CN100593456C - Magnetorheological finishing device for super large caliber aspheric surface optical part - Google Patents
Magnetorheological finishing device for super large caliber aspheric surface optical part Download PDFInfo
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- CN100593456C CN100593456C CN200810031897A CN200810031897A CN100593456C CN 100593456 C CN100593456 C CN 100593456C CN 200810031897 A CN200810031897 A CN 200810031897A CN 200810031897 A CN200810031897 A CN 200810031897A CN 100593456 C CN100593456 C CN 100593456C
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Abstract
The invention relates to a magnetic rheological polishing device used in an aspheric optical part with a super large caliber, comprising a machine tool, a magnetic rheological polishing device and a control system which is connected with the above components. The machine tool comprises a lathe bed on which the work piece to be processed is placed, an X axial linear motion mechanism is arranged onthe two sides of the lathe bed, a movable portal is fixed on a slider of the X axial linear motion mechanism, a Y axial linear motion mechanism is arranged on a cross beam of the movable portal, a Z axial linear motion mechanism is fixed on a slider of the Y axial linear motion mechanism, an A axial rotary table used for arranging the magnetic rheological polishing device is fixed on a slider of the Z axial linear motion mechanism, the magnetic rheological polishing device is fixed on the cross beam by a fourth linear motion mechanism, the two have opposite directions of motion, and the magnetic rheological polishing device is arranged right above the work piece to be processed. The device of the invention has the advantages of simple and compact structure, low cost, easy control and strong processing capacity, and can process the aspheric optical part with the super large caliber.
Description
Technical field
The present invention is mainly concerned with the technical field of magnetorheological polishing, refers in particular to a kind of magnetorheological finishing device that is used for super large caliber aspheric surface optical part.
Background technology
According to Rayleigh criterion, optical system is differentiated the limiting angle distance, delta θ=1.22 λ/D of far field two object points, and D is the effective aperture of optical system in the formula, and the effective aperture that therefore increases optical system is the Basic Ways that improves the optical system resolution capability.With the space camera is example, and the height of satellite in order to obtain high-resolution, requires the camera bore to be at least 0.5～1m greatly about 200～300km.In the space telescope field, the primary mirror bore is also increasing, the EURO50 telescope of European Southern Observatory for example, and its primary mirror is of a size of 50m, is spliced by the aspheric mirror of 618 diameter 2m.
Another important trend of aspherical mirror development is continuing to bring out of novel complicated optical mirror plane.Along with the continuous development of Modern Optics Technology and computer technology, various powerful optical design software obtain development and application, thereby make that the complicated optical mirror plane of design becomes possibility in optical system.The most common is large-scale off-axis aspheric surface, high steepness conformal optical aspherical surface and various free form surface optical mirror planes etc.Current diameter more than 8 meters the astronomical telescope primary mirror all be spliced by 1～2 meter sub-mirror of off-axis aspheric surface.
In sum, the development trend of current aspherical mirror is to develop towards high accuracy, super large caliber, big relative aperture direction; Pursue efficiently, processing technology cheaply; The novel optical minute surface of various complicated surfaces continues to bring out simultaneously.
Technique of Magnetorheological Finishing is exactly a kind of novel optical element processing method that electromagnetism, hydrodynamics, analytical chemistry theory are combined and propose, the characteristic that it utilizes the solid-liquid of Magnetorheologicai polishing liquid in magnetic field to transform mutually, by the control external magnetic field shear yield stress and the local shape of Magnetorheologicai polishing liquid are controlled in real time, create " a flexible polishing mould " that can match with processed optical surface, realize grinding, polishing correction of the flank shape processing hard brittle materials such as optical glass.Traditional relatively polishing processing method, this technology have the polishing efficiency height, remove significant advantages such as function is stable, edge effect is little.Domestic existing research also is in laboratory stage basically, and Harbin Institute of Technology, Tsing-Hua University etc. has carried out some basic researchs to the optical glass Technique of Magnetorheological Finishing, has set up some basic research equipments.Be the schematic diagram of some magnetorheological finishing devices of domestic existing research institute foundation as shown in Figure 1, 2, 3, Harbin Institute of Technology has successively adopted processing mode illustrated in figures 1 and 2, because processed optical element is fixed on the top of polished die, so the size of processing parts just is restricted; China Patent No.: 03153996.3, denomination of invention: the magnetorheological rubbing head of electromagnetic mode is exactly the polishing wheel device of the public rotation as shown in Figure 3 of Tsing-Hua University's exploitation.Because in this device, Magnetorheologicai polishing liquid can not be recycled, so " polished die " do not change can not to guarantee not change promptly by the composition of Magnetorheologicai polishing liquid in for a long time, and the process time of large scale optical element is very long, so the processing of this system's incompatibility large scale optical element.Chinese patent application number: 200610043079.1, denomination of invention: magnetic rheologic flexible, fine grinding, polishing equipment and method, this invention can not solve the difficult problem of large-aperture optical part processing.
