CN101028700A - Processing device with rotary table - Google Patents
Processing device with rotary table Download PDFInfo
- Publication number
- CN101028700A CN101028700A CN 200710084461 CN200710084461A CN101028700A CN 101028700 A CN101028700 A CN 101028700A CN 200710084461 CN200710084461 CN 200710084461 CN 200710084461 A CN200710084461 A CN 200710084461A CN 101028700 A CN101028700 A CN 101028700A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- turntable
- cable
- chuck table
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012545 processing Methods 0.000 title claims abstract description 33
- 230000008093 supporting effect Effects 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 30
- 230000007246 mechanism Effects 0.000 claims description 28
- 238000012546 transfer Methods 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 238000007665 sagging Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 39
- 230000009471 action Effects 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 125000004122 cyclic group Chemical group 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000012467 final product Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000008400 supply water Substances 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Images
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Machine Tool Units (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
An objective of the invention is to realize the miniaturisation of a processing device having a turn plate. The turn plate seat (60) of the processing device comprises a periphery supporting part (61) capable of rotatablely supporting the periphery part (20b) of the turn plate (20), and a central supporting part (62) capable of rotatablely supporting the rotating center of the turn plate (20), wherein the extending part (100A) of a plurality of cables (100) connected to the clamping disc bench (18, 19) is received inside a cable receiving chamber (67) formed at the inner side of the periphery supporting part (61).
Description
Technical field
The present invention relates to have the processing unit (plant) of turntable.
Background technology
Past is formed with the wafer of devices such as a plurality of IC, LSI from the teeth outwards, and the thickness that forms regulation is ground at the back side, cuts apart device and is divided into single device by dicing device etc., is used for electronic equipments such as portable phone, personal computer.
The lapping device at the grinding wafers back side roughly have the chuck table that attract to keep wafer, the chuck table of supporting more than 2 turntable, supporting turntable the turntable seat and be equipped with attracting to remain on the grinding mechanism (for example referring to patent documentation 1) of the abrasive wheel that the wafer on the chuck table grinds, grinding wafers expeditiously.
And, chuck table has motor, to attracting the zone to transmit the attraction transfer part of suction and to the water supply portion that attracts regional water supply, be provided with and comprise the electric wire that is attached on the motor, the attraction flexible pipe that is attached at the attraction transfer part and the cable that is attached at the water supply hose of water supply portion, the required function of transmission chuck table.
Patent documentation 1:(Japan) spy opens 2003-209080 communique (Fig. 1)
Yet, the cable in past since folding and unfolding connect to by a plurality of casees can be crooked the cable support in and be configured to periphery around the turntable seat, follow the rotation of turntable and carry out bending mobile, so exist in the surplus that the periphery of turntable must have the cable support to move, the problem that lapping device becomes bigger.And, exist the cable ratio to be easier to elongated, difficult treatment and uneconomic problem.
Summary of the invention
The present invention be directed to above-mentioned situation and propose, its objective is that realization has the miniaturization of the processing unit (plant) of turntable.
In order to address the above problem, achieve the goal, relate to the processing unit (plant) with turntable of the present invention, have: the chuck table that keeps wafer, the turntable of supporting this chuck table more than 2, support the turntable seat of this turntable, and to remaining on the organisation of working of the wafer enforcement processing on the above-mentioned chuck table, it is characterized in that, above-mentioned turntable seat has the periphery support of the peripheral part of rotatably mounted above-mentioned turntable, and the centre bearing portion of the pivot of rotatably mounted above-mentioned turntable, many cables that are attached at above-mentioned chuck table are indoor at the drawing cable that the inboard of above-mentioned periphery support forms by folding and unfolding.
And, relate to the processing unit (plant) with turntable of the present invention, it is characterized in that in foregoing invention, rotating shaft is sagging at the pivot of above-mentioned turntable; Being formed with the rotating shaft that inserts above-mentioned rotating shaft in the above-mentioned centre bearing portion of above-mentioned turntable seat inserts mouthful, the extension that is attached at the above-mentioned cable of above-mentioned chuck table is bundled into can be crooked and be fixed on the above-mentioned rotating shaft, along with the rotation of above-mentioned turntable, above-mentioned cable is wound on the above-mentioned rotating shaft.
And, relate to the processing unit (plant) with turntable of the present invention, it is characterized in that the rotating shaft with reach through hole is sagging at the pivot of above-mentioned turntable; Be formed with the rotating shaft that inserts above-mentioned rotating shaft in the above-mentioned centre bearing portion of above-mentioned turntable seat and insert mouthful, the above-mentioned cable that is attached at above-mentioned chuck table is by above-mentioned reach through hole, and it is indoor that the extension of above-mentioned cable is coiled in above-mentioned drawing cable.
And, relate to the processing unit (plant) with turntable of the present invention, it is characterized in that in foregoing invention, above-mentioned organisation of working is the grinding mechanism that the abrasive wheel that the surface that remains on the wafer on the above-mentioned chuck table is ground is installed.
