CN100595871C - Planar display device with bent lower-grid controlled structure and its production - Google Patents
Planar display device with bent lower-grid controlled structure and its production Download PDFInfo
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- CN100595871C CN100595871C CN200710054606A CN200710054606A CN100595871C CN 100595871 C CN100595871 C CN 100595871C CN 200710054606 A CN200710054606 A CN 200710054606A CN 200710054606 A CN200710054606 A CN 200710054606A CN 100595871 C CN100595871 C CN 100595871C
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Abstract
This is a flat displayer of bent shape low grid cathode structure and its production process. It includes a sealed vacuum chamber formed by a anodic glass panel, a cathode glass panel and surrounded glass frame; on the anodic glass panel is a conducting layer coated with fluorescent; on the cathode glass panel are a grid down-lead layer, carbon nanotube and bent shape low grid structure; a supporting wall between the anodic and cathode panel and a getter; which is capable of increasing the electron ejecting area of the nanotube and decreasing the working voltage of the rid.
Description
Technical field
The invention belongs to the mutual crossing domain in technical field of flat panel display, microelectronics science and technology field, vacuum science and technical field and nanometer science and technology field, relate to the element manufacturing of panel field emission display, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, particularly a kind of flat-panel monitor of bent lower-grid controlled structure and manufacture craft thereof.
Background technology
Display device is the core in the photoelectric display system, also is the main demonstration means of live image always.At present, flat panel display has had the development of leap, at high definition TV, video telephone, computer display, under the promotion of automobile with application targets such as digitlization terminal and military systems, Display Technique develops towards high-resolution, the big capacity of display, complete panelized and maximization direction.Carbon nano-tube is a kind of very thin graphite linings coiled structure material, has little tip curvature radius, can launch a large amount of electronics under the effect of extraneous electric field strength, and just outstanding awkward silence at a meeting causes emission function.Utilize this operation principle, carried out the development of the field-emission plane display of carbon nanotube cathod.This display has advantages such as high definition, high display resolution, high image quality, has become the developing direction of flat-panel display device of future generation already.
Grid structure is one of control element the most key in the three-stage structure carbon nanotube cathod field-emission plane display, and it is directly determining the electronics emission of carbon nanotube cathod.Although at present the control model of grid structure is varied, come down to consistently, that is exactly to be the powerful electric field strength on top, carbon nanotube cathod surface with the voltage transitions that the external world applies, and forces carbon nano-tube to launch a large amount of electronics.Because institute's electrons emitted will be subjected to the effect of grid structure positive voltage and be carried out portions of electronics by grid and hold back, just grid current formation reason too bigger than normal; And be subjected to the influence of concrete manufacture craft and manufacturing materials, and the distance between grid structure and the carbon nanotube cathod structure can not be very near, and this also is the high main cause of grid voltage.In addition, the shape of carbon nanotube cathod also can have certain influence to formed electric field strength, also can cause grid voltage higher a bit indirectly.For these practical problems, go back relatively perfectly solution of neither one at present, all need conscientious consideration of numerous researchers and solution.
In addition, in the middle of the panel field emission display spare of three-stage structure, guaranteeing that grid structure has carbon nanotube cathod under the prerequisite of good control action, also need to reduce as much as possible the total device cost, carry out reliable and stable, with low cost, function admirable, high quality devices is made.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect that exists in the above-mentioned flat-panel display device and provide a kind of with low cost, manufacturing process is reliable and stable, be made into the power height, the flat-panel monitor and the manufacture craft thereof of bent lower-grid controlled structure simple in structure.
The object of the present invention is achieved like this, comprise by anode glass panel, cathode glass faceplate and all around glass enclose the sealed vacuum chamber that frame constitutes; Be arranged on anode conductive layer and the phosphor powder layer of preparation on anode conductive layer are arranged on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate and getter subsidiary component; Cathode glass faceplate is provided with grid lead layer, carbon nano-tube and bent lower-grid controlled structure.