In sum, because the not solution of the limitation of the processing mode that is adopted or some technical difficult problems.The key technical problem that exists for the magnetorheological machining tool of super large caliber optical element mainly contain following some: the precision control problem of (1) super large caliber optical element in magnetorheological process: the processing of traditional optical part needs a turntable to realize the clamping and the rotation of workpiece usually, yet optical element for super large caliber, large-sized high precision turntable like this is difficult to accept on cost, often adopt the mode of multi-point support or endless belt support in the world for the super large caliber optical element of heavy type, do not need to fix, yet but can not adopt this support for super large caliber lightweight part, this support can't be fixed workpiece, therefore in process, bring bigger size distortion, need suitable support and clamping form for the aspheric surface optical accessory of super large caliber.(2) to realize magnetorheological processing to the super large caliber optical element, under the situation that does not need turntable, can only adopt the machining path of X-Y scan mode, be movably with regard to the overall beam that needs lathe like this, and require to have certain speed and acceleration characteristic, and the crossbeam of large span is heavier, inertia is big, satisfy velocity mode or mode position that magnetorheological processing is adopted, the motion of crossbeam need have higher dynamic property, therefore needs to solve kinetic characteristic and the control problem that the crossbeam motion brings.(3) present, the nozzle of magnetic flow liquid and recovery section are positioned at the top of workpiece in the magnetorheological finishing device, and the EGR of magnetic rheological liquid is placed in the lathe switch board in addition, when being used for the super large caliber part processing, the super large range can cause the processing part of magnetorheological finishing device to be connected long with pipeline between the Magnetorheologicai polishing liquid EGR, the stability of Magnetorheologicai polishing liquid performance had been disturbed in the excessive variation of difference in height between the grand movement of Magnetorheologicai polishing liquid pipeline and magnetic flow liquid were imported and exported in motion process, therefore needed to solve the problem that influences the Magnetorheologicai polishing liquid stability that the wide range motion brings.(4) it is bigger to be used for the removable crossbeam span of super large caliber optical element machining tool, deflection deformation is bigger, on the basis that guarantees deformation condition, also to satisfy the processing request of magnetorheological polishing, reach the stability that guarantees Magnetorheologicai polishing liquid as far as possible, need carry out special structural design crossbeam.
Summary of the invention
The problem to be solved in the present invention just is: at the technical problem of prior art existence, the invention provides a kind of simple and compact for structure, with low cost, control is simple, applied widely, working ability is strong magnetorheological finishing device that is used for super large caliber aspheric surface optical part, be particularly useful for the super large caliber aspheric surface optical part of 1000mm～2000mm.
For solving the problems of the technologies described above, the solution that the present invention proposes is: a kind of magnetorheological finishing device that is used for super large caliber aspheric surface optical part, it is characterized in that: it comprises lathe, magnetorheological polishing system and the control system that links to each other with respectively above each assembly, lathe comprises lathe bed and the X axis straight-line motion mechanism that is used for placing workpiece to be processed, removable gantry, Y-axis is to straight-line motion mechanism, Z axial linear movement mechanism, the 4th straight-line motion mechanism and A axle turntable, the X axis straight-line motion mechanism is arranged in both sides on the lathe bed, two columns at removable gantry are individually fixed on the slide block of X axis straight-line motion mechanism, Y-axis is arranged on gantry crossbeam at removable gantry to straight-line motion mechanism, Y-axis is fixed on the slide block of straight-line motion mechanism in Z axial linear movement mechanism, the A axle turntable that is used for installing magnetorheological finishing device is fixed on the slide block of Z axial linear movement mechanism, the Magnetorheologicai polishing liquid EGR of described magnetorheological finishing device is fixed on the crossbeam of gantry by the 4th straight-line motion mechanism, the 4th straight-line transmitting actuation mechanism is consistent with Z axial linear movement motion of mechanism direction, magnetorheological finishing device be positioned at workpiece to be processed directly over.