And, relate to the processing unit (plant) with turntable of the present invention, it is characterized in that in foregoing invention, above-mentioned turntable is back and forth rotating in the restricted scope of the anglec of rotation of origin position.
And, relate to the processing unit (plant) with turntable of the present invention, it is characterized in that, in foregoing invention, above-mentioned chuck table has attraction zone that wafer is attracted to keep, around the framework in this attractions zone, make this framework motor rotating, transmit the attraction transfer part of attraction and the water supply portion that supplies water to above-mentioned suction zone territory to above-mentioned suction zone territory, above-mentioned cable comprises the electric wire that links with above-mentioned motor, and the attraction flexible pipe that is connected of above-mentioned attraction transfer part and the water supply hose that is connected with above-mentioned water supply portion.
The effect of invention
Relate to the processing unit (plant) with turntable of the present invention, the indoor folding and unfolding of drawing cable that forms in the inboard of the periphery support of turntable seat is attached at many cables of chuck table, so produce following effect: need not have the surplus that the coiling cable is used in the periphery of turntable seat, the processing unit (plant) miniaturization can be made, and cable can be made than lacking and reducing expenses.
And, relate to the processing unit (plant) with turntable of the present invention, because the extension that is attached at the cable of chuck table is bundled into can be crooked and be fixed on the rotating shaft of chuck table, along with the rotation of turntable, cable is wound on the rotating shaft, so produce following effect: can prevent along with the rotation of turntable that crooked cable is stranded mutually and break, can improve the reliability of cable, and crooked cable part is by weight reduction, so can alleviate the load of the motor that makes turntable rotation usefulness.
And, relate to the processing unit (plant) with turntable of the present invention, owing to be attached at the reach through hole of the cable of chuck table by rotating shaft, it is indoor that the extension of cable is coiled in drawing cable, so the extension of cable is fixing to get final product, there is not flexure operation with the rotation of turntable, do not need to be wound on the rotating shaft yet, can further shorten the length of cable, can further alleviate the load that makes the turntable motor rotating.
Description of drawings
Fig. 1 is the stereoscopic figure of the processing unit (plant) of expression present embodiment.
Fig. 2 is near the exploded perspective view of the structure example the expression turntable.
Fig. 3 is the stereogram of the structure of expression chuck table.
Fig. 4 is the vertical side view that cuts of chuck table.
Fig. 5 is the ideograph of the folding and unfolding state of expression cable.
Fig. 6 is the summary stereogram of the extension configuration example partly of expression cable.
Fig. 7-the 1st, the summary plane at the origin position place of the action of the extension part of expression cable.
Fig. 7-the 2nd, the summary plane at 180 degree position of rotation places of the action of the extension part of expression cable.
Fig. 8 is the partial perspective view of variation of the binding method of expression extension.
Fig. 9 is the plane of the variation of expression turntable seat.
Figure 10 is the ideograph of variation of the folding and unfolding state of expression cable.
The specific embodiment
Following with reference to accompanying drawing, describe in detail as the processing unit (plant) of implementing preferred forms of the present invention with turntable.
In the present embodiment, represented to be applied to the example of lapping device with turntable as an example of processing unit (plant) with turntable.Fig. 1 is the stereoscopic figure of the topping machanism of expression present embodiment.Lapping device 10 has: the box 11 of accommodating wafer W, 12, from box 11, transport wafer W or wafer W is transported into transporting of box 12 and be transported into mechanism 13, carry out the position registration mechanism 14 of the center aligning of wafer W, transmit the conveyer 15 of wafer W, 16, attract to keep three chuck table 17～19 of wafer W, the turntable 20 of these chuck table 17～19 is supported in rotation freely respectively, to remaining on the grinding mechanism 30 of the wafer W enforcement milled processed on each chuck table 17～19,40, the wiper mechanism 51 that chuck table 17～19 after grinding is cleaned, and the wiper mechanism 52 that the wafer W after grinding is cleaned.
In this lapping device 10, the wafer W of folding and unfolding in box 11 is transported into mechanism 13 and is sent in the position registration mechanism 14 by transporting, and carries out being transmitted, being placed on the chuck table 17 by conveyer 15 after the center aims at this.Chuck table 17～19 is made the structure that can rotate separately and move on the XY plane along with the rotation of turntable 20.Concerning attracting to have kept the chuck table 17 of wafer W, by the rotation predetermined angular, for example rotate 120 and spend to counter clockwise direction, thereby be positioned grinding mechanism 30 under.
The grinding mechanism 30 that is provided with as an example of the organisation of working of the wafer W that remains on chuck table 17～19 being implemented processing constitutes by support 34 supportings, and move up and down on Z-direction along with moving up and down of support 34, this support 34 is arranged on pair of guide rails 32 guiding of wall portion 31 along Z-direction and the driving by motor 33 moves up and down.This grinding mechanism 30 has: the abrasive wheel 37 that makes the main shaft 35a motor rotating 35 that rotatably is supported and be installed in the back side of the front end of main shaft 35a and grinding wafers W by wheel mount pad 36.Abrasive wheel 37 has and is fixed into the abrasive millstone 38 that circular rough lapping is used in its lower section.
