mode.More particularly, as shown in Figure 4, with the second distribution 23a, the first distribution 22a, the second distribution 23b, the first distribution 22b ..., the mode that is arranged in order of the first distribution 22h, the order of the second distribution 23i forms Wiring pattern.In addition, near the end of lamellar body member 21, corresponding with each distribution of first distribution 22a～22h and second distribution 23a～23i respectively and form pad 24a～24h and pad 25a～25i.In addition, the convenience during for contraposition described later forms the alignment mark 26 (example as the contraposition sign in the claim works) that contraposition is used on end regions 21c in the example of Fig. 4.
Then, along dotted line shown in Figure 4 lamellar body member 21 is divided into three of middle section 21a, end regions 21b and end regions 21c.Three of the middle section 21a that is partitioned into, end regions 21b and end regions 21c work as an example of the 3rd lamellar body member in the claim, the first lamellar body member and the second lamellar body member respectively.Middle section 21a, end regions 21b and the end regions 21c of the Wiring pattern of regulation have been formed, constitute lamellar body member 15, lamellar body member 13 and lamellar body member 14 that relaying connecting elements 6 is possessed respectively, and be formed at the Wiring pattern on each zone, Fig. 4 and Fig. 3 contrast is promptly very clear, constitute second Wiring construction 16, first Wiring construction 12, first Wiring construction 11 respectively.Promptly, among formed first distribution 22a～22h and the second distribution 23a～23i, the part that remains on the middle section 21a constitutes second Wiring construction 16 respectively, the part that remains in end regions 21b constitutes first Wiring construction 12 respectively, and the part that remains in end regions 21c constitutes first Wiring construction 11 respectively.In addition, pad 24 and pad 25 constitute connection pads 19 and connection pads 18 respectively.
Then, will end regions 21b, the end regions 21c stacked above one another and fixing corresponding with the lamellar body member 14 that is used to form first connecting elements 8 and lamellar body member 13.In above-mentioned operation, preferably correctly carry out the contraposition of end regions 21b, end regions 21c by above-mentioned alignment mark 26.For example, in example shown in Figure 4, the position of the end (end of a side of representing with dotted portion among Fig. 4) of the middle section 21a side of alignment mark 26 expression end regions 21b, the end by making end regions 21b and the position consistency of alignment mark 26 are carried out stacked and are fixing, can correctly aim at the position relation between end regions 21b, end regions 21c.
On the other hand, middle section 21a be formed at lip-deep first distribution 22a～22h and second distribution 23a～23i forms second connecting elements 9 jointly.Therefore, the structure that forms with respect to stacked end regions 21b, end regions 21c, the mode that middle section 21a is electrically connected each other with Wiring construction, promptly bondd fixingly in the mode that satisfies annexation shown in Figure 3, finished relaying connecting elements 6.
Below, the advantage of the testing fixture of present embodiment is described.At first, the testing fixture of present embodiment is at first connecting elements 8, has that first Wiring construction 11,12 that adjoins each other is formed at that different layers is gone up and the advantage that obtains.As shown in Figure 2, by first Wiring construction 11,12 that adjoins each other is formed on the different layers (being lamellar body member 13,14), can twice that expand as the configuration space of probe 3 with the configuration space of a plurality of first Wiring constructions 11 on one deck and a plurality of first Wiring constructions 12 will be formed at.Therefore, possesses such advantage: as shown in Figure 2, can increase the area that is used for the connection pads 18,19 that contacts with the end of probe 3, be easy to carry out the contraposition of 18,19 of probe 3 and connection pads, can suppress simultaneously because and the friction force between the probe 3 and the distortion of the Wiring construction (connection pads) that causes.
In addition, in the present embodiment, with regard to a plurality of connection pads 18 on being formed at lamellar body member 13 respectively, be formed at regard to a plurality of connection pads 19 on the lamellar body member 14 respectively, has the structure that adjacent connection pads is configured in positions different on the bearing of trend of first Wiring construction each other.By adopting this kind structure, can further increase connection pads 18,19 area separately.Promptly, for example in Fig. 2, because on the bearing of trend (longitudinal direction among Fig. 2) of first Wiring construction, connection pads 18b is formed on the position different with connection pads 18a, 18c, therefore even connection pads 18b goes up in the direction vertical with bearing of trend (transverse direction among Fig. 2) and extends, also not can with connection pads 18a, 18c short circuit.Therefore, with regard to connecting pad 18b, only however with the first Wiring construction 11a, the 11c short circuit that are positioned near it, just can on the direction vertical, extend with bearing of trend.This reason for other connection pads 18a, 19a etc. too, by on one deck, adjacent connection pads being configured in different positions each other, can realize more large-area connection pads.
