CN100589192C - 集成压电可动微透镜锥形亚波长近场光探针阵列 - Google Patents
集成压电可动微透镜锥形亚波长近场光探针阵列 Download PDFInfo
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- CN100589192C CN100589192C CN200810025447A CN200810025447A CN100589192C CN 100589192 C CN100589192 C CN 100589192C CN 200810025447 A CN200810025447 A CN 200810025447A CN 200810025447 A CN200810025447 A CN 200810025447A CN 100589192 C CN100589192 C CN 100589192C
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- 239000000523 sample Substances 0.000 title claims abstract description 57
- 230000010354 integration Effects 0.000 title abstract 2
- 239000002184 metal Substances 0.000 claims abstract description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000010931 gold Substances 0.000 claims description 8
- 239000012528 membrane Substances 0.000 claims description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 239000011651 chromium Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 34
- 238000000034 method Methods 0.000 abstract description 10
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 8
- 239000013307 optical fiber Substances 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000013500 data storage Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004980 dosimetry Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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Application Number | Priority Date | Filing Date | Title |
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CN200810025447A CN100589192C (zh) | 2008-04-30 | 2008-04-30 | 集成压电可动微透镜锥形亚波长近场光探针阵列 |
Applications Claiming Priority (1)
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CN200810025447A CN100589192C (zh) | 2008-04-30 | 2008-04-30 | 集成压电可动微透镜锥形亚波长近场光探针阵列 |
Publications (2)
Publication Number | Publication Date |
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CN101276620A CN101276620A (zh) | 2008-10-01 |
CN100589192C true CN100589192C (zh) | 2010-02-10 |
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CN200810025447A Expired - Fee Related CN100589192C (zh) | 2008-04-30 | 2008-04-30 | 集成压电可动微透镜锥形亚波长近场光探针阵列 |
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CN (1) | CN100589192C (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8045422B2 (en) * | 2009-01-07 | 2011-10-25 | Tdk Corporation | Near-field light generating element comprising surface plasmon antenna and waveguide with groove |
CN107283835A (zh) * | 2017-07-21 | 2017-10-24 | 中国科学院微电子研究所 | 一种3d打印装置 |
CN108614130B (zh) * | 2018-04-20 | 2023-08-25 | 华中科技大学 | 一种增强透射的纳米环形近场光学探针及其制备方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1538581A (zh) * | 2003-04-18 | 2004-10-20 | 清华大学 | 近场光学阶梯型纳米孔径激光器 |
CN1832279A (zh) * | 2005-03-10 | 2006-09-13 | 中国科学院半导体研究所 | 近场光学固体浸墨透镜型微小孔径激光器及制作方法 |
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- 2008-04-30 CN CN200810025447A patent/CN100589192C/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1538581A (zh) * | 2003-04-18 | 2004-10-20 | 清华大学 | 近场光学阶梯型纳米孔径激光器 |
CN1832279A (zh) * | 2005-03-10 | 2006-09-13 | 中国科学院半导体研究所 | 近场光学固体浸墨透镜型微小孔径激光器及制作方法 |
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Effective date of registration: 20100908 Address after: 215123 Suzhou Industrial Park, Jiangsu, if waterway No. 398 Patentee after: Suzhou Institute of Nano-Tech and Bionics (SINANO), Chinese Academy of Sciences Address before: 215125 Jiangsu city of Suzhou province Dushu Lake Industrial Park No. 398 waterway if higher education Patentee before: Suzhou Nano Technique & Nano Bionic Research Inst. |
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