Described magnetorheological polishing system comprises two shaft support mechanisms and is installed on inversion type rubbing head in two shaft support mechanisms, two shaft support mechanism comprises turntable, crossbeam, first support arm, second support arm, turntable motor and electric rotating machine, turntable links to each other with turntable motor, crossbeam is installed on the turntable, the relative two ends that are installed on crossbeam of first support arm with second support arm, the relative position place offers the axis hole that is used for installing the inversion type rubbing head on first support arm and second support arm, and the electric rotating machine that is installed on first support arm or second support arm links to each other with the inversion type rubbing head by reductor.
Described inversion type rubbing head comprises support, polishing wheel, cantilever, field generator for magnetic and rubbing head driving mechanism, support is installed in two shaft support mechanisms by rotating shaft, a side is provided with cantilever on the support, polishing wheel is installed on the cantilever by the polishing wheel rotating shaft, the polishing wheel rotating shaft links to each other with rubbing head driving mechanism on being fixed in support, and the field generator for magnetic that links to each other with control system is installed in the polishing wheel.
Described Magnetorheologicai polishing liquid EGR comprises nozzle, recover, fluid reservoir, rear pump, make-up water pump, recovery pump that links to each other by pipeline and the arrangements for speed regulation that are used for controlling rear pump, nozzle and recover lay respectively at a side of polishing wheel, nozzle is connected to form the polishing fluid output loop by output pipe and rear pump and fluid reservoir, recover is connected to form polishing fluid recovery loop by reclaiming pump and reclaim line and fluid reservoir, and make-up water pump and fluid reservoir are connected to form the viscosity regulating loop; Be equiped with flowmeter and viscosimeter on the output pipe of described polishing fluid output loop, rear pump, make-up water pump, flowmeter and viscosimeter all link to each other with control system.
The cross section of described gantry crossbeam is stepped nearly triangle.
Described X axis straight-line motion mechanism, Y-axis are identical with the structure of the 4th straight-line motion mechanism to straight-line motion mechanism, Z axial linear movement mechanism, include drive motors, shaft coupling, screw mandrel, guide rail and slide block, drive motors links to each other with screw mandrel by shaft coupling, and slide block is slidedly arranged in the guide rail.
Described lathe bed comprises pedestal and column base, and the column base is positioned at the two ends of pedestal, offers T-slot on the pedestal.
The bottom of described pedestal is provided with more than one jack.
Compared with prior art, advantage of the present invention just is:
1, the invention provides a kind of instrument of processing the magnetorheological polishing of super large caliber aspheric surface optical part;
2, the present invention adopts two synchronously packaged type gantry structures that drive, and makes lathe have good dynamic characteristic, can satisfy the demand of the magnetorheological polishing processing of super large caliber aspheric surface optical part;
3, lathe of the present invention can directly be placed on workpiece on the work top of bed piece formation, fixing and installation way with band T type groove workbench on the traditional machine tool being applied on the machining tool of optical element like this, guaranteed the size distortion minimum of different types of super large caliber optical element in process, help guaranteeing the surface figure accuracy of workpiece like this, and clamping is simple and convenient;
4, Magnetorheologicai polishing liquid EGR of the present invention directly is placed on removable gantry, shortened the pipeline distance between part such as magnetic flow liquid fluid reservoir, rear pump and the nozzle so greatly, and with Z axial linear movement mechanism together along crossbeam move with Z to moving, both reduced the difference in height between the Magnetorheologicai polishing liquid EGR is imported and exported, having avoided on a large scale again, pipeline moves the fluctuation of the magnetic flow liquid flow that causes and the problems such as fluctuation of flow velocity, make magnetic flow liquid keep long stability as far as possible, guarantee good machining accuracy.
5, the present invention adopts removable gantry structure, gantry beam structure has wherein carried out optimal design on based on the basis of emulation, be designed to have the nearly triangular structure of stairstepping, such design is guaranteeing on the basis of beam deformation at tolerance interval, both guaranteed the rigidity of Z axial linear movement mechanism, solved the rearmounted problem that the Magnetorheologicai polishing liquid EGR moves on the crossbeam of gantry on the least possible usefulness guide rail principle basis again, such scheme has also reduced the lathe cost.