Therefore, grinding mechanism 30 grinds feeding in the below to Z-direction along with the rotation of the main shaft 35a of motor 35, the abrasive millstone 38 of abrasive wheel 37 of rotation contacts with the back side of wafer W, thus remain on the chuck table 17 and be positioned grinding mechanism 30 under the back side of wafer W by rough lapping.
Then, turntable 20 only rotates identical angle to counterclockwise, thus by the wafer W of rough lapping be positioned grinding mechanism 40 under.
The grinding mechanism 40 that is provided with as an example of the organisation of working of the wafer W that remains on chuck table 17～19 being implemented processing constitutes by support 43 supportings, move up and down on Z-direction along with moving up and down of support 43, above-mentioned support 43 is arranged on pair of guide rails 41 guiding of wall portion 31 along Z-direction and the driving by motor 42 moves up and down.This grinding mechanism 40 has the abrasive wheel 46 that makes the main shaft 44a motor rotating 44 that rotatably is supported and be installed in the back side of the front end of main shaft 44a and grinding wafers W by wheel mount pad 45.Abrasive wheel 46 has and is fixed into the abrasive millstone 47 that circular smooth grinding is used in its lower section.That is to say that grinding mechanism 40 and the structure of grinding mechanism 30 are that the kind of abrasive millstone is different.
Therefore, grinding mechanism 40 grinds feeding along with the main shaft 44a rotation of motor 44 to the below of Z-direction, the abrasive millstone 47 of abrasive wheel 46 of rotation contacts with the back side of wafer W, thus by chuck table 17 maintenances and be positioned grinding mechanism 40 under the back side of wafer W by smooth grinding.
The back side is turned back to shown in Figure 1 initial position by turntable 20 to clockwise reverse rotation by the chuck table 17 that the wafer W of smooth grinding attracts to keep.In this position, the back side is sent to wiper mechanism 52 by the wafer W of smooth grinding by conveyer 16, at this, by clean removing after the lapping rejects, is transported into mechanism 13 and is housed in the box 12 by transporting.And 51 pairs of wiper mechanisms take out the chuck table 17 that is become vacant state after the wafer W of smooth grinding by connecting gear 16 and clean.
To the rough lapping of the wafer W on other chuck table 18,19, smooth grinding, the transporting of wafer W of other chuck table 18,19 is transported into etc., also according to the position of rotation of turntable 20 by carrying out with quadrat method.
Near the following structure the turntable 20 of explanation in the lapping device 10.Fig. 2 is near the exploded perspective view of the structure example the expression turntable.Form discoid turntable 20 and have 21,3 reach through holes of rotating shaft 22～24,3 cable inserting holes 25～27, a plurality of pillar 28 and belt grooves 29.Rotating shaft 21 is by formed centre bore 20a (referring to Fig. 5) on the pivot Φ of turntable 20, from turntable 20 under let droop.The flange part 21a that forms in the upper end is fixed on the turntable 20 by screw 21b, forms an integral body with turntable 20 like this.And rotating shaft 21 has the reach through hole 21c of break-through along the vertical direction, has by the fixing freely major diameter coiling 21e of portion (referring to Fig. 5) of screw 21d loading and unloading in the lower end side periphery.
Reach through hole 22～24 is used for 3 chuck table 17～19 of position configuration of uniformly-spaced separating around pivot Φ, with each 120 degree, and these chuck table 17～19 are supported in rotation freely.Cable inserting hole 25～27 is with respect to reach through hole 22～24, and all side positions in being formed on are used for inserting and wear the cable of stating.Pillar 28 is used for guaranteeing the space between following turntable cover of placing on the turntable 20 and turntable 20, is fixed on the turntable 20 by bolt structure.Belt grooves 29 is formed on the whole circumference of outer peripheral face of turntable 20, and the rotation belt 29a that is used to make turntable 20 rotations is installed.
And lapping device 10 has turntable seat 60 in the lower side of turntable 20, has turntable cover 70 in the upper side of turntable 20.Turntable seat 60 is fixed on the substrate etc. of the inside that is configured in lapping device 10, has periphery support 61 and centre bearing portion 62.Periphery support 61 can support the peripheral part 20b (referring to Fig. 5) of the turntable 20 that is placed rotationally by a plurality of air bearing 63 of being cut apart configuration, forms identical cylindric of diameter and turntable 20.The middle position of centre bearing portion 62 in the formed recess 64 of the top side of turntable seat 60 is outstanding to be formed, and can support the pivot Φ of turntable 20 rotatably, is formed with the rotating shaft patchhole 65 (referring to Fig. 5) of the rotating shaft 21 that inserts turntable 20.At this, centre bearing portion 62 is fixed on the upper end, has the bearing supporting mass 66c that bearing 66a, 66b are supported.The internal perisporium butt of the centre bore 20a of bearing 66a, 66b and turntable 20, turntable 20 is supported in rotation freely like this.
