CN100557841C - 一种制备交叉分子电子器件的方法 - Google Patents
一种制备交叉分子电子器件的方法 Download PDFInfo
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- CN100557841C CN100557841C CNB2007101762801A CN200710176280A CN100557841C CN 100557841 C CN100557841 C CN 100557841C CN B2007101762801 A CNB2007101762801 A CN B2007101762801A CN 200710176280 A CN200710176280 A CN 200710176280A CN 100557841 C CN100557841 C CN 100557841C
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- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000005442 molecular electronic Methods 0.000 title claims abstract description 33
- 239000002184 metal Substances 0.000 claims abstract description 35
- 238000005516 engineering process Methods 0.000 claims abstract description 13
- 238000005530 etching Methods 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000004528 spin coating Methods 0.000 claims abstract description 9
- 238000012546 transfer Methods 0.000 claims abstract description 9
- 239000002120 nanofilm Substances 0.000 claims abstract description 8
- 238000001459 lithography Methods 0.000 claims abstract description 6
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 5
- 230000003628 erosive effect Effects 0.000 claims abstract description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 238000001259 photo etching Methods 0.000 claims description 4
- 238000001338 self-assembly Methods 0.000 claims description 4
- 238000001015 X-ray lithography Methods 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 238000000609 electron-beam lithography Methods 0.000 claims description 3
- 238000000206 photolithography Methods 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 238000002207 thermal evaporation Methods 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 11
- 230000008569 process Effects 0.000 abstract description 7
- 238000012545 processing Methods 0.000 abstract description 3
- 230000008859 change Effects 0.000 abstract description 2
- 238000004377 microelectronic Methods 0.000 abstract description 2
- 238000002360 preparation method Methods 0.000 description 17
- 239000010410 layer Substances 0.000 description 10
- 238000001704 evaporation Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 239000011368 organic material Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 241000193935 Araneus diadematus Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000006200 vaporizer Substances 0.000 description 1
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Abstract
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Application Number | Priority Date | Filing Date | Title |
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CNB2007101762801A CN100557841C (zh) | 2007-10-24 | 2007-10-24 | 一种制备交叉分子电子器件的方法 |
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CNB2007101762801A CN100557841C (zh) | 2007-10-24 | 2007-10-24 | 一种制备交叉分子电子器件的方法 |
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CN101420014A CN101420014A (zh) | 2009-04-29 |
CN100557841C true CN100557841C (zh) | 2009-11-04 |
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CNB2007101762801A Active CN100557841C (zh) | 2007-10-24 | 2007-10-24 | 一种制备交叉分子电子器件的方法 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1885521A (zh) * | 2005-06-23 | 2006-12-27 | 中国科学院微电子研究所 | 一种交叉线阵列结构有机分子器件的制备方法 |
CN1949475A (zh) * | 2005-10-13 | 2007-04-18 | 中国科学院微电子研究所 | 基于自组装技术的交叉阵列结构有机器件制备方法 |
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- 2007-10-24 CN CNB2007101762801A patent/CN100557841C/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1885521A (zh) * | 2005-06-23 | 2006-12-27 | 中国科学院微电子研究所 | 一种交叉线阵列结构有机分子器件的制备方法 |
CN1949475A (zh) * | 2005-10-13 | 2007-04-18 | 中国科学院微电子研究所 | 基于自组装技术的交叉阵列结构有机器件制备方法 |
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CN101420014A (zh) | 2009-04-29 |
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