And, in the present embodiment,, have and can between check circuit 5 and relaying connecting elements 6, realize the good advantage that conducts by adopting the structure that is provided with second connecting elements 9 in addition at relaying connecting elements 6.Below, describe this advantage in detail.
As mentioned above, in the present embodiment, have at first connecting elements 8 and make first Wiring construction 11,12 be formed at structure on the different layers, more particularly, between first Wiring construction 11,12, accompany lamellar body member 14.Thereby, conduct with other Wiring constructions in order to make first Wiring construction 11 that is positioned at lower floor, need to adopt the structure that first Wiring construction 11 has been exposed near the end, (the dot-and-dash line region S among Fig. 3 of the electrical connections on first Wiring construction 11
11), with electrical connections (the dot-and-dash line region S among Fig. 3 that is formed on first Wiring construction 12 on upper strata
12) the two position staggers on the bearing of trend of Wiring construction.Therefore, the member that is electrically connected with first connecting elements 8 in order to be electrically connected with first Wiring construction, 11,12 both sides, need guarantee that length is about the distribution length d of common needs
12 times distribution length d
2As electrical connections.
Relative therewith, as the check circuit 5 of the connecting object of relaying connecting elements 6, its electrical connections (dot-and-dash line zone T of Wiring construction 7
7) length only possess the distribution length d usually
1Degree.As mentioned above and since check circuit 5 continue to use be installation check object 1 time circuit that uses as driving circuit etc., so the electrical connections that possessed of check circuit 5 only has necessary length (distribution length d for example
1), be electrically connected with the terminal 2 that is formed on the surface (promptly with one deck) of checking object 1 being used for.Therefore, when first connecting elements 8 directly is connected with check circuit 5, can produce the new problem that is difficult between first connecting elements 8 and check circuit 5, obtain sufficient conducting state.Though also can adopt electrical connection section to be divided into the distribution length d as check circuit 5
2The circuit of inspection special use, but when adopting described structure, can produce the new problem that the manufacturing cost of the inspection that is difficult to suit the action when installing and testing fixture rises again in addition, can not deal with problems at all.
Therefore, in the present embodiment, make the structure of second connecting elements 9 between first connecting elements 8 and check circuit 5, and between relaying connecting elements 6 and check circuit 5, realize good conducting state by employing.That is,, do not have the restriction of distribution length, guarantee the distribution length d in a side that is connected with first connecting elements 8 at second Wiring construction 16 easily at second connecting elements 9
2Therefore, can both realize good conducting state for any one that is formed on first Wiring construction 11,12 on the different layers.In addition, above-mentioned a plurality of second Wiring constructions 16 all are formed on the single lamellar body member 15, therefore with Wiring construction 7 that check circuit 5 is possessed between be electrically connected so long as the distribution length d
1Just enough, also can guarantee sufficient conducting even continue to use existing check circuit 5.So, has following advantage: by not only having first connecting elements 8 but also having second connecting elements 9, relaying connecting elements 6 can be guaranteed sufficient conducting to probe 3 by the effect of first connecting elements 8, can guarantee sufficient conducting to check circuit 5 by the effect of second connecting elements 9.
In addition, in the present embodiment, because relaying connecting elements 6 possesses second connecting elements 9 in addition, so have the advantage that does not have the testing fixture of the very forced part of physical property in can realizing constructing.As shown in Figure 5, in the testing fixture in the past, relaying connecting elements 104 has by the formed structure of single connecting elements.Therefore, testing fixture in the past, to be formed on a plurality of Wiring construction 105a on the check circuit 105 and to be formed on corresponding relation between a plurality of terminal 101a that check on the object 101 in order to keep, need as shown in Figure 5, relaying connecting elements 104 and check circuit 105 are connected into " ㄑ " font, become the structure that has produced very forced part on physical property, the problem of broken string etc. takes place in the part that exists in weak strength.
Relative therewith, in the present embodiment, relaying connecting elements 6 possesses a plurality of connecting elements (first connecting elements 8, second connecting elements 9) such structure is so can solve described problem.That is, at the Pareto diagram of the terminal 2 of the paper vertical direction of Fig. 1, by via overturning with first connecting elements 8 of first Wiring construction 11,12 with respect to terminal 2 state configuration in opposite directions.Then, by via overturning once more, consistent with former Pareto diagram with second connecting elements 9 of second Wiring construction 16 with respect to first Wiring construction 11,12 state configuration in opposite directions.The result is, check circuit 5 can with check that the situation that a plurality of terminals 2 that object 1 is possessed contact is the same, Wiring construction 7 is contacted with second Wiring construction 16, can connect second connecting elements 9 and check circuit 5 by the common connected mode of non-" ㄑ " font.The result is that the testing fixture of present embodiment has the structure that can realize not having the very forced part of physical property, can reduce the advantage of the generation probability of bad situations such as broken string.