Description of drawings
Fig. 1 is the structural representation one of traditional magnetorheological polishing processing mode;
Fig. 2 is the structural representation two of traditional magnetorheological polishing processing mode;
Fig. 3 is the structural representation three of traditional magnetorheological polishing processing mode;
Fig. 4 is an overall structure schematic diagram of the present invention;
Fig. 5 is the free degree schematic diagram of lathe among the present invention;
Fig. 6 is a specific embodiment of the invention medial bed structural representation;
Fig. 7 is the structural representation of X axis straight-line motion mechanism in the specific embodiment of the invention;
Fig. 8 is the structural representation at removable gantry in the specific embodiment of the invention;
Fig. 9 is the structural representation of crossbeam cross section in gantry in the specific embodiment of the invention;
Figure 10 is Y and a Z axial linear movement structural scheme of mechanism in the specific embodiment of the invention;
Figure 11 is that the Z of Z axial linear movement mechanism in the specific embodiment of the invention is to the slide carriage structural representation;
Figure 12 is the frame structure schematic diagram of Magnetorheologicai polishing liquid EGR in the specific embodiment of the invention;
Figure 13 is the structural representation that has the magnetorheological polishing system of structure with double rotating shafts in the specific embodiment of the invention;
Figure 14 is the structural representation of two shaft support mechanisms in the specific embodiment of the invention;
Figure 15 is the side-looking structural representation of Figure 14;
Figure 16 is the structural representation of inversion type rubbing head in the specific embodiment of the invention;
Figure 17 is the side-looking structural representation of Figure 16;
Figure 18 is crossbeam deformation simulation result schematic diagram under stressing conditions of stepped nearly three-legged structure in the specific embodiment of the invention;
Figure 19 is that embodiment of the invention Y is to travelling table deformation simulation result schematic diagram under stressing conditions.
Marginal data
101, lathe bed 102, X axis straight-line motion mechanism
103, Y-axis is to straight-line motion mechanism 104, Z axial linear movement mechanism
201, two shaft support mechanism
202, inversion type rubbing head 203, turntable
204, crossbeam 205, first support arm
206, second support arm 207, turntable motor
208, electric rotating machine 209, reductor
210, axis hole 211, support
212, polishing wheel 213, cantilever
215, rotating shaft 216, polishing wheel rotating shaft
217, polishing wheel drive motors 218, polishing wheel reductor
219, driving pulley 220, driven pulley
221, be with synchronously
302, X-axis motor 303, X-axis motor cabinet
304, X-axis shaft coupling 305, X-axis leading screw
306, X-axis feed screw nut 307, X-axis screw nut sleeve
308, X-axis bearing block 309, X-axis guide rail
310, X-axis guide rail slide block
401, column 402, gantry crossbeam
501, Y is to travelling table
502, y-axis motor 503, y-axis motor seat
504, Y-axis shaft coupling 505, Y-axis leading screw
506, Y-axis feed screw nut 507, Y-axis screw nut sleeve
508, Y-axis bearing block 509, Y-axis guide rail
510, Y-axis guide rail slide block 511, Magnetorheologicai polishing liquid EGR
512, Y is to travelling table circulatory system connecting plate 513, the 4th straight-line motion mechanism
601, nozzle
602, recover 603, fluid reservoir
604, rear pump 605, make-up water pump
606, output pipe 607, recovery pump
608, reclaim line 609, flowmeter
610, viscosimeter 611, computer
612, arrangements for speed regulation
701, Z is to slide carriage 702, Z spindle motor
703, Z spindle motor seat 704, Z axle shaft coupling
705, Z axial filament thick stick 706, Z axial filament thick stick nut
707, Z axial filament thick stick nut sleeve 708, Z axle bearing seat
709, Z axis rail 710, Z axis rail slide block
711, Z axis rail base 801, pedestal
802, T type groove 803, column base
9, A axle turntable 10, workpiece
11, jack 12, switch board
In the prior art (being among Fig. 1, Fig. 2 and Fig. 3)
1301, field generator for magnetic 1302, workpiece
1303, rotating shaft 1304, polishing disk
1305, Magnetorheologicai polishing liquid
1401, field generator for magnetic 1402, workpiece
1403, rotating shaft 1404, polishing wheel
1405, Magnetorheologicai polishing liquid 1406, rear pump
1501, magnetic polishing wheel 1502, magnet
1503, magnetic isolation plate 1504, magnetic are pounded
1505, the axis of rotation 1506, hollow shaft
The specific embodiment
Below with reference to the drawings and specific embodiments the present invention is described in further details.