And turntable seat 60 has drawing cable chamber 67 and rotation belt motor 68.Drawing cable chamber 67 is the spaces that form in the inboard of periphery support 61, is formed with the peristome 61a that makes drawing cable chamber 67 and external communications in the part of periphery support 61.Rotation belt motor 68 is fixed on the part of the outer peripheral face of periphery support 61, and rotation belt 29a is enclosed within on the motor shaft 68a, and turntable 20 is back and forth rotated to counter clockwise direction, clockwise direction.In the present embodiment, turntable 20 is configured to, and the anglec of rotation of Gui Ding origin position is being restricted to predetermined angular, is for example back and forth rotating in 270 scopes of spending certainly.
And turntable cover 70 forms than turntable 20 big circles, is placed on the turntable 20 by pillar 28, covers its upper surface.Turntable cover 70 has: with 3 corresponding respectively positions of reach through hole 22～24 form a big circle reach through hole 71～73 and the periphery of reach through hole 71～73 towards above cyclic rib 71a～73a of using of the outstanding waterproof that forms.And, turntable cover 70 outer peripheral edges have towards below the cyclic rib 70a that uses of the outstanding waterproof that forms.Cyclic rib 70a by with the periphery of the opening 54 of the drainage cover 53 that is provided with around the turntable 20 of topping machanism 10 towards above the combination of the cyclic rib 54a that uses of the outstanding waterproof that forms, the performance water-proof function.
The formation of chuck table 17～19 below is described.The structure of chuck table 17～19 is identical, is that example is illustrated at this with chuck table 17.Fig. 3 is the stereogram of structure of the chuck table 17 of expression present embodiment.Fig. 4 is the vertical side view that cuts of chuck table 17.Chuck table 17 has: attract zone 18, framework 82, motor 83, encoder 84, attraction transfer part 85 and water supply portion 86.It is discoid to attract zone 81 to be formed by porous ceramic materials etc., is used for attracting to keep wafer W.Framework 82 forms around attracting zone 81, forms space 87 in the bottom that attracts zone 81, and, have the rotating shaft 89 of the stream 88 that formation is connected with space 87 towards the below.
82 rotations of such framework are installed in the reach through hole 71,22 freely, have rotation freely with the endless groove 82a of cyclic rib 71a tabling.The framework 82 that motor 83 is used to rotation is bearing on the turntable 20 is freely rotated, and is fixedly installed in the reach through hole 22 of turntable 20 around rotating shaft 89.Framework 82 in the case by bearing 90 with respect to motor 83 rotations freely.Encoder 84 is arranged on the bottom of motor 83, is used to detect the rotation status of rotating shaft 89.At this, the electric wire 101a that electric power is supplied with usefulness is attached on the motor 83; The electric wire 101b that holding wire is used is attached on the encoder 84.
And attraction transfer part 85 is used for transmitting by stream 88, space 87 and is used for attracting zone 81 to attract to keep the attraction of wafer W, is connected with stream 88 by the swivel joint 9 in the lower end side setting of rotating shaft 89.Connect attraction flexible pipe 102 in this attraction transfer part 85, the other end of this flexible pipe is connected on the attraction sources such as vacuum tank (not having diagram).
And water supply portion 86 is used for by stream 88, space 87 to attracting zone 81 to supply water, and the swivel joint 92 of the lower end side by being arranged on rotating shaft 89 is connected with stream 88.Link water supply hose 103 in this water supply portion 86, the other end of this flexible pipe is connected on the water source (not having diagram).So, when taking out from chuck table 17 when finishing the wafer W of grinding, by wafer W is floated from the adsorption plane that attracts zone 81 to attracting zone 81 to supply water, laminar wafer W is left attracted zone 81, and water supply portion 86 also can supply with water and compressed-air actuated fluid-mixing.
At this, in the present embodiment, be connected with chuck table 17, the structure that is used to transmit the cable 100 of the required function of chuck table 17 comprises: the electric wire 101a that is connected with above-mentioned motor 83, the electric wire 101b that is connected with encoder 84, the attraction flexible pipe 102 that is connected with attraction transfer part 85 and the water supply hose 103 that is connected with water supply portion 86.About chuck table 18,19 also is the same, has many cables 100 that are connected with chuck table 17～19 as topping machanism 10.
The below folding and unfolding of explanation cable 100.Fig. 5 is the ideograph of the folding and unfolding state of expression cable 100.In the present embodiment, many cables 100 that are connected with chuck table 17～19 by folding and unfolding in the drawing cable chamber 67 of turntable seat 60.At this, the cable 100 that is connected with chuck table 17～19,67 process peristome 61a extend to the supply source at power supply, attraction source, water source etc. respectively from the drawing cable chamber, but the extension 100A of such cable 100 guarantees to follow the length of the rotation of turntable 20, being become by the bundle letter can be crooked, utilizes fastened tools 200, bolt 201 etc. to be fixed on the 21e of coiling portion of rotating shaft 21 outstanding in drawing cable chamber 67.And the extension 100A of cable 100 utilizes fastened tools 203, bolt 204 etc. to be fixed on substrate etc. and goes up on the fixing fixed head 202 near peristome 61a.So, along with the rotation of turntable 20, the extension 100A of cable 100 be wound onto rotating shaft 21 the 21e of coiling portion around, untie action by reverse rotation.