Moreover the testing fixture of present embodiment as shown in Figure 4, can be made relaying connecting elements 6 with single lamellar body member 21.And as mentioned above, second Wiring construction 16 that forms on the lamellar body member 15 that constitutes relaying connecting elements 6 has the structure that is connected alternately with first Wiring construction 11,12 that forms on lamellar body member 13,14.Therefore, on lamellar body member 21, the mode that goes up with mutual arrangement at middle section 21a (separate the back and constitute lamellar body member 15) forms first distribution 22 and second distribution 23, and make second distribution 23 wherein extend to end regions 21c (separate the back and constitute lamellar body member 13), make first distribution 22 extend to end regions 21b (separate the back and constitute lamellar body member 14), by forming such Wiring construction, can easily realize first Wiring construction 11,12 and second Wiring construction 16.Therefore, be used on lamellar body member 21, forming the mask of Wiring pattern, just prepare three covers, can utilize the mask of simple pattern to form Wiring pattern without each zone.
In addition, can be clear that very from Fig. 4 that first distribution 22 keeps continuity at middle section 21a and end regions 21b, second distribution 23 keeps continuity at middle section 21a and end regions 21c.Therefore, in the lamellar body member 13～15 that forms by separation lamellar body member 21, the interval that adjacent Wiring construction can not take place is being formed at lip-deep first Wiring construction 11 of lamellar body member 13, is being formed at lip-deep first Wiring construction 12 of lamellar body member 14 and is being formed at the drawbacks such as mutual generation deviation of lip-deep second Wiring construction 16 of lamellar body member 15, have when connecting first connecting elements 8 and second connecting elements 9, any one Wiring construction can both be guaranteed the advantage of good conducting state.
More than, utilize embodiment to describe the present invention, but embodiment is a concrete example eventually, the present invention should be defined in embodiment and make an explanation, so long as those of ordinary skills just can expect various embodiment, variation.For example, in the present embodiment, structure as first connecting elements 8, though the lamellar body member 13,14 that has the Wiring pattern that is formed with regulation from the teeth outwards respectively carries out stacked structure, but might not be defined in as first connecting elements 8 TAB, FPC etc. is carried out stacked structure, so long as the structure that the first adjacent Wiring construction is formed on the mutually different layer can be used as first connecting elements.In addition, about the number of the layer that forms first Wiring construction too, might not be defined in two-layerly,, can on the layer of arbitrary number, form first Wiring construction if a plurality of.
Industrial applicibility
As mentioned above, relay-connecting member of the present invention, use relay-connecting member testing fixture with And the manufacture method of relay-connecting member, when the inspection object to regulation checks, will be to one The end be formed at a plurality of probes of a plurality of termination contact on the described inspection object the other end, with output Of great use, outstanding when being electrically connected between the check circuit of the employed inspection signal of described inspection It carries out being suitable for when electrical characteristic checks at the electronic component to liquid crystal panel etc.
Claims (5)
1. relaying connecting elements, when the inspection object of regulation is checked, described relaying connecting elements to an end be formed on described inspection object on the check circuit of the other end, the inspection signal that uses with the described inspection of output of a plurality of probes of a plurality of termination contact between be electrically connected, described relaying connecting elements is characterised in that
Have:
First connecting elements, it is formed with a plurality of first Wiring constructions, described first Wiring construction is electrically connected with the other end of a plurality of described probes at an end separately, and described first Wiring construction of adjacency is positioned on the different layers each other, and the other end is exposed to the surface with the length more than the specified length; And
Second connecting elements, it is formed with a plurality of second Wiring constructions on one deck, and described second Wiring construction at one end contacts with the other end that only is exposed to described first Wiring construction on surface with specified length, is electrically connected with described check circuit at the other end.
2. relaying connecting elements as claimed in claim 1 is characterized in that,
Described first connecting elements has had the structure of a plurality of lamellar body members stacked, and described lamellar body member is formed by insulating component, is formed with more than one described first Wiring construction at the upper surface of described lamellar body member,
Adjacent described first Wiring construction is formed on the mutually different lamellar body member.
3. testing fixture, for the inspection object of regulation, a plurality of terminals that possessed by this inspection object carry out input and output to electric signal, to check, it is characterized in that,
Have:
A plurality of probes, an end of described a plurality of probes contacts respectively with a plurality of described terminal on being formed on described inspection object;
Probe keeps tool, and it accommodates a plurality of described probes in the position corresponding with described terminal;
First connecting elements, it is formed with a plurality of first Wiring constructions, described first Wiring construction is electrically connected with the other end of a plurality of described probes at an end separately, and described first Wiring construction of adjacency is positioned on the different layers each other, and the other end is exposed to the surface with the length more than the specified length;
Second connecting elements, it is formed with a plurality of second Wiring constructions on one deck, and described second Wiring construction at one end contacts with the other end that only is exposed to described first Wiring construction on surface with specified length, is electrically connected with described check circuit at the other end; And
Check circuit, it is electrically connected with described second connecting elements, to described second connecting elements outgoing inspection signal at least.