The backing material of described bent lower-grid controlled structure is soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the grid lead layer; Alternating floor between the insulation paste layer of the printing above the grid lead layer forms; Between the upper and lower surface of alternating floor be the plane, lower surface is wanted cover grid trace layer and vacant block layer part; Between have beveled aperture in the alternating floor, be whole beveled aperture be a tip towards under inversion wedge angle pyramid type shape, beveled aperture is the circular apertures of hollow in the cross section that an alternating floor upper surface place forms, the conical bottom surface of inversion wedge angle diameter maximum herein, then from the upper surface of an alternating floor, gradually to the inner recess of an alternating floor, till the lower surface position of arrival interval one deck, the madial wall of beveled aperture is a straight line inclined plane successively; Between bottom in the alternating floor beveled aperture to expose the grid lead layer; Between in the alternating floor beveled aperture metal level after the etching on the madial wall form the regulation and control grid layer; The regulation and control grid layer will be covered with a madial wall of alternating floor beveled aperture, and and the grid lead layer of bottom be interconnected; Between the insulation paste layer that prints in the alternating floor beveled aperture form two layers at interval; Will fill full beveled aperture for two layers at interval, its upper surface is mutually concordant with the upper surface of an alternating floor; Between the insulation paste layer of alternating floor and the at interval printing of two layers of upper surface form three layers at interval; Three layers upper and lower surface is the plane at interval, and its lower surface will cover the upper surface at an alternating floor and two layers at interval fully; At interval there is profiled holes in three layers, be that this profiled holes is an inversion right angle trigonometry type shape that wedge angle is downward, its side right-angle side has formed the upright side walls of profiled holes, its bottom right-angle side is opened on three layers upper surface at interval, its hypotenuse is perpendicular to regulation and control grid layer direction, whole inversion right angle trigonometry type be looped around regulation and control grid layer around, form a right angle trigonometry annular shape; The metal level after the etching forms the cathode leg layer on three layers the upper surface at interval; At interval the metal level after the etching on the hypotenuse sidewall of profiled holes forms the negative electrode transition zone in three layers; The negative electrode transition zone is covered with on the profiled holes hypotenuse sidewall; Metal level after the etching above the negative electrode transition zone forms cathode conductive layer; Cathode leg layer, negative electrode transition zone and cathode conductive layer all are interconnected; The insulation paste layer of the printing above the cathode leg layer forms cathode coating; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described bent lower-grid controlled structure is for being fixed on the cathode glass faceplate; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium; The regulation and control grid layer can be metallic gold, silver, aluminium, molybdenum, chromium; The trend of the trend of cathode leg layer and grid lead layer is orthogonal; The cathode leg layer can be metallic gold, silver, aluminium, copper, molybdenum, chromium, tin, lead, indium; The negative electrode transition zone can be metallic gold, silver, aluminium, copper, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel.
