CN100508352C - Rod shaped piezoelectric ceramic micro motor capable of axial output force moment - Google Patents

Rod shaped piezoelectric ceramic micro motor capable of axial output force moment Download PDF

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CN100508352C
CN100508352C CNB031461603A CN03146160A CN100508352C CN 100508352 C CN100508352 C CN 100508352C CN B031461603 A CNB031461603 A CN B031461603A CN 03146160 A CN03146160 A CN 03146160A CN 100508352 C CN100508352 C CN 100508352C
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piezoelectric ceramic
micro motor
stator
output shaft
rotor disk
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CN1514534A (en
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李龙土
阎立
褚祥诚
董蜀湘
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Tsinghua University
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Tsinghua University
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Abstract

Shape of the invented motor and stator in divided into two structures: U type and X type. Motor in both types is composed of round bar of piezoelectric ceramics, stator, rotor and tension spring. Based on bending resonant mode of bar type ceramics, method for actuating the invented motor includes method of doublet electrode and method of four electrodes. The method of doublet electrode utilizes D33 value of ceramics, and the method of four electrodes utilizes D31 value of ceramics. Round bar of ceramics as actuating element is adopted in both of two structures of invented micro motor. Output torque of shaft in both of two structures is based on bending resonant mode. The invented motor provides features of simple structure and low cost.

