CN100530704C - 一种应用于硅太阳能电池的扩散工艺 - Google Patents
一种应用于硅太阳能电池的扩散工艺 Download PDFInfo
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- CN100530704C CN100530704C CNB2007103043441A CN200710304344A CN100530704C CN 100530704 C CN100530704 C CN 100530704C CN B2007103043441 A CNB2007103043441 A CN B2007103043441A CN 200710304344 A CN200710304344 A CN 200710304344A CN 100530704 C CN100530704 C CN 100530704C
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 25
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- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 claims description 5
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- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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CNB2007103043441A CN100530704C (zh) | 2007-12-27 | 2007-12-27 | 一种应用于硅太阳能电池的扩散工艺 |
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CNB2007103043441A CN100530704C (zh) | 2007-12-27 | 2007-12-27 | 一种应用于硅太阳能电池的扩散工艺 |
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CN101217170A CN101217170A (zh) | 2008-07-09 |
CN100530704C true CN100530704C (zh) | 2009-08-19 |
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CNB2007103043441A Expired - Fee Related CN100530704C (zh) | 2007-12-27 | 2007-12-27 | 一种应用于硅太阳能电池的扩散工艺 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103325666A (zh) * | 2012-03-21 | 2013-09-25 | 苏州贝克微电子有限公司 | 半导体晶圆掺杂扩散技术 |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101425549B (zh) * | 2008-10-13 | 2010-06-09 | 浙江弘晨光伏能源有限公司 | 晶体硅太阳能电池钝化与发射极(pn结)生产工艺 |
WO2011160272A1 (zh) * | 2010-06-21 | 2011-12-29 | 常州天合光能有限公司 | 一种高方阻太阳电池制作方法 |
CN102097524B (zh) * | 2010-09-28 | 2012-10-17 | 常州天合光能有限公司 | 太阳能电池高方阻扩散方法 |
CN102148284B (zh) * | 2010-12-13 | 2012-11-21 | 浙江晶科能源有限公司 | 制备多晶硅太阳能电池发射极的扩散方法 |
CN102280373A (zh) * | 2011-09-13 | 2011-12-14 | 江阴鑫辉太阳能有限公司 | 一种制备多晶硅太阳能电池发射极的扩散方法 |
CN102509746B (zh) * | 2011-11-03 | 2013-11-06 | 湖南红太阳新能源科技有限公司 | 晶体硅太阳能电池的扩散工艺 |
CN103367521B (zh) * | 2011-12-31 | 2016-04-06 | 英利能源(中国)有限公司 | 一种减少太阳能电池死层的方法 |
CN102586884B (zh) * | 2012-03-06 | 2015-09-09 | 英利能源(中国)有限公司 | 一种多晶硅硅片两次扩散的制造方法 |
CN102694070B (zh) * | 2012-05-30 | 2015-09-30 | 中建材浚鑫科技股份有限公司 | 一种太阳能电池的pn结制作方法 |
CN102737964B (zh) * | 2012-07-02 | 2015-02-11 | 苏州阿特斯阳光电力科技有限公司 | 一种晶体硅片及其扩散方法 |
CN103066162B (zh) * | 2013-01-24 | 2015-11-18 | 山东力诺太阳能电力股份有限公司 | 一种晶体硅太阳能电池均匀扩散制节方法 |
CN103094417B (zh) * | 2013-01-24 | 2015-10-28 | 山东力诺太阳能电力股份有限公司 | 低高低掺杂浓度的发射极结构的太阳能电池制作方法 |
CN103193195B (zh) * | 2013-03-08 | 2015-04-01 | 厦门大学 | 一种重掺杂硼硅片的再分布方法 |
CN103603053A (zh) * | 2013-11-15 | 2014-02-26 | 中电电气(南京)光伏有限公司 | 一种制备晶体硅太阳能电池的方法 |
CN104409557A (zh) * | 2014-09-01 | 2015-03-11 | 苏州矽美仕绿色新能源有限公司 | 一种用于加深硅片pn结深度的扩散方法及硅片 |
CN104867820A (zh) * | 2015-04-16 | 2015-08-26 | 株洲南车时代电气股份有限公司 | 一种高浓度n型浅结的制备方法 |
CN106299021B (zh) * | 2016-08-17 | 2017-11-17 | 横店集团东磁股份有限公司 | 一种高开路电压的单晶电池扩散工艺 |
CN106340567B (zh) * | 2016-08-31 | 2017-12-08 | 横店集团东磁股份有限公司 | 一种应用于太阳能电池提升开压的两步通源工艺 |
CN109411560A (zh) * | 2018-11-02 | 2019-03-01 | 无锡帝科电子材料股份有限公司 | 太阳能电池片、太阳能电池及用于制备太阳能电池电极的组合物 |
CN109545899A (zh) * | 2018-12-03 | 2019-03-29 | 江苏中宇光伏科技有限公司 | 一种太阳能电池片生产用氮封工艺 |
CN111710756A (zh) * | 2020-07-01 | 2020-09-25 | 苏州腾晖光伏技术有限公司 | 一种新型perc电池及其制作方法 |
CN111883420A (zh) * | 2020-08-05 | 2020-11-03 | 中国科学院半导体研究所 | 提高晶硅表层掺磷、掺硼激活率的热扩散方法 |
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2007
- 2007-12-27 CN CNB2007103043441A patent/CN100530704C/zh not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103325666A (zh) * | 2012-03-21 | 2013-09-25 | 苏州贝克微电子有限公司 | 半导体晶圆掺杂扩散技术 |
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CN101217170A (zh) | 2008-07-09 |
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Effective date of registration: 20170502 Address after: 274000 Shandong city of Heze province Dingtao County ran Guzhen Street No. 1 Patentee after: Zhang Jing Address before: 010010, the Inner Mongolia Autonomous Region Hohhot Saihan District Xinhua East Street and Ruyi Development Zone Tengfei Avenue intersection, Zhongsheng building, room 141, room 6114 Patentee before: In Inner Mongolia branch thermal equipment Limited by Share Ltd |
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