As shown in Figure 4, the magnetorheological finishing device that is used for super large caliber aspheric surface optical part of the present invention, it comprises lathe, magnetorheological polishing system and the control system that links to each other with respectively above each assembly, lathe comprises lathe bed 101 and the X axis straight-line motion mechanism that is used for placing workpiece to be processed 10, removable gantry, Y-axis is to straight-line motion mechanism, Z axial linear movement mechanism, the 4th straight-line motion mechanism 513 and A axle turntable 9, the X axis straight-line motion mechanism is arranged in both sides on the lathe bed 101, two columns 401 at removable gantry are individually fixed on the slide block of X axis straight-line motion mechanism, Y-axis is arranged on gantry crossbeam 402 at removable gantry to straight-line motion mechanism, Y-axis is fixed on the slide block of straight-line motion mechanism in Z axial linear movement mechanism, the A axle turntable 9 that is used for installing magnetorheological polishing system is fixed on the slide block of Z axial linear movement mechanism, the Magnetorheologicai polishing liquid EGR 511 of magnetorheological polishing system is fixed on gantry crossbeam 402 by the 4th straight-line motion mechanism 513, the 4th straight-line transmitting actuation mechanism 513 is consistent with Z axial linear movement motion of mechanism direction, magnetorheological polishing system be positioned at workpiece to be processed 10 directly over.
In the present embodiment, referring to Fig. 4, Fig. 5, Fig. 6 and shown in Figure 7, X-axis guide rail slide block 310 is connected with X-axis leading screw 305, X-axis leading screw 305 is connected with X-axis motor cabinet 303 with X-axis bearing block 308, and X-axis motor 302 is fixed on the motor cabinet 303, realize and being connected of X-axis leading screw 305 by X-axis shaft coupling 304, X-axis motor cabinet 303 and X-axis bearing block 308 are fixed on the column base 202 of lathe bed both sides, X-axis guide rail 309 also is fixed on the column base 202, like this X axis straight-line motion mechanism respectively by X-axis guide rail slide block 310 and X-axis feed screw nut adapter sleeve 307 realized with bed piece on be connected.X-axis guide rail slide block 310 and X-axis feed screw nut adapter sleeve 307 are fixed on the column 401 at removable gantry.The present invention adopts has synchronously two drive forms, and removable gantry is for the dynamic characteristic that solves the crossbeam motion designs, and below the crossbeam both sides connect column, adopts the more high-power pair of synchronously driven form of servomotor.
In the present embodiment, referring to Fig. 7, Fig. 8 and shown in Figure 9, the X axis straight-line motion mechanism comprises removable gantry, and removable gantry comprises column 401 and gantry crossbeam 402, wherein gantry crossbeam 402 is designed to have stair-stepping nearly triangular structure, and column 401 then is designed to Y to asymmetric inwardly structures that support more.Y is installed on the X axis straight-line motion mechanism to straight-line motion mechanism, wherein Y-axis guide rail slide block 510 is connected with Y-axis leading screw 505, Y-axis leading screw 505 is connected with X-axis motor cabinet 503 with Y-axis bearing block 508, and y-axis motor 502 is fixed on the motor cabinet 503, realize and being connected of Y-axis leading screw 505 by Y-axis shaft coupling 504, y-axis motor seat 503 and Y-axis bearing block 508 are fixed on gantry crossbeam 402, Y-axis guide rail 509 also is fixed on gantry crossbeam 402, and Y-axis has realized and being connected of gantry crossbeam 402 by Y-axis guide rail slide block 510 and Y-axis feed screw nut adapter sleeve 507 respectively to straight-line motion mechanism like this.
