CN103281005A - Macro and micro-driving type linear piezoelectric motor and driving method thereof - Google Patents
Macro and micro-driving type linear piezoelectric motor and driving method thereof Download PDFInfo
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- CN103281005A CN103281005A CN2013101750848A CN201310175084A CN103281005A CN 103281005 A CN103281005 A CN 103281005A CN 2013101750848 A CN2013101750848 A CN 2013101750848A CN 201310175084 A CN201310175084 A CN 201310175084A CN 103281005 A CN103281005 A CN 103281005A
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Abstract
The invention discloses a macro and micro-driving type linear piezoelectric motor and a driving method thereof, and relates to the field of the ultrasonic motor and micro driving. The motor comprises a rack, a driving vibrator, an active cell and a pre-tightening mechanism, wherein the driving vibrator comprises a metallic elastomer, a micrometric displacement amplification elastomer and a piezoelectric element; the two symmetrical convex teeth on the inner side of the micrometric displacement amplification elastomer are in frictional contact with the active cell; and the piezoelectric element is polarized along the thickness direction. The motor macro driving method is characterized in that two longitudinal standing waves of which the phase difference is 90 degrees, the frequencies are closed, and the type are the same are stimulated by the vibrator under the action of the alternating current of which the phase difference is 90 degrees; after the standing waves are combined, an elliptic movement locus is formed on the convex tooth part; and under the pre-tightening force action, the active cell generates the macro linear movement. According to the micro-driving method, direct-current high voltage is applied to the piezoelectric element, the vibrator generates static deformation, and the two symmetrical convex teeth on the inner side of the micrometric displacement amplification elastomer clamp the active cell and the micro linear movement is generated. According to the invention, the macro driving and the micro driving are simultaneously realized on one motor, and the invention has the characteristics of simple structure and reliability in working.
Description
Technical field
The present invention relates to the motor research field, particularly a kind of grand little driving linear piezoelectric motor and driving method thereof.
Background technology
Along with the quick progress of IC manufacturing process and the market eager demand to micro chip, chip integration increases day by day, I/O density is more and more higher, chip size, chip lead spacing and pad diameter continue to reduce, and the positioning accuracy and movement velocity, the acceleration that develop rapidly sealed in unit of chip packaging industry have proposed high requirement simultaneously.Yet, the raising of positioning accuracy and movement velocity is conflicting, movement velocity, acceleration improve, make mechanism inertia force increase, the frequency that inertia force changes also strengthens thereupon, and system is easy to produce strain and oscillation phenomenon, both destroyed the motion of mechanism precision, increase the settling time of mechanically stable, influence the fatigue strength of member again, the wearing and tearing in the aggravation kinematic pair.Hi-Fix wishes that mechanism kinematic is mild, and high production rate is wished system high-speed reciprocating motion and high speed start and stop, and namely big stroke and high accuracy are conflicting.How to solve these contradictions preferably, realize that the precision positioning of big stroke, high speed machine kinematic system has become the problem demanding prompt solution in current chip encapsulation circle.
Piezoelectric Ceramic is little because of its volume, displacement resolution is high, response speed is fast, power output is big, the conversion efficiency advantages of higher, more satisfactory driving element when becoming precision positioning, but its stroke has only tens of microns, so its range of application is restricted.
The concept of existing grand little driving in the prior art namely on a motor, realize that simultaneously large travel high-speed moves with high-resolution accurate mobile, but this concept can not realize accurately in actual applications still at present.
Summary of the invention
Main purpose of the present invention is to overcome the shortcoming of prior art with not enough, a kind of grand little driving linear piezoelectric motor is provided, this electric machine structure is simple, compact, reliable operation, this motor can be in the ultrasound-driven that realizes under different driving frequencies, operating voltage and the phase difference under the oscillator vibration mode, also can realize little driving (wriggling) of static deformation by micro displacement magnifying mechanism, on same motor, the realization large travel high-speed moves with high-resolution low speed and moves i.e. so-called grand little driving.
Another object of the present invention is to provide a kind of driving method based on above-mentioned grand little driving linear piezoelectric motor.