A kind of manufacture craft of flat-panel monitor of bent lower-grid controlled structure, its manufacture craft is as follows:
1) making of cathode glass faceplate: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of grid lead layer: on block layer, prepare a metal level, form the grid lead layer after the etching;
4) making of alternating floor between: printing insulation paste layer on the grid lead layer, alternating floor between forming behind baking, the sintering process;
5) making of regulation and control grid layer: in an alternating floor beveled aperture, prepare a metal level on the madial wall, form the regulation and control grid layer after the etching;
6) two layers making at interval: printing insulation paste layer in an alternating floor beveled aperture forms two layers at interval behind baking, sintering process;
7) three layers making at interval: on the upper surface at an alternating floor and two layers at interval, print insulation paste, behind baking, sintering process, form three layers at interval;
8) making of cathode leg layer: prepare a metal level at the interval on three layers the upper surface, form the cathode leg layer after the etching;
9) making of negative electrode transition zone: preparing a metal level on three layers of profiled holes hypotenuse sidewall at interval, forming the negative electrode transition zone after the etching;
10) making of cathode conductive layer: on the upper surface of negative electrode transition zone, prepare a metal level, form cathode conductive layer after the etching;
11) making of cathode coating: printing insulation paste layer on the cathode leg layer forms cathode coating behind baking, sintering process;
12) cleaning surfaces of bent lower-grid controlled structure is handled: clean is carried out on the surface to bent lower-grid controlled structure, removes impurity and dust;
13) preparation of carbon nano-tube: with made of carbon nanotubes on cathode conductive layer;
14) making of anode glass panel: whole plate glass is carried out scribing, produce the anode glass panel;
15) making of anode conductive layer: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
16) making of insulation paste layer: at the non-display area printing insulation paste layer of anode conductive layer;
17) making of phosphor powder layer: the viewing area printing phosphor powder layer on anode conductive layer;
18) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure and all around glass enclose frame and be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point;
19) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 16 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 17 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 19 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The present invention has following good effect:
At first, in described bent lower-grid controlled structure, grid lead layer and regulation and control grid layer structure have been made respectively.Wherein the grid lead layer can be delivered to device inside with external voltage, and the regulation and control grid layer that presents V-shape then can change the external voltage dress into the strong electric field intensity on top, carbon nanotube cathod surface, forces carbon nano-tube to launch a large amount of electronics.Because institute's electrons emitted bundle directly flies to anode under the anode action of high voltage, can not be subjected to holding back of bottom gate configuration, so just greatly reduced the operating current of grid, help the display brightness of enhance device; Because the end of regulation and control grid layer can approach carbon nanotube cathod as much as possible, thereby can greatly reduce operating voltage of grid structure.
Secondly, in described bent lower-grid controlled structure, the carbon nanotube cathod preparation is being presented above the cathode conductive layer of plagiohedral.Change the surface configuration of macroscopic carbon nanotube negative electrode, helped to strengthen the surface field intensity of carbon nanotube cathod, reduced operating voltage of grid indirectly.Greatly increase the electron emission area of carbon nanotube cathod, made more carbon nanotube cathod all participate in the electronics emission, helped improving anode working current.Grid structure and cathode construction height are integrated together, help lend some impetus to the Highgrade integration development of integral device;
In addition, in described bent lower-grid controlled structure, do not adopt special structure fabrication material, do not adopt special device making technics yet, this has just further reduced the cost of manufacture of whole flat-panel display device to a great extent, simplify the manufacturing process of device, can carry out large-area element manufacturing, helped carrying out business-like large-scale production.
Description of drawings
Fig. 1 has provided the vertical structure schematic diagram of bent lower-grid controlled structure;
Fig. 2 has provided the transversary schematic diagram of bent lower-grid controlled structure;
Fig. 3 has provided and has had the structural representation bent lower-grid controlled structure emitting structural, the carbon nanotube field emission flat-panel screens.
Embodiment
The present invention is further described below in conjunction with drawings and Examples, but the present invention is not limited to embodiment.
Described a kind of flat-panel monitor that has bent lower-grid controlled structure, comprise by anode glass panel [13], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [18] is constituted; Anode conductive layer [14] and the phosphor powder layer [16] of preparation on anode conductive layer are arranged on the anode glass panel; Grid lead layer [3], carbon nano-tube [12] and bent lower-grid controlled structure are arranged on cathode glass faceplate; Supporting wall structure between anode glass panel and cathode glass faceplate [17] and getter [19] subsidiary component.
Described bent lower-grid controlled structure comprises cathode glass faceplate [1], block layer [2], grid lead layer [3], an alternating floor [4], regulation and control grid layer [5], interval two layers of [6], interval three layers of [7], cathode leg layer [8], negative electrode transition zone [9], cathode conductive layer [10], cathode coating [11] and carbon nano-tube [12] part.