At this,, describe the concrete configuration example and the action of cable 100 in detail with reference to Fig. 6 and Fig. 7.Fig. 6 is the summary stereogram of the extension 100A configuration example partly of expression cable 100, and Fig. 7-1 and Fig. 7 the-the 2nd, represents the summary plane of its action.Cable 100 will respectively have many electric wire 101, attract flexible pipe 102 and water supply hose 103, overlap to form one on the above-below direction by being bonded in, respectively as electric wire group 101G, attraction hose set 102G and water supply hose group 103G, thereby make flat cable, at the fixed part that adopts strong elements 200,203, sandwich liner 205,206 and fix between each electric wire group 101G, attraction hose set 102G and water supply hose group 103G, becoming as extension 100A bundle letter like this can be crooked.
At this, electric wire group 101G for example is made of 7 electric wire 101a～101g, and electric wire 101a topmost uses as the power supply to motor 83; Electric wire 101b uses as the holding wire to encoder 84; Electric wire 101g bottom uses as false electric wire, and along with the bending change of the rotation of turntable 20 time, so that other electric wires 101a～101f does not rub mutually with substrate, electric wire 101e, 101f use as standby wiring, so that can adapt to special use specification.
And, in the position of leaning on private side than the fixed part that adopts fastened tools 200, shown in Fig. 7-1 and Fig. 7-2, by electric wire group 101G, the cable 100 that attracts hose set 102G, water supply hose group 103 to constitute, the 21e of coiling portion that is drawn in rotating shaft 21 goes up in the fixing branching portion 210, from this branching portion 210, by reach through hole 21c from the peristome 21f that is connected with reach through hole 21c to rotating shaft 21, pull out from the upper end, pass through cable inserting hole 25～27 again to each chuck table 17～19 branches, be attached on the chuck table 17～19.At this, because branching portion 210 is fixed on the 21e of coiling portion of rotating shaft 21, so, cable 100 between branching portion 210, rotating shaft 21, chuck table 17～19 and connection chuck table 17～19 and the branching portion 210, forming one with turntable 20 is rotated, even turntable 20 rotation can not change the relative position relation with each chuck table 17～19 yet, can not make the cable 100 that has passed through reach through hole 21c produce distortion etc.
At this, the position of rotation of Fig. 7-1 expression turntable 20 is in the state of the origin position that becomes 0 degree.The extension 100A of cable 100 is in the state that is not wound on the rotating shaft 21.From this state, for example to counter clockwise direction Rotate 180 degree, then move shown in Fig. 7-2: along with the rotation of turntable 20, the extension 100A of cable 100 is wound on around the 21e of coiling portion of rotating shaft 21 as if turntable.If 270 degree that turntable 20 further limits to rotation counterclockwise, then following action: along with the rotation of turntable 20, the extension 100A of cable 100 is wound on around the 21e of coiling portion of rotating shaft 21.Under the situation of clockwise direction reverse rotation, the extension 100A of cable 100 that is wound on the 21e of coiling portion of rotating shaft 21 is untied successively at turntable 20.
If adopt the lapping device 10 of present embodiment, then turntable seat 60 has: can support the periphery support 61 of peripheral part 20b of turntable 20 and the centre bearing portion 62 that can support the pivot of turntable 20 rotatably rotatably, the a plurality of cables 100 that are connected with chuck table 17～19 by folding and unfolding in the drawing cable chamber 67 that the inboard of periphery support 61 forms, so, periphery at turntable seat 60 does not need to have the surplus of the cable disc of the rotation that should follow turntable 20 around usefulness, can make lapping device 10 miniaturizations.And, can shorten the length of the cable 100 of the rotation that should follow turntable 20, both economical.
And, if adopt the lapping device 10 of present embodiment, then rotating shaft 21 is sagging at the pivot φ of turntable 20, be formed for inserting the rotating shaft patchhole 65 of rotating shaft 21 in the centre bearing portion 62 of turntable seat 60, the extension 100A of the cable 100 that links with chuck table 17～19 is tied that letter becomes can bending, be fixed on the rotating shaft 21, along with the rotation of turntable 20 is wound on the rotating shaft 21 cable 100, so, can prevent between the cable 100 of bending displacement stranded mutually and break along with the rotation of turntable 20, can improve the cable reliability, and, because crooked cable part is by weight reduction, so, the load of the rotation belt motor 68 that makes turntable 20 rotation usefulness can be alleviated.
And, if adopt the lapping device 10 of present embodiment, then when safeguarding cable 100 grades that are connected with each chuck table 17～19, cable 100 is taken off from branching portion 210 parts and make under the state that extension 100A side keeps intact, unclamp screw 21d, pull down the 21e of coiling portion from rotating shaft 21, can extract rotating shaft 21 and turntable 20 upward together like this, can improve operability.
