CN100588924C - 用于机电传感器的防潮保护 - Google Patents
用于机电传感器的防潮保护 Download PDFInfo
- Publication number
- CN100588924C CN100588924C CN03817789A CN03817789A CN100588924C CN 100588924 C CN100588924 C CN 100588924C CN 03817789 A CN03817789 A CN 03817789A CN 03817789 A CN03817789 A CN 03817789A CN 100588924 C CN100588924 C CN 100588924C
- Authority
- CN
- China
- Prior art keywords
- foil gauge
- layer
- restraining barrier
- resistor track
- polymeric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/14—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of electrical resistance
- G01G3/1402—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
- G01G3/1412—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being parallelogram shaped
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G21/00—Details of weighing apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Force In General (AREA)
- Emergency Protection Circuit Devices (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Inorganic Insulating Materials (AREA)
- Drying Of Gases (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02102061A EP1384980A1 (de) | 2002-07-25 | 2002-07-25 | Feuchtigkeitsschutz für einen elektromechanischen Wandler |
EP02102061.5 | 2002-07-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1672022A CN1672022A (zh) | 2005-09-21 |
CN100588924C true CN100588924C (zh) | 2010-02-10 |
Family
ID=29797288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN03817789A Expired - Lifetime CN100588924C (zh) | 2002-07-25 | 2003-07-22 | 用于机电传感器的防潮保护 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7197940B2 (de) |
EP (3) | EP1384980A1 (de) |
JP (1) | JP2005534020A (de) |
CN (1) | CN100588924C (de) |
AT (2) | ATE536538T1 (de) |
AU (1) | AU2003262533A1 (de) |
DE (1) | DE50312534D1 (de) |
DK (1) | DK1535035T3 (de) |
WO (1) | WO2004011892A1 (de) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070062300A1 (en) * | 2003-09-25 | 2007-03-22 | Dorfman Benjamin F | Method and apparatus for straining-stress sensors and smart skin for air craft and space vehicles |
DK1560011T3 (da) * | 2004-01-27 | 2010-05-31 | Mettler Toledo Ag | Strain-gauge med fugtighedsbeskyttelse ved hjælp af et uensartet, uorganisk lag på et udglattende polymerlag (ORMOCER) samt slidsindretning |
DE102005012686A1 (de) * | 2005-01-14 | 2006-07-27 | Trafag Ag | Drucksensor, darin verwendbarer Verformungskörper und Herstellverfahren dafür |
US8173995B2 (en) | 2005-12-23 | 2012-05-08 | E. I. Du Pont De Nemours And Company | Electronic device including an organic active layer and process for forming the electronic device |
US7945388B2 (en) * | 2008-06-25 | 2011-05-17 | The Boeing Company | Test bed for in-situ studies |
US8033156B2 (en) * | 2008-06-25 | 2011-10-11 | The Boeing Company | Sensor apparatus and method for detecting impacts |
TWI348716B (en) * | 2008-08-13 | 2011-09-11 | Cyntec Co Ltd | Resistive component and making method thereof |
FR2937727B1 (fr) * | 2008-10-24 | 2010-12-31 | Snecma | Procede pour installer et proteger un capteur sur un substrat |
FR2937726B1 (fr) * | 2008-10-24 | 2010-12-17 | Snecma | Procede pour installer et proteger un capteur sur un substrat |
JP2010169616A (ja) * | 2009-01-26 | 2010-08-05 | A & D Co Ltd | 歪ゲージとロードセル。 |
JP5713615B2 (ja) * | 2010-09-17 | 2015-05-07 | 大和製衡株式会社 | ロードセル |