Purpose of the present invention realizes by following technical scheme: a kind of grand little driving linear piezoelectric motor, comprise frame, drive vibrator, mover, and be used for locking frame, drive vibrator, mover and regulate the pre-tightening mechanism of pretightning force, described frame two ends are provided with bearing, and mover passes two bearings and drive vibrator; Described drive vibrator comprises piezoelectric element, two centre metallic elastic body and centre micrometric displacements with holes with holes amplify elastomer, two metallic elastic bodies amplify elastomeric two ends with micrometric displacement respectively and are connected, micrometric displacement amplifies elasticity body opening middle inside and is provided with double wedge, double wedge is connected with mover CONTACT WITH FRICTION in the driving process, micrometric displacement amplifies the elastomer two ends and is provided with for the groove of placing piezoelectric element, every end is placed 2M piezoelectric ceramic plate, M 〉=1, each piezoelectric ceramic plate all polarizes along thickness direction, per two piezoelectric ceramic plate polarity are fitted into one group on the contrary mutually, in groups in the symmetrical groove that is placed on the micrometric displacement amplification elastomer two ends, the both sides of each piezoelectric ceramic plate are provided with the sheet metal as binding post, the common contact area territory was the power supply signal input in every group piezoelectric ceramic contact-making surface was namely organized, and the non-common contact area of every group piezoelectric ceramic territory is the power supply signal input ground end.The core component of piezoelectric motor of the present invention is compound drive vibrator, this drive vibrator is to amplify the elastomer tandem compound by two metallic elastic bodies by micrometric displacement to form, this oscillator is to motivate the standing wave that two nearly frequencies, homotype, phase differences are the extensional vibrations of 90 degree under the 90 alternating current effects of spending respectively at phase difference, after two standing waves are synthetic, form the track of elliptic motion at the double wedge place, by regulating the pretightning force between drive vibrator and the mover, and then can make mover under the effect of pretightning force, rely on frictional drive to produce required rectilinear motion.Thereby can realize that large travel high-speed moves at mover, under the effect of piezoelectric element, can also realize that the precision of little stroke moves, i.e. so-called grand little driving simultaneously.
Preferably, described piezoelectric ceramic plate is piezoelectric ceramic disk or regular polygon piezoelectric ceramic plate.
Preferably, the double wedge that described micrometric displacement amplification elasticity body opening middle inside is provided with is laterally zygomorphic V-arrangement double wedge, or parabola shaped double wedge, or the circular arc double wedge.
As preferred version, described metallic elastic body and micrometric displacement amplify the elastomer outside and are provided with boss, produce radial displacement for preventing that the vibration of micrometric displacement amplification elastomer from causing between micrometric displacement amplification elastomer and the binding post by friction, porose in the boss, the metallic elastic body amplifies elastomer with micrometric displacement and is connected by fastening bolt.When assembling, metallic elastic body and micrometric displacement amplification elastomer can be linked together tightly by regulating fastening bolt, this kind structure is suitable for bearing higher driving voltage.
As another kind of preferred version, the external side of described metallic elastic is prism structure, outer surface is provided with external screw thread simultaneously, micrometric displacement amplifies elastomer and is provided with internal thread, internal thread is provided be used to making and draws micrometric displacement and amplify elastomeric breach, and the metallic elastic body amplifies elastomer with micrometric displacement and is connected by threaded engagement.This kind structure is suitable for the application scenario of low thrust.In actual applications, hexagon, pentagon, quadrilateral prism can be selected in the external side of metallic elastic, even only cut two planes on the surface also passable, is used as the spanner position, are convenient to spanner like this and regulate elasticity.
As another kind of preferred version, the external side of described metallic elastic is prism structure, and inner surface is provided with internal thread simultaneously, and micrometric displacement amplifies elastomer and is provided with external screw thread, the two connects by threaded engagement, is provided with the hole of drawing be used to making in the non-threaded position of metallic elastic body.This kind structure both had been convenient to the staff and has regulated micrometric displacement and amplify elasticity between elastomer and the metallic elastic body, can improve the performance of piezoelectric motor again.
Further, in the above-mentioned three types fixed structure, it is assembly or circular cone and cylinder assembly or pyramid and prismatic assembly hollow, shaped face cylinder and cylinder that described micrometric displacement amplifies elastomer.
As preferably, when micrometric displacement amplification elastomer is connected by threaded engagement with the metallic elastic body, for making things convenient for the assembling of drive vibrator, and piezoelectric element is compressed, micrometric displacement amplifies elastomer to cut out two planes parallel with axis along the axis direction symmetry is the spanner position in the described drive vibrator.
