CN100470863C - Production method for P type gallium nitride electrode - Google Patents
Production method for P type gallium nitride electrode Download PDFInfo
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- CN100470863C CN100470863C CNB2006101141905A CN200610114190A CN100470863C CN 100470863 C CN100470863 C CN 100470863C CN B2006101141905 A CNB2006101141905 A CN B2006101141905A CN 200610114190 A CN200610114190 A CN 200610114190A CN 100470863 C CN100470863 C CN 100470863C
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Abstract
The present invention relates to the preparation method of P-typed gallium nitride electrode, the present invention comprises the procedures that the external Mg on a sapphire substrate is mixed with P-typed gallium nitride kinetosome; a semi-transparent electrode ohm contact layer Ru/Ni is evaporated on the P-GaN kinetosome mixed with Mg through an electronic beam; an adhesion layer Ni is evaporated on the semi-transparent electrode ohm contact layer Ru/Ni through an electronic layer; a layer of high launching mirror Ag is evaporated on the adhesive layer Ni through an electronic beam; a layer of blocking layer Pt is evaporated on the high launching mirror Ag through an electronic beam; a protection layer Au is bonded on the blocking layer Pt so as to prevent the oxidation and the pollution of the metal electrode, thereby completing the preparation of the P-typed gallium nitride electrode.
Description
Technical field
The present invention is used for optoelectronic device manufacturing technology field, be specifically related to P-GaN in the GaN based power type light-emitting diode (LED) electrode body and the preparation method.
Background technology
In the preparation of GaN based power type LED device, because the P-GaN doping content is lower and lack work function metal or the metal system higher than P-GaN work function (7.5eV), make the hole be difficult to the tunnelling Schottky barrier, cause the P-GaN metal electrode to be difficult to form low ohm contact resistance, high transmission and performances such as high reflection, good thermal stability are arranged simultaneously.
General conventional P-GaN metal electrode is by high reflectance electrode Ni/Au or transparent conductive oxide (ITO) layer adds high reflection mirror Ag and protective layer Au forms; Ni/Au/Ag/Au metallization P-GaN electrode is made up of Mg doping P-GaN layer, semitransparent electrode ohmic contact layer Ni/Au, high reflection mirror layer Ag and protective layer Au; though this kind metal system has low ohm contact resistance, its resistivity can reach 10-6 Ω cm
2, the P-GaN electrode only is 73.8% for the transmitance of 450-460nm but this Ni/Au/Ag/Au metallizes, the light that residue is sent is absorbed in electrode interior and is converted into heat energy, causes the thermal stability variation of electrode; There is not barrier layer Pt; protective layer under long-term work conditioned disjunction high-temperature condition easily in diffusion, cause the degeneration of high reflection mirror Ag, make extraction efficiency reduction, leakage current and the contact resistance increase of device light; the thermal stability variation of electrode has a strong impact on the long-term reliability of device.ITO plates high reflection mirror Ag electrode outward and is made up of Mg doping P-GaN layer, ito transparent electrode ohmic contact layer, high reflection mirror layer Ag and protective layer; ITO is for the absorption of light less (10-4-10-6 magnitude); transmissivity for the 455-460nm blue light can reach 97%, but the contact resistance of ito transparent electrode ohmic contact layer and Mg doping P-GaN layer is big, driving voltage is higher and poor heat stability.Therefore, existing electrode system can not satisfy the low specific contact resistivity rate of P-GaN electrode in the GaN based power type LED preparation process, has high-transmission rate and high reflectivity simultaneously, performance requirements such as Heat stability is good.
Summary of the invention
The object of the invention is, a kind of preparation method of P type gallium nitride electrode is provided, has improved the reliability of GaN based power type light-emitting diode, solved the P-GaN electrode and be difficult to form low specific contact resistivity rate, have high-transmission rate and high reflectance simultaneously, advantages such as Heat stability is good.
