CN1209685A - Cylindrical-shaped piezo ultrasonic micro-motor based on freely-bending vibration mode - Google Patents

Cylindrical-shaped piezo ultrasonic micro-motor based on freely-bending vibration mode Download PDF

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Publication number
CN1209685A
CN1209685A CN 98117827 CN98117827A CN1209685A CN 1209685 A CN1209685 A CN 1209685A CN 98117827 CN98117827 CN 98117827 CN 98117827 A CN98117827 A CN 98117827A CN 1209685 A CN1209685 A CN 1209685A
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piezoelectric
motor
stator
piezo
central shaft
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CN 98117827
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CN1082274C (en
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董蜀湘
王树昕
沈文江
李龙土
桂治轮
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Tsinghua University
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Tsinghua University
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Abstract

The present invented product comprises central shaft, piezoelectric stator cover-mounted on the central shaft and upper and lower rotors respectively tightly pressed on both end faces of the stator. Its piezoelectric stator comprises upper and lower matched blocks and piezoelectric ceramic tube tightly pressed between upper and lower matched blocks. Said invention adopts two-rotor coaxial torque output structure, so that it can make motor possess double torque output and stronger loading capacity. Besides, said invented substitutes several piezoelectric exciting elements and detection element of existent piezoelectric motor by piezoelectric ceramic tube, so that it is simple in structure and easy to assemble.

