CN100524587C

CN100524587C - Method and apparatus for correcting minute graphics defect of plane substrate

Info

Publication number: CN100524587C
Application number: CNB2003101036750A
Authority: CN
Inventors: 矢田雄司; 清水茂夫; 德永宽哲; 藤川芳夫
Original assignee: NTN Corp
Current assignee: NTN Corp
Priority date: 2003-02-21
Filing date: 2003-11-03
Publication date: 2009-08-05
Anticipated expiration: 2023-11-03
Also published as: KR20040075675A; CN1523631A; TW200416771A; TWI323478B; JP4331515B2; JP2004311914A

Abstract

An apparatus and a method are provided to obtain a specified cross section by processing the surplus paste after baking of repair paste. A method comprises a first step of filling a repair paste; a second step of drying and baking the repair paste; a third step of mechanically cutting the specified cross section surplus material; a fourth step of determining position by moving a head unit equipped with devices for performing the first to third steps and a flat substrate with a micro pattern in the direction parallel to the flat substrate; and a fifth step of permitting each of devices equipped in the head unit to be interlocked with the device which moves in the direction vertical to the flat substrate with the micro pattern. An apparatus comprises a repair paste filling unit(50); a paste baking unit(60); a mechanical cutting unit(70) for mechanically cutting the surplus paste; a vertical movement unit(80) which moves in the direction vertical to the flat substrate; and a position determination unit(40) for moving in the direction parallel to a head unit and the flat substrate.

Description

The minute graphics defect modification method and the correcting device of planar substrates

Technical field

The present invention relates to method and correcting device that the defective that is arranged on the Micropicture on the substrate is revised.

Background technology

Below, the modification method of the material of the plasma display device of developing fast in recent years (below, be called PDP) is described for example, but the invention is not restricted to the purposes of PDP.

The defective of the Micropicture on the so-called substrate is shown in Figure 2 as described later, be arranged on the defective that Micropicture produced on the backplate 20 of 2 relative substrate (front panel 10 and backplate 20) of PDP, for example, described later shown in Figure 3, be meant that material at the backplate 20 that fin 21 is formed at certain intervals (below, be called backplate material 20A) goes up the fin defective part 21ab that the fin defect flaw 21a of portion, the fin that produce adhere to defective part 21b etc. when forming fin 21.

Fig. 2 is the PDP structure chart that includes the fin that will revise the defective of the Micropicture of fin.Be provided with the minute graphics defect modification method and the correcting device of the planar substrates of Micropicture of the present invention, the defective of the Micropicture of the fin 21 that is provided with at certain intervals on the backplate to the front panel 10 of the PDP of this figure and 2 of backplate 20 relative glass substrates is revised.

In general PDP, as shown in Figure 2, on the substrate of facing mutually of plate 10 and backplate 20 a plurality of electrodes series are set regularly respectively in front, and are configured to the electrodes series quadrature of front panel 10 and backplate 20.

In front on the plate 10; with the face of backplate 20 butts on a plurality of groups of ground form the transparency electrode 11 of wide cut of the maintenance discharge that the transparent material by ITO etc. constitutes and the 1 pair of combination electrode that constitutes by the opaque bus electrode 12 in a narrow margin of the high metallic film of conductance; filling secret note between the bus electrode; be formed on the above-mentioned combination electrode for the protective layer 14 of composition is covered integratedly in order to dielectric layer 13 and MgO (magnesium oxide), these dielectric layers 13 and protective layer 14 have light transmission.

Again, overleaf on the plate 20, be provided with fin 21 at certain intervals, between each trench of fin and fin configuration address electrode 22 and on each address electrode, the luminescent coating 23 that the luminescent coating 23B of the luminescent coating 23G of 1 couple of luminescent coating 23R by emitting red light, green emitting and blue-light-emitting constitutes that is being covered respectively.

So-called relative front panel 10 and backplate 20, be fixed and form by fin 21 and be known as battery (Japanese: the discharge space セ Le), enclose neon, xenon etc. betwixt and be the gas of main body, between above-mentioned electrode, apply the voltage of setting, carry out image and show that the battery of arranging regularly of usefulness is carried out Discharge illuminating selectively.

Generally, on planar substrates Micropicture being formed material carries out texturing and forms Micropicture.Specifically, any method of the fin shaping of PDP all adopts on the glass substrate that PDP uses fin is formed that material carries out texturing and the method that bakes after forming fin, with the temperature of regulation basically.For example, the fin formation method of sand-blast is to blow the grinding agent that is used for fin formation material on the glass substrate and baking behind processing fin figure.In other fin formation method, be when the fin of PDP forms, all produce damaged and make workmanship, revise declines such as efficient in any zone of PDP.

Fig. 3 is the fin defect map that produces when forming fin with common sand-blast, and this figure (A) is the fin defect flaw figure after fin produces breach, and this figure (B) is that the fin that adheres to unnecessary fin adheres to defect map.

Shown in this figure (A), panel material 20A go up to form fin 21 overleaf, and this fin 21-part produces the damaged fin defect flaw 21a of portion of fin.Shown in this figure (B), overleaf on the part of the fin 21 on the panel material 20A, between fin, produce unnecessary part transition portion, adhere to defective part 21b than the fin of the part of normal wider width etc. again.

The height of the fin shown in this figure (A) is 150[μ m], width is 60[μ m] degree.

Usually, the manufacture method of fin, the method that forms with sand-blast is a main flow, but with the fin that this method is made, and produces thick or make the defective that adjacent fin blocks or generation is cut off because of fin is damaged because of fin.

Such defective the darker point of brightness occurs, becomes the point of lighting all the time the quality of face is significantly descended when lighting owing to panel, so must eliminate defective to fin correction before forming panel.Method as revising these defectives proposes many fin defect correcting methods or device at present.

Fin defect correcting method or the device that in the past proposes described.On the part of the fin 21 on the backplate material 20A shown in above-mentioned Fig. 3 (B), between fin, produce unnecessary part transition portion, adhere to defective part 21b than the fin of the part of normal wider width etc., use laser to cut shaping.

On the part of the fin 21 on the backplate material 20A shown in above-mentioned Fig. 3 (B), the fin defect flaw 21a of portion after fin is damaged is will be filled in damaged with the paste of the approaching material of fin material or place of incision and this rejected region is repaired in its defect.

But it is difficulty extremely that this reparation part will make with on every side fin shape identical, and repairing the position often becomes thick etc. the defective of fin on the contrary.Therefore, after drying (low temperature bakes) is carried out at the position behind the filling paste, carry out shape correction (shaping processing), then, bake (high temperature bakes) once more and the paste of this retouch is baked fully with laser.

[conventional art 1]

In the shaping processing that utilizes laser, must come the change condition according to the color (white fin, black fin etc.) of fin.Because the white insufficient absorption laser energy of fin, so compare, revise rejected region with the occasion of black fin, laser output that must be big, thus more time-consuming for correction.Again, in such processing, on electrode, dielectric layer, form fin, then, because fin is revised, so might damage the dielectric layer, electrode etc. of fin lower floor.

The shaping processing method of utilizing laser of conventional art 1 for example, is put down in writing on Japanese patent laid-open 10-223145 communique (identical with patent documentation 1).

Fig. 4 is defective part paste filling figure and cuts the laser cutting plastic repair procedure chart of shaping with laser shaping machining tool 31.This figure (A) is the defective part paste filling figure that paste 24 is repaired in filling on the fin defect flaw 21a of portion shown in Figure 3, and this figure (B) is the laser shaping machining damage position generation figure that is easy to generate the damage location 21c of lower floor in the lower floor of the fin that produces when unnecessary repairing paste 24 usefulness laser shaping machining tools 31 are cut shaping.