The preparation method of a kind of P type of the present invention gallium nitride electrode is characterized in that, comprises the steps:
Step 1: extension Mg doping P type gallium nitride matrix on Sapphire Substrate;
Step 2: electron beam evaporation semitransparent electrode ohmic contact layer Ru/Ni on Mg doping P-GaN matrix, behind the stripping electrode, carry out Alloying Treatment;
Step 3: electron beam evaporation one deck adhesion layer Ni on semitransparent electrode ohmic contact layer Ru/Ni, adhesion layer Ni can increase the adhesion strength of semitransparent electrode ohmic contact layer Ru/Ni;
Step 4: electron beam evaporation one deck high emission mirror Ag on adhesion layer Ni, the main effect of high reflection mirror Ag is the speculum that serves as high reflection, electrode pair 455-460nm light reflectance is 84%, increases the light extraction efficiency of electrode;
Step 5: electron beam evaporation one deck barrier layer Pt on high emission mirror Ag, under high temperature or long-term work condition, barrier layer Pt can stop the interior diffusion of bonding protective layer Au, prevent that ohmic contact resistance and reverse leakage from increasing and the degeneration of high reflection mirror Ag, improve P-GaN metal electrode thermal stability;
Step 6: bonding protective layer Au on the Pt of barrier layer, its effect is to prevent the oxidation of metal electrode and pollution.The thickness of wherein translucent ohmic contact layer Ru/Ni is Ru25
And Ni25
Process is at O
2: N
2In=1:2 the atmosphere, 350 ℃ of temperature insulation 8min, be warmed up to the Alloying Treatment of 500 ℃ of insulation 5min then after, semitransparent electrode ohmic contact layer Ru/Ni is 91.5% to the transmissivity of 455-460nm light.
Wherein the thickness of adhesion layer Ni is 1000
The thickness of speculum Ag is 1000
Increase the intensity of sticking of electrode, improve the thermal stability of electrode.
Wherein the thickness of barrier layer Pt is 5000
The thickness of protective layer Au is 3000
It can prevent that ohmic contact resistance from increasing, reverse leakage increases, degeneration and the thermal stability variation of high reflection mirror Ag.
Wherein adhesion layer Ni, high reflection mirror Ag, barrier layer Pt and bonding protective layer Au be for finishing in e-beam evaporation chamber flush distillation successively, avoids the oxidation and the pollution of the metal electrode for preparing, improves the long-term reliability of P-GaN electrode.
The present invention adopts the electrode of preparation method's preparation of P type gallium nitride electrode of the present invention, has satisfied the requirement of low specific contact resistivity rate, high-transmission rate and high reflectance, good thermal stability simultaneously.At the translucent ohmic contact layer Ru/Ni of Mg doping P-GaN matrix 1 surface electronic beam evaporation, at O
2: N
2In=1:2 the atmosphere, 350 ℃ of temperature insulation 8min, be warmed up to the Alloying Treatment of 500 ℃ of insulation 5min then after, electrode pair 450-460nm light transmittance 91.5% and reflectivity are 84%.Electron beam evaporation adhesion layer Ni, high reflection mirror Ag successively, barrier layer Pt and bonding protective layer Au then.Device detection is the result show: under other technology same case, the power-type LED that the P-GaN electrode adopts this system and traditional electrode system to make compares, and under operating current 350mA, operating voltage descends 9.5%, Output optical power improves 28.7%, and light extraction efficiency improves 18%.
Description of drawings
For further specifying concrete technology contents of the present invention, below in conjunction with embodiment and accompanying drawing describes in detail as after, wherein:
Fig. 1 is a P type gallium nitride electrode structural representation of the present invention.