In the present embodiment, referring to Figure 10 and shown in Figure 11, Y-axis guide rail slide block 510 and Y-axis feed screw nut adapter sleeve 507 are fixed on Y on travelling table 501.At Y to travelling table 501 fronts, Z axial filament thick stick 705 is connected with Z spindle motor seat 703 with Z axle bearing seat 708, and Z spindle motor 702 is fixed on the motor cabinet 703, realize and being connected of Z axial filament thick stick 705 by Z axle shaft coupling 704, Z spindle motor seat 703 and Z axle bearing seat 708 are fixed on Y on travelling table 501, Z axis rail 709 is fixed on the Z axis rail base 711, fixedly Y is on travelling table 501 for Z axis rail base 711, and Z axial linear movement mechanism has realized being connected to travelling table 501 with Y by Z axis rail slide block 710 with Z axial filament thick stick nut adapter sleeve 707 respectively like this.Z axis rail slide block 710 and Z axial filament thick stick nut adapter sleeve 707 are fixed on Z on slide carriage 701.And has realized and being connected of machine body to slide carriage 701 by Z whole magnetorheological finishing device processing part 105.Magnetorheologicai polishing liquid EGR 511 is connected to travelling table circulatory system connecting plate 512 with Y by the 4th straight-line motion mechanism 513 in addition, mechanism is the same with the Z axial linear movement, realized Magnetorheologicai polishing liquid EGR 511 along Z to lifting, guaranteed that the difference in height between the magnetorheological turnover pumping hole keeps constant.The present invention places the Magnetorheologicai polishing liquid EGR 511 on the removable crossbeam to be meant that the partial devices with supply liquid is placed on the guide rail at gantry crossbeam 402 rears, this part can along guide rail realize Z to move, move up and down with magnetorheological polishing system, keep constant with the import and export difference in height that guarantees magnetic flow liquid; This part can be Y to moving with Y along gantry crossbeam 402 to travelling table 501 simultaneously, has shortened the length of magnetic flow liquid circulating line so as far as possible, has reduced the stable problem of the magnetic flow liquid flow that brings because of the pipeline motion.Specifically comprise guide rail, motor, leading screw and the rearmounted Magnetorheologicai polishing liquid part circulatory system, this part is connected to travelling table 501 with Y, is symmetrical in the both sides, front and back of gantry crossbeam 402 on the position.
In the present embodiment, bed piece 101 comprises pedestal 801 and column base 803, and column base 803 is placed in the both sides of bed piece 101, is used for supporting removable gantry 301.The pedestal 801 of lathe has higher surface figure accuracy, and the T type groove 802 of standard is arranged, and workpiece 10 can directly be placed on the pedestal 801.In the present embodiment, referring to shown in Figure 180, on the basis of selecting material, simulation analysis has been carried out in the distortion of gantry crossbeam 402 under stressing conditions to the different structure shape, design crossbeam at last with stepped nearly triangular structure, can find that this moment, corresponding crossbeam maximum distortion was 2.63 microns, in the designing requirement scope.In the present embodiment, referring to shown in Figure 19, Y has also been carried out improvement design repeatedly to the shape of travelling table 501, be defined as the back at last and have the version that nearly triangular stall board supports, this structure has improved the rigidity of Z to mobile platform, has taken into account the Structure Designing Problem of circulatory system postposition simultaneously.High accuracy super large lathe bed 101 with T type groove 802 is to design for support and the clamping that solves the super large caliber optical element, be to adopt traditional T type groove 802 Working table structures on the lathe 101, use abrasive method with the work top that obtains high accuracy face shape as lathe bed, thereby solve the clamping and the support problem of different types of super large caliber optical element.The present invention adopts the crossbeam of particular design, end face from gantry crossbeam 402, the structure of gantry crossbeam 402 becomes stepped nearly triangular structure, this structure designs for technical solution problem three and four, step structure is considered by mounting guide rail, triangular structure is to guarantee on the less basis of gantry crossbeam 402 distortion, increase the strong point distance of the Working table structure that moves along gantry crossbeam 402 as far as possible, the rigidity that guarantees this structure is better, taken into account simultaneously under the situation of using the thrifty cost principle of guide rail less, satisfy the requirement of Magnetorheologicai polishing liquid circulating system device 511 on removable gantry, to guarantee the stability of magnetorheological fluid performance.Gantry crossbeam 402 is to realize being connected with guide rail and guide rail slide block with feed screw nut by leading screw with Y to travelling table 501.
In the present embodiment, referring to shown in Figure 12, Magnetorheologicai polishing liquid EGR 511 comprises the nozzle 601 that links to each other by pipeline, recover 602, fluid reservoir 603, rear pump 604, make-up water pump 605, the arrangements for speed regulation 612 that reclaim pump 607 and be used for controlling rear pump 604, nozzle 601 and recover 602 lay respectively at a side of polishing wheel 212, nozzle 601 is connected to form the polishing fluid output loop by output pipe 606 and rear pump 604 with fluid reservoir 603, recover 602 is connected to form polishing fluid recovery loop by reclaiming pump 607 and reclaim line 608 with fluid reservoir 603, and make-up water pump 605 is connected to form the viscosity regulating loop with fluid reservoir 603; Be equiped with flowmeter 609 and viscosimeter 610 on the output pipe 606 of described polishing fluid output loop, rear pump 604, make-up water pump 605, flowmeter 609 and viscosimeter 610 all link to each other with control system.For Magnetorheologicai polishing liquid EGR 511, except nozzle 601, recover 602 and control computer 611, other parts promptly among the figure equipment in the frame of broken lines all be placed on the back of Y to travelling table 501, be connected with reclaim line 608 by output pipe 606 between two parts, whole Magnetorheologicai polishing liquid EGR 511 with Y to travelling table 501 along Y to moving.Control computer 611 is placed in the other switch board 12 of lathe.