The backing material of described bent lower-grid controlled structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the grid lead layer; Alternating floor between the insulation paste layer of the printing above the grid lead layer forms; Between the upper and lower surface of alternating floor be the plane, lower surface is wanted cover grid trace layer and vacant block layer part; Between have beveled aperture in the alternating floor, be whole beveled aperture be a tip towards under inversion wedge angle pyramid type shape, beveled aperture is the circular apertures of hollow in the cross section that an alternating floor upper surface place forms, the conical bottom surface of inversion wedge angle diameter maximum herein, then from the upper surface of an alternating floor, gradually to the inner recess of an alternating floor, till the lower surface position of arrival interval one deck, the madial wall of beveled aperture is a straight line inclined plane successively; Between bottom in the alternating floor beveled aperture to expose the grid lead layer; Between in the alternating floor beveled aperture metal level after the etching on the madial wall form the regulation and control grid layer; The regulation and control grid layer will be covered with a madial wall of alternating floor beveled aperture, and and the grid lead layer of bottom be interconnected; Between the insulation paste layer that prints in the alternating floor beveled aperture form two layers at interval; Will fill full beveled aperture for two layers at interval, its upper surface is mutually concordant with the upper surface of an alternating floor; Between the insulation paste layer of alternating floor and the at interval printing of two layers of upper surface form three layers at interval; Three layers upper and lower surface is the plane at interval, and its lower surface will cover the upper surface at an alternating floor and two layers at interval fully; At interval there is profiled holes in three layers, be that this profiled holes is an inversion right angle trigonometry type shape that wedge angle is downward, its side right-angle side has formed the upright side walls of profiled holes, its bottom right-angle side is opened on three layers upper surface at interval, its hypotenuse is perpendicular to regulation and control grid layer direction, whole inversion right angle trigonometry type be looped around regulation and control grid layer around, form a right angle trigonometry annular shape; The metal level after the etching forms the cathode leg layer on three layers the upper surface at interval; At interval the metal level after the etching on the hypotenuse sidewall of profiled holes forms the negative electrode transition zone in three layers; The negative electrode transition zone is covered with on the profiled holes hypotenuse sidewall; Metal level after the etching above the negative electrode transition zone forms cathode conductive layer; Cathode leg layer, negative electrode transition zone and cathode conductive layer all are interconnected; The insulation paste layer of the printing above the cathode leg layer forms cathode coating; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described bent lower-grid controlled structure is for being fixed on the cathode glass faceplate; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium; The regulation and control grid layer can be metallic gold, silver, aluminium, molybdenum, chromium; The trend of the trend of cathode leg layer and grid lead layer is orthogonal; The cathode leg layer can be metallic gold, silver, aluminium, copper, molybdenum, chromium, tin, lead, indium; The negative electrode transition zone can be metallic gold, silver, aluminium, copper, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel.
A kind of manufacture craft that has the flat-panel monitor of bent lower-grid controlled structure, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of grid lead layer [3]: on block layer, prepare a metallic chromium layer, form the grid lead layer after the etching;
The making of alternating floor 4) [4]: printing insulation paste layer on the grid lead layer, alternating floor between forming behind baking, the sintering process;
5) making of regulation and control grid layers [5]: in an alternating floor beveled aperture, prepare a metallic chromium layer on the madial wall, form the regulation and control grid layer after the etching;
6) making of two layers [6] at interval: printing insulation paste layer in an alternating floor beveled aperture forms two layers at interval behind baking, sintering process;
7) making of three layers [7] at interval: on the upper surface at an alternating floor and two layers at interval, print insulation paste, behind baking, sintering process, form three layers at interval;
8) making of cathode leg layer [8]: prepare a metal molybdenum layer at the interval on three layers the upper surface, form the cathode leg layer after the etching;
9) making of negative electrode transition zone [9]: preparing a metallic chromium layer on three layers of profiled holes hypotenuse sidewall at interval, forming the negative electrode transition zone after the etching;
10) making of cathode conductive layer [10]: on the upper surface of negative electrode transition zone, prepare a metal nickel dam, form cathode conductive layer after the etching;
