CN101071929A - Grating-selected quick tuning laser resonant cavity - Google Patents

Grating-selected quick tuning laser resonant cavity Download PDF

Info

Publication number
CN101071929A
CN101071929A CNA2006100782127A CN200610078212A CN101071929A CN 101071929 A CN101071929 A CN 101071929A CN A2006100782127 A CNA2006100782127 A CN A2006100782127A CN 200610078212 A CN200610078212 A CN 200610078212A CN 101071929 A CN101071929 A CN 101071929A
Authority
CN
China
Prior art keywords
grating
laser
tuning
servomotor
resonant cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2006100782127A
Other languages
Chinese (zh)
Other versions
CN100466402C (en
Inventor
谭荣清
程永强
王永
刘世明
张阔海
柯常军
王东蕾
陈静
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institute of Electronics of CAS
Original Assignee
Institute of Electronics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institute of Electronics of CAS filed Critical Institute of Electronics of CAS
Priority to CNB2006100782127A priority Critical patent/CN100466402C/en
Publication of CN101071929A publication Critical patent/CN101071929A/en
Application granted granted Critical
Publication of CN100466402C publication Critical patent/CN100466402C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Lasers (AREA)

Abstract

The invention is of a grating election rapid tunable laser resonator, involving laser technology, the laser resonator with servo-motor-driven rotary turntable grating and accurate positioning and achieve grating election of the rapid line tunable lasers. The laser resonator cavity of the laser output mirror, grating, grating turntable, the servo motor, servo motor drive modules and control modules and other components, which is part of the output mirror reflection of the transmission type spherical mirror or plane mirror, grating for the plane or spherical reflecting diffraction grating. Total output mirror and a grating optical axis, and the normal and the optical axis grating into the quasi-rectangular. This invention achieved a grating election rapid tuning of the laser output, tuning speed, tuning range, high precision tuning advantages. Apply to pulse CO2 laser pulse CO laser, pulsed HF / DF and other tunable laser pulse laser, laser atmospheric detection, laser chemistry, laser processing, and other fields have a broad application prospects.

Description

Grating-selected quick tuning laser resonant cavity
Technical field
The present invention relates to laser technology field, particularly a kind of tuning grating-selected tunable laser resonant cavity fast of realizing.
Background technology
Along with development of modern industry, it is more and more serious that air pollution becomes.Because the monochromaticjty of laser is good, the coherence is good, directivity is high, high brightness and characteristics such as high-power, laser differential absorbs a kind of effective tool that radar (Differential Absorption Lidar (DIAL)) is trace toxic gas and dusty gas in the remote measurement atmosphere.The tunable pulsed laser device is because have good tunable wave length, the air pollution species is many, many materials have strong absworption peak in tunable pulsed laser device spectral regions, so the tunable pulsed laser device is the perfect light source that laser differential absorbs radar.But, in order " to freeze " emission two bundle different wavelength of laser in the time at atmosphere, obtain accurate measurement result, also in order to obtain the aeromerric moasurenont result in a zone in the automatic scan mode fast, this just requires the repetition rate work and tuning fast of tunable pulsed laser device energy simultaneously.The development trend of differential absorption lidar light source is to use a quick tuning laser device, and it can satisfy requirement of actual application in all many-sides such as control, volume, costs.Because grating-selected cavity resonator structure is simple, be easy to control, so it is a kind of method of the most normal employing.And the quick tunable technology of tunable pulsed laser device commonly used mainly contains rotating multisurface raster method, galvanometer+fixed grating method, polyhedron rotating prism+fixed grating method, Single-chip Controlling high frequency stepping motor rotating grating method etc.Though it is tuning fast that these methods all can realize, exist cost height, anti-electromagnetic interference capability relatively poor, that control realizes is difficult, can not realize closed-loop control, positioning accuracy is poor, reappearance is undesirable, the not high many shortcomings of stability.
Summary of the invention
The objective of the invention is to provides a kind of practicality, reliable laserresonator for the quick tunable technology research of laser.Grating-selected quick tuning laser resonant cavity has tentatively been realized the tuning fast of laser.This invention can be applicable to fields such as laser Atmospheric Survey, laser chemistry, laser processing.
For achieving the above object, technical solution of the present invention provides a kind of grating-selected quick tuning laser resonant cavity, comprises parts such as cavity, outgoing mirror, grating, grating turntable, servomotor, driven by servomotor module and automatic control module; Its servomotor is connected with the grating turntable, is the driving mechanism of grating turntable, rotary power is provided for the grating turntable, and is electrically connected with the driven by servomotor module;
Automatic control module comprises computer, motion control card and tuning trigger control circuit, motion control card is electrically connected with tuning trigger control circuit, driven by servomotor module respectively, its output is communicated by letter with computer interactive, and tuning trigger control circuit is electrically connected with the laser trigger switch again;
Its workflow is: in the servomotor rotation process, position feedback element in the driven by servomotor module is to the real-time detection of accurate turned position and the feedback information of grating, after motion control card receives the signal of position feedback element, communicate by letter with computer interactive, utilize the auto-control software of computer, control driven by servomotor module drive servomotor drives grating and rotates fast and accurately, rotational angle by the control grating reaches selection to optical maser wavelength, when grating forwards required optical maser wavelength position to, the tuning trigger control circuit synchronous triggering of motion control card control laser, some optical maser wavelengths are exported in order, and it is tuning fast to finish whole resonant cavity.
Described grating-selected quick tuning laser resonant cavity, its described outgoing mirror and grating be totally one optical axis, and the grating normal becomes the autocollimatic right angle with optical axis.
Described grating-selected quick tuning laser resonant cavity, its described servomotor is an AC servo motor, or DC servo motor, or the direct drive servovalve motor, or has the servomotor of bindiny mechanism.
Described grating-selected quick tuning laser resonant cavity, its described grating are reflective plane diffraction grating or reflective sphere diffraction grating.
Described grating-selected quick tuning laser resonant cavity, its described outgoing mirror is partial reflection part transmission sphere or level crossing, its transmitance is 1%-99%.
Described grating-selected quick tuning laser resonant cavity, the position feedback element in its described driven by servomotor module is an encoder, or the circle grating.
Described grating-selected quick tuning laser resonant cavity, its described automatic control module is a dsp system, or professional motion control PLC system, or dedicated control system.
The present invention has provided a kind of new grating-selected quick tuning laser resonant cavity, and its tuned speed is fast, tuning range is big, tuning precision is high, is applicable to pulse CO 2Multiple tunable pulsed laser devices such as laser, pulse CO laser, pulse HF/DF laser can be applicable to fields such as laser Atmospheric Survey, laser chemistry, laser processing.
Description of drawings
Fig. 1 is a grating-selected quick tuning laser resonant cavity structural representation of the present invention;
Fig. 2 is the tuning triggering signal figure of tuning trigger control circuit in the laserresonator running, and wherein, Fig. 2 (a) finishes CO one time for laserresonator 2Laser is two tuning triggering signal figure than intense line 9R (20), 10P (20) scanning farthest, and Fig. 2 (b) finishes once the tuning triggering signal figure of same adjacent two the spectral line 10P of transition band scope (20), 10P (22) scanning for laserresonator;
Fig. 3 is higher two average energy (E) schematic diagrames than laser output facula after intense line 9R (20), 10P (20) and spectral line 10P (22) focusing and correspondence farthest of gain.
Embodiment
For further specifying feature of the present invention and structure, the present invention is described in detail below in conjunction with accompanying drawing.
Fig. 1 is a grating-selected quick tuning laser resonant cavity device schematic diagram, and among the figure, beam-splitter 4, energy meter 5 and spectrometer 6, energy meter 5 are used for measuring the output laser energy, and spectrometer 6 is used for measuring output laser line wavelength.
Grating-selected quick tuning laser resonant cavity of the present invention partly is made up of cavity (not illustrating among the figure), laser output mirror 3, grating 1, grating turntable 11, servomotor 2, driven by servomotor module 9 and automatic control module etc.Servomotor 2 is connected with grating turntable 11, is the driving mechanism of grating turntable 11, rotary power is provided for grating turntable 11, and is electrically connected with driven by servomotor module 9.
Automatic control module comprises computer 8, motion control card 10 and tuning trigger control circuit 7, motion control card 10 is electrically connected with tuning trigger control circuit 7, driven by servomotor module 9 respectively, its output and computer 8 interactive communications, tuning trigger control circuit 7 is electrically connected with the laser trigger switch again.
Laser output mirror 3 and grating 1 be totally one optical axis, and the grating normal becomes Littrow angle (being the autocollimatic right angle) with optical axis.
Servomotor 2 and driven by servomotor module 9 are power drive elements, are the cores of quick tuning system, and the position feedback element in the driven by servomotor module 9 is finished the isoparametric real-time monitoring feedback of motor position.The main effect of servomotor 2 and driven by servomotor module 9 is to drive grating 1 fast and accurate the rotation, and the rotational angle by control grating 1 reaches the selection to optical maser wavelength, realizes the orderly output of some optical maser wavelengths at last.Automatic control module mainly comprises upper control (comprising computer 8 and motion control card 10) and tuning trigger control circuit 7, it mainly acts on is that the synchronous triggering laser is realized the orderly output of optical maser wavelength when making grating 1 forward the corresponding corner of required optical maser wavelength to by control driven by servomotor module 9.The feedback signal of 2 rotations of upper control section control servomotor and reception position feedback element, and when grating 1 forwards required optical maser wavelength position to, control tuning trigger control circuit 7 synchronous triggering lasers, thus finish whole resonant cavity tuning purpose fast.
As shown in Figure 1, to realize whole C O 2Any two spectral lines of laser spectroscopy scope and adjacent two spectral lines of same transition band scope be tuned as example fast, according to corresponding autocollimatic grating equation: 2dsin α=λ (wherein, d is a grating constant, λ is an optical maser wavelength, α is the optical grating diffraction angle), when servomotor 2 drives grating 1 rotation, laser beam will incide with different angles on the grating 1, position feedback element in driven by servomotor module 9 real-time detects the physical location of grating 1, signal is finished in automatic control module output location when drafting wavelength location, be converted to tuning triggering signal synchronous triggering laser through tuning trigger control circuit 7, thereby can realize the orderly output of some optical maser wavelengths.
The control program of grating-selected quick tuning laser resonant cavity is based under the Windows operation interface, by the operating software New SigmaWin of motion control card 10 +And corresponding debugging developing instrument is finished.Our institute's written program only needs to revise by simple parameters and just can be implemented in the tuning fast of any two spectral lines and adjacent two spectral lines of same transition band scope in the whole C O2 laser spectroscopy scope.
The laser that we adopt in the experiment is the high repetition pulse frequency TEA CO of CAS Electronics Research Institute's development 2Laser, single pulse energy are 13J, the about 200ns of half maximum place full duration; It is that 10m, reflectivity are that 65% concave mirror is formed that laserresonator reaches 95% balzed grating, and radius of curvature by first-order diffraction efficient; Grating is in the auto-collimation state, adopts the first-order diffraction of grating to feed back as laser generation, and grating is a plane reflection type diffraction grating, and its constant is 100line/mm.
The servomotor that adopts is for directly driving AC servo motor, and the driver module supporting with it is the directly-drive servo motor driver, and the rated power of motor is 105W, rated speed is 200rpm, the absolute fix precision is 15 rads, and repetitive positioning accuracy is 1.3 rads, and angular acceleration is 980rad/s 2The position feedback element that adopts is 20 high precision photoelectric encoders, and its angular resolution is 1.24 rads; The upper computer based motion control card that is controlled to be that adopts.
Adopt the said apparatus CO that experimentized primary study 2Higher two spectral line 9R (20) farthest, 10P (20) and the output characteristic of same adjacent two the spectral line 10P of transition band scope (20), 10P (22) gain in the laser spectroscopy scope.Whole quick tuning laser resonant cavity is under dynamic rapid triggering situation, be example to export above several spectral lines respectively, Fig. 2 is the triggering signal figure of tuning trigger control circuit in system's running, the pulse signal of CH1 passage represents that the location of each spectral line of motion control card output finishes signal among Fig. 2, pulse signal in the CH2 passage is represented the tuning triggering signal of each spectral line of synchronous trigger circuit output, and vertical every lattice of time shaft are represented 10ms among Fig. 2.Laserresonator is finished CO one time among Fig. 2 (a) 2Laser farthest two need 60ms than intense line 9R (20), 10P (20) scanning.When laserresonator scans adjacent two spectral lines of same transition band scope, tuning period can shorten greatly, and the scanning that Fig. 2 (b) finishes once 10P (20), (22) two spectral lines of 10P for laserresonator needs 20ms.Laser output facula after above three spectral lines that measuring instrument is measured focus on and corresponding average energy (E) are as shown in Figure 3.
In sum, grating-selected quick tuning laser resonant cavity proposed by the invention, adopt rotation of driven by servomotor grating high-speed and accurate location first, to the accurate turned position real-time detection of grating and by auto-control software and hardware, coordinate the position of control grating and the triggering of laser, realized the tuning fast of laserresonator under the repetition rate drive manner.

Claims (7)

1. a grating-selected quick tuning laser resonant cavity comprises parts such as cavity, outgoing mirror, grating, grating turntable, servomotor, driven by servomotor module and automatic control module; It is characterized in that servomotor is connected with the grating turntable, be the driving mechanism of grating turntable, rotary power is provided for the grating turntable, and is electrically connected with the driven by servomotor module;
Automatic control module comprises computer, motion control card and tuning trigger control circuit, motion control card is electrically connected with tuning trigger control circuit, driven by servomotor module respectively, its output is communicated by letter with computer interactive, and tuning trigger control circuit is electrically connected with the laser trigger switch again;
Its workflow is: in the servomotor rotation process, position feedback element in the driven by servomotor module is to the real-time detection of accurate turned position and the feedback information of grating, after motion control card receives the signal of position feedback element, communicate by letter with computer interactive, utilize the auto-control software of computer, control driven by servomotor module drive servomotor drives grating and rotates fast and accurately, rotational angle by the control grating reaches selection to optical maser wavelength, when grating forwards required optical maser wavelength position to, the tuning trigger control circuit synchronous triggering of motion control card control laser, some optical maser wavelengths are exported in order, and it is tuning fast to finish whole resonant cavity.
2. grating-selected quick tuning laser resonant cavity as claimed in claim 1 is characterized in that described outgoing mirror and grating be totally one optical axis, and the grating normal becomes the autocollimatic right angle with optical axis.
3. grating-selected quick tuning laser resonant cavity as claimed in claim 1 is characterized in that described servomotor is an AC servo motor, or DC servo motor, or the direct drive servovalve motor, or has the servomotor of bindiny mechanism.
4. grating-selected quick tuning laser resonant cavity as claimed in claim 1 or 2 is characterized in that, described grating is reflective plane diffraction grating or reflective sphere diffraction grating.
5. grating-selected quick tuning laser resonant cavity as claimed in claim 1 or 2 is characterized in that, described outgoing mirror is partial reflection part transmission sphere or level crossing, and its transmitance is 1%-99%.
6. grating-selected quick tuning laser resonant cavity as claimed in claim 1 is characterized in that, the position feedback element in the described driven by servomotor module is an encoder, or the circle grating.
7. grating-selected quick tuning laser resonant cavity as claimed in claim 1 is characterized in that described automatic control module is a dsp system, or professional motion control PLC system, or dedicated control system.
CNB2006100782127A 2006-05-12 2006-05-12 Grating-selected quick tuning laser resonant cavity Expired - Fee Related CN100466402C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNB2006100782127A CN100466402C (en) 2006-05-12 2006-05-12 Grating-selected quick tuning laser resonant cavity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2006100782127A CN100466402C (en) 2006-05-12 2006-05-12 Grating-selected quick tuning laser resonant cavity

Publications (2)

Publication Number Publication Date
CN101071929A true CN101071929A (en) 2007-11-14
CN100466402C CN100466402C (en) 2009-03-04

Family

ID=38898979

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006100782127A Expired - Fee Related CN100466402C (en) 2006-05-12 2006-05-12 Grating-selected quick tuning laser resonant cavity

Country Status (1)

Country Link
CN (1) CN100466402C (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353462A (en) * 2011-07-08 2012-02-15 上海市激光技术研究所 Carbon dioxide laser wavelength measuring apparatus
CN104659645A (en) * 2013-11-18 2015-05-27 中国科学院大连化学物理研究所 RTP electrooptical modulating Q airflow hydrogen fluoride laser
CN112129228A (en) * 2019-06-25 2020-12-25 宝山钢铁股份有限公司 Method and system for accurately measuring length dimension of high-temperature plate blank
CN113050403A (en) * 2021-03-22 2021-06-29 湖北科技学院 Low-microwave-power miniature CPT atomic clock light source generation device and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4559500A (en) * 1981-10-09 1985-12-17 California Institute Of Technology Mirror-grating tuning arrangement for high resolution lasers
CN2310403Y (en) * 1997-07-09 1999-03-10 浙江大学 High-resolution raster cavity selective sublaser
US6282213B1 (en) * 1998-09-14 2001-08-28 Interscience, Inc. Tunable diode laser with fast digital line selection

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102353462A (en) * 2011-07-08 2012-02-15 上海市激光技术研究所 Carbon dioxide laser wavelength measuring apparatus
CN104659645A (en) * 2013-11-18 2015-05-27 中国科学院大连化学物理研究所 RTP electrooptical modulating Q airflow hydrogen fluoride laser
CN112129228A (en) * 2019-06-25 2020-12-25 宝山钢铁股份有限公司 Method and system for accurately measuring length dimension of high-temperature plate blank
CN113050403A (en) * 2021-03-22 2021-06-29 湖北科技学院 Low-microwave-power miniature CPT atomic clock light source generation device and method
CN113050403B (en) * 2021-03-22 2022-06-14 湖北科技学院 Low-microwave-power miniature CPT atomic clock light source generation device and method

Also Published As

Publication number Publication date
CN100466402C (en) 2009-03-04

Similar Documents

Publication Publication Date Title
CN100466402C (en) Grating-selected quick tuning laser resonant cavity
CN102072769A (en) Novel Fourier infrared spectrograph and analysis method
CN106017519B (en) A kind of Demodulation System for Fiber Optic Fabry-Perot Sensors and method
CN110233417B (en) Device for improving diamond Raman laser efficiency
CN104897610B (en) A kind of more component trace gas concentration measurement apparatus of rotating prism formula
CN109343032A (en) A kind of laser thunder emission system based on diffraction beam splitting element
CN109509602A (en) A kind of laser resistance adjuster
CN109313257A (en) System and method for light-beam position detection
CN112285036B (en) Frequency-reducing synchronous ultrafast transient absorption test system
CN102200581B (en) High-precision moisture Raman system and scaling method using monochromator
CN110148880A (en) The single pulse energy of passive Q-regulaitng laser automates adjusting method
CN104914443B (en) A kind of high-precision laser range-finding method of quick scanning
CN110045392B (en) Laser radar system for scanning atmospheric aerosol
CN104964641A (en) Magnetic micro displacement platform-type cascade step angle reflector laser interferometer, calibration method and measurement method
CN201378063Y (en) High-precision laser beam small angle deflecting device based on optical grating
CN103308460A (en) Micro spectrometer based on micro-electro-mechanical interference platform
CN103091260A (en) System for controlling femtosecond laser two-dimensional infrared spectroscopy device
CN105259138A (en) Z-scanning device for middle-infrared band being 3-5 micrometers
CN206095942U (en) Optic system and POCT fluorescent quantitation analysis appearance of POCT fluorescent quantitation analysis appearance
CN211697497U (en) Time-domain optical coherence tomography system
CN209216680U (en) A kind of laser resistance adjuster
CN210166031U (en) High-speed imaging spectrometer based on scanning galvanometer
US20030072334A1 (en) Variable wavelength light source
CN203350177U (en) Micro spectrometer based on MEMS (Micro-electro-mechanical system) interference platform
CN215985739U (en) Interference filter full-field transmittance scanning test device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090304

Termination date: 20120512