Description

Rod shaped piezoelectric ceramic micro motor capable of axial output force moment
Technical field
The invention belongs to accurate mechanical ﹠ electrical technology scope, particularly a kind of rod shaped piezoelectric ceramic micro motor capable of axial output force moment and the motivational techniques thereof that encourage based on crooked syntony mode.
Background technology
<Japanese Journal of Applied Physics, Part1〉proposed a kind of in the volume 5B volume 3347-3350 page or leaf in 1999 years the 38th by Morita, the piezoelectricity tubular piezoelectric ceramic micro motor of the diameter 2.4mm that Takeshi designs and produces, be each equally distributed four electrode in the outside at tubular piezoelectric ceramic two ends, there is interior electrode the earthenware inboard.Two rotors pass the mesopore of tubular piezoelectric ceramic by connecting axle, by being enclosed within the two ends that tension spring on connecting axle one end and nut are fixed on the tubular piezoelectric ceramic.During polarization, four outer electrodes connect positive voltage, and interior electrode grounding line radially polarizes piezoelectric ceramic; During driving, four electrodes connect the sinusoidal signal of phase difference 90 degree respectively, and under suitable drive signal, the earthenware end face forms capable ripple, produce moment, and earthenware is done flexural vibrations, because the pretightning force effect of spring, earthenware drives four rotor rotation.
The China national number of patent application be 01109049.9 by name<based on the flexural vibrating ultrasound ripple electrical micro-machine and the combination of electrodes motivational techniques of piezo column patent mention a kind of stick miniaturized motor: this micro motor is formed by the rotor/axle of stator, output torque and to the pre-pressure mechanism that rotor pressurizes, stator mainly is made of the piezo column and the match block of excited vibration, and this piezo column outer wall scribbles four equally distributed polarization and used external electrodes of excited vibration of supplying.
Summary of the invention
The object of the present invention is to provide a kind of rod shaped piezoelectric ceramic micro motor capable of axial output force moment and motivational techniques thereof based on the excitation of crooked syntony mode.It is characterized in that: described pole shape piezoelectric ceramic micro motor comprises U type micro motor or two kinds of structures of X type micro motor, and two kinds of structure divisions are as follows:
1) U type micro motor is at the upper surface of piezoelectric ceramic pole 6 bonding U type stator 5, rotor drum 4 is enclosed within on stator 5 cylindricals, the following periphery of rotor drum 4 inner faces becomes the inclined plane to contact with the last periphery of stator 5 cylindricals, rotor disk 3 is connected in rotor drum 4 upper port, rotor disk 3 and output shaft 1 card connection, the built-in spring 2 that is pressed on output shaft 1 and the rotor disk 3 constitutes pretightning force mechanism;
2) X type micro motor is shell 7 and loam cake 8 bondings, and the bearing 9 in loam cake 8 blocks the rotor disk 3 with polytetrafluoroethylene system, rotor disk 3 and output shaft 1 card connection, and the built-in spring 2 that is pressed on output shaft 1 and the rotor disk 3 constitutes pretightning force mechanism; Output shaft 1 lower end is inserted in X-shaped stator 5 centre bores and is located simultaneously, and output shaft 1 is independent of each other pretightning force and output torque by loam cake 8 location; X-shaped stator 5 and piezoelectric ceramic pole 6 is fixing, and piezoelectric ceramic pole 6 lower surfaces contact with steel ball 10 rollings in shell 7 bottoms, and rubber ring 11 is fixed on the vibration nodal point of piezoelectric ceramic pole 6, not only plays fixation but also do not influence vibration.
The way of contact of described output shaft 1 and stator 5 has cone angle contact, ball contact, bearing contact and polytetrafluoroethylene loop contacts.
Two kinds of structures that the invention has the beneficial effects as follows micro motor all are to utilize bar-shaped pottery to do exciting element, and the axle output torque all is based on beam mode.Simple in structure, with low cost.
Description of drawings
Fig. 1 is the bar-shaped piezoelectric ceramic micro-motor structure of a U type schematic diagram.
Fig. 2 (a) and (b), (c), (d) are four kinds of way of contact schematic diagrames of output shaft and U type stator among Fig. 1
Fig. 3 is the bar-shaped piezoelectric ceramic micro-motor structure of an X type schematic diagram.
Embodiment
The present invention is a kind of rod shaped piezoelectric ceramic micro motor capable of axial output force moment
Described pole shape piezoelectric ceramic micro motor includes two kinds of structures:
1) U type micro motor is at the upper surface of piezoelectric ceramic pole 6 bonding U type stator 5, rotor drum 4 is enclosed within on stator 5 cylindricals, rotor drum 4 contacts with the following one-tenth inclined plane of stator 5 cylindricals, rotor disk 3 connects and fixes together with rotor drum 4, rotor disk 3 and output shaft 1 card connection, the built-in spring 2 that is pressed on output shaft 1 and the rotor disk 3 constitutes pretightning force mechanism.The way of contact of this U type micro motor output shaft 1 and stator 5 has cone angle contact, ball contact, bearing contact and polytetrafluoroethylene loop contacts (as shown in Figure 1 and Figure 2).
2) X type micro motor is shell 7 and loam cake 8 bondings, and the bearing 9 in loam cake 8 blocks the rotor disk 3 with polytetrafluoroethylene system, rotor disk 3 and output shaft 1 card connection, and the built-in spring 2 that is pressed on output shaft 1 and the rotor disk 3 constitutes pretightning force mechanism; Output shaft 1 lower end is inserted in X-shaped stator 5 centre bores and is located simultaneously, and output shaft 1 is independent of each other pretightning force and output torque by loam cake 7 location; X-shaped stator 5 and piezoelectric ceramic pole 6 is fixing, and piezoelectric ceramic pole 6 lower surfaces contact with steel ball 10 rollings in shell 7 bottoms, and rubber ring 11 is fixed on the vibration nodal point of piezoelectric ceramic pole 6, not only plays fixation but also do not influence vibration (as shown in Figure 3).
The motivational techniques of pole shape piezoelectric ceramic micro motor of the present invention are based on the crooked syntony mode excitation of bar-shaped piezoelectric ceramic, and two kinds of energisation modes are arranged:
1) utilizes ceramic D 33Value excitation piezoelectric ceramic rod crooked syntony mode couple electrode method:
Before distribution of electrodes, polarization mode and energisation mode that couple electrode method is discussed.With dull and stereotyped single order mode of flexural vibration is that example is illustrated.As shown in Figure 4, pair of electrodes respectively distributes dull and stereotyped both sides, and electrode is polarized along its length, then in the just in time opposite sinusoidal signal of the two sides of flat board input two-way, be phase difference 180 degree, cause dull and stereotyped top and bottom internal stress direction opposite, produce the first rank crooked syntony mode on the macroscopic view.
Couple electrode method in the lip-deep distribution of electrodes of piezoelectric ceramic rod shown in Fig. 5 (a) and (b).Along circumference each distribute symmetrically four electrode A 1, B1, C1, D1 and A2, B2, C2, D2, polarised direction is along its length at the piezoelectric ceramic two ends.We can be divided into a so bar-shaped piezoelectric ceramic orthogonal two parts, and according to the flexural vibrations principle of top flat board, each group electrode can be made the first rank crooked syntony by drive pressure electroceramics rod.If just two groups of pumping signal phase difference 90 degree are can be in the end pumping row ripple of piezoelectric ceramic rod, output torque.In fact, this scheme is not necessarily leaveed no choice but four pairs of electrodes, three pairs, four pairs, five pairs ... N is to all right, but the phase difference of the excitation sinusoidal signal of corresponding every pair of electrode just should be the 360/N degree.Therefore we with this energisation mode couple electrode method.Adopt above-mentioned couple electrode method or four electrode method excitation micro motor stator, it can be worked under the 2 rank crooked syntony mode in the past.
This scheme is utilized the D of pottery 33Value encourages the flexural deformation of piezoelectric ceramic rod, and promptly the driving voltage direction is identical with polarised direction, and also identical with piezoelectric ceramic rod deformation direction.
2) utilize ceramic D 31Value excitation piezoelectric ceramic rod crooked syntony mode four electrode method:
The distribution of electrodes of four electrode method is shown in Fig. 6 (a) and (b), at piezoelectric ceramic rod circumference even distribute four electrode A, B, C and D.During polarization, A, C connect positive pole, B, D earth connection.So just be divided into α, β, γ and four districts of δ during the pottery polarization.It is identical with polarised direction that each distinguishes the electricdomain direction, the change 0 in α district is discussed earlier changed, and the electricdomain direction is pointed to B by A.If V A-BBe positive voltage, promptly the polarised direction with the α district is identical, and then α district piezoelectric ceramic vertically shrinks along rod.Otherwise, if V A-BBe negative voltage, then α district piezoelectric ceramic is along the bar longitudinal tensile strain.Analyze with this, four electrodes of piezoelectric ceramic rod are according to four road signals of telecommunication power supply of table 1, and one-period divides four motion sections to discuss.In 0 ~ 1/4 λ, because the β section length increases, the δ section length reduces, therefore ceramic rod is under the acting in conjunction of these two kinds of vibrations, and bending backward is in the one-period, table 2 is depicted as the piezoelectric ceramic rod bending direction in each stage, in the one-period four-stage, piezoelectric ceramic rod top can form a capable ripple, successfully motivates the first rank flexural vibration mode of piezoelectric ceramic rod.
The power supply signal of each electrode of table 1
Figure C03146160D00061
The motion of table 2 piezoelectric ceramic rod
Figure C03146160D00062
This scheme is utilized the D of pottery 31Value encourages the flexural deformation of piezoelectric ceramic rod, and promptly the driving voltage direction is identical with polarised direction, and vertical mutually with deformation direction.
Two kinds of schemes are done a comparison: the deflection of couple electrode method excitation piezoelectric ceramic rod is big, and the moment of motor is big, but complex process increases cost.Four pairs of electrode method technologies are simple, and reliability is big, but antithesis is little to the deflection of electrode method piezoelectric ceramic rod.Different needs at the client should be in different ways.