4. the manufacture method of a relaying connecting elements, when the inspection object of regulation is checked, described relaying connecting elements pair be formed on described inspection object on the check circuit of a plurality of probes, the inspection signal that uses with the described inspection of output of a plurality of termination contact between be electrically connected, the manufacture method of described relaying connecting elements is characterised in that
Comprise:
Distribution forms operation, on the surface of single lamellar body member, form extend near a plurality of first distributions the central authorities from a side end and extend near the central authorities from the opposing party's end and near central authorities between adjacent described first distribution and second distribution of formation;
The lamellar body segmentation process, by on the direction of described first distribution and the extension of described second distribution, described lamellar body member is divided into: only be formed with the first area of described first distribution, only be formed with the second area of described second distribution and be formed with described first distribution and described second these both sides' of distribution the 3rd zone, form the first lamellar body member, the second lamellar body member and the 3rd lamellar body member;
Stacked operation is carried out stackedly to the described first lamellar body member and the described second lamellar body member, make that the Pareto diagram of described first distribution and described second distribution and the Pareto diagram in described the 3rd lamellar body member are roughly the same; And
Fixing operation, with the end of described first distribution in the lit-par-lit structure of described first lamellar body member and the described second lamellar body member and described second distribution, with described the 3rd lamellar body member in described first distribution and the state that has been electrically connected of the end of described second distribution under, the mutual position relation of described first, second and third lamellar body member is fixed.
5. the manufacture method of relaying connecting elements as claimed in claim 4 is characterized in that,
Comprise that also sign forms operation, before described stacked operation, on the either party at least of described first lamellar body member and the described second lamellar body member, be formed for carrying out the contraposition sign of contraposition with the opposing party,
In described stacked operation, use described contraposition sign, in the contraposition of carrying out between described first lamellar body member and the described second lamellar body member, carry out stacked.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004355855A JP4767528B2 (en) | 2004-12-08 | 2004-12-08 | Relay connection member, inspection device, and method of manufacturing relay connection member |
| JP355855/2004 | 2004-12-08 | ||
| PCT/JP2005/022535 WO2006062152A1 (en) | 2004-12-08 | 2005-12-08 | Relay connection member, inspection device, and relay connection member manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101073014A true CN101073014A (en) | 2007-11-14 |
| CN101073014B CN101073014B (en) | 2010-05-26 |
Family
ID=36577975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2005800423113A Expired - Fee Related CN101073014B (en) | 2004-12-08 | 2005-12-08 | Relay connection member, inspection device and method of manufacturing relay connection member |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4767528B2 (en) |
| KR (1) | KR101166861B1 (en) |
| CN (1) | CN101073014B (en) |
| TW (1) | TWI278633B (en) |
| WO (1) | WO2006062152A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010054487A (en) * | 2008-08-26 | 2010-03-11 | Isao Kimoto | Prober apparatus |
| JP2012233723A (en) * | 2011-04-28 | 2012-11-29 | Micronics Japan Co Ltd | Probe device and probe unit |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3076600B2 (en) * | 1990-11-20 | 2000-08-14 | 株式会社日本マイクロニクス | Display panel prober |
| JP3322774B2 (en) * | 1995-05-15 | 2002-09-09 | 株式会社日本マイクロニクス | Multi-pole terminal plate and probe device |
| JPH09184853A (en) * | 1995-12-28 | 1997-07-15 | Nippon Maikuronikusu:Kk | Probe unit |
| JP2000266779A (en) * | 1999-03-18 | 2000-09-29 | Toshiba Corp | Multiprobe unit |
-
2004
- 2004-12-08 JP JP2004355855A patent/JP4767528B2/en not_active Expired - Fee Related
-
2005
- 2005-12-08 TW TW094143325A patent/TWI278633B/en not_active IP Right Cessation
- 2005-12-08 CN CN2005800423113A patent/CN101073014B/en not_active Expired - Fee Related
- 2005-12-08 KR KR1020077012780A patent/KR101166861B1/en active IP Right Grant
- 2005-12-08 WO PCT/JP2005/022535 patent/WO2006062152A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| TW200634312A (en) | 2006-10-01 |
| JP4767528B2 (en) | 2011-09-07 |
| JP2006162478A (en) | 2006-06-22 |
| KR101166861B1 (en) | 2012-07-19 |
| KR20070085822A (en) | 2007-08-27 |
| TWI278633B (en) | 2007-04-11 |
| WO2006062152A1 (en) | 2006-06-15 |
| CN101073014B (en) | 2010-05-26 |
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