11) making of cathode coating [11]: printing insulation paste layer on the cathode leg layer forms cathode coating behind baking, sintering process;
12) cleaning surfaces of bent lower-grid controlled structure is handled: clean is carried out on the surface to bent lower-grid controlled structure, removes impurity and dust;
13) preparation of carbon nano-tube [12]: with made of carbon nanotubes on cathode conductive layer;
14) reprocessing of carbon nano-tube: carbon nano-tube is carried out reprocessing, improve field emission characteristics;
15) making of anode glass panel [13]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
16) making of anode conductive layer [14]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
17) making of insulation paste layer [15]: at the non-display area printing insulation paste layer of anode conductive layer;
18) making of phosphor powder layer [16]: the viewing area printing phosphor powder layer on anode conductive layer;
19) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [17] and all around glass enclose frame [18] and be assembled together, and getter [19] is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
20) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 17 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 18 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 20 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Claims (6)
1, a kind of flat-panel monitor of bent lower-grid controlled structure, comprise by anode glass panel (13), cathode glass faceplate (1) and all around glass enclose the sealed vacuum chamber that frame (18) is constituted; Be arranged on anode conductive layer (14) and the phosphor powder layer (16) of preparation on anode conductive layer on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate (17) and getter subsidiary component (19) is characterized in that:
Cathode glass faceplate is provided with grid lead layer (3), carbon nano-tube (12) and bent lower-grid controlled structure;
Described bent lower-grid controlled structure is backing material with the cathode glass faceplate, and this backing material is soda-lime glass or Pyrex; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the grid lead layer; Alternating floor between the insulation paste layer of the printing above the grid lead layer forms; Between the upper and lower surface of alternating floor be the plane, lower surface is wanted cover grid trace layer and vacant block layer part; Between have beveled aperture in the alternating floor, this beveled aperture be shaped as most advanced and sophisticated towards under inversion wedge angle taper shape, beveled aperture is the circular port of hollow in the cross section that an alternating floor upper surface place forms, the conical bottom surface of inversion wedge angle diameter maximum herein, then from the upper surface of an alternating floor, gradually to the inner recess of an alternating floor, till the lower surface position of arrival interval one deck, the madial wall of beveled aperture is a straight line inclined plane successively; Bottom in the beveled aperture will expose the grid lead layer; Between in the alternating floor beveled aperture metal level after the etching on the madial wall form the regulation and control grid layer; The regulation and control grid layer will be covered with a madial wall of alternating floor beveled aperture, and and the grid lead layer of bottom be interconnected; The insulation paste layer that prints in the beveled aperture forms two layers at interval; Will fill full beveled aperture for two layers at interval, its upper surface is mutually concordant with the upper surface of an alternating floor; Between the insulation paste layer of alternating floor and the at interval printing of two layers of upper surface form three layers at interval; Three layers upper and lower surface is the plane at interval, and its lower surface will cover the upper surface at an alternating floor and two layers at interval fully; At interval there is profiled holes in three layers, this profiled holes is shaped as an inversion right-angled triangle that wedge angle is downward, its side right-angle side has formed the upright side walls of profiled holes, its bottom right-angle side is opened on three layers upper surface at interval, its hypotenuse is perpendicular to regulation and control grid layer direction, whole inversion right-angled triangle be looped around regulation and control grid layer around, form a right angle trigonometry annular shape; The metal level after the etching forms the cathode leg layer on three layers the upper surface at interval; At interval the metal level after the etching on the hypotenuse sidewall of profiled holes forms the negative electrode transition zone in three layers; The negative electrode transition zone is covered with on the profiled holes hypotenuse sidewall; Metal level after the etching above the negative electrode transition zone forms cathode conductive layer; Cathode leg layer, negative electrode transition zone and cathode conductive layer all are interconnected; The insulation paste layer of the printing above the cathode leg layer forms cathode coating; Made of carbon nanotubes is on cathode conductive layer.