Claims (2)

1. rod shaped piezoelectric ceramic micro motor capable of axial output force moment, it is characterized in that: described pole shape piezoelectric ceramic micro motor comprises U type micro motor or two kinds of structures of X type micro motor, and two kinds of structure divisions are as follows:
1) U type micro motor is at the upper surface of piezoelectric ceramic pole (6) bonding U type stator (5), rotor drum (4) is enclosed within on stator (5) cylindrical, the following periphery of rotor drum (4) inner face becomes the inclined plane to contact with the last periphery of stator (5) cylindrical, rotor disk (3) is connected in rotor drum (4) upper port, rotor disk (3) and output shaft (1) card connection, the built-in spring (2) that is pressed on output shaft (1) and the rotor disk (3) constitutes pretightning force mechanism;
2) X type micro motor is shell (7) and loam cake (8) bonding, bearing (9) in loam cake (8) blocks the rotor disk (3) with polytetrafluoroethylene system, rotor disk (3) and output shaft (1) card connection, the built-in spring (2) that is pressed on output shaft (1) and the rotor disk (3) constitutes pretightning force mechanism; Output shaft (1) lower end is inserted in X-shaped stator (5) centre bore and is located simultaneously, and output shaft (1) is independent of each other pretightning force and output torque by loam cake (8) location; X-shaped stator (5) and piezoelectric ceramic pole (6) are fixing, piezoelectric ceramic pole (6) lower surface contacts with rolling at the steel ball (10) of shell (7) bottom, rubber ring (11) is fixed on the vibration nodal point of piezoelectric ceramic pole (6), not only plays fixation but also do not influence vibration.
2. according to the described rod shaped piezoelectric ceramic micro motor capable of axial output force moment of claim 1, it is characterized in that: the way of contact of described output shaft (1) and stator (5) has cone angle contact, ball contact, bearing contact and polytetrafluoroethylene loop contacts.
CNB031461603A 2003-07-25 2003-07-25 Rod shaped piezoelectric ceramic micro motor capable of axial output force moment Expired - Fee Related CN100508352C (en)

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CN103051243B (en) * 2013-01-11 2015-01-28 南京航空航天大学 Hollow ultrasonic motor with built-in vibrating ring
CN103710494B (en) * 2013-12-30 2016-04-27 江苏大学 A kind of based on hyperacoustic reinforcement method for small hole and device
CN107196439B (en) * 2017-05-10 2019-09-27 哈尔滨工程大学 A kind of microwave-driven micro motor based on MEMS technology
CN108518439B (en) * 2018-03-08 2019-09-27 东北大学 A kind of adjustable bump leveller of rotor-support-foundation system adjusted with piezoelectric ceramics

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