Referring to Figure 13, Figure 14, Figure 15, Figure 16 and shown in Figure 17, in the present embodiment, burnishing device comprises two shaft support mechanisms 201 and is installed on inversion type rubbing head 202 in two shaft support mechanisms 201, two shaft support mechanism 201 comprises turntable 203, crossbeam 204, first support arm 205, second support arm 206, turntable motor 207 and electric rotating machine 208, turntable 203 links to each other with turntable motor 207, crossbeam 204 is installed on the turntable 203, first support arm 205 and the relative two ends that are installed on crossbeam 204 of second support arm, 206 usefulness screws, the relative position place offers the axis hole 210 that is used for installing inversion type rubbing head 202 on first support arm 205 and second support arm 206, and the electric rotating machine 208 that is installed on first support arm 205 or second support arm 206 links to each other with inversion type rubbing head 202 by reductor 209.By the control of turntable motor 208, whole turntable 203 is rotated, can drive inversion type rubbing head 202 by electric rotating machine 208 and rotate.Referring to shown in Figure 15, inversion type rubbing head 202 comprises support 211, polishing wheel 212, cantilever 213, field generator for magnetic and rubbing head driving mechanism, support 211 is installed in two shaft support mechanisms 201 by rotating shaft 215, a side is provided with cantilever 213 on the support 211, polishing wheel 212 is installed on the cantilever 213 by polishing wheel rotating shaft 216, polishing wheel rotating shaft 216 links to each other with rubbing head driving mechanism on being fixed in support 211, and the field generator for magnetic that links to each other with control system is installed in the polishing wheel 212.In the present embodiment, field generator for magnetic is screwed on support 211, places the inside of polishing wheel 212.Polishing wheel 212 adopts stainless steel material to make, and is processed into the hollow cylindrical that one side has the end, and its outer surface is a spherical surface, can process the aspheric surface optical accessory of high steepness.Referring to shown in Figure 15, the rubbing head driving mechanism comprises polishing wheel drive motors 217, polishing wheel reductor 218, driving pulley 219, driven pulley 220 and is with 221 synchronously, polishing wheel drive motors 217 links to each other with driving pulley 219 by polishing wheel reductor 218, driven pulley 220 links to each other with polishing wheel rotating shaft 216, is with 221 to be sheathed on driving pulley 219 and the driven pulley 220 synchronously.Can drive driving pulley 219 by polishing wheel drive motors 217 and rotate, through being with 221 to drive driven pulley 220 rotations synchronously, rotate again thereby make polishing wheel rotating shaft 216 drive polishing wheels 212.Be controlled the control of system, can control the rotation of polishing wheel 212 as required in real time.
Claims (8)
1, a kind of magnetorheological finishing device that is used for super large caliber aspheric surface optical part, it is characterized in that: it comprises lathe, magnetorheological polishing system and the control system that links to each other with respectively above each assembly, lathe comprises lathe bed (101) and the X axis straight-line motion mechanism that is used for placing workpiece to be processed (10), removable gantry, Y-axis is to straight-line motion mechanism, Z axial linear movement mechanism, the 4th straight-line motion mechanism (513) and A axle turntable (9), the X axis straight-line motion mechanism is arranged in lathe bed (101) and goes up both sides, two columns (401) at removable gantry are individually fixed on the slide block of X axis straight-line motion mechanism, Y-axis is arranged on gantry crossbeam (402) at removable gantry to straight-line motion mechanism, Y-axis is fixed on the slide block of straight-line motion mechanism in Z axial linear movement mechanism, the A axle turntable (9) that is used for installing magnetorheological polishing system is fixed on the slide block of Z axial linear movement mechanism, the Magnetorheologicai polishing liquid EGR (511) of described magnetorheological polishing system is fixed on gantry crossbeam (402) by the 4th straight-line motion mechanism (513), the 4th straight-line transmitting actuation mechanism (513) is consistent with Z axial linear movement motion of mechanism direction, magnetorheological polishing system be positioned at workpiece to be processed (10) directly over.