Description

Cylindric piezo-electric supersonic micro-motor based on the free bend vibration mode
The invention belongs to the driving element technical field of precision instrument, particularly based on the structural design of the cylindric piezo-electric supersonic micro-motor of free bend vibration mode.
Piezo-electric supersonic micro-motor is widely used as the driving element of precision instrument.Japan has announced a patent (patent No.: JP344759) that is entitled as " ultrasonic motor " on December 24th, 1993, this patent is a kind of typical piezo-electric supersonic micro-motor based on sandwich piezoelectric ceramic transducer beam mode, its structure as shown in Figure 1, this motor stator 10 is fixed on the fixed object 18, motor stator is by following match block 101, last match block 102, the piezoelectric ceramic 103 that presses between the piece is up and down formed.Wherein, last match block is a bellows, and a center fixation screw rod 12 will place piezoelectric ceramic therebetween to compress by the screw thread of match block centre bore up and down, and the screw rod lower end is screwed in the fixed object 18 and is connected with it.The motor rotor 11 that has toothed disc inserts the screw rod upper end, is pressed on 102 upper surfaces and its tight contact by nut 121.
After giving this motor piezoelectric ceramic input electrical signal, at immobile interface one end place motor stator form fluctuation nodal section, an end that contacts with motor rotor is a free end face, and it is moving to produce the row wave-wave, motor rotor 11 produces moment output around fixed axis 12 rotations by epitrochanterian gear 110.
The vibration wave motor (USP5231325) that is used for the camera gun driving of U.S. Patent Publication, with the ultrasonic motor of above-mentioned Japanese publication similar structure is arranged, also be to rely on a plurality of piezoelectric discs 26,27,28,29 respectively in x, y direction excitation flexural vibrations, detect the flexural vibrations of stator again with a piezoelectric disc 25, also rely on the gear 23a on the rotor 23 to produce moment output, as shown in Figure 2.
Above-mentioned two breeds of horses reaches following deficiency.For first kind, motor is not the drive element, and motor stator must be fixed on certain fixed object or the heavier object, could form the fluctuation nodal section at stationary plane, produces fluctuation output at the free end of stator.They are two years old, above-mentioned two breeds of horses reaches and all relies on rotor gear output, when rotor bears than heavy load, to make rotor be subjected to the cross force of a vertical axial, the uniform pressure that this power can change between rotor, stator distributes, cause relying on the rotary speed unstabilization of the rotor of frictional force output torque, output torque descends; Its three, rotor relies on gear output, being driven part also must be that gear rotates, and makes whole drive mechanism complexity, the cost height; They are four years old, owing to be subjected to the motor stator size restrictions, the outside diameter of gear on the motor rotor can not be less than stator dimensions, small-sized when actuator, the result causes the gear wheel rotation pinion, and rotating speed is accelerated on the contrary, have to take a plurality of gear-driven methods for this reason, speed is subtracted get off, this is not easy to be used in some limited space systems, requires the accurate occasion that drives of low speed.Its five, this motor needs 5 piezoelectric elements of as many as to be used to excite flexural vibrations and detects vibration, piezoelectric excitation element cost height, the packaging technology difficulty is also bigger.
The objective of the invention is to for overcoming the weak point of prior art, a kind of cylindric piezo-electric supersonic micro-motor based on the free bend vibration mode is proposed, adopt the coaxial moment export structure of birotor, make full use of the Wave energy of motor stator upper and lower end, motor torque output is doubled, and it is stronger to bear load capacity.And further adopt piezoelectric ceramic circular tube, to replace a plurality of piezoelectric excitation elements and the detecting element of existing piezo-electric motor, make it simple in structure, assembling is easy, and can obtain same arousal effect and detect effect.
The present invention proposes a kind of cylindric piezo-electric supersonic micro-motor based on the free bend vibration mode, is made up of central shaft and the piezoelectric stator and the rotor that are placed on the axle; Said piezoelectric stator comprises upper and lower match block and the piezoelectric excitation element that presses between upper and lower match block constitutes, it is characterized in that said rotor is made up of by the upper and lower rotor of the coaxial moment export structure of birotor two end faces that are pressed on stator.
The upper/lower terminal inwall of the said stator of the present invention also can have pair of bearings, and said central shaft places among the two bearings, and said upward lower rotor part and said central shaft are by the pressure mechanism tight fit.Central shaft obtains bitrochanteric moment output by transmission pin and pressure mechanism between central shaft and the rotor.
The upper and lower match block of said piezoelectric stator can be the bellows-like structure of symmetry.Also can be the mute tinkling of pieces of jade shape structure of symmetry.
Said pressure mechanism can be by central shaft bottom flange connecting dish, sheet rubber, and the spring leaf of central shaft upper end and sheet rubber, and the axle shelves snap ring that inserts in the cannelure of central shaft upper end constitutes.
Exciting element in the said piezoelectric stator can be made of a piezoelectric ceramic circular tube and the pretension screw rod that has central through hole, and this pretension screw rod and said upper and lower match block screw togather.
Said piezoelectric ceramic circular tube is the piezoelectric ceramic circular tube along the wall thickness direction polarization, and its lateral surface main electrode is divided into 2 pairs of 4 parts, is respectively applied for the flexural vibrations that excite x, y direction, is used to detect the vibration of piezoelectric stator; Place, pipe one end is provided with a pair of attached narrow electrode, is used to detect the vibration of piezoelectric stator.
Said central shaft can be provided with a ring flange near the lower rotor part end, has a cannelure near the upper rotor part end, and a said shelves snap ring is embedded in wherein, and the mechanism that keep-ups pressure applies constant compression force to upper and lower rotor.
The said piezoelectric ceramic circular tube of the present invention can adopt high piezoelectric constant d31, low-loss piezoceramic material, the moment output that can make motor stator obtain bigger amplitude and improve motor.
The present invention adopts the coaxial export structure of birotor, makes full use of the Wave energy of motor stator upper and lower end, and motor torque output is doubled, and it is stronger to bear load capacity, makes rotor output more steady strong, adopts axle output also can save the inconvenience of gear output.And further adopt piezoelectric ceramic circular tube, and by dividing the method for electrode, exciting element and vibration signal as motor stator detect and feedback element, to replace a plurality of piezoelectric excitation elements and the detecting element of existing piezo-electric motor, make it simple in structure, assembling is easy, and obtains same arousal effect and detect effect.
Brief Description Of Drawings:
Fig. 1 is the micro-motor structure schematic diagram of prior art.
Fig. 2 is the micro-motor structure schematic diagram of another prior art.
Fig. 3 is one of embodiment of the invention general structure schematic diagram.
Fig. 4 is piezoelectric ceramic circular tube and the energisation mode schematic diagram of embodiment one.
Fig. 5 is two general structure schematic diagrames of the embodiment of the invention.
The present invention designs two embodiment of piezo-electric supersonic micro-motor based on beam mode, and its structure is described with reference to the accompanying drawings as follows as shown in Figure 3 and Figure 4:
The general structure of one of present embodiment as shown in Figure 3, this motor is by piezoelectric stator 31, last lower rotor part 321,322, central shaft 323 and elastic pressure element: compositions such as sheet rubber 331,332 and butterfly bullet 333.Wherein stator 31 is by the dynamo-electric conversion element piezoelectric ceramic circular tube 314 of excitation flexural vibrations, and symmetry is seated in this piezoelectricity pipe 314 two ends, and the compositions such as bellows up and down 311,312 of pretension screw rod 313 pretensions by having central through hole.The bellows role is to amplify the amplitude of flexural vibrations.
In two end centre bores of stator, pair of bearings 351,352 is installed, central shaft 323 is felt relieved preferably, central shaft 323 is pressed on motor piezoelectric stator 31 two ends by ring flange on elastic pressure element 331,332,333 and the central shaft 342 and snap ring 341 etc. with rotor 321,322, and keeps a constant compression force.These two rotors can receive the moving output of equidirectional capable wave-wave that piezoelectric stator produces at the biend place simultaneously, and by coaxial export structure, obtain the moment output that doubles.Be provided with transmission pin (not demonstrating) between two rotors and the central shaft, can be used to drive central shaft and produce moment output, be called the coaxial output of birotor.Two bearings in the stator not only play the centering effect to central shaft, also can allow motor center's axle when normal load output, can bear bigger lateral load and do not influence pressure between rotor, the stator, make rotor output more steady strong.Adopt axle output also can save the inconvenience of gear output.
The piezoelectric ceramic circular tube 314 of the foregoing description excitation flexural vibrations and energisation mode are as shown in Figure 4.Pair of orthogonal voltage signal sin ω t and cos ω t are input to two couples of main electrode 314a of piezoelectricity pipe respectively, 314a ' and 314b, 314b ' (314a ', 314b ' does not demonstrate).The flexural vibrations signal that the narrow electrode 314c at place, pipe end and 314c ' (not demonstrating) are used to detect and obtain piezoelectric stator.
Fig. 5 is an another embodiment of the present invention.With embodiment difference shown in Figure 3, be that the upper and lower symmetrical match block 317,318 of motor stator is mute tinkling of pieces of jade shape structure, this structure also has the function of amplifying the flexural vibrations wave amplitude.Same meaning shown in other code name and Fig. 3.The piezoelectric excitation element of stator still as shown in Figure 4.With comparing based on the piezoelectric micromotor motor (as Japan and the United States Patent (USP) that Fig. 1, Fig. 2 disclosed) of beam mode equally of having reported, piezo-electric supersonic micro-motor of the present invention has bigger moment output volume ratio; Be used to encourage the piezoelectric element of flexural vibrations, also reduce to one from 5 of as many as, so piezo-electric motor of the present invention, its production and assembly technology and cost cost all can be reduced.

Claims (9)

1, a kind of cylindric piezo-electric supersonic micro-motor based on the free bend vibration mode is made up of central shaft and the piezoelectric stator and the rotor that are placed on the axle; Said piezoelectric stator comprises upper and lower match block and the piezoelectric excitation element that presses between upper and lower match block constitutes, it is characterized in that said rotor is made up of the upper and lower rotor by the coaxial moment export structure of birotor of two end faces that are pressed on stator.
2, as the said piezo-electric supersonic micro-motor of claim 1, the upper/lower terminal inwall that it is characterized in that said stator, also have pair of bearings, said central shaft places among the two bearings, and said upward lower rotor part and said central shaft are by transmission pin and pressure mechanism tight fit.
3, piezo-electric supersonic micro-motor as claimed in claim 1 is characterized in that, the upper and lower match block of said piezoelectric stator is the bellows-like structure of symmetry.
4, piezo-electric supersonic micro-motor as claimed in claim 1, the upper and lower match block of said piezoelectric stator are the mute tinkling of pieces of jade shape structure of symmetry.
5, piezo-electric supersonic micro-motor structure as claimed in claim 1, it is characterized in that said pressure mechanism is by central shaft bottom flange connecting dish, sheet rubber, the spring leaf of central shaft upper end and sheet rubber, and the axle shelves snap ring that inserts in the cannelure of central shaft upper end constitutes.
6, piezo-electric supersonic micro-motor structure as claimed in claim 1 is characterized in that, the exciting element in the said piezoelectric stator is made of a piezoelectric ceramic circular tube and the pretension screw rod that has central through hole, and this pretension screw rod and said upper and lower match block screw togather.
7, piezo-electric supersonic micro-motor structure as claimed in claim 6, it is characterized in that, said piezoelectric ceramic circular tube is a piezoelectric ceramic circular tube along the wall thickness direction polarization, and its outer hand hay cutter face main electrode is divided into 2 pairs of 4 parts, and place, pipe one end is provided with a pair of narrow electrode.
8, piezo-electric supersonic micro-motor structure as claimed in claim 1 is characterized in that said central shaft is provided with a ring flange near the lower rotor part end, has a cannelure near the upper rotor part end, and a said shelves snap ring is embedded in wherein.
9, piezo-electric supersonic micro-motor structure as claimed in claim 1 is characterized in that said piezoelectric ceramic circular tube adopts high piezoelectric constant d31 and low-loss piezoceramic material to make.
CN98117827A 1998-08-28 1998-08-28 Cylindrical-shaped piezo ultrasonic micro-motor based on freely-bending vibration mode Expired - Fee Related CN1082274C (en)

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CN98117827A CN1082274C (en) 1998-08-28 1998-08-28 Cylindrical-shaped piezo ultrasonic micro-motor based on freely-bending vibration mode

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CN98117827A CN1082274C (en) 1998-08-28 1998-08-28 Cylindrical-shaped piezo ultrasonic micro-motor based on freely-bending vibration mode

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CN1082274C CN1082274C (en) 2002-04-03

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101072001B (en) * 2007-04-05 2010-08-04 南京航空航天大学 Toothless traveling wave rotary ultrasonic motor and working mode and electric exciting manner
CN101159418B (en) * 2007-11-23 2011-05-11 清华大学 Low-voltage driven piezoelectric motor
CN101867315B (en) * 2006-04-14 2012-05-23 博立码杰通讯(深圳)有限公司 Ultrasound motor
CN104234753A (en) * 2014-07-18 2014-12-24 北京理工大学 Micro-motor with surface texture
TWI563789B (en) * 2015-08-27 2016-12-21 Univ Chung Yuan Christian Single hybrid motor,dual hybrid motor and hybrid motor assembly

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05344759A (en) * 1992-06-09 1993-12-24 Olympus Optical Co Ltd Ultrasonic motor
CN1062992C (en) * 1997-06-20 2001-03-07 清华大学 Piezo-electric supersonic micro-motor based on flexural vibration mode

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101867315B (en) * 2006-04-14 2012-05-23 博立码杰通讯(深圳)有限公司 Ultrasound motor
CN101072001B (en) * 2007-04-05 2010-08-04 南京航空航天大学 Toothless traveling wave rotary ultrasonic motor and working mode and electric exciting manner
CN101159418B (en) * 2007-11-23 2011-05-11 清华大学 Low-voltage driven piezoelectric motor
CN104234753A (en) * 2014-07-18 2014-12-24 北京理工大学 Micro-motor with surface texture
CN104234753B (en) * 2014-07-18 2016-05-18 北京理工大学 A kind of micro motor that has Surface Texture
TWI563789B (en) * 2015-08-27 2016-12-21 Univ Chung Yuan Christian Single hybrid motor,dual hybrid motor and hybrid motor assembly

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