Embodiment
Electrode of the present invention is made of bonding protective layer Au6, barrier layer Pt5, high reflection mirror Ag4, adhesion layer Ni3, translucent ohmic contact layer Ru/Ni2 and Mg doping P-GaN layer 1 etc.; as shown in Figure 1, the concrete preparation process of preparation method of a kind of P type gallium nitride electrode of the present invention is as follows:
1) preparing thickness with common metal organic chemical vapor deposition (MOCVD) or molecular beam epitaxial growth (MBE) method on Sapphire Substrate 10 is 1 μ m, and the Mg doping content is 5*1017cm
-3P-GaN matrix 1;
2) sample cleans with chemical cleaning method: the acetone cotton balls is cleaned, chloroazotic acid soaks 15min, HCl:H
2O=1:1 soaks 5min, ethanol boils 5min and deionized water rinsing, cleans the back with doing N
2Dry up, reach the purpose of removing oxide, organic ion, metal micro particles and the steam on surface in material growth and the storage and transport process;
3) sample of finishing dealing with being put in the electron beam evaporation platform reative cell rapidly, the vacuum degree of reative cell is extracted into below the 10-5Pa, is that 96 ℃, speed are in temperature
Evaporation 25
Ru and temperature be 99 ℃ with speed 0.5
/ s evaporation 25
Ni, stripping electrode;
4) behind the stripping electrode, sample is put into annealing furnace, at O
2: N
2In=1:2 the atmosphere, earlier at 350 ℃ of insulations of temperature 8min, be warmed up to 500 ℃ then, insulation 5min carries out Alloying Treatment, reduce translucent ohmic contact layer Ru/Ni2 can with the ohmic contact resistance of doping P-GaN matrix 1, improve the transmissivity of translucent ohmic contact layer Ru/Ni2 to 455-460nm light;
5) sample of process Alloying Treatment; adopt conventional Ka Er Hughes (Karl Suss) mask aligner; make by lithography the P-GaN substrate add thick electrode after; put into rapidly in the electron beam evaporation platform reative cell; the vacuum degree of reative cell is extracted into below the 10-5Pa; evaporate adhesion layer Ni3, high reflection mirror Ag4, barrier layer Pt5, bonding protective layer Au6 successively respectively, promptly temperature be 96 ℃ with speed 3
/ s, evaporation 1000
Ni, temperature be 93 ℃ with speed 2
/ s, evaporation 1000
Ag, temperature be 95 ℃ with speed 5
/ s, evaporation 5000
Pt, temperature be 95 ℃ with speed 2
/ s, evaporation 3000
Au, take out sample and peel off and clean;
6) recording its specific contact resistivity rate with circular transmission line (TLM method) is 4.7*10-5 Ω cm
2, the transmissivity 91.5% and the reflectivity that record electrode with Hitachi's 4100 spectrophotometers are 84%.
Claims (5)
1. the preparation method of a P type gallium nitride electrode is characterized in that, comprises the steps:
Step 1: extension Mg doping P type gallium nitride matrix on Sapphire Substrate;
Step 2:, behind the stripping electrode, carry out Alloying Treatment at the Mg doping P type gallium nitride matrix beam evaporation semitransparent electrode ohmic contact layer Ru/Ni that powers on;
Step 3: electron beam evaporation one deck adhesion layer Ni on semitransparent electrode ohmic contact layer Ru/Ni, adhesion layer Ni can increase the adhesion strength of semitransparent electrode ohmic contact layer Ru/Ni;
Step 4: electron beam evaporation one deck high reflection mirror Ag on adhesion layer Ni, the main effect of high reflection mirror Ag is the speculum that serves as high reflection, electrode pair 455-460nm light reflectance is 84%, increases the light extraction efficiency of electrode;
Step 5: electron beam evaporation one deck barrier layer Pt on high emission mirror Ag, under high temperature or long-term work condition, barrier layer Pt can stop the interior diffusion of bonding protective layer Au, prevent that ohmic contact resistance and reverse leakage from increasing and the degeneration of high reflection mirror Ag, improve P type gallium-nitride metal electrode thermal stability;
Step 6: bonding protective layer Au on the Pt of barrier layer, its effect is to prevent the oxidation of metal electrode and pollution.