2, the magnetorheological finishing device that is used for super large caliber aspheric surface optical part according to claim 1, it is characterized in that: described magnetorheological polishing system comprises two shaft support mechanisms (201) and is installed on inversion type rubbing head (202) in two shaft support mechanisms (201), two shaft support mechanisms (201) comprise turntable (203), crossbeam (204), first support arm (205), second support arm (206), turntable motor (207) and electric rotating machine (208), turntable (203) links to each other with turntable motor (207), crossbeam (204) is installed on the turntable (203), the relative two ends that are installed on crossbeam (204) of first support arm (205) with second support arm (206), first support arm (205) and second support arm (206) are gone up the relative position place and are offered the axis hole (210) that is used for installing inversion type rubbing head (202), and the electric rotating machine (208) that is installed on first support arm (205) or second support arm (206) links to each other with inversion type rubbing head (202) by reductor (209).
3, the magnetorheological finishing device that is used for super large caliber aspheric surface optical part according to claim 2, it is characterized in that: described inversion type rubbing head (202) comprises support (211), polishing wheel (212), cantilever (213), field generator for magnetic and rubbing head driving mechanism, support (211) is installed in two shaft support mechanisms (201) by rotating shaft (215), the last side of support (211) is provided with cantilever (213), polishing wheel (212) is installed on the cantilever (213) by polishing wheel rotating shaft (216), polishing wheel rotating shaft (216) links to each other with rubbing head driving mechanism on being fixed in support (211), and the field generator for magnetic that links to each other with control system is installed in the polishing wheel (212).
4, the magnetorheological finishing device that is used for super large caliber aspheric surface optical part according to claim 3, it is characterized in that: described Magnetorheologicai polishing liquid EGR (511) comprises the nozzle (601) that links to each other by pipeline, recover (602), fluid reservoir (603), rear pump (604), make-up water pump (605), the arrangements for speed regulation (612) that reclaim pump (607) and be used for controlling rear pump (604), nozzle (601) and recover (602) lay respectively at a side of polishing wheel (212), nozzle (601) is connected to form the polishing fluid output loop by output pipe (606) and rear pump (604) with fluid reservoir (603), recover (602) is connected to form polishing fluid recovery loop by reclaiming pump (607) and reclaim line (608) with fluid reservoir (603), and make-up water pump (605) is connected to form the viscosity regulating loop with fluid reservoir (603); Be equiped with flowmeter (609) and viscosimeter (610) on the output pipe of described polishing fluid output loop (606), rear pump (604), make-up water pump (605), flowmeter (609) and viscosimeter (610) all link to each other with control system.
5, according to claim 1 or 2 or the 3 or 4 described magnetorheological finishing devices that are used for super large caliber aspheric surface optical part, it is characterized in that: the cross section of described gantry crossbeam (402) is stepped nearly triangle.
6, according to claim 1 or 2 or the 3 or 4 described magnetorheological finishing devices that are used for super large caliber aspheric surface optical part, it is characterized in that: described X axis straight-line motion mechanism, Y-axis are identical with the structure of the 4th straight-line motion mechanism (513) to straight-line motion mechanism, Z axial linear movement mechanism, include drive motors, shaft coupling, screw mandrel, guide rail and slide block, drive motors links to each other with screw mandrel by shaft coupling, and slide block is slidedly arranged in the guide rail.
7, according to claim 1 or 2 or the 3 or 4 described magnetorheological finishing devices that are used for super large caliber aspheric surface optical part, it is characterized in that: described lathe bed (101) comprises pedestal (801) and column base (803), column base (803) is positioned at the two ends of pedestal (801), offers T-slot (802) on the pedestal (801).
8, the magnetorheological finishing device that is used for super large caliber aspheric surface optical part according to claim 7 is characterized in that: the bottom of described pedestal (801) is provided with more than one jack (11).
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| CN200810031897A CN100593456C (en) | 2008-07-28 | 2008-07-28 | Magnetorheological finishing device for super large caliber aspheric surface optical part |
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| CN200810031897A CN100593456C (en) | 2008-07-28 | 2008-07-28 | Magnetorheological finishing device for super large caliber aspheric surface optical part |
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| CN100593456C true CN100593456C (en) | 2010-03-10 |
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