As preferably, also be provided with rubber washer between described metallic elastic body and the micrometric displacement amplification elastomer.By the strain of rubber washer, not only play the effect of adjusting pretightning force, also play the effect of vibration isolation simultaneously.
Preferably, described mover is cylinder guide rod or prismatic guide rod.
Preferably, the material of described sheet metal as binding post is red copper.
Preferably, the set bearing in described frame two ends is rolling linear ball bearing or sliding bearing.Adopt this two class bearing can limit the radial displacement of mover, make mover rectilinear motion vertically.
A kind of driving method based on above-mentioned grand little driving linear piezoelectric motor, this motor comprises mover and drive vibrator, this driving method comprises grand driving and little driving, grand driving refers to: according to the position of piezoelectric element in drive vibrator, drive vibrator is to motivate two nearly frequencies under the 90 alternating current effects of spending respectively at phase difference, homotype, phase difference is the standing wave of the extensional vibration of 90 degree, after two standing waves are synthetic, form oval micron order movement locus at the double wedge place, under the pretightning force effect that pre-tightening mechanism produces, double wedge relies on and the friction of mover makes mover carry out the high-speed straight-line motion of big stroke; Little driving refers to: piezoelectric element is applied the dc high voltage excitation, make oscillator produce quiet distortion along the column axis direction, amplify the Precision Linear Moving of two double wedge clamping mover generation micro-strokes up and down of elastomer inboard then by micrometric displacement.
Grand driving operation principle of the present invention is as follows: drive vibrator of the present invention is subjected to ultrasonic action, gets symmetric vibration mode and the antisymmetric vibration mode of its two extensional vibration.When left and right piezoelectric ceramic plate feeds the in-phase voltage pumping signal simultaneously, about two oscillators stretch simultaneously and compress, for double wedge and mover contact area provide radially opening and closing active force, make oscillator that displacement in the radial direction be arranged, this symmetrical longitudinal mode is called symmetric vibration mode; When left and right sides piezoelectric ceramic feeds the out-of-phase voltage pumping signal simultaneously, two oscillators stretch on one side then, compression on one side, for double wedge and mover contact area provide the intermittent axial direction active force that changes direction, make its oscillator that displacement on the axial direction be arranged, change the axial displacement direction by changing voltage signal, this asymmetrical longitudinal mode is called antisymmetric vibration mode.Displacement on the both direction forms elliptical orbit at double wedge and mover contact area, does rectilinear motion thereby drive mover.Through drive vibrator various piece size finite element simulation is calculated and design, make the resonance frequency of above-mentioned two kinds of mode of oscillations reach unanimity, this two kinds of mode in order to can use same frequency to swash.
Little driving operation principle of the present invention is as follows: the piezoelectric element of drive vibrator of the present invention can produce nano level little distortion in axial direction when being subjected to the dc high voltage excitation.Double wedge in the drive vibrator is passed to mover by rubbing action with deflection.By the wiring difference, can change the direction of the little distortion of drive vibrator.Calculate as can be known through theoretical, deflection and voltage are linear.
The present invention compared with prior art has following advantage and beneficial effect:
1, the present invention proposes to increase a drive vibrator on the basis of linear piezoelectric motor, this drive vibrator is to amplify the elastomer combination by piezoelectric element, two metallic elastic bodies and micrometric displacement to form, by piezoelectric element is imposed dc high voltage, can drive mover does high-resolution low speed and moves, add motor self and can carry out large travel high-speed and move, therefore namely realized grand little driving.
2, the piezoelectric element among the present invention only needs polarization vertically, does not need subregion in the face, has simplified the processing technology of piezoelectric element greatly.
3, motor stator structure of the present invention is simply compact, and piezoelectric element and metallic elastic body do not need bonding, amplifies by metallic elastic body and micrometric displacement that elastomer is fastening get final product, processes simply, is easy to suitability for industrialized production, and cost is low.
4, the invention provides 3 kinds of metallic elastic bodies and micrometric displacement and amplify elastomeric fastening means, can also adopt different fastening means to the piezoelectric ceramic disk according to different application in actual applications, obtain suitable preload pressure, applicable situation is extensive.
5, the inventive method is under phase difference is the alternating current effects of 90 degree oscillator to be motivated the standing wave that two near frequencies, homotype, phase differences are 90 extensional vibrations of spending respectively, wherein relate to two kinds of mode of oscillations, change metallic elastic body and micrometric displacement and amplify the elastomer dimensions length and makes two resonance frequencys coordinate, for design and the debugging of motor brings great convenience.