[conventional art 2]

After paste 24 is repaired in the fin defect flaw 21a of portion filling, in bake method preceding, that fin is revised fully with high temperature, because it is low to bake the hardness of portion, be processed into unnecessary repairing paste shaping identical shaped with convex rib is to be relatively easy to, and when finally the baking of high temperature because the fin contraction distortion, the unnecessary repairing paste that must overflow the regulation section from fin (below, be called and overflow paste) 24a cuts the operation of shaping once more.

Fig. 5 is 2 cutting shaping procedure charts of 2 cuttings of the needs shaping in the conventional art 2.Carry out from the process of filling mending paste 24 on the fin defect flaw 21a of portion to cutting 2 times fin regulation section excess material cutting shaping process of the process of shaping once more overflowing paste 24a.

This figure (A) is the defective repairing figure not of the expression fin defect flaw 21a of portion, this figure (B) is with the defective part paste filling figure of filling needle 32 to the fin defect flaw 21a of portion filling mending paste 24, this figure (C) is the dry figure of the paste when baking (drying) with the low temperature initial stage of carrying out, this figure (D) utilizes grinding band 85a to overflowing the 1st the cutting shaping procedure chart that paste 24a cuts shaping by above-mentioned drying, this figure (E) finally bakes figure, fin 21 contraction distortions when finally baking with high temperature just must be once more cut the 2nd cutting shaping process of shaping to overflowing paste 24a.

The shaping processing method of utilizing laser of conventional art 2 for example is recorded in the Japan Patent spy and opens on the 2000-260326 communique (identical with patent documentation 2).

[conventional art 3]

Japan Patent spy in aforesaid conventional art 2 opens in the 2000-260326 communique, conventional art 2 is putting down in writing that " Fig. 8 is the stereogram that will be formed at after the distolateral amplification of fin 14 of the linearity on the dielectric layer 13 of glass substrate 11, is the figure that filling is carried out shaping processing back, baked with material 2 in damaged 1 formation of fin.”

Then, owing to putting down in writing " after baking herein; also consider to try to implement filling is carried out the shaping method for processing in damaged 1 formation of fin with material 2; and, need spend the more time to shaping processing because filling is all burnt with the organic principle of material 2 in damaged 1 formation of fin and lost and hardening.Therefore, after fin bakes,, be preferably in described damaged filling fin formation material, described fin formed with material carry out shaping processing, bake once more as the modification method of the damaged portion that on fin, produces.", therefore, technology described here is the shaping processing method that adopts conventional art 3.

Patent documentation 1:

Japanese patent laid-open 10-223145 communique (Fig. 3)

Patent documentation 2:

The Japan Patent spy opens 2000-260326 communique (Fig. 8)

[problem that conventional art 1 exists]

The color adularescent of repairing paste 24, black etc. are multiple.Color (white fin, black fin etc.) according to fin in the shaping processing that utilizes laser must change condition.Because the white insufficient absorption laser energy of fin, so compare during for black fin with the corrective pitting position, laser that must be big is exported and is spent the more time.

[problem that conventional art 2 exists]

2 times of described conventional art 2 cutting plastic repair methods as shown in Figure 5, need carry out to the process of the fin defect flaw 21a of portion filling mending paste 24 to cutting 2 times fin regulation section excess material cutting shaping process of the process of shaping once more to overflowing paste 24a.Therefore, there is the inefficient problem of revising in the cutting plastic repair method of conventional art 2.

[problem that conventional art 3 exists]

Japan Patent spy in described conventional art 2 opens in the 2000-260326 communique, putting down in writing " after this bakes; also consider to try to implement filling is carried out the shaping method for processing in damaged 1 formation of fin with material 2; and, need spend the more time to shaping processing because filling is all burnt with the organic principle of material 2 in damaged 1 formation of fin and lost and hardening.”

And putting down in writing " shaping processing is needed the more time of cost " of the conventional art 3 with after fin bakes, modification method as the damaged portion that on fin, produces, best " at described damaged filling fin formation material; described fin formation is cut shaping processing with material, and bake once more." content.Therefore, there is the inefficient problem of revising in the cutting plastic repair method of conventional art 3.

Summary of the invention

The objective of the invention is to, the problem that can solve conventional art 1 and conventional art 2 and conventional art 3 simultaneously is provided, and by each mechanism is carried out rationally, effectively combination is carried out defect correction, and is realized improving the method and the correcting device of the corrective pitting of Micropicture correction efficient.

Below, with reference to figure, the formation of claim is described particularly.The relation of the term of Ji Zai term and example or embodiment in the claims, with reference to Fig. 2～shown in Figure 4, and as described below.

The plane that 1. will be provided with Micropicture is as the fin plane, the planar substrates that 2. will be provided with Micropicture is as

backplate material

20A, 3. with the regulation section of Micropicture regulation section as fin, 4. with minute graphics defect as the fin defective, 5. Micropicture is formed material defect flaw portion as the fin defect flaw 21a of portion, 6. Micropicture being formed material adheres to defective part and adheres to defective part 21b as fin, 7. Micropicture is formed material and form material as fin, 8. with above the Micropicture as 21d above the fin, 9. with minute graphics defect observation element as fin defective observation element 90.

The minute graphics defect portion on the planar substrates of Micropicture of being provided with is formed the fin defective part 21ab of the backplate material 20A of fin 21 as the planar substrates that is provided with Micropicture.

Again, the unnecessary Micropicture regulation section excess material that overflows from the regulation section of Micropicture, be to overflow paste, Micropicture to form the excess material that material adheres to defective part etc., from the unnecessary fin regulation section excess material 26 that the regulation section of fin overflows, be to overflow the excess material that paste 24a, fin adhere to defective part 21b etc.

Then, the example after the formation of claim is specialized describes.

Example 1 is that the process that will implement from overall structure device shown in Figure 1 is implemented the mechanism of basic process and the invention of the method for mechanism's interlock of implementing the vertical direction moving process.

After filling on the fin defective part 21ab of the backplate material 20A that forms fin 21 as being provided with the planar substrates of Micropicture is repaired paste 24 and is baked, to the regulation section from fin overflow unnecessary overflow the unnecessary fin that adheres to that paste 24a or fin adhere to defective part 21b form material or its both (below, be called fin regulation section excess material 26) carry out having in the minute graphics defect modification method of shaping processing:

The mending paste stowing operation ST50 of the described repairing paste 24 of filling;

The paste that make described repairing paste 24 dryings, bakes bakes process ST60;

Described fin regulation section excess material 26 is carried out the machine cut shaping process ST70 of machine cut shaping;

Make be equipped with the mechanism that implements described mending paste stowing operation ST50 and implement described paste bake the head of mechanism of the mechanism of process ST60 and the described machine cut shaping process ST70 of enforcement and the horizontal direction position fixing process ST40 that position relatively mobile to the in-plane parallel with above-mentioned backplate material with above-mentioned backplate material 20A and

Make lift-launch each mechanism on described head and the process ST80 that links to the mechanism that the direction perpendicular to the fin plane moves.

Example 2 is the inventions that make the device of basic system and the interlock of vertical direction travel mechanism from overall structure device shown in Figure 1,

After filling on the fin defective part 21ab of the backplate material 20A that forms fin 21 as being provided with the planar substrates of Micropicture is repaired paste 24 and is baked, regulation section excess material 26 from fin is carried out have the minute graphics defect correcting device of shaping processing:

The mending paste filling body 50 of the described repairing paste 24 of filling;

The paste that make described repairing paste 24 dryings, bakes bakes mechanism 60;

The machine cut reshaping device 70 that described fin regulation section excess material 26 is carried out the machine cut shaping;

To the vertical direction travel mechanism 80 that the direction vertical with the fin plane moves;

Make and be equipped with the horizontal direction detent mechanism that head that described mending paste filling body 50 and described paste bake mechanism 60 and described machine cut reshaping device 70 and above-mentioned backplate material 20A relatively move and position to the in-plane parallel with above-mentioned backplate material

Each mechanism and the described vertical direction travel mechanism 80 of lift-launch on described head linked.