2, the flat-panel monitor of bent lower-grid controlled structure according to claim 1 is characterized in that: the grid lead layer is metallic gold or silver or aluminium or molybdenum or chromium; The regulation and control grid layer is metallic gold or silver or aluminium or molybdenum or chromium; The trend of the trend of cathode leg layer and grid lead layer is vertical mutually; The cathode leg layer is metallic gold or silver or aluminium or copper or molybdenum or chromium or tin or lead or indium; The negative electrode transition zone is metallic gold or silver or aluminium or copper or molybdenum or chromium or tin; Cathode conductive layer is metallic iron or cobalt or nickel.
3, a kind of manufacture craft of flat-panel monitor of bent lower-grid controlled structure is characterized in that, its manufacture craft is as follows:
1) making of cathode glass faceplate (1): whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer (2): printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of grid lead layer (3): on block layer, prepare a metal level, form the grid lead layer after the etching;
The making of alternating floor 4) (4): printing insulation paste layer on the grid lead layer, alternating floor between forming behind baking, the sintering process;
5) making of regulation and control grid layers (5): in an alternating floor beveled aperture, prepare a metal level on the madial wall, form the regulation and control grid layer after the etching;
6) making of two layers (6) at interval: printing insulation paste layer in an alternating floor beveled aperture forms two layers at interval behind baking, sintering process;
7) making of three layers (7) at interval: on the upper surface at an alternating floor and two layers at interval, print insulation paste, behind baking, sintering process, form three layers at interval;
8) making of cathode leg layer (8): prepare a metal level at the interval on three layers the upper surface, form the cathode leg layer after the etching;
9) making of negative electrode transition zone (9): preparing a metallic chromium layer on three layers of profiled holes hypotenuse sidewall at interval, forming the negative electrode transition zone after the etching;
10) making of cathode conductive layer (10): on the upper surface of negative electrode transition zone, prepare a metal level, form cathode conductive layer after the etching;
11) making of cathode coating (11): printing insulation paste layer on the cathode leg layer forms cathode coating behind baking, sintering process;
12) cleaning surfaces of bent lower-grid controlled structure is handled: clean is carried out on the surface to bent lower-grid controlled structure, removes impurity and dust;
13) preparation of carbon nano-tube (12): with made of carbon nanotubes on cathode conductive layer;
14) making of anode glass panel (13): the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
15) making of anode conductive layer (14): evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
16) making of insulation paste layer (15): at the non-display area printing insulation paste layer of anode conductive layer;
17) making of phosphor powder layer (16): the viewing area printing phosphor powder layer on anode conductive layer;
18) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure (17) and all around glass enclose frame (18) and be assembled together, and getter (19) is put in the middle of the cavity, fix with glass powder with low melting point;
19) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
4, the manufacture craft of the flat-panel monitor of bent lower-grid controlled structure according to claim 3 is characterized in that: described step 16 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: 5 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes.
5, the manufacture craft of the flat-panel monitor of bent lower-grid controlled structure according to claim 3 is characterized in that: described step 17 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes.
6, the manufacture craft of the flat-panel monitor of bent lower-grid controlled structure according to claim 3 is characterized in that: the device that described step 19 is specially having assembled carries out following packaging technology: the device that will assemble toasts in the middle of putting into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710054606A CN100595871C (en) | 2007-06-19 | 2007-06-19 | Planar display device with bent lower-grid controlled structure and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710054606A CN100595871C (en) | 2007-06-19 | 2007-06-19 | Planar display device with bent lower-grid controlled structure and its production |
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| Publication Number | Publication Date |
|---|---|
| CN101075539A CN101075539A (en) | 2007-11-21 |
| CN100595871C true CN100595871C (en) | 2010-03-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710054606A Expired - Fee Related CN100595871C (en) | 2007-06-19 | 2007-06-19 | Planar display device with bent lower-grid controlled structure and its production |
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| CN (1) | CN100595871C (en) |
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| CN101075539A (en) | 2007-11-21 |
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