The following variation of bundle letter method of the extension 100A of explanation cable 100.Fig. 8 is the partial perspective view of variation of the bundle letter method of expression extension 100A.This variation relates to extension 100A, utilizes fastened tools 200,203, bolt 201,204 etc., be clipped in each electric wire group 101G, attract between hose set 102G, the water supply hose group 103G can be crooked the two ends of separation sheet material 300 fix.By sandwiching the good separation sheet material 300 of sliding, can improve the electric wire group 101G among the extension 100A of bending displacement, attract the sliding of hose set 102G, water supply hose group 103G, prevent mutual friction.
Moreover, the variation of the branch configuration of cable 100 is described.Fig. 9 is the plane of structure example of turntable seat 60 of the variation of the expression branch configuration that is used to illustrate cable 100.This variation is to replace the structure shown in Fig. 2 etc., in order to make cable 100 not by in the reach through hole 21c of rotating shaft 21 and possess cable inserting hole 69 towards 17～19 configurations of each chuck table, this cable inserting hole 69 is around pivot φ, as circular-arc slotted hole, make the radial location difference form concentric circles.Cable inserting hole 69 also staggers 120 degree respectively with the corresponding length that forms the angular dimension of about 270 degree of angle that turntable 20 can rotate and forms.And the position of the reach through hole 22～24 when setting turntable 20 for and being positioned at origin position becomes respectively near the end of each cable inserting hole 69.
If adopt the cable inserting hole 69 of this shape, then along with the rotation formation one of turntable 20 is rotated, even the fixing turntable seat 60 in location between constant chuck table 17～19 of relative position relation and branching portion 210, each cable 100 that is attached between chuck table 17～19 and the branching portion 210 also can move without barrier in the space that cable inserting hole 69 forms.Like this, need be and make a circulation on turntable 20 in order to make cable 100 pass reach through hole 21c, cable inserting hole 25～27, can link with the shortest path, so, can shorten the length that links the cable 100 between chuck table 17～19 and the branching portion 210 with the bottom line of necessity.
The variation of the folding and unfolding state of cable further, is described.Figure 10 is the ideograph of variation of the folding and unfolding state of expression cable 100.This variation is as follows: the cable 100 that is attached at chuck table 17～19 is towards just following to the reach through hole 21c that passes rotating shaft 21, route to the branching portion of being fixed on the substrate 211 210, moreover the extension 100A of the cable 100 of front is from branching portion 210 suitably coiling in drawing cable chamber 67.Cover case 212 for example is arranged on the branching portion 210, is used for the directionality of the cable 100 that connects up in reach through hole 21c from branching portion 210 is led.
If adopt this variation, then cable 100 is configured to pass in the reach through hole 21c of rotating shaft 21, if but have surplus in the upper end of rotating shaft 21 and the cable 100 between the cable inserting hole 25～27, so, even cable 10 distortions also can be followed the intermittent of turntable 20 and back and forth be rotated.And the extension 100A of cable 100 does not need to follow the intermittent reciprocal rotation of turntable 20, is getting final product of fixing, so do not follow the intermittent back and forth flexure operation of rotation of turntable 20, does not need to reel to rotating shaft 21 yet.Like this, the extension 100A of cable 100 gets final product in cable retractable room 67 as suitable length folding and unfolding, can further shorten the length of cable 100, can further alleviate the load of the rotation belt motor 68 that makes turntable 20 rotations.And,,, can improve the cable reliability so do not worry cable twist or broken string owing to reduced the moving part of cable 100.
The present invention is not limited only to above-mentioned embodiment, in the scope that does not break away from aim of the present invention, can carry out various distortion.For example present embodiment has illustrated the example that is applicable to lapping device 10 as processing unit (plant), but is not limited only to lapping device, also goes for having turntable, the topping machanism of chuck table etc.And, corresponding, also be not limited only to topping machanism 30,40 as processing unit (plant), be under the situation of topping machanism for example at processing unit (plant), also can be the cutting mechanism that the cutting tip that the surface that remains on the wafer on the chuck table is cut is installed.
And,, also can suitably set according to the function of the kind of the processing unit (plant) that is suitable for and chuck table, organisation of working about the kind of cable 100 (wiring, pipe arrangement), bar number.For example, be under the situation of cutting mechanism at organisation of working, cable also can not comprise the water supply hose to chuck table water supply usefulness.
Moreover, in the lapping device 10 of present embodiment, be illustrated as example with 3 chuck table 17～19, but so long as just be not limited only to more than 23 all applicable.Grinding mechanism 30,40 also is not limited only to 2, for example also can be one.
Claims (6)
1, a kind of processing unit (plant) with turntable has: keep chuck table, supporting this chuck table more than 2 of wafer turntable, support the turntable seat of this turntable and implement the organisation of working of processing remaining on wafer on the above-mentioned chuck table, it is characterized in that,
Above-mentioned turntable seat has the centre bearing portion of the pivot of the periphery support of peripheral part of rotatably mounted above-mentioned turntable and rotatably mounted above-mentioned turntable,
Many drawing cables that are attached at above-mentioned chuck table are indoor at the drawing cable that the inboard of above-mentioned periphery support forms.