Example 3 is to implement except the process of being implemented from overall structure device shown in Figure 1 the mechanism of basic process, the invention of the method that the mechanism that also makes the overall process of implementing to comprise the mechanism that implements additive proccess and the mechanism that implements the vertical direction moving process link.

After filling on the fin defective part 21ab of the backplate material 20A that forms fin 21 as being provided with the planar substrates of Micropicture is repaired paste 24 and is baked, regulation section excess material 26 from fin is carried out have the minute graphics defect modification method of shaping processing:

The smear metal discharge process ST100 that the smear metal 101a that will produce when fin regulation section excess material cutting shaping is discharged;

Observe the fin defective of the minute graphics defect 21ab of portion and observe process ST90;

Make to be equipped with the mechanism that implements described mending paste stowing operation ST50 and to implement described paste and bake the mechanism of process ST60 and and implement the mechanism of described machine cut shaping process ST70 and implement the mechanism of smear metal discharge process ST100 and the head of the mechanism of enforcement minute graphics defect observation process ST90 is relatively mobile to the in-plane parallel with above-mentioned backplate material with above-mentioned backplate material 20A and the horizontal direction position fixing process ST40 that positions; And

Example 4 is except becoming the basic system from overall structure device shown in Figure 1, make the invention of the device that also comprises the whole mechanism of appending mechanism and the interlock of vertical direction travel mechanism,

The chip-repelling mechanism 100 that the smear metal 101a that will produce when fin regulation section excess material cutting shaping is discharged;

Observe the fin defective observation element 90 of fin defective part 21ab;

To the vertical direction travel mechanism 80 that the direction vertical with the fin plane moves; And

Make and be equipped with the horizontal direction detent mechanism that head that described mending paste filling body 50 and described paste bake mechanism 60 and described machine cut reshaping device 70 and chip-repelling mechanism 100 and fin defective observation element 90 and above-mentioned backplate material 20A relatively move and position to the in-plane parallel with above-mentioned backplate material

Example 5, being that the fin defective part 21ab of backplate material 20A to record in example 1 or the example 3 carries out the shaping method for processing, is the minute graphics defect modification method that the fin regulation section excess material 26 of flat display panel substrate is carried out machine cut shaping processing.

Example 6, be the process ST90 of fin defective observation element that the fin defective part 21ab to 3 records of example 1 or example observes, to fin defective part 21ab is that fin defect flaw 21a of portion or fin adhere to defective part 21b judges, and the minute graphics defect modification method of revising according to the defective part of judging.

Example 7 is minute graphics defect correcting devices, the horizontal direction travel mechanism 40 that is record in example 2 or the example 4 bakes mechanism 60 with mending paste filling body 50 and paste and positions with machine cut reshaping device 70 relative backplate material 20A in the plane parallel with backplate material 20A, and the vertical direction travel mechanism 80 that moves to the direction perpendicular to the plane parallel with above-mentioned backplate material 20A is positioned at machine cut shaping organisation of working 70 on the direction vertical with substrate.

Example 8 as shown in Figure 9, it is the minute graphics defect modification method of record in example 1 or the example 3, promptly have the minute graphics defect modification method of the pushing force utilization of machine cut reshaping device 70 being cut the lower surface 81a function that 21d stops dispersedly on a plurality of fins of reference feature 81, have:

The process of the vertical direction position consistency of machine cut reshaping device 70, the front end face 73a that makes regulation section excess material machining tool 73 above the fin that is installed in described machine cut reshaping device 70 front ends and described incision reference feature 81 lower surface 81a is installed on the incision reference feature 81 on being installed on vertical direction travel mechanism 80;

Described vertical direction travel mechanism 80 is dropped to contact and the fin regulation section excess material upper surface 24d of the protuberance of 21d on fin is utilized regulation section excess material machining tool 73 above the described fin and the process of cutting with 21d above the fin;

The lower surface 81a that makes described incision reference feature 81 and 21d above the fin contact, make the pushing force process that 21d stops dispersedly on a plurality of fins of regulation section excess material machining tool 73 above the fin.

Example 9 as shown in Figure 9, it is the minute graphics defect modification method of record in example 1 or the example 3, promptly except the pushing force function that 21d stops dispersedly on a plurality of fins, also have the minute graphics defect modification method of the function that the pushing force more than the setting of machine cut reshaping device 70 is absorbed by pushing force adjusting mechanism 82, have the machine cut reshaping device 70 of example 8:

The lower surface 81a that makes described vertical direction travel mechanism 80 drop to described incision reference feature 81 contacts with 21d above the fin and the fin regulation section excess material upper surface 24d of the protuberance of 21d on fin is utilized regulation section excess material machining tool 73 above the described fin and the process of cutting;

The lower surface 81a that makes described incision reference feature 81 and 21d above the fin contact, make the above pushing force of the setting of regulation section excess material machining tool 73 above the fin to be pushed pressure adjustmenting mechanism 82 to absorb and make the unabsorbed pushing force process that 21d stops dispersedly on a plurality of fins.

Example 10 as shown in Figure 9, it is the minute graphics defect correcting device of example 2 or example 4 records, promptly be the minute graphics defect correcting device that has the lower surface 81a of the pushing force of machine cut reshaping device 70,21d stops dispersedly on a plurality of fins incision reference feature 81, have:

Be installed in the vertical direction travel mechanism 80 and the incision reference feature 81 of machine cut reshaping device 70 is installed;

Be installed in regulation section excess material machining tool 73 above the fin of described machine cut reshaping device 70 front ends;

Contact with 21d above the fin and make the pushing force of regulation section excess material machining tool 73 above the fin disperse the lower surface 81a of the incision reference feature 81 that stops by 21d above a plurality of fins.

Example 11 as shown in Figure 9, it is the minute graphics defect correcting device of record in example 2 or the example 4, promptly except the pushing force of the machine cut reshaping device 70 of example 10 is disperseed the lower surface 81a of the incision reference feature 81 that stops by 21d above a plurality of fins, also have the minute graphics defect correcting device of the pushing force adjusting mechanism 82 that absorbs the above pushing force of machine cut reshaping device 70 settings, have:

Contact with 21d above the fin and make the pushing force of regulation section excess material machining tool 73 above the fin disperse the lower surface 81a of the incision reference feature 81 that stops by 21d above a plurality of fins;

Absorb the pushing force adjusting mechanism 82 of the above pushing force of machine cut reshaping device 70 settings.

Example 12 as shown in figure 11, it is the minute graphics defect correcting device of record in example 2 or the example 4, promptly be the pushing force adjusting mechanism 82 of the pushing force more than the setting of the machine cut reshaping device 70 that absorbs example 11, also have the minute graphics defect correcting device of the pushing force adjusting mechanism 83 of cutting tools ways, have:

Absorb the pushing force adjusting mechanism 82 of the above pushing force of machine cut reshaping device 70 settings;

The ways 84 of the machine cut reshaping device 70 that on incision reference feature 81, slides; And

The pushing force adjusting mechanism 83 of the cutting tools ways that the pushing force more than the setting of regulation section excess material machining tool 73 front end face 73a above the described fin is absorbed.

Example 13 is as Fig. 7 or shown in Figure 8, being the minute graphics defect correcting device of record in example 2 or the example 4, promptly is that machine cut reshaping device 70 has the throw that is provided with vertical axis rotary cutting sword 71 or horizontal rotational shaft cutting edge 72 and keeps throw and make the rotary driving part of its rotation and fin regulation section excess material 26 is cut the minute graphics defect correcting device of shaping.

Example 14 is minute graphics defect correcting devices of record in example 2 or the example 4, machine cut reshaping device 70 moves back and forth grinding band assembly 85 and fin regulation section excess material 26 is cut shaping, and described grinding band assembly 85 comprises: the grinding band 85a that adheres to sand grains from the teeth outwards, the supply spool 85b of grinding band 85a before keeping using, the take-up reel 85c of the grinding band after coiling uses, be positioned at the centre of supply spool 85b and take-up reel 85c and grinding band 85a is adhered to the band supporting member 85d that defective part 21b pushes to overflowing paste 24a or fin.

