CN100524869C - 整体式激励器 - Google Patents

整体式激励器 Download PDF

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Publication number
CN100524869C
CN100524869C CNB02812202XA CN02812202A CN100524869C CN 100524869 C CN100524869 C CN 100524869C CN B02812202X A CNB02812202X A CN B02812202XA CN 02812202 A CN02812202 A CN 02812202A CN 100524869 C CN100524869 C CN 100524869C
Authority
CN
China
Prior art keywords
electrode layer
actuator
electrode
exciter
partial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB02812202XA
Other languages
English (en)
Chinese (zh)
Other versions
CN1547779A (zh
Inventor
安德鲁·尼古拉斯·达姆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huber and Suhner Polatis Ltd
Original Assignee
Polatis Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB0115067.1A external-priority patent/GB0115067D0/en
Priority claimed from GB0116245A external-priority patent/GB0116245D0/en
Priority claimed from PCT/GB2001/005361 external-priority patent/WO2002046825A1/en
Application filed by Polatis Ltd filed Critical Polatis Ltd
Publication of CN1547779A publication Critical patent/CN1547779A/zh
Application granted granted Critical
Publication of CN100524869C publication Critical patent/CN100524869C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2046—Cantilevers, i.e. having one fixed end adapted for multi-directional bending displacement
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CNB02812202XA 2001-06-20 2002-06-19 整体式激励器 Expired - Lifetime CN100524869C (zh)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
GBGB0115067.1A GB0115067D0 (en) 2000-11-13 2001-06-20 Optical switching assembly
GB0115068.9 2001-06-20
GBGB0115068.9A GB0115068D0 (en) 2000-11-13 2001-06-20 Multiport optical switch
GB0115067.1 2001-06-20
GB0116245A GB0116245D0 (en) 2001-07-05 2001-07-05 Multiport optical switching assembly
GB0116245.2 2001-07-05
GBPCT/GB01/05361 2001-12-04
PCT/GB2001/005361 WO2002046825A1 (en) 2000-12-04 2001-12-04 Beam steering arrangements and optical switches
GB0213020A GB2378573B (en) 2001-06-20 2002-06-06 A piezoelectric actuator
GB0213020.1 2002-06-06

Publications (2)

Publication Number Publication Date
CN1547779A CN1547779A (zh) 2004-11-17
CN100524869C true CN100524869C (zh) 2009-08-05

Family

ID=27447956

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB02812202XA Expired - Lifetime CN100524869C (zh) 2001-06-20 2002-06-19 整体式激励器

Country Status (11)

Country Link
US (1) US7026745B2 (enExample)
EP (1) EP1402582B1 (enExample)
JP (1) JP4240472B2 (enExample)
CN (1) CN100524869C (enExample)
AT (1) ATE387725T1 (enExample)
CA (1) CA2450613C (enExample)
DE (1) DE60225281T2 (enExample)
ES (1) ES2302812T3 (enExample)
GB (1) GB2378573B (enExample)
IL (1) IL159322A0 (enExample)
WO (1) WO2002103816A2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7522789B2 (en) 2004-05-29 2009-04-21 Polatis Ltd. Optical switches and actuators
WO2006022557A1 (en) * 2004-08-24 2006-03-02 Auckland Uniservices Limited Optical fibre switch
GB2423788A (en) * 2005-03-02 2006-09-06 Pbt Piezo ceramic actuator for a lock bolt
US8203253B2 (en) * 2007-11-21 2012-06-19 Konica Minolta Opto, Inc. Piezoelectric actuator, driving device, positioning device and laser module
US7786648B2 (en) * 2008-08-18 2010-08-31 New Scale Technologies Semi-resonant driving systems and methods thereof
US8217553B2 (en) * 2008-08-18 2012-07-10 New Scale Technologies Reduced-voltage, linear motor systems and methods thereof
EP2870690B1 (en) 2012-07-05 2016-04-20 Noliac A/S A wobble motor with a solid state actuator
GB2531552B (en) * 2014-10-21 2017-12-27 Polatis Ltd Crosstalk reduction technique for multi-channel driver circuits
JP2022548258A (ja) 2019-09-12 2022-11-17 テクニーシェ・ユニバーシタイト・アイントホーベン 光学部品をオンチップポートにアライメントするために配置された装置、およびそれに対応するシステムおよび方法
JP7467511B2 (ja) * 2020-02-07 2024-04-15 京セラ株式会社 圧電素子
WO2022004848A1 (ja) * 2020-07-03 2022-01-06 京セラ株式会社 圧電素子
US20230397499A1 (en) 2020-10-23 2023-12-07 Kyocera Corporation Piezoelectric actuator

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor
US6066911A (en) * 1995-02-23 2000-05-23 Robert Bosch Gmbh Ultrasonic driving element

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4812697A (en) * 1986-04-09 1989-03-14 Taga Electric Co., Ltd. Ultrasonic vibrator and a method of controllingly driving same
US4958100A (en) * 1989-02-22 1990-09-18 Massachusetts Institute Of Technology Actuated truss system
US5027028A (en) * 1989-08-29 1991-06-25 Skipper John D Piezoelectric motor
US5081391A (en) * 1989-09-13 1992-01-14 Southwest Research Institute Piezoelectric cylindrical transducer for producing or detecting asymmetrical vibrations
JPH03117384A (ja) * 1989-09-28 1991-05-20 Canon Inc 超音波モータの摩擦材
JPH08111991A (ja) * 1994-08-19 1996-04-30 Mitsui Petrochem Ind Ltd 超音波モータ用圧電振動子および圧電振動子の取付け方法
JP2799410B2 (ja) 1995-02-02 1998-09-17 サンケン電気株式会社 直流コンバータ装置
US6359370B1 (en) * 1995-02-28 2002-03-19 New Jersey Institute Of Technology Piezoelectric multiple degree of freedom actuator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor
US6066911A (en) * 1995-02-23 2000-05-23 Robert Bosch Gmbh Ultrasonic driving element

Also Published As

Publication number Publication date
WO2002103816A2 (en) 2002-12-27
GB2378573B (en) 2003-09-10
CA2450613A1 (en) 2002-12-27
JP2004531189A (ja) 2004-10-07
DE60225281T2 (de) 2009-03-05
CN1547779A (zh) 2004-11-17
US20040251771A1 (en) 2004-12-16
EP1402582B1 (en) 2008-02-27
GB2378573A (en) 2003-02-12
ATE387725T1 (de) 2008-03-15
DE60225281D1 (de) 2008-04-10
CA2450613C (en) 2010-12-07
US7026745B2 (en) 2006-04-11
ES2302812T3 (es) 2008-08-01
JP4240472B2 (ja) 2009-03-18
IL159322A0 (en) 2004-06-01
EP1402582A2 (en) 2004-03-31
WO2002103816A3 (en) 2003-06-19
GB0213020D0 (en) 2002-07-17

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SE01 Entry into force of request for substantive examination
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Granted publication date: 20090805

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