DE102012210021A1 (de) * | 2012-06-14 | 2013-12-19 | Tecsis Gmbh | Kraftsensor mit einer Sensorplatte mit lokalen Unterschieden der Steifigkeit |
CN102735378B (zh) * | 2012-06-21 | 2014-07-02 | 戴文钟 | 压力传感器 |
CN102998049A (zh) * | 2012-11-28 | 2013-03-27 | 安徽埃克森科技集团有限公司 | 一种防腐蚀压阻式压力传感器 |
JP5973357B2 (ja) * | 2013-02-05 | 2016-08-23 | 株式会社鷺宮製作所 | 圧力検知ユニット及び圧力検知ユニットの製造方法 |
JP6259967B2 (ja) * | 2014-01-30 | 2018-01-17 | 地方独立行政法人大阪産業技術研究所 | 歪抵抗薄膜およびこれを用いた歪センサ素子 |
DE102014103065A1 (de) * | 2014-03-07 | 2015-09-10 | Leifheit Ag | Küchenwaage |
CN104075653A (zh) * | 2014-04-10 | 2014-10-01 | 中北大学 | 一种基于正交应变片阵列的应变量测试系统 |
CN104075654A (zh) * | 2014-04-10 | 2014-10-01 | 中北大学 | 一种高速小目标侵彻明胶体的应变量测试系统 |
CN104062048B (zh) * | 2014-05-15 | 2016-06-29 | 浙江工业大学 | 高压氢环境下的载荷传感器 |
CN104062047B (zh) * | 2014-05-15 | 2016-05-11 | 浙江工业大学 | 高压硫化氢环境用电阻应变式载荷传感器 |
GB2528897A (en) * | 2014-08-03 | 2016-02-10 | Shekel Scales Co 2008 Ltd | Low-profile load cell assembly |
JP2015096868A (ja) * | 2015-01-20 | 2015-05-21 | 大和製衡株式会社 | ロードセル |
DE202015104676U1 (de) | 2015-09-03 | 2015-11-23 | Leifheit Ag | Küchenwaage |
CN105222701A (zh) * | 2015-10-22 | 2016-01-06 | 桂林电子科技大学 | 一种具有耐酸碱腐蚀性能的应变式传感器 |
CN105220198B (zh) * | 2015-10-22 | 2017-12-19 | 桂林电子科技大学 | 一种耐酸碱腐蚀轻金属材料弹性体及其制造工艺 |
JP2019078726A (ja) * | 2017-10-27 | 2019-05-23 | ミネベアミツミ株式会社 | ひずみゲージ、センサモジュール |
JP2019082425A (ja) * | 2017-10-31 | 2019-05-30 | ミネベアミツミ株式会社 | ひずみゲージ |
JP2019120555A (ja) * | 2017-12-28 | 2019-07-22 | ミネベアミツミ株式会社 | ひずみゲージ、センサモジュール |
JP2019174387A (ja) | 2018-03-29 | 2019-10-10 | ミネベアミツミ株式会社 | ひずみゲージ |
JP2019184284A (ja) * | 2018-04-03 | 2019-10-24 | ミネベアミツミ株式会社 | ひずみゲージ |
CN110873616A (zh) * | 2018-08-31 | 2020-03-10 | 梅特勒-托利多(常州)精密仪器有限公司 | 防潮应变片及其制备方法 |
EP3617683A1 (de) * | 2018-08-31 | 2020-03-04 | Mettler Toledo (Changzhou) Precision Instrument Ltd. | Verfahren zum isolieren eines dms gegen feuchtigkeitseintritt |
CN109702556B (zh) * | 2019-01-29 | 2023-07-14 | 孝感松林智能计测器有限公司 | 一种不平衡校正去重刀具的对刀系统及其使用方法 |
JP7426794B2 (ja) * | 2019-10-01 | 2024-02-02 | ミネベアミツミ株式会社 | センサモジュール |
CN111162018B (zh) * | 2019-12-24 | 2023-06-06 | 陕西电器研究所 | 一种等离子体刻蚀调整薄膜传感器零位的方法 |
JP2022086254A (ja) * | 2020-11-30 | 2022-06-09 | 株式会社イシダ | 歪みゲージ及び歪みゲージの製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2728916A1 (de) * | 1977-06-27 | 1979-01-18 | Hottinger Messtechnik Baldwin | Verfahren und vorrichtung zum abdecken eines dehnungsmesstreifens |
US4185496A (en) * | 1978-08-28 | 1980-01-29 | Gould Inc. | Thin film strain gage and process therefor |
AU547838B2 (en) * | 1982-10-26 | 1985-11-07 | Ishida Koki Seisakusho K.K. | Load cell |
GB8303555D0 (en) * | 1983-02-09 | 1983-03-16 | Strain Measurement Dev Ltd | Strain gauges |
JPH01212327A (ja) * | 1988-02-19 | 1989-08-25 | Ishida Scales Mfg Co Ltd | ロードセルおよびその製造方法 |
DE3828098A1 (de) | 1988-08-18 | 1990-03-08 | Fraunhofer Ges Forschung | Verfahren und zusammensetzung zur herstellung von kratzfesten materialien |
SU1709724A1 (ru) * | 1989-09-29 | 1995-09-10 | Научно-производственное объединение "Полимерклей" | Липкая лента |
DE4015666A1 (de) | 1990-05-16 | 1991-11-28 | Deutsche Forsch Luft Raumfahrt | Kraftaufnehmer |
US5289722A (en) * | 1992-04-27 | 1994-03-01 | Kansas State University Research Foundation | Preassembled, easily mountable strain gage |
DE4303570C2 (de) * | 1993-02-08 | 1997-03-20 | Fraunhofer Ges Forschung | Verfahren zur Herstellung von funktionellen Beschichtungen, beschichtete Substrate und Beschichtungsmaterial |