2. the preparation method of a kind of P type gallium nitride electrode according to claim 1 is characterized in that, the thickness of wherein translucent ohmic contact layer Ru/Ni is Ru 25
With Ni 25
Process is at O
2: N
2In=1:2 the atmosphere, 350 ℃ of temperature insulation 8min, be warmed up to the Alloying Treatment of 500 ℃ of insulation 5min then after, semitransparent electrode ohmic contact layer Ru/Ni is 91.5% to the transmissivity of 455-460nm light.
3. the preparation method of a kind of P type gallium nitride electrode according to claim 1 is characterized in that, wherein the thickness of adhesion layer Ni is 1000
The thickness of speculum Ag is 1000
Increase the intensity of sticking of electrode, improve the thermal stability of electrode.
4. the preparation method of a kind of P type gallium nitride electrode according to claim 1 is characterized in that, wherein the thickness of barrier layer Pt is 5000
The thickness of protective layer Au is 3000
It can prevent that ohmic contact resistance from increasing, reverse leakage increases, degeneration and the thermal stability variation of high reflection mirror Ag.
5. the preparation method of a kind of P type gallium nitride electrode according to claim 1; it is characterized in that; wherein adhesion layer Ni, high reflection mirror Ag, barrier layer Pt and bonding protective layer Au are for finishing in e-beam evaporation chamber flush distillation successively; avoid the oxidation and the pollution of the metal electrode for preparing, improve the long-term reliability of P type gallium nitride electrode.
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| CNB2006101141905A CN100470863C (en) | 2006-11-01 | 2006-11-01 | Production method for P type gallium nitride electrode |
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| CNB2006101141905A CN100470863C (en) | 2006-11-01 | 2006-11-01 | Production method for P type gallium nitride electrode |
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| CN100470863C true CN100470863C (en) | 2009-03-18 |
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| JP5888132B2 (en) * | 2012-06-08 | 2016-03-16 | 豊田合成株式会社 | Method for manufacturing light emitting device |
| CN104377287B (en) * | 2013-08-14 | 2017-04-26 | 展晶科技(深圳)有限公司 | Light-emitting diode and manufacturing method thereof |
| CN106159044B (en) * | 2015-04-01 | 2018-10-02 | 映瑞光电科技(上海)有限公司 | LED chip structure and preparation method thereof |
| CN106579564B (en) * | 2016-12-23 | 2020-03-31 | 湘潭大学 | Porous heating film and preparation method thereof |
| CN113555481B (en) * | 2021-07-20 | 2023-01-17 | 厦门三安光电有限公司 | Light-emitting diode chip |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1176498A (en) * | 1996-09-06 | 1998-03-18 | 东芝株式会社 | Compound semicoductor light-emitting device of gallium nitride series |
| CN1499651A (en) * | 2002-11-05 | 2004-05-26 | 炬鑫科技股份有限公司 | Method for manufacturing white light LED and illuminator |
| JP2004327980A (en) * | 2003-04-21 | 2004-11-18 | Samsung Electronics Co Ltd | Semiconductor light emitting diode and method for manufacturing the same |
| US20050279990A1 (en) * | 2004-06-17 | 2005-12-22 | Yu-Chuan Liu | High brightness light-emitting device and manufacturing process of the light-emitting device |
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2006
- 2006-11-01 CN CNB2006101141905A patent/CN100470863C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1176498A (en) * | 1996-09-06 | 1998-03-18 | 东芝株式会社 | Compound semicoductor light-emitting device of gallium nitride series |
| CN1499651A (en) * | 2002-11-05 | 2004-05-26 | 炬鑫科技股份有限公司 | Method for manufacturing white light LED and illuminator |
| JP2004327980A (en) * | 2003-04-21 | 2004-11-18 | Samsung Electronics Co Ltd | Semiconductor