CN100539019C - 曝光装置、曝光方法以及器件制造方法 - Google Patents

曝光装置、曝光方法以及器件制造方法 Download PDF

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Publication number
CN100539019C
CN100539019C CNB2005800310613A CN200580031061A CN100539019C CN 100539019 C CN100539019 C CN 100539019C CN B2005800310613 A CNB2005800310613 A CN B2005800310613A CN 200580031061 A CN200580031061 A CN 200580031061A CN 100539019 C CN100539019 C CN 100539019C
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CN
China
Prior art keywords
mentioned
substrate
nozzle arrangement
nozzle
exposure device
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Expired - Fee Related
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CNB2005800310613A
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English (en)
Chinese (zh)
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CN101019209A (zh
Inventor
水谷刚之
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Nikon Corp
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Nikon Corp
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CNB2005800310613A 2004-09-17 2005-09-16 曝光装置、曝光方法以及器件制造方法 Expired - Fee Related CN100539019C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004271635 2004-09-17
JP271635/2004 2004-09-17
JP274990/2004 2004-09-22

Publications (2)

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CN101019209A CN101019209A (zh) 2007-08-15
CN100539019C true CN100539019C (zh) 2009-09-09

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CNB2005800310613A Expired - Fee Related CN100539019C (zh) 2004-09-17 2005-09-16 曝光装置、曝光方法以及器件制造方法

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JP (4) JP5229264B2 (enExample)
CN (1) CN100539019C (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9019404B2 (en) 2010-12-20 2015-04-28 Samsung Electronics Co., Ltd Image processing apparatus and method for preventing image degradation
CN103092007B (zh) * 2013-02-06 2015-06-17 京东方科技集团股份有限公司 曝光机掩膜版安装装置
JP7368131B2 (ja) * 2019-07-22 2023-10-24 株式会社ディスコ テープマウンタ
CN112288628B (zh) * 2020-10-26 2023-03-24 武汉大学 基于光流跟踪和抽帧映射的航拍图像拼接加速方法及系统
CN115407611A (zh) * 2021-05-26 2022-11-29 中芯国际集成电路制造(上海)有限公司 浸没式光刻设备及其浸没罩系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999049504A1 (fr) * 1998-03-26 1999-09-30 Nikon Corporation Procede et systeme d'exposition par projection
JP2005129914A (ja) * 2003-10-02 2005-05-19 Nikon Corp 露光装置及び露光方法、並びにデバイス製造方法
JP2005183744A (ja) * 2003-12-22 2005-07-07 Nikon Corp 露光装置及びデバイス製造方法
JP2005191394A (ja) * 2003-12-26 2005-07-14 Canon Inc 露光方法及び装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3747566B2 (ja) * 1997-04-23 2006-02-22 株式会社ニコン 液浸型露光装置
TW591653B (en) * 2000-08-08 2004-06-11 Koninkl Philips Electronics Nv Method of manufacturing an optically scannable information carrier
SG121822A1 (en) * 2002-11-12 2006-05-26 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
TWI232357B (en) * 2002-11-12 2005-05-11 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
CN101872135B (zh) * 2002-12-10 2013-07-31 株式会社尼康 曝光设备和器件制造法
JP4645027B2 (ja) * 2002-12-10 2011-03-09 株式会社ニコン 露光装置及び露光方法、デバイス製造方法
CN103383527B (zh) * 2003-04-10 2015-10-28 株式会社尼康 包括用于沉浸光刻装置的真空清除的环境系统
TWI295414B (en) * 2003-05-13 2008-04-01 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
JP4720106B2 (ja) * 2003-05-23 2011-07-13 株式会社ニコン 露光方法、並びにデバイス製造方法
TWI347741B (en) * 2003-05-30 2011-08-21 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
EP1498778A1 (en) * 2003-06-27 2005-01-19 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2005159322A (ja) * 2003-10-31 2005-06-16 Nikon Corp 定盤、ステージ装置及び露光装置並びに露光方法
KR101111363B1 (ko) * 2003-12-15 2012-04-12 가부시키가이샤 니콘 투영노광장치 및 스테이지 장치, 그리고 노광방법
JP4474979B2 (ja) * 2004-04-15 2010-06-09 株式会社ニコン ステージ装置及び露光装置
US7486381B2 (en) * 2004-05-21 2009-02-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999049504A1 (fr) * 1998-03-26 1999-09-30 Nikon Corporation Procede et systeme d'exposition par projection
JP2005129914A (ja) * 2003-10-02 2005-05-19 Nikon Corp 露光装置及び露光方法、並びにデバイス製造方法
JP2005183744A (ja) * 2003-12-22 2005-07-07 Nikon Corp 露光装置及びデバイス製造方法
JP2005191394A (ja) * 2003-12-26 2005-07-14 Canon Inc 露光方法及び装置

Also Published As

Publication number Publication date
JP2012134554A (ja) 2012-07-12
JP5229264B2 (ja) 2013-07-03
JP2011211224A (ja) 2011-10-20
JP5429229B2 (ja) 2014-02-26
JP5633533B2 (ja) 2014-12-03
JP2010153932A (ja) 2010-07-08
CN101019209A (zh) 2007-08-15
JP5765415B2 (ja) 2015-08-19
JP2014057115A (ja) 2014-03-27

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