2, the processing unit (plant) with turntable as claimed in claim 1 is characterized in that, rotating shaft is sagging at the pivot of above-mentioned turntable; Being formed with the rotating shaft that inserts above-mentioned rotating shaft in the above-mentioned centre bearing portion of above-mentioned turntable seat inserts mouthful, the extension that is attached at the above-mentioned cable of above-mentioned chuck table is bundled into can be crooked and be fixed on the above-mentioned rotating shaft, along with the rotation of above-mentioned turntable, above-mentioned cable is wound on the above-mentioned rotating shaft.
3, the processing unit (plant) with turntable as claimed in claim 1 is characterized in that, the rotating shaft with reach through hole is sagging at the pivot of above-mentioned turntable; Be formed with the rotating shaft that inserts above-mentioned rotating shaft in the above-mentioned centre bearing portion of above-mentioned turntable seat and insert mouthful, the above-mentioned cable that is attached at above-mentioned chuck table is by above-mentioned reach through hole, and it is indoor that the extension of above-mentioned cable is coiled in above-mentioned drawing cable.
4, as each the described processing unit (plant) in the claim 1～3, it is characterized in that above-mentioned organisation of working is the grinding mechanism that the abrasive wheel that the surface that remains on the wafer on the above-mentioned chuck table is ground is installed with turntable.
As each the described processing unit (plant) in the claim 1～4, it is characterized in that 5, above-mentioned turntable is back and forth rotating in the restricted scope of the anglec of rotation of origin position with turntable.
6, as each the described processing unit (plant) in the claim 1～5 with turntable, it is characterized in that, above-mentioned chuck table has attraction zone that wafer is attracted to keep, around the framework in this attractions zone, make this framework motor rotating, transmit the attraction transfer part of attraction and to the water supply portion of above-mentioned suction zone territory water supply to above-mentioned suction zone territory
Attraction flexible pipe that above-mentioned cable comprises the electric wire that links with above-mentioned motor, be connected with above-mentioned attraction transfer part and the water supply hose that is connected with above-mentioned water supply portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006058029A JP2007229904A (en) | 2006-03-03 | 2006-03-03 | Machining device provided with turntable |
| JP058029/2006 | 2006-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101028700A true CN101028700A (en) | 2007-09-05 |
| CN101028700B CN101028700B (en) | 2010-12-29 |
Family
ID=38551001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200710084461 Active CN101028700B (en) | 2006-03-03 | 2007-03-02 | Processing device with rotary table |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2007229904A (en) |
| CN (1) | CN101028700B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102233542A (en) * | 2010-04-30 | 2011-11-09 | 三星电子株式会社 | Chemical mechanical polishing system, method and system |
| CN102240963A (en) * | 2011-06-14 | 2011-11-16 | 平高集团有限公司 | Electric grinder |
| CN104457490A (en) * | 2013-09-24 | 2015-03-25 | 株式会社迪思科 | Wire cable |
| CN107622971A (en) * | 2016-07-13 | 2018-01-23 | 株式会社迪思科 | Chuck table mechanism |
| CN115750925A (en) * | 2022-11-02 | 2023-03-07 | 中国电子科技集团公司第十四研究所 | Large-angle comprehensive coaxial bending device |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5184135B2 (en) * | 2008-02-20 | 2013-04-17 | 日特エンジニアリング株式会社 | manufacturing device |
| US8376339B2 (en) | 2008-09-12 | 2013-02-19 | Panasonic Corporation | Positioner |
| JP5495936B2 (en) * | 2009-06-17 | 2014-05-21 | 株式会社東京精密 | Wafer holding apparatus and wafer processing apparatus |
| US8794563B2 (en) * | 2010-05-17 | 2014-08-05 | Asm Assembly Automation Ltd | Integrated connector assembly for a rotary apparatus |
| JP5814040B2 (en) * | 2011-08-11 | 2015-11-17 | 株式会社ディスコ | Movable wiring piping connection device |
| JP5569541B2 (en) | 2012-01-11 | 2014-08-13 | 株式会社安川電機 | Conveying device and robot system |
| JP5848167B2 (en) * | 2012-03-13 | 2016-01-27 | 株式会社ディスコ | Grinding equipment |
| JP5549702B2 (en) * | 2012-04-03 | 2014-07-16 | 株式会社安川電機 | Conveying device and robot system |
| JP6058386B2 (en) * | 2012-12-26 | 2017-01-11 | 株式会社ディスコ | Processing equipment |
| KR101555487B1 (en) * | 2014-03-04 | 2015-09-24 | (주)에스티아이 | Deflection preventing device for turntable of semiconductor wafer continuous treatment apparatus |
| JP7058117B2 (en) * | 2017-12-26 | 2022-04-21 | 株式会社東京精密 | Wiring / piping protection device that follows turning motion |
| JP7085890B2 (en) * | 2018-05-11 | 2022-06-17 | 東京エレクトロン株式会社 | Connection line support device |
| CN108788725A (en) * | 2018-07-27 | 2018-11-13 | 丽水市智汇佳科技有限公司 | Automatic disc assembles device |
| CN115279549A (en) * | 2020-03-24 | 2022-11-01 | 东京毅力科创株式会社 | Removing and processing device |
| WO2022097190A1 (en) * | 2020-11-04 | 2022-05-12 | 株式会社Fuji | Tool main shaft device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60167728A (en) * | 1984-02-02 | 1985-08-31 | Enshu Ltd | Cable connector for rotary spindle head |
| CN2102177U (en) * | 1990-12-05 | 1992-04-22 | 金陵石油化工公司化肥厂 | Moving type large flange sealing face abrasive machine |
| JPH05183042A (en) * | 1991-12-28 | 1993-07-23 | Disco Abrasive Syst Ltd | Suction of wafer |
| JP2000117570A (en) * | 1998-10-09 | 2000-04-25 | Toyoda Mach Works Ltd | Piping and wiring device for revolving body |
| JP2001150258A (en) * | 1999-11-29 | 2001-06-05 | Olympus Optical Co Ltd | Power source supply structure, wiring structure, and piping structure for machine tool |
| JP2003151373A (en) * | 2001-11-12 | 2003-05-23 | Ryosei Electro-Circuit Systems Ltd | Laminated flat cable |
| JP2003209080A (en) * | 2002-01-11 | 2003-07-25 | Disco Abrasive Syst Ltd | Semiconductor wafer protecting member and grinding method for semiconductor wafer |
| JP2004319254A (en) * | 2003-04-16 | 2004-11-11 | Ryosei Electro-Circuit Systems Ltd | Bending part of flat cable |
| JP2006007408A (en) * | 2004-05-25 | 2006-01-12 | Seiko Epson Corp | Machining apparatus |
-
2006
- 2006-03-03 JP JP2006058029A patent/JP2007229904A/en active Pending
-
2007
- 2007-03-02 CN CN 200710084461 patent/CN101028700B/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102233542A (en) * | 2010-04-30 | 2011-11-09 | 三星电子株式会社 | Chemical mechanical polishing system, method and system |
| CN102233542B (en) * | 2010-04-30 | 2014-06-25 | 三星电子株式会社 | Chemical mechanical polishing system, method and system |
| CN102240963A (en) * | 2011-06-14 | 2011-11-16 | 平高集团有限公司 | Electric grinder |
| CN104457490A (en) * | 2013-09-24 | 2015-03-25 | 株式会社迪思科 | Wire cable |
| CN107622971A (en) * | 2016-07-13 | 2018-01-23 | 株式会社迪思科 | Chuck table mechanism |
| CN107622971B (en) * | 2016-07-13 | 2023-03-28 | 株式会社迪思科 | Chuck worktable mechanism |
| CN115750925A (en) * | 2022-11-02 | 2023-03-07 | 中国电子科技集团公司第十四研究所 | Large-angle comprehensive coaxial bending device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007229904A (en) | 2007-09-13 |
| CN101028700B (en) | 2010-12-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101028700A (en) | Processing device with rotary table | |
| WO2014122968A1 (en) | Brush unit, brush polishing device provided with this brush unit, brush polishing system, and brush polishing method | |
| KR101549175B1 (en) | System for laminating an optical film and Method for manufacturing a display unit using the same | |
| KR101622421B1 (en) | Horizontal articulated robot and substrate transfer system provided with the same | |
| CN1293610C (en) | Adhesive and stripping method for protective belt | |
| WO2003101879A1 (en) | Dual arm substrate transport apparatus | |
| CN101043015A (en) | Chip retaining cushion | |
| JP2006303112A (en) | Semiconductor wafer peripheral edge polisher and method therefor | |
| CN1666853A (en) | A molded component retrieving apparatus and a molding machine mounted thereon | |
| CN102233542B (en) | Chemical mechanical polishing system, method and system | |
| ES2817416T3 (en) | System, coating machine as well as provisioning arrangement | |
| CN100346943C (en) | Device for handling flat panels in a vacuum | |
| CN102886829A (en) | Processing method | |
| CN1052399A (en) | Winding tape apparatus and winding tape system | |
| CN116002512B (en) | Clamp and transfer equipment | |
| CN110902338B (en) | Conveying device and conveying method thereof | |
| JP7343306B2 (en) | Transfer robot | |
| CN1715019A (en) | Protective belt cutting method and device for semiconductor wafer | |
| US7984543B2 (en) | Methods for moving a substrate carrier | |
| CN1487578A (en) | Trans mitting apparatus | |
| KR20130062320A (en) | Apparatus for sorting led device | |
| CN1601706A (en) | Method and apparatus for joining adhesive tape | |
| CN110666784B (en) | Industrial robot | |
| CN110265340B (en) | Battery piece conveying device and conveying method | |
| US6506099B1 (en) | Driving a carrier head in a wafer polishing system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |