CN101042985A - 基板处理装置和基板处理方法 - Google Patents
基板处理装置和基板处理方法 Download PDFInfo
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- CN101042985A CN101042985A CN 200710088784 CN200710088784A CN101042985A CN 101042985 A CN101042985 A CN 101042985A CN 200710088784 CN200710088784 CN 200710088784 CN 200710088784 A CN200710088784 A CN 200710088784A CN 101042985 A CN101042985 A CN 101042985A
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2006078529 | 2006-03-22 | ||
JP2006078529 | 2006-03-22 | ||
JP2007004276 | 2007-01-12 |
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CN101042985A true CN101042985A (zh) | 2007-09-26 |
CN100483621C CN100483621C (zh) | 2009-04-29 |
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CNB2007100887848A Active CN100483621C (zh) | 2006-03-22 | 2007-03-22 | 基板处理装置和基板处理方法 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101850344A (zh) * | 2010-05-28 | 2010-10-06 | 上海集成电路研发中心有限公司 | 半导体器件清洗装置及清洗方法 |
CN103406322A (zh) * | 2013-07-22 | 2013-11-27 | 彩虹显示器件股份有限公司 | 一种用于清洗基板玻璃的装置及方法 |
CN101764048B (zh) * | 2008-12-25 | 2015-11-25 | 硅电子股份公司 | 微气泡产生装置以及硅晶片清洁设备 |
TWI628007B (zh) * | 2014-03-10 | 2018-07-01 | 斯克林集團公司 | 基板處理系統及配管洗淨方法 |
CN111417457A (zh) * | 2018-03-20 | 2020-07-14 | 株式会社岛津制作所 | 小气泡供给装置以及小气泡分析系统 |
CN112619272A (zh) * | 2019-09-24 | 2021-04-09 | 株式会社斯库林集团 | 基板处理装置 |
-
2007
- 2007-03-22 CN CNB2007100887848A patent/CN100483621C/zh active Active
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101764048B (zh) * | 2008-12-25 | 2015-11-25 | 硅电子股份公司 | 微气泡产生装置以及硅晶片清洁设备 |
CN101850344A (zh) * | 2010-05-28 | 2010-10-06 | 上海集成电路研发中心有限公司 | 半导体器件清洗装置及清洗方法 |
CN103406322A (zh) * | 2013-07-22 | 2013-11-27 | 彩虹显示器件股份有限公司 | 一种用于清洗基板玻璃的装置及方法 |
TWI628007B (zh) * | 2014-03-10 | 2018-07-01 | 斯克林集團公司 | 基板處理系統及配管洗淨方法 |
CN111417457A (zh) * | 2018-03-20 | 2020-07-14 | 株式会社岛津制作所 | 小气泡供给装置以及小气泡分析系统 |
CN112619272A (zh) * | 2019-09-24 | 2021-04-09 | 株式会社斯库林集团 | 基板处理装置 |
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Publication number | Publication date |
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CN100483621C (zh) | 2009-04-29 |
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C56 | Change in the name or address of the patentee |
Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. |
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CP01 | Change in the name or title of a patent holder |
Address after: Kyoto City, Kyoto, Japan Patentee after: Skilling Group Address before: Kyoto City, Kyoto, Japan Patentee before: DAINIPPON SCREEN MFG Co.,Ltd. Address after: Kyoto City, Kyoto, Japan Patentee after: DAINIPPON SCREEN MFG Co.,Ltd. Address before: Kyoto City, Kyoto, Japan Patentee before: Dainippon Screen Mfg. Co.,Ltd. |