Description of drawings
Fig. 1 is the main cutaway view of the embodiment of the invention 1 device;
Fig. 2 is the main cutaway view of drive vibrator in the embodiment of the invention 1;
Fig. 3 is A-A cross-section cutaway view among Fig. 2;
Fig. 4 is the vertical view of drive vibrator in the embodiment of the invention 1;
Fig. 5 is the operation principle view of drive vibrator in the embodiment of the invention 1;
Fig. 6 is the main cutaway view of drive vibrator in the embodiment of the invention 2;
Fig. 7 is A-A cross-section cutaway view among Fig. 6;
Fig. 8 is the vertical view of drive vibrator in the embodiment of the invention 2;
Fig. 9 is the main cutaway view of drive vibrator in the embodiment of the invention 3;
Figure 10 is A-A cross-section cutaway view among Fig. 9;
Figure 11 is the vertical view of drive vibrator in the embodiment of the invention 3.
Wherein: 1-mover; 2-fastening bolt; 3-circlip; 4-rolling linear ball bearing; 5-metallic elastic body; 6-piezoelectric element; 7-micrometric displacement amplifies elastomer; 8-binding post; 9-rubber washer; 10-housing cap; 11-frame plate; 12-double wedge; 13-plain washer; 14-cylindrical spring; 15-clamp nut.
Embodiment
The present invention is described in further detail below in conjunction with embodiment and accompanying drawing, but embodiments of the present invention are not limited thereto.
Embodiment 1
As shown in Figure 1, a kind of grand little driving linear piezoelectric motor, comprise frame, drive vibrator, mover 1, and be used for locking frame, drive vibrator, mover 1 and regulate the pre-tightening mechanism of pretightning force, the present embodiment mid frame comprises frame plate 11, housing cap 10, and pre-tightening mechanism comprises fastening bolt 2, rubber washer 9, plain washer 13, cylindrical spring 14 and clamp nut 15 etc.Pre-tightening mechanism passes through to change the feeding depth of fastening bolt 2 and the strain of rubber washer 9, thereby gives the certain pretightning force of motor stator.Described frame two ends are provided with rolling linear ball bearing 4, be provided with circlip 3 between bearing 4 and the housing cap 10, mover 1 is permanent radius cylinder guide rod, mover 1 passes the hole in the middle of two bearings and the drive vibrator, by the guide effect of both sides rolling linear ball bearing, make mover 1 do axial linear movement.Simultaneously, frame plate 11 and housing cap 10 surround two cylinder disjunctor oscillators, in order to avoid be subjected to the influence that dust in the air, steam make moist etc., change motor properties.
Drive vibrator in the present embodiment is shown in Fig. 2,3,4, this drive vibrator comprises that piezoelectric element 6, two centre metallic elastic body 5 and centre micrometric displacements with holes with holes amplify elastomer 7, micrometric displacement amplifies elasticity body opening 7 middle inside and is provided with double wedge 12, double wedge 12 and mover 1 CONTACT WITH FRICTION in the driving process, the two contact area is the drive area, and micrometric displacement amplifies elastomer 7 two ends and is provided with for the groove of placing piezoelectric element.Piezoelectric element 6 in the present embodiment is piezoelectric ceramic plate, during use, each piezoelectric ceramic plate all polarizes along thickness direction, per two piezoelectric ceramic plate polarity are fitted into one group on the contrary mutually, in groups in the symmetrical groove that is placed on the micrometric displacement amplification elastomer two ends, the piezoelectric ceramic disc set number at two ends equates that the both sides of each piezoelectric ceramic plate are provided with the sheet metal 8 as binding post, and this sheet metal adopts the red copper material.The common contact area territory was the power supply signal input in every group piezoelectric ceramic contact-making surface was namely organized, and the non-common contact area of every group piezoelectric ceramic territory is the power supply signal input ground end.
In actual applications, described micrometric displacement amplifies the double wedge 12 that elasticity body opening 7 middle inside are provided with can be laterally zygomorphic V-arrangement double wedge, or parabola shaped double wedge, or the circular arc double wedge, in the present embodiment, employing be the circular arc double wedge.It is the cylinder of the change diameter of hollow that micrometric displacement amplifies elastomer endoporus both sides.The assembling of drive vibrator is for convenience simultaneously amplified elastomer to micrometric displacement and is cut along axis direction, and symmetry cuts out two planes parallel with axis as the spanner position.In application, can also cut the metallic elastic body as required.
By Fig. 2,4 as can be known, the metallic elastic body inner surface in the drive vibrator is provided with internal thread, and micrometric displacement amplifies elastomer and is provided with external screw thread, and the two connects by threaded engagement, is provided with the hole of drawing be used to making in the non-threaded position of metallic elastic body.
The described motor installation process of present embodiment is as follows: drive vibrator is installed earlier, at first successively binding post 8, piezoelectric ceramic disk 6 being stuck in micrometric displacement amplifies in the groove of elastomer 7, carry out the fastening of internal and external threads again after wiring lead-in wire drawn from the fairlead of metallic elastic body 5, micrometric displacement is amplified elastomer 7 and metallic elastic body 5 is fastening.After the installation, mover 1 is passed in the middle of the drive vibrator, checks whether correctly install, prevent the radial deflection of part, confirm with mover 1 between do not interfere, mover 1 is taken out after errorless, oscillator is installed end.
Carry out whole machine installation then, in the housing cap 10 of earlier rolling linear ball bearing 4 being packed into, with fastening bolt 2 electric motor end cap and housing cap 10 are linked together again, prevent that bearing shaft is to skidding off.Housing cap 10, rubber washer 9, drive vibrator are installed from left to right successively, rubber washer 9, frame plate 11 from around overlapped, be right housing cap then, fastening bolt 2 connects left and right sides housing cap, mover 1 passes in the middle of bearing 4, whole machine installation finishes.Apply certain pretightning force, external power supply is namely prepared to start working.
Present embodiment based on the driving method of above-mentioned grand little driving linear piezoelectric motor is: drive vibrator is to motivate the standing wave that two nearly frequencies, homotype, phase differences are the extensional vibrations of 90 degree under the 90 alternating current effects of spending respectively at phase difference, after two standing waves are synthetic, form elliptic motion trace at the double wedge place, under the pretightning force effect that pre-tightening mechanism produces, double wedge relies on the friction-driven mover rectilinear motion with mover.
In concrete practical application, the number of piezoelectric ceramic plate and thickness can be determined according to demand, for example shown in Fig. 2, can amplify at micrometric displacement and place 4 (1. 2. 3. 4.) piezoelectric ceramic disks in the elastomeric groove, per two is one group, about each one group, add the red copper thin slice between the piezoelectric ceramic disk as ultrasonic action signal terminal, select the piezoelectric ceramic disk 1., 2. between for connecing Usin ω t pumping signal terminal, the piezoelectric ceramic disk 3., 4. between for connecing Ucos ω t pumping signal terminal, all the other are earth terminal.
Specify its course of work when eight piezoelectric elements are housed below by Fig. 5, and the state of piezoelectric element in each process.
Because last drive point (shown in Fig. 5 (m)) and following drive point (shown in Fig. 5 (n)) symmetry, therefore above drive point m is as the description object of following principle.Figure (A) is the displacement of symmetrical mode, the left and right sides branch of drive vibrator all applies Usin ω t, figure (B) is the displacement of asymmetric mode, the left branch of drive vibrator applies-Ucos ω t, right branch applies Ucos ω t, figure (C) applies Usin ω t for the left branch of drive vibrator, the total displacement amount when right branch applies Ucos ω t.L
4=L
y～0, L
8=0～-2L
xAnd L
yRepresent horizontal and vertical maximum displacement respectively.
(1) when ω t=0～pi/2, L
1=0～-L
y, L
5=-L
x～0, the drive vibrator change in displacement is shown in (a-1), (a-2), (a-3) among Fig. 5.Stator is tapered to vertical compression,metal-to-metal position (among Fig. 5 shown in (a-1)) of symmetrical mode by the maximum elongation displacement of the left branch compression,metal-to-metal position of asymmetric mode and right branch.The driving end face of stator is rotated down (among Fig. 5 shown in (a-3)) bottom of symmetrical mode counterclockwise by the high order end of antisymmetry mode.Under the effect of pretightning force, drive the mover L that moved right
xDistance.
(2) when ω t=pi/2～π, L
2=-L
y～0, L
6=0～L
x, the drive vibrator change in displacement as (b-1), (b-2) among Fig. 5 (b-3) shown in.Stator tapers to the left branch maximum elongation of antisymmetry mode and right branch compression,metal-to-metal position (among Fig. 5 shown in (b-2)) by the compression,metal-to-metal position of symmetrical mode.Stator drives end face and rotates up antisymmetric low order end (among Fig. 5 shown in (b-3)) bottom counterclockwise by symmetrical mode.Under prestressed effect, drive the mover L that moved right
xDistance.
(3) when ω t=π～3 pi/2s, L
3=0～L
y, L
7=L
x～0, the drive vibrator change in displacement is shown in (c-1), (c-2), (c-3) among Fig. 5.The maximum elongation position that stator tapers to symmetrical mode by left branch maximum elongation and the right branch compression,metal-to-metal position of antisymmetry mode (among Fig. 5 shown in (c-1)).Stator drives end face is rotated up symmetry counterclockwise by antisymmetric low order end the top (among Fig. 5 shown in (c-3)).Owing to drive end face and mover disengaging this moment, to not driving effect of mover.
(4) when ω t=3 pi/2～2 π, L
4=L
y～0, L
8=0～-L
x, the drive vibrator change in displacement is shown in (d-1), (d-2), (d-3) among Fig. 5.Stator is tapered to the maximum elongation position (among Fig. 5 shown in (d-2)) of left branch compression,metal-to-metal position and the right branch of antisymmetry mode by the maximum elongation position of symmetrical mode.The driving end face of stator is rotated down asymmetrical high order end (among Fig. 5 shown in (d-3)) counterclockwise by the top of symmetry.Owing to drive end face and mover disengaging this moment, to not driving effect of mover.
In sum, the driving end face of going up of this motor is finished a week counterclockwise along an elliptical path in one-period, in like manner, under drive end face and in one-period, finish a week clockwise along an elliptical path, drive the displacement that end face drives the total 2Lx that moved right of mover simultaneously up and down, so go round and begin again, mover is telemechanical to the right just.If switched voltage signal in two branches of drive vibrator, at this moment the direction of rotation of the elliptical trajectory of this motor-driven end face then can be reverse accordingly, thereby show as the reverse of mover.
Present embodiment except following characteristics other structures with embodiment 1: the drive vibrator of present embodiment such as Fig. 6,7, shown in 8, the metallic elastic body 25 of each end is divided into two parts in the drive vibrator, end outer surface near housing cap is the hexagon prism structure, this structure can be used as the spanner position fixedly the time, an end outer surface that is connected with micrometric displacement amplification elastomer is cylinder, outer surface is provided with external screw thread simultaneously, micrometric displacement amplifies elastomer 27 and is provided with internal thread, internal thread is provided be used to making and draws micrometric displacement and amplify elastomeric breach, binding post 28 namely from then on breach draw.Piezoelectric ceramic disk 26, metallic elastic body 25 and micrometric displacement amplify elastomer 27 and tighten together by internal and external threads.This kind structure is suitable for the application scenario of low thrust.Micrometric displacement amplifies elasticity body opening 27 middle inside and is provided with double wedge 212, double wedge 212 and mover CONTACT WITH FRICTION in the driving process, and the two contact area is the drive area.
The installation process of drive vibrator is as follows in the present embodiment: successively binding post 28, piezoelectric ceramic disk 26 are stuck in micrometric displacement and amplify in elastomer 27 grooves, the lead-in wire of binding post 28 is drawn from the reservation breach of micrometric displacement amplification elastomer 27, again metallic elastic body 25 precession micrometric displacements are amplified in the internal thread of elastomer 27, with spanner metallic elastic body 25 is screwed.After the installation, mover is passed in the middle of the drive vibrator, checks whether correctly install, prevent the radial deflection of part, confirm and mover between do not interfere, mover is taken out after errorless, oscillator is installed and is finished.
Present embodiment except other structures the following characteristics with embodiment 2: the drive vibrator of present embodiment is shown in Fig. 9,10,11, metallic elastic body 35 outer surfaces in the drive vibrator are cylinder, the elastomer of metallic elastic body 35 and micrometric displacement amplification simultaneously 37 outsides are provided with boss, and the two is connected with clamp nut 34 by fastening bolt 33.In the practical application, for making things convenient for the connection of bolt, micrometric displacement amplifies elastomer and the metallic elastic body can all be designed to become the diameter cylinder as required.Micrometric displacement amplifies elasticity body opening 37 middle inside and is provided with double wedge 312, double wedge 312 and mover CONTACT WITH FRICTION in the driving process, and the two contact area is the drive area.
The installation process of drive vibrator is as follows in the present embodiment: at first successively binding post 38, piezoelectric ceramic disk 36 are stuck in micrometric displacement and amplify in the groove of elastomer 37, after place micrometric displacement to amplify the both sides of elastomer 37 metallic elastic body 35, fastening bolt 33 is passed micrometric displacement amplify in the elastomeric bolt hole, micrometric displacement is amplified elastomer and the metallic elastic body is fastening.After the installation, mover is passed in the middle of the drive vibrator, checks whether correctly install, prevent the radial deflection of part, confirm and mover between do not interfere, mover is taken out after errorless, oscillator is installed and is finished.
Above-described embodiment is preferred implementation of the present invention; but embodiments of the present invention are not restricted to the described embodiments; other any do not deviate from change, the modification done under spiritual essence of the present invention and the principle, substitutes, combination, simplify; all should be the substitute mode of equivalence, be included within protection scope of the present invention.
Claims (10)
1. grand little driving linear piezoelectric motor, it is characterized in that, comprise frame, drive vibrator, mover, and be used for locking frame, drive vibrator, mover and regulate the pre-tightening mechanism of pretightning force, described frame two ends are provided with bearing, and mover passes two bearings and drive vibrator; Described drive vibrator comprises piezoelectric element, two centre metallic elastic body and centre micrometric displacements with holes with holes amplify elastomer, two metallic elastic bodies amplify elastomeric two ends with micrometric displacement respectively and are connected, micrometric displacement amplifies elasticity body opening middle inside and is provided with double wedge, double wedge is connected with mover CONTACT WITH FRICTION in the driving process, micrometric displacement amplifies the elastomer two ends and is provided with for the groove of placing piezoelectric element, every end is placed 2M piezoelectric ceramic plate, M 〉=1, each piezoelectric ceramic plate all polarizes along thickness direction, per two piezoelectric ceramic plate polarity are fitted into one group on the contrary mutually, in groups in the symmetrical groove that is placed on the micrometric displacement amplification elastomer two ends, the both sides of each piezoelectric ceramic plate are provided with the sheet metal as binding post, the common contact area territory was the power supply signal input in every group piezoelectric ceramic contact-making surface was namely organized, and the non-common contact area of every group piezoelectric ceramic territory is the power supply signal input ground end.
2. grand little driving linear piezoelectric motor according to claim 1, it is characterized in that, described metallic elastic body and micrometric displacement amplify the elastomer outside and are provided with boss, are provided with the hole in the boss, and the metallic elastic body amplifies elastomer with micrometric displacement and is connected by fastening bolt.
3. grand little driving linear piezoelectric motor according to claim 1, it is characterized in that, the external side of described metallic elastic is prism structure, outer surface is provided with external screw thread simultaneously, micrometric displacement amplifies elastomer and is provided with internal thread, internal thread is provided be used to making and draws micrometric displacement and amplify elastomeric breach, and the metallic elastic body amplifies elastomer with micrometric displacement and is connected by threaded engagement.
4. grand little driving linear piezoelectric motor according to claim 1, it is characterized in that, the external side of described metallic elastic is prism structure, inner surface is provided with internal thread simultaneously, micrometric displacement amplifies elastomer and is provided with external screw thread, the two connects by threaded engagement, is provided with the hole of drawing be used to making in the non-threaded position of metallic elastic body.
5. according to claim 3,4 each described grand little driving linear piezoelectric motors, it is characterized in that micrometric displacement amplifies elastomer to cut out two planes parallel with axis along the axis direction symmetry be the spanner position in the described drive vibrator.
6. grand little driving linear piezoelectric motor according to claim 1 is characterized in that:
It is assembly or circular cone and cylinder assembly or pyramid and prismatic assembly hollow, shaped face cylinder and cylinder that described micrometric displacement amplifies elastomer;
Described piezoelectric ceramic plate is piezoelectric ceramic disk or regular polygon piezoelectric ceramic plate.
7. grand little driving linear piezoelectric motor according to claim 1 is characterized in that: it is laterally zygomorphic V-arrangement double wedge that described micrometric displacement amplifies the double wedge that elasticity body opening middle inside is provided with, or parabola shaped double wedge, or the circular arc double wedge.
8. grand little driving linear piezoelectric motor according to claim 1 is characterized in that: also be provided with rubber washer between described metallic elastic body and the micrometric displacement amplification elastomer.
9. grand little driving linear piezoelectric motor according to claim 1 is characterized in that:
Described mover is cylinder guide rod or prismatic guide rod;
The set bearing in described frame two ends is rolling linear ball bearing or sliding bearing.
10. the driving method based on the described grand little driving linear piezoelectric motor of claim 1 is characterized in that, this motor comprises mover and drive vibrator, and this driving method comprises grand driving and little driving,
Grand driving refers to: according to the position of piezoelectric element in drive vibrator, drive vibrator is to motivate the standing wave that two nearly frequencies, homotype, phase differences are the extensional vibrations of 90 degree under the 90 alternating current effects of spending respectively at phase difference, after two standing waves are synthetic, form oval micron order movement locus at the double wedge place, under the pretightning force effect that pre-tightening mechanism produces, double wedge relies on and the friction of mover makes mover carry out the high-speed straight-line motion of big stroke;
Little driving refers to: piezoelectric element is applied the dc high voltage excitation, make oscillator produce quiet distortion along the column axis direction, amplify the Precision Linear Moving of two double wedge clamping mover generation micro-strokes up and down of elastomer inboard then by micrometric displacement.
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| CN201310175084.8A CN103281005B (en) | 2013-05-10 | 2013-05-10 | A kind of macro and micro servo type linear piezoelectric motor and driving method thereof |
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| CN201310175084.8A CN103281005B (en) | 2013-05-10 | 2013-05-10 | A kind of macro and micro servo type linear piezoelectric motor and driving method thereof |
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| CN201310175084.8A Expired - Fee Related CN103281005B (en) | 2013-05-10 | 2013-05-10 | A kind of macro and micro servo type linear piezoelectric motor and driving method thereof |
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Cited By (7)
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| CN103683967A (en) * | 2013-12-10 | 2014-03-26 | 华南农业大学 | Macro-micro driving power supply of linear driver and control method thereof |
| CN103944446A (en) * | 2014-04-24 | 2014-07-23 | 长春工业大学 | Tangential vibration disc-type piezoelectric meshing motor of piezoelectric actuator and excitation method of tangential vibration disc-type piezoelectric meshing motor |
| CN106026762A (en) * | 2016-06-15 | 2016-10-12 | 浙江师范大学 | Piezoelectric wafer driver |
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN112290824A (en) * | 2020-09-14 | 2021-01-29 | 南京航空航天大学 | Threaded piezoelectric linear actuator with high thrust and working method thereof |
| CN112437849A (en) * | 2018-06-14 | 2021-03-02 | 物理仪器(Pi)两合有限公司 | Brake device |
| CN112727689A (en) * | 2020-12-29 | 2021-04-30 | 河北科技大学 | Permanent magnet generator and power generation system |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103683967A (en) * | 2013-12-10 | 2014-03-26 | 华南农业大学 | Macro-micro driving power supply of linear driver and control method thereof |
| CN103683967B (en) * | 2013-12-10 | 2016-07-27 | 华南农业大学 | The macro and micro servo power supply of a kind of linear actuator and control method thereof |
| CN103944446A (en) * | 2014-04-24 | 2014-07-23 | 长春工业大学 | Tangential vibration disc-type piezoelectric meshing motor of piezoelectric actuator and excitation method of tangential vibration disc-type piezoelectric meshing motor |
| CN106026762A (en) * | 2016-06-15 | 2016-10-12 | 浙江师范大学 | Piezoelectric wafer driver |
| CN107786120A (en) * | 2017-11-21 | 2018-03-09 | 吉林大学 | Piezoelectricity rotation positioning platform and control method with grand microring array kinetic characteristic |
| CN112437849A (en) * | 2018-06-14 | 2021-03-02 | 物理仪器(Pi)两合有限公司 | Brake device |
| CN112290824A (en) * | 2020-09-14 | 2021-01-29 | 南京航空航天大学 | Threaded piezoelectric linear actuator with high thrust and working method thereof |
| CN112727689A (en) * | 2020-12-29 | 2021-04-30 | 河北科技大学 | Permanent magnet generator and power generation system |
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