CN100489709C - 机械手监控和自动复位系统 - Google Patents
机械手监控和自动复位系统 Download PDFInfo
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- CN100489709C CN100489709C CNB2006100302717A CN200610030271A CN100489709C CN 100489709 C CN100489709 C CN 100489709C CN B2006100302717 A CNB2006100302717 A CN B2006100302717A CN 200610030271 A CN200610030271 A CN 200610030271A CN 100489709 C CN100489709 C CN 100489709C
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Application Number | Priority Date | Filing Date | Title |
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CNB2006100302717A CN100489709C (zh) | 2006-08-22 | 2006-08-22 | 机械手监控和自动复位系统 |
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CNB2006100302717A CN100489709C (zh) | 2006-08-22 | 2006-08-22 | 机械手监控和自动复位系统 |
Publications (2)
Publication Number | Publication Date |
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CN101131578A CN101131578A (zh) | 2008-02-27 |
CN100489709C true CN100489709C (zh) | 2009-05-20 |
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CNB2006100302717A Expired - Fee Related CN100489709C (zh) | 2006-08-22 | 2006-08-22 | 机械手监控和自动复位系统 |
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Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101694581B (zh) * | 2009-09-28 | 2011-07-20 | 昆山华恒工程技术中心有限公司 | 一种机器人自动回零的方法 |
CN101804640A (zh) * | 2010-03-17 | 2010-08-18 | 昆山工研院工业机器人研究所有限公司 | 机器人自动回零的方法 |
CN103632995B (zh) * | 2012-08-13 | 2016-06-08 | 上海华虹宏力半导体制造有限公司 | 片盒监控系统 |
CN102942061B (zh) * | 2012-10-29 | 2016-01-27 | 深圳市华星光电技术有限公司 | 一种自动搬运设备的校正系统及一种校正方法 |
CN103839852A (zh) * | 2012-11-20 | 2014-06-04 | 上海华虹宏力半导体制造有限公司 | 用于灰化机台的晶圆检测装置及方法 |
CN103794525B (zh) * | 2013-07-18 | 2016-04-06 | 北京中科信电子装备有限公司 | 一种可运动机械臂上判定晶片存在的方法 |
CN107516641A (zh) * | 2016-06-16 | 2017-12-26 | 上海新昇半导体科技有限公司 | 机械手臂的监控系统及监控方法 |
CN108622466B (zh) * | 2018-05-21 | 2020-05-12 | 温州职业技术学院 | 一种产品自动化装箱装盒系统 |
CN110950092B (zh) * | 2019-12-27 | 2021-06-29 | 深圳市越疆科技有限公司 | 一种码垛装置的控制方法及装置 |
CN112378354B (zh) * | 2020-11-13 | 2022-09-30 | 广州粤芯半导体技术有限公司 | 一种位置检测传感器、晶圆盒位置检测装置及方法 |
CN114156216B (zh) * | 2022-02-10 | 2022-06-24 | 绍兴中芯集成电路制造股份有限公司 | 自动取片方法、自动取片控制系统、计算机存储介质 |
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- 2006-08-22 CN CNB2006100302717A patent/CN100489709C/zh not_active Expired - Fee Related
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Publication number | Publication date |
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CN101131578A (zh) | 2008-02-27 |
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C06 | Publication | ||
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140109 |
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Effective date of registration: 20140109 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201203, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090520 Termination date: 20180822 |
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CF01 | Termination of patent right due to non-payment of annual fee |