JPH07113697A (ja) * | 1993-10-19 | 1995-05-02 | Tec Corp | ロードセル |
DE4404716A1 (de) * | 1994-02-15 | 1995-08-17 | Hottinger Messtechnik Baldwin | Dehnungsmeßstreifen und Verfahren zur Herstellung eines Dehnungsmeßstreifens sowie Meßgrößenaufnehmer |
US5616227A (en) * | 1995-06-26 | 1997-04-01 | Dionex Corporation | Method for extending the life of electrophoretic gels |
-
2002
- 2002-07-25 EP EP02102061A patent/EP1384980A1/de not_active Withdrawn
-
2003
- 2003-07-22 JP JP2004523814A patent/JP2005534020A/ja active Pending
- 2003-07-22 WO PCT/EP2003/050326 patent/WO2004011892A1/de active Application Filing
- 2003-07-22 AU AU2003262533A patent/AU2003262533A1/en not_active Abandoned
- 2003-07-22 DE DE50312534T patent/DE50312534D1/de not_active Expired - Lifetime
- 2003-07-22 EP EP05109509A patent/EP1686356B1/de not_active Expired - Lifetime
- 2003-07-22 CN CN03817789A patent/CN100588924C/zh not_active Expired - Lifetime
- 2003-07-22 AT AT05109509T patent/ATE536538T1/de active
- 2003-07-22 AT AT03771117T patent/ATE461436T1/de not_active IP Right Cessation
- 2003-07-22 EP EP03771117A patent/EP1535035B1/de not_active Expired - Lifetime
- 2003-07-22 DK DK03771117.3T patent/DK1535035T3/da active
-
2005
- 2005-01-24 US US11/040,015 patent/US7197940B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2005534020A (ja) | 2005-11-10 |
WO2004011892A1 (de) | 2004-02-05 |
ATE461436T1 (de) | 2010-04-15 |
EP1686356A2 (de) | 2006-08-02 |
US7197940B2 (en) | 2007-04-03 |
AU2003262533A1 (en) | 2004-02-16 |
EP1535035B1 (de) | 2010-03-17 |
EP1686356B1 (de) | 2011-12-07 |
ATE536538T1 (de) | 2011-12-15 |
CN1672022A (zh) | 2005-09-21 |
EP1384980A1 (de) | 2004-01-28 |
EP1535035A1 (de) | 2005-06-01 |
DE50312534D1 (de) | 2010-04-29 |
US20050155435A1 (en) | 2005-07-21 |
DK1535035T3 (da) | 2010-07-12 |
EP1686356A3 (de) | 2006-08-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100588924C (zh) | 用于机电传感器的防潮保护 | |
CN1648626B (zh) | 用于机电传感器的防潮保护 | |
US9122901B2 (en) | Surface sensor | |
US5631622A (en) | Strain gage and measuring transducer and method of producing the same | |
CN102138147B (zh) | 表面传感器 | |
JP4732902B2 (ja) | 湿度センサおよびそれを有する半導体装置 | |
CN101398402B (zh) | 物理量传感器及其制造方法 | |
CN104160365A (zh) | 柔性触摸屏 | |
CN110494744B (zh) | 湿度传感器 | |
JP2022105964A (ja) | 静電容量型センサ | |
JP2024038304A (ja) | 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法 | |
CN114414123A (zh) | 一种异形金属基底上的应变传感器芯片及其原位制备方法 | |
EP0981754B1 (de) | Sensor | |
US20190074245A1 (en) | Component Carrier With Integrated Strain Gauge | |
JP2018194483A (ja) | センサーユニット、およびセンサーモジュール | |
EP0981753B1 (de) | Beschleunigungsaufnehmer | |
US11977695B2 (en) | Touch module and touch display device | |
EP3255402B1 (de) | Dehnungssensor und herstellungsverfahren dafür | |
CA3049673C (en) | Coated printed electronic devices exhibiting improved yield | |
CN211626765U (zh) | 应力应变传感器、应力应变传感模组及电子设备 | |
EP3939783A1 (de) | Mit isolierendem material versehenes metallmaterial und drucksensor | |
CN110873616A (zh) | 防潮应变片及其制备方法 | |
JPS6135320A (ja) | 焦電型赤外検出素子およびその製造方法 | |
CN113324682A (zh) | 应力应变传感器、应力应变传感模组及电子设备 | |
WO2023180187A1 (en) | Electronic device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Swiss G Lai Finn Jose Patentee after: Mettler-Toledo GmbH Address before: Swiss G Lai Finn Jose Patentee before: Mettler-Toledo AG |
|
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20100210 |