Example 15 as shown in figure 16, it is the minute graphics defect correcting device of record in example 2 or the example 4, promptly be that machine cut reshaping device 70 is installed in front end with cut instrument 75 and makes cut instrument 75 vibration at high speed and carry out the vibration processing machine 87 of cut, and be to use 87 pairs of fin regulations of this vibration processing machine section excess material 26 to cut the minute graphics defect correcting device of shaping.

Example 16 as shown in figure 17, being the minute graphics defect correcting device of record in example 2 or the example 4, promptly is to have the smear metal that produces to attract the negative pressure generator of discharging and the minute graphics defect correcting device of smear metal outlet when fin regulation section excess material 26 is cut shaping.

Example 17 is the minute graphics defect correcting device that mending paste filling body 50 is put down in writing as the example 2 or the example 4 of filling needle shown in Fig. 5 (B).

Example 18 is minute graphics defect correcting devices that mending paste filling body 50 is put down in writing as the example 2 or the example 4 of injector (liquor discharger).

Example 19 is minute graphics defect correcting devices that mending paste filling body 50 is put down in writing as the example 2 or the example 4 of ink-jetting style.

Example 20 is the minute graphics defect correcting devices put down in writing as the example 2 or the example 4 of laser with thermal source that bake that paste bakes mechanism 60.

Example 21 is the minute graphics defect correcting devices put down in writing as the example 2 or the example 4 of hot wind generating device with thermal source that bake that paste bakes mechanism 60.

Example 22 is as Figure 14 or shown in Figure 15, being the minute graphics defect correcting device of record in example 2 or the example 4, promptly is that machine cut reshaping device 70 has the throw that is provided with vertical axis rotary grinding tool 86A or horizontal rotational shaft grinding tool 86B and keeps throw and make the rotary driving part of rotation and fin regulation section excess material 26 is cut the minute graphics defect correcting device of shaping.

Each device or method of the present invention needn't have following institute of the present invention simultaneously and produce effect, and the effect more than 1 of the present invention is not as long as just passable in known technology.

The fin defect correcting method and the device of plasma display of the present invention, be to repairing cutting shaping method for processing and the device that paste 24 carries out filling, drying and bakes the back, utilizes the machine cut shaping that the fin shape is carried out shaping, relatively have following effect with previous methods.

Conventional art, owing to after the shaping of fin shape, bake, can not make the fin shape become the problem of regulation section so exist when baking fin to be out of shape (contraction), and in the present invention, owing to bake back (sclerosis back), process overflowing paste 24a, so can be processed into the regulation section at repairing paste 24.

Especially, conventional art 3, the problem that has " to the shaping processing more time of cost ", and in the present invention, since make method in embodiment, the usefulness of dealing with problems, and described each mechanism such as claim defect correction is carried out in combination rationally, effectively, so can carry out stay-in-grade defect correction, and can realize improving the correction efficient of Micropicture.

Again, in the laser processing of conventional art, be created in the damage location 21c of lower floor that produces in the laser processing, and in the present invention, since to because of filling or the machine cut shaping of the cutting plastic operation that bakes the fin regulation section excess material 26 that produces after by improvement of the present invention carry out, so can not produce the damage location 21c of lower floor that produces in the laser processing.

Description of drawings

Fig. 1 be with each mechanism rationally, effectively the combination minute graphics defect correcting device overall structure figure of the present invention.

Fig. 2 is the PDP structure chart that includes the fin that the defective of the described Micropicture of fin is revised.

Fig. 3 is the fin defect map that produces with common sand-blast, and this figure (A) is the fin defect flaw figure after fin produces breach, and this figure (B) is that the fin that adheres to unnecessary fin adheres to defect map.

Fig. 4 is defective part paste filling figure and cuts the laser cutting plastic repair procedure chart of shaping with the laser shaping machining tool.

Fig. 5 is 2 cutting shaping procedure charts that need 2 cutting shapings in the conventional art 2.

To be mending paste 24 mending paste that the filling syringe needle 32a in the mending paste filling body 50 with buffer component 51 divides a word with a hyphen at the end of a line to the fin defect flaw 21a of the portion procedure chart of dividing a word with a hyphen at the end of a line from embedding to Fig. 6.

Fig. 7 is to use vertical axis rotary cutting sword 71 to cut the cutting shaping course of processing figure of shaping processing.

Fig. 8 is to use horizontal rotational shaft cutting edge 72 to cut the cutting shaping course of processing figure of shaping processing.

Fig. 9 is that the pushing force of utilizing the lower surface 81a of incision reference feature 81 to make fin regulation section excess material upper surface 24d to 21d above the fin cut regulation section excess material machining tool 73 above the fin of shaping prevents procedure chart by the fin device for preventing breakage sketch fin breakage that 21d above a plurality of fins stops dispersedly.

Among Figure 10, Figure 10 (A) is that the pushing force adjusting mechanism 82 of Fig. 9 utilizes spring to absorb the fin device for preventing breakage sketch of pushing force adjusting mechanism 82B of the spring of the above pushing force of setting, and Figure 10 (B) is that the pushing force adjusting mechanism 82 of Fig. 9 utilizes cylinder to absorb the fin device for preventing breakage sketch of pushing force adjusting mechanism 82A of the cylinder of the above pushing force of setting.

Figure 11 is except the pushing force adjusting mechanism 82 of Figure 10, also have when the front end face of cut instrument 75 contacts with fin regulation section excess material upper surface 24d, absorb the fin device for preventing breakage sketch of the cutting tools ways pushing force adjusting mechanism 83 of the pushing force more than the setting.

Figure 12 is fin slot part organisation of working and the course of processing figure that the fin regulation section excess material 26 of fin slot part 21e is cut shaping.

Figure 13 is to use grinding band 85a the fin regulation section excess material 26 of 21d above the fin to be cut the grinding band cutting shaping procedure chart of shaping.

The cutting Grinding Process figure that the vertical axis rotary grinding tool that Figure 14 is to use vertical axis rotary grinding tool 86A to cut grinding uses.

The cutting Grinding Process figure that the horizontal rotational shaft grinding tool that Figure 15 is to use horizontal rotational shaft grinding tool 86B to cut grinding uses.

Figure 16 installs grinding tool 86 and utilizes vibration at high speed (reciprocating motion) to carry out the vibrocutting shaping processing sketch of the cutting shaping processing of the fin regulation section excess material 26 of 21d and fin slot part 21e above the fin.

Figure 17 is the chip sucking discharge process figure that is attracted and discharged from smear metal outlet 103 by the smear metal 101a that 102 pairs of the negative pressure generators of chip-repelling mechanism 100 produce when the fin regulation section excess material cutting plastic operation.

Embodiment

Example of the present invention is the minute graphics defect correcting device of the example 4 of overall structure device shown in Figure 1, is described as follows as reference Fig. 3 and Fig. 4:

The minute graphics defect correcting device is, as the planar substrates that is provided with Micropicture, after filling on the fin defective part 21ab of the backplate material 20A that forms fin 21 is repaired paste 24 and baked, fin regulation section excess material 26 is carried out shaping processing, has:

The mending paste filling body 50 of the above-mentioned repairing paste 24 of filling;

Above-mentioned repairing paste 24 dryings, the paste that bakes are baked mechanism 60;

The machine cut reshaping device 70 that above-mentioned fin regulation section excess material 26 is carried out the machine cut shaping;

The chip-repelling mechanism 100 that the smear metal 101a that will produce when above-mentioned fin regulation section excess material cuts shaping is discharged;

The fin defective observation element 90 that fin defective part 21ab is observed;

Make and be equipped with above-mentioned mending paste filling body 50, above-mentioned paste bakes the head of mechanism 60, above-mentioned machine cut reshaping device 70, chip-repelling mechanism 100 and fin defective observation element 90 and the horizontal direction detent mechanism that above-mentioned backplate material 20A relatively moves and positions to the in-plane parallel with above-mentioned backplate material

Make lift-launch in each mechanism of above-mentioned head and 80 interlocks of above-mentioned vertical direction travel mechanism.

[embodiment]

Fig. 1 be with each mechanism rationally, effectively the combination minute graphics defect correcting device overall structure figure of the present invention.The figure shows be used for conventional art 1 and conventional art 2, also solved conventional art 3 problem each mechanism of the present invention rationally, the overall structure device of the minute graphics defect correcting device of the planar substrates that is provided with Micropicture of combination effectively.

Below, the embodiment of plasma display panel describes.This device is used in and the fin defect flaw 21a of portion shown in Figure 3 that produces when the making of the backplate material 20A of plasma display device and fin are adhered to defective part 21b (below, be called fin defective part 21ab) revises.

In the defective part mending paste filling figure shown in overall structure device shown in Figure 1 and Fig. 4 (A), basic system is carried the vertical direction travel mechanism loading device of the basic system in vertical direction travel mechanism, constitute: be equipped with backplate material 20A that comprises fin and the horizontal direction travel mechanism that moves to the in-plane parallel (XY worktable that can move to the XY direction) 40 with backplate material 20A by following mechanism; The mending paste filling body 50 of the mending paste that the correction of filling fin is used; With the paste of filling give drying, the paste that bakes bakes mechanism 60; The machine cut reshaping device 70 that fin regulation section excess material 26 is carried out the machine cut shaping; Make above-mentioned mending paste filling body 50 and above-mentioned paste bake mechanism 60 and above-mentioned machine cut reshaping device 70 to vertical direction travel mechanism that the direction vertical with the fin plane moves (the Z workbench that moves to the Z direction) 80.

In overall structure device shown in Figure 1, the overall structure that will also comprise additional mechanism providing additional operation except basic system is carried the integrally-built vertical direction travel mechanism loading device in vertical direction travel mechanism, in vertical direction travel mechanism 80, except by mending paste filling body 50, paste bakes outside the basic system of mechanism 60 and machine cut reshaping device 70 formations, also have the chip-repelling mechanism 100 of the smear metal 101a that discharge produces and observe the additional mechanism providing additional operation of fin defective observation element 90 grades of fin rejected region when fin regulation section excess material cutting shaping, and these additional mechanism providing additional operations are carried in above-mentioned vertical direction travel mechanism (to the Z workbench that the Z direction moves) 80, if to a series of flow chart when automatically carrying out, because can each mechanism is reasonable, make up effectively, so can carry out stay-in-grade defect correction, and can improve the correction efficient of Micropicture.

Again, overall structure device shown in Figure 1 each mechanism of the present invention in being recorded in embodiment and example, also has monitor 110, correcting device controller 120, image process controller 130 etc.

In the embodiment shown in fig. 1, lift-launch each mechanism in the above-mentioned vertical direction travel mechanism 80 (below, be called head), 1. utilize to horizontal direction travel mechanism that the in-plane parallel with backplate material 20A moves (XY worktable that can move to the XY direction) 40 and along continuous straight runs positions.2. this head and backplate material 20A location in the horizontal direction also can make head move, make backplate material 20A to move to the Y direction to directions X except the foregoing description, and head is moved to the XY direction.Head and backplate material 20A are so long as relatively move and the horizontal direction detent mechanism that positions gets final product to the in-plane parallel with the backplate material.

The upperseat concepts such as mechanism that above-mentioned horizontal direction detent mechanism is a 1. above-mentioned horizontal direction travel mechanism (XY worktable that can move to the XY direction) 40,2. make head move, make backplate material 20A to move, head is moved to the XY direction to the Y direction to directions X.

With reference to Fig. 1, a series of flow chart that constitutes from the 1st following operation～the 5th operation of being undertaken by the overall structure device is described.

1. the 1st operation is to judge that the defect kind of the fin defective part 21ab of backplate material 20A is the defect kind judgement operation that fin defect flaw 21a of portion or fin adhere to defective part 21b.

2. the 2nd operation, be the defect kind in the 1st operation, judged when being the fin defect flaw 21a of portion filling repair the mending paste filling procedure of paste 24.

3. the 3rd operation is that the paste that the repairing paste 24 to filling in the 2nd operation bakes bakes operation.

4. the 4th operation is that the regulation section that the fin that overflows paste 24a or judge in the 1st operation to the repairing paste 24 that bakes in the 3rd operation adheres to defective part 21b cuts the machine cut trimming of shaping.

5. the 5th operation is that the chip sucking that the smear metal 101a that produces when fin regulation section excess material cuts plastic operation attracts to discharge is discharged operation.

Below, the 1st operation～the 5th operation is described.

[the 1st operation]

The 1st operation is that defect kind is judged operation, and the fin defective part 21ab that 90 pairs of the fin defective observation elements of use ccd video camera etc. are positioned in the backplate material 20A on the XY worktable judges.

Ccd video camera 90 carries on Z workbench 80, and move and the focal length of fin defective part 21ab is adjusted to vertical direction relative to backplate material 20A, be that fin defect flaw 21a of portion or fin adhere to defective part 21b judges to defect kind.Focal length can manually or automatically be adjusted, and again, defect kind is judged by being used by the image processing of operator or computer.

At fin defective part 21ab is fin when adhering to defective part 21b, skips the 2nd operation and the 3rd operation and carries out the 4th operation.

[the 2nd operation]

The 2nd operation is to repair the paste filling procedure, in the occasion that is the fin defect flaw 21a of portion, uses mending paste filling body 50 to come the approaching glass paste of material composition of filling and fin defective part.

Lift-launch is positioned moving near 21d above the fin to the direction vertical with the material plane of backplate material 20A (below, be called the substrate vertical direction) on the Z workbench 40 or with the mending paste filling body 50 of its interlock.

Again, make position on the XY plane of mending paste filling body 50 consistent with the fin defect flaw 21a of portion, make workbench 40 the direction in the material plane of panel material 20A (below, be called the base plan direction) that supports or opposes move and position.

Typical example as repairing the paste filling method has following 3 kinds.

The 1st filling method is shown in Figure 6 as described later, uses filling needle 32.The paste shell 25 of mending paste filling body 50 that inject to repair paste 24 embedded filling needle 32, the repairing paste 24 that is attached on the filling syringe needle 32a is shifted to the fin defect flaw 21a of portion.

When filling syringe needle 32a contacts with the fin defect flaw 21a of portion, in order to prevent to make filling syringe needle 32a damage, and the buffer component 51 that absorbs the above power of setting is set on mending paste filling body 50 because of filling syringe needle 32a being applied power more than the setting.

Fig. 6 repairs paste 24 mending paste that the filling syringe needle 32a in the mending paste filling body 50 with buffer component 51 divides a word with a hyphen at the end of a line to the fin defect flaw 21a of the portion procedure chart of dividing a word with a hyphen at the end of a line from embedding.

This figure (A) is the procedure chart that filling syringe needle 32a does not contact with the fin defect flaw 21a of portion, this figure (B) is the procedure chart that instantaneous, buffer component 51 that filling syringe needle 32a contacts with the fin defect flaw 21a of portion also do not absorb the above power of setting, and this figure (C) is that filling syringe needle 32a contact with the fin defect flaw 21a of portion and the procedure chart of power more than the buffer component 51 absorption settings.The lower end of the paste shell 25 of this figure (B) is only than this figure (A) decline Δ L1.Again, the length of the spring of this figure (C) is only than this figure (B) compression Δ L2.

The 2nd filling method uses injector (liquor discharger) to blow attached.The aperture of outlet can be 10～150 μ m.This filling method is suitable for repairing the incomplete occasion of damaging of carrying out tight fin correction of paste etc.

The 3rd filling method is coated with plaster ointment with ink-jetting style.

[the 3rd operation]

The 3rd operation is that paste bakes operation, uses paste to bake mechanism 60 and makes the repairing paste 24 of filling dry and bake.Bake at paste and to carry not shown laser in the mechanism 60 and bake instrument, paste filling part irradiating laser is baked repair paste 24.

According to the paste width, utilize Z workbench 80 to make laser bake the range of exposures that instrument is adjusted laser up and down movably.

Whether be fit to come selected semiconductor laser, carbon dioxide laser etc. according to the number of repetition of the Wavelength of Laser of using, irradiation time, intermittent irradiation etc.

Because the absorptivity of laser is different and different according to the color of repairing paste 24, so can change the condition that bakes (power, irradiation time etc.) of laser according to color.

Can also realize repairing baking of paste 24 with warm wind generator again.Also has the method for utilizing the other insulating box of preparing that the backplate material 20 with fin is baked again.

[the 4th operation]

The 4th operation is the machine cut trimming, observes with fin defective observation element (ccd video camera) 90, and according to fixing the result that bakes who repairs paste 24, uses 70 pairs of machine cut reshaping devices to overflow paste 24a and cut shaping.Again, be described fin when adhering to defective part 21b at fin defective part 21ab, also carry out with to above-mentioned process same when overflowing paste 24a cutting shaping.

The machine cut shaping processing of the Z direction among the present invention is, carry out in the present invention: the cutting shaping processing that (1) separates 2 places of the cutting shaping processing of the fin regulation section excess material 26 of fin slot part 21e to the cutting shaping processing of the fin of 21d above fin regulation section excess material 26 (below be called above the fin process), (2) (below, be called the processing of fin slot part).

(1) processes above the fin

Processing is that fin regulation section excess material 26 to 21d above the fin cuts shaping processing above the fin.

(2) fin slot part processing

Fin slot part processing is that the fin regulation section excess material 26 to fin slot part 21e cuts shaping processing.

The machine cut shaping mode of fin regulation section excess material cutting shaping has following 4 kinds.

The 1st fin regulation section excess material cutting shaping mode, vertical axis rotary cutting sword 71 for example shown in Figure 7 is such, uses the cut instrument 75 with cutting edge to cut shaping processing.

The 2nd fin regulation section excess material cutting shaping mode for example uses the such grinding band of grinding band 85a shown in Figure 13 to cut shaping processing.

The 3rd fin regulation section excess material cutting shaping mode for example uses grinding tool shown in Figure 14 86 such grinding tools to cut shaping processing.

The 4th fin regulation section excess material cutting shaping mode for example uses the cut instrument 75 of vibration processing machine 87 shown in Figure 16 to cut shaping processing.

Here, the machine cut reshaping device 70 that uses in the machine cut trimming of the 4th operation is briefly described.So-called machine cut reshaping device 70, be have comprise to fin regulation section excess material 26 carry out cut instrument 75, the grinding tool 86 of machine cut shaping and be installed in cut instrument 75 on the vibration processing machine 87 etc. the machine cut shaping throw and keep throw and make the mechanism of the rotary driving part of its rotation.

So-called grinding tool 75, be comprise have vertical axis rotary cutting sword 71, horizontal rotational shaft cutting edge 72, above the fin regulation section excess material machining tool 73, fin slot part regulation section excess material machining tool 74 etc. the throw with cutting face and keep throw and make the meta notion of mechanism of the rotary driving part of its rotation.

So-called grinding tool 86, be comprise have grinding band 85a, the throw of the grinding face of vertical axis rotary grinding tool 86A, horizontal rotational shaft grinding tool 86B etc. and keep throw to make the meta notion of the mechanism, grinding band assembly 85 etc. of the rotary driving part of its rotation.

[the 1st fin regulation section excess material cutting shaping mode]

In the 1st fin regulation section excess material cutting shaping mode, the fin regulation section excess material 26 of 71 pairs of fin slot parts of vertical axis rotary cutting sword 21e of Fig. 7 cuts shaping processing.

Fig. 7 is to use vertical axis rotary cutting sword 71 to cut the cutting shaping course of processing figure of shaping processing.This figure (A) be have the cut instrument 75 that makes cutting edges such as slotting cutter, for example, be to make vertical axis rotary cutting sword 71 support or oppose the approaching vertical axis rotary cutting sword fin slot part in the side of fin 21 of panel material 20A near figure, this figure (B) is to use vertical axis rotary cutting sword 71 and the fin slot part 21e of backplate material 20A is carried out the vertical axis rotary cutting sword fin slot part cut figure of cut.

Fig. 8 is to use horizontal rotational shaft cutting edge 72 to cut the cutting shaping course of processing figure of shaping processing.Same with the vertical axis rotary cutting sword 71 of Fig. 7, this figure (A) makes horizontal rotational shaft cutting edge 72 support or oppose the approaching horizontal rotational shaft cutting edge fin slot part in the side of fin 21 of panel material 20A near figure, and this figure (B) is to use the fin slot part 21e of 72 pairs of backplate materials of horizontal rotational shaft cutting edge 20A to carry out the horizontal rotational shaft cutting edge fin slot part cut figure of cut.When this horizontal rotational shaft cutting edge fin slot part cut, its processing sequence is same with the order of the vertical axis rotary cutting sword fin slot part cut of Fig. 7.

Machine cut shaping such as Fig. 7 or shown in Figure 8 use vertical axis rotary cutting sword 71 or horizontal rotational shaft cutting edge 72 to carry out shaping processing.In the location of the base plan direction described in the 2nd operation is that XY worktable 40 is moved, and is that Z workbench 80 is moved in the location of the vertical direction of the substrate described in the 2nd operation.

This machine cut shaping, be to the fin width be below the 100 μ m, the fin height is the very fine processing that fin below the 200 μ m carries out the machine cut shaping, in the Z direction high-precision positioning requirements arranged also.

Only utilized Z workbench 80 to make the cutting shaping tool move the processing of carrying out 21d above the fin to necessary approach in the past.But, there is the problem of base plan degree, chuck precision etc., it is very difficult will carrying out high-precision location in the Z direction.Again, as the big Z workbench 80 of actuating force is moved and add man-hour, can apply big pushing force at the front end face of vertical axis rotary cutting sword 71, because the diameter of vertical axis rotary cutting sword 71 is very thin below 0.2mm, so vertical axis rotary cutting sword 71 might fracture.

With reference to Fig. 9 the machine cut shaping processing of Z direction of the present invention is described.Fig. 9 is that the pushing force of utilizing the lower surface 81a of incision reference feature 81 to make fin regulation section excess material upper surface 24d to 21d above the fin cut regulation section excess material machining tool 73 above the fin of shaping prevents procedure chart by the fin device for preventing breakage summary fin breakage that 21d above a plurality of fins stops dispersedly.

This figure (A) supports or opposes above the approaching cut instrument fin of the fin slot part 21d of panel material 20A near figure regulation section excess material machining tool 73 above the fin, and this figure (B) makes 21d above the fin of 73 pairs of backplate materials of regulation section excess material machining tool 20A above the fin carry out cut figure above the fin of cut.

To cut that reference feature 81 is installed on the Z workbench 80 and machine cut reshaping device 70 will be installed on the incision reference feature 81.At the front end of this machine cut reshaping device 70, mounting regulation section excess material machining tool 73 above the fin.

On make fin in the process of Z-direction position consistency of the front end face 73a of regulation section excess material machining tool 73 and the lower surface 81a of incision reference feature 81, make Z workbench 80 drop to the lower surface 81a of incision reference feature 81 and contact, and utilize above the fin mending paste 24 that 21d swells above the regulation section excess material machining tool 73 subtend fins to carry out cut with 21d above the fin.By this cutting shaping processing, make the height of 21d above the fin after the processing in full accord with the height of 21d above the fin that cuts shaping processing.

Owing to the lower surface 81a of this incision reference feature 81 is contacted with 21d above the fin, can prevent the breakage of fin so the pushing force of machine cut reshaping device 70 is stopped dispersedly by 21d above a plurality of fins.

In Fig. 9, will cut reference feature 81 and be installed in sliding freely on the Z workbench 80, at an end of this incision reference feature 81 pushing force adjusting mechanisms 82 such as utilizing spring, cylinder is installed.On incision reference feature 81, fixing machine cut reshaping device 70 again.Pushing force adjusting mechanism 82 has the pushing force adjusting mechanism 82A that utilizes cylinder, the pushing force adjusting mechanism 82B that utilizes spring etc.

Pushing force adjusting mechanism 82 shown in Figure 9 the lower surface 81a of the incision reference feature 81 that is stopped dispersedly by 21d above a plurality of fins except the pushing force that makes machine cut reshaping device 70, absorbs the above pushing force of setting of machine cut reshaping device 70.

Fin device for preventing breakage shown in Figure 9 comprises the incision reference feature 81 that is installed in the vertical direction travel mechanism 80 and machine cut reshaping device 70 is installed, be installed in regulation section excess material machining tool 73 above the fin on above-mentioned machine cut reshaping device 70 front ends, make the lower surface 81a of the incision reference feature 81 that stops dispersedly by 21d above a plurality of fins with the pushing force of regulation section excess material machining tool above the fin that fin contacts above, this pushing force adjusting mechanism 82 of the pushing force that the setting of absorption machine cut reshaping device 70 is above.

So-called above-mentioned pushing force, be meant cut for vertical direction travel mechanism (the Z workbench that moves to the Z direction) is descended shaping, cut instrument 75 front end face work in-processes are to the pushing force of fin regulation section excess material upper surface 24d pushing.

Among Figure 10 (A), the pushing force adjusting mechanism 82 of Fig. 9 is fin device for preventing breakage of the pushing force adjusting mechanism 82B that undertaken by the spring that utilizes spring to absorb the above pushing force of setting, among Figure 10 (B), the pushing force adjusting mechanism 82 of Fig. 9 is fin device for preventing breakage of the pushing force adjusting mechanism 82A that undertaken by the cylinder that utilizes cylinder to absorb the above pushing force of setting.

To be the residual setting that absorbed of the pushing force adjusting mechanism 82 (B) that will be undertaken by spring disperse the fin device for preventing breakage skeleton diagram that stops, this figure (B) with interior pushing force by 21d above a plurality of fins to this figure (A) is will utilize to play residual setting that pushing force adjusting mechanism 82 (A) that cylinder carries out absorbs and disperseed the fin device for preventing breakage skeleton diagram that stops with interior pushing force by 21d above a plurality of fins.

Figure 11 is the front end face 73a that except the pushing force adjusting mechanism 82 of Figure 10, also has a regulation section excess material cut instrument 73 on fin when contacting with fin regulation section excess material upper surface 24d, the fin device for preventing breakage skeleton diagram that absorbs the cutting tools ways pushing force adjusting mechanism 83 of the above pushing force of setting.

Cutting tools ways pushing force adjusting mechanism 83 shown in this figure, the front end face 73a of regulation section excess material machining tool 73 overflows paste 24a with 21d above the fin or when 21d contacts above the fin on fin, owing to the pushing force more than the setting is pushed pressure adjustmenting mechanism 82 and cutting tools ways pushing force adjusting mechanism 83 stops as land used simultaneously, so the increase the when effect that the fin breakage prevents compares the pushing force adjusting mechanism 82 of Figure 10 only.

Figure 12 is fin slot part organisation of working and the course of processing figure that the fin regulation section excess material 26 of fin slot part 21e is cut shaping.This figure (A) is that the fin slot part mechanism that the front end face of the fin slot part regulation section excess material machining tool 74 of fin slot part organisation of working is moved to the top of fin slot part 21e moves figure, this figure (B) is the fin slot part organisation of working hookup that contacts above of front end face and fin slot part 21e that makes the fin slot part regulation section excess material machining tool 74 of fin slot part organisation of working, and this figure (C) is the fin slot part organisation of working cutting figure that the front end face of fin slot part regulation section excess material machining tool 74 is descended to fin slot part 21e.

Machine cut reshaping device 70, but the ways 84 of the machine cut reshaping device 70 by precision positioning is installed on the incision reference feature 81.Be somebody's turn to do the fin slot part processing of (2), same with the action that processing on the fin of described (1) is illustrated, make 80 declines of Z workbench and incision reference feature 81 is contacted with 21d above the fin.Then, to cut the lower surface 81a of reference feature 81 as Z directional reference position, use the ways 84 of machine cut reshaping device 70 and make the machine cut reshaping device 70 predefined penetraction depth amount that only descends, and the paste of fin slot part 21e is cut.

[the 2nd fin regulation section excess material cutting shaping mode]

In the 2nd fin regulation section excess material cutting shaping mode, the grinding band 85a of Figure 13 cuts shaping to the fin regulation section excess material 26 of 21d above the fin.

Figure 13 is to use grinding band 85a the fin regulation section excess material 26 of 21d above the fin to be cut the grinding band cutting shaping procedure chart of shaping.This figure (A) is the grinding Tape movement figure that grinding band 85a is moved to the top of overflowing paste 24a, this figure (B) makes grinding band 85a and overflows the grinding band hookup that paste 24a contacts, and this figure (C) utilizes grinding band 85a fin regulation section excess material 26 to be cut the grinding band cutting grinding figure of grinding.

The figure shows the grinding band assembly 85 that is installed on the not shown machine cut reshaping device 70.Grinding band 85a is wound onto on the band supply spool 85b, and the grinding band 85a after the use is wound on successively to reel on the spool 85c.The band supporting member 85d that is arranged on the centre position of two spools utilizes Z workbench 80 to move, with grinding band 85a to overflowing paste 24a pushing.Then, grinding band assembly 85 is moved back and forth to the length direction of fin 21, fin regulation section excess material 26 is carried out cut.The mode of utilizing this grinding band assembly 85 to process can prevent the breach of fin 21 leading sections that work in-process produces.

Also can carry out same processing even fix, make X or Y workbench 40 to move back and forth to grinding band assembly 85 again.Because the grinding band 85a after will using is successively to take-up reel 85c coiling and carry out operation, so new grinding band 85a is contacted with fin regulation section excess material 26.

[the 3rd fin regulation section excess material cutting shaping mode]

In the 3rd fin regulation section excess material cutting shaping mode, the fin regulation section excess material 26 of 86 pairs of fin slot parts of grinding tool 21e of Figure 14 cuts shaping.

The cutting Grinding Process figure that the vertical axis rotary grinding tool that Figure 14 is to use vertical axis rotary grinding tool 86A to cut grinding is used.This figure (A) makes vertical axis rotary grinding tool 86A to the approaching figure of the approaching vertical axis rotary grinding tool fin slot part in the top, side of fin 21, and this figure (B) is by using vertical axis rotary grinding tool 86A fin slot part 21e to be carried out the vertical axis rotary grinding tool fin slot part cut figure of cut.

The cutting Grinding Process figure that the horizontal rotational shaft grinding tool that Figure 15 is to use horizontal rotational shaft grinding tool 86B to cut grinding is used.This figure (A) makes horizontal rotational shaft grinding tool 86B to the approaching figure of the approaching horizontal rotational shaft grinding tool fin slot part in the top, side of fin 21, and this figure (B) is the horizontal rotational shaft grinding tool fin slot part cut figure that fin slot part 21e is carried out cut by horizontal rotational shaft grinding tool 86B.

Again, also can cut shaping processing, not limit the direction of grinding tool 86 from tilted direction.With the processing sequence of grinding tool 86, with the occasion of aforesaid vertical axis rotary cutting sword 71 or horizontal rotational shaft cutting edge 72 be same.Generally in cutting shaping processing, when being made high speed, the peripheral speed of the contact-making surface of cut instrument can improve cutting ability (free-cutting ability), and because the cut instrument that uses in this device, especially the contact-making surface external diameter of vertical axis rotary cutting machining tool (spool diameter) is very little, so, rotating speed must be made quite high (more than tens thousand of r/min) in order to make suitable peripheral speed.Therefore, it is favourable using the mode that realizes the air shaft of high speed rotating easily in the present invention.Certainly, also can process with the axle of in the past use ball bearing.

[the 4th fin regulation section excess material machine cut shaping mode]

In the 4th fin regulation section excess material cutting shaping mode, the vibration processing machine 87 of the cut instrument 75 of Figure 16 is installed, be that the fin regulation section excess material to 21d above the fin and fin slot part 21e cuts shaping.

The 4th fin regulation section excess material cutting shaping mode is, with cut instrument 75 be installed in front end, and the vibration processing machine 87 that makes cut instrument 75 vibration at high speed carry out cut come that fin regulation section excess material 26 is cut shaping and process.Grinding tool 86 is installed on the vibration processing machine 87, utilizes vibration at high speed (reciprocating motion) that 21d above the fin or fin slot part 21e are cut shaping processing.Cut instrument 75 has vertical axis rotary cutting sword 71, horizontal rotational shaft cutting edge 72, regulation section excess material machining tool 73, grinding band 85a and grinding tool 86 etc. above the fin.

Figure 16 installs cut instrument 75 and utilizes vibration at high speed (reciprocating motion) the fin regulation section excess material 26 of 21d above the fin and fin slot part 21e to be cut the vibrocutting shaping processing sketch of shaping processing.The processing sequence of cut instrument 75 (moving method of instrument), the occasion of processing above with the fin of aforementioned (1) is identical.

[the 5th operation]

The 5th operation is that chip sucking is discharged operation, and the smear metal 101a that the suction device of use chip-repelling mechanism 100 produces when fin regulation section excess material is cut plastic operation attracts to discharge.

Figure 17 is the chip sucking discharge process figure that is attracted and discharged from smear metal outlet 103 by the smear metal 101a that 102 pairs of the negative pressure generators of chip-repelling mechanism 100 produce when the fin regulation section excess material cutting plastic operation.This figure (A) is to use the negative pressure generator 102 of chip-repelling mechanism 100 to attract the chip sucking procedure chart of smear metal 101a, and this figure (B) is the smear metal discharge process figure that discharges the smear metal 101a that attracts from smear metal outlet 103.

For the attraction of smear metal 101a, use negative pressure generator 102.The smear metal 101a that is attracted discharges to the outside by flexible pipe etc. from the smear metal outlet 103 that is connected with negative pressure generator 102.Therefore, panel material 20A goes up just not residual fin and the smear metal 101a that repairs paste 24 overleaf.

Current example and the embodiment that discloses is illustration and unrestricted aspect all.Scope of the present invention is not according to the above description, but according to the scope of claim and comprise the meaning suitable with the claim scope and all changes in the scope.

Claims

1, a kind of minute graphics defect correcting device of planar substrates, after being provided with the minute graphics defect portion filling repairing paste on the planar substrates of Micropicture and baking, the unnecessary Micropicture regulation section excess material that regulation section from described Micropicture is overflowed carries out shaping processing, it is characterized in that having:

The mending paste filling body of the described repairing paste of filling;

The paste that make described repairing paste drying, bakes bakes mechanism;

The machine cut reshaping device that described Micropicture regulation section excess material is carried out the machine cut shaping;

To the vertical direction travel mechanism that the direction vertical with described planar substrates moves; And

Make to be equipped with the horizontal direction detent mechanism that head that described mending paste filling body, described paste bake mechanism and described machine cut reshaping device and described planar substrates relatively move and position to the in-plane parallel with described planar substrates,

Each mechanism and the described vertical direction travel mechanism interlock of lift-launch on described head,

Described vertical direction travel mechanism comprises the incision reference feature that described machine cut reshaping device is installed,

Described machine cut reshaping device comprises regulation section excess material machining tool above the Micropicture,

With the pushing force of regulation section excess material machining tool above the described Micropicture that described Micropicture contacts the above lower surface by described incision reference feature by stopping dispersedly above a plurality of described Micropictures.

2, a kind of minute graphics defect correcting device of planar substrates, after being provided with the minute graphics defect portion filling repairing paste on the planar substrates of Micropicture and baking, the unnecessary Micropicture regulation section excess material that regulation section from described Micropicture is overflowed carries out shaping processing, it is characterized in that having:

The mending paste filling body of the described repairing paste of filling;

The paste that make described repairing paste drying, bakes bakes mechanism;

The chip-repelling mechanism that the smear metal that will produce when Micropicture regulation section excess material cutting shaping is discharged;

Observe the minute graphics defect observation element of described minute graphics defect portion;

Make and be equipped with the horizontal direction detent mechanism that head that described mending paste filling body, described paste bake mechanism, described machine cut reshaping device, described chip-repelling mechanism and described minute graphics defect observation element and described planar substrates relatively move and position to the in-plane parallel with described planar substrates

3, as the minute graphics defect correcting device of claim 1 or the described planar substrates of claim 2, it is characterized in that, described horizontal direction detent mechanism bakes mechanism with described mending paste filling body, described paste and positions with described machine cut reshaping device relative described planar substrates in the plane parallel with described planar substrates

Described vertical direction travel mechanism is positioned at described machine cut shaping organisation of working on the direction vertical with described planar substrates.

4, as the minute graphics defect correcting device of claim 1 or the described planar substrates of claim 2, it is characterized in that also having the pushing force adjusting mechanism of the pushing force more than the setting that absorbs described machine cut reshaping device.

5, the minute graphics defect correcting device of planar substrates as claimed in claim 4 is characterized in that also having:

The ways of the machine cut reshaping device that on described incision reference feature, slides; And

Absorb the pushing force adjusting mechanism of the cutting tools ways of the above pushing force of the setting of regulation section excess material machining tool front end face above the described Micropicture.

As the minute graphics defect correcting device of claim 1 or the described planar substrates of claim 2, it is characterized in that 6, described machine cut reshaping device has grinding band assembly,

Described grinding band assembly comprises: the grinding band that adheres to sand grains from the teeth outwards; The supply spool of the described grinding band before keeping using; The take-up reel of the described grinding band after coiling uses; And be positioned at the centre of described supply spool and described take-up reel and push the band supporting member of described grinding band,

Described grinding band assembly makes described grinding take to reciprocating cutter and cuts shaping to overflowing paste.

7, as the minute graphics defect correcting device of claim 1 or the described planar substrates of claim 2, it is characterized in that, described machine cut reshaping device is the vibration processing machine with cut instrument, and described vibration processing machine makes described cut instrument vibration and cuts shaping to overflowing paste.

8, as the minute graphics defect correcting device of claim 1 or the described planar substrates of claim 2, it is characterized in that also having the smear metal that cutting is produced during shaping and attract the negative pressure generator and the smear metal outlet of discharging.

As the minute graphics defect correcting device of claim 1 or the described planar substrates of claim 2, it is characterized in that 9, described machine cut reshaping device comprises throw and described throw of maintenance with cutting edge and the rotary driving part that makes its rotation,

Make described cutting edge and Micropicture adhere to defective part or overflow paste and contact and remove defective.

As the minute graphics defect correcting device of claim 1 or the described planar substrates of claim 2, it is characterized in that 10, described machine cut reshaping device comprises throw and described throw of maintenance with grinding face and the rotary driving part that makes its rotation,

The grinding face that makes described throw and Micropicture form material and adhere to defective part or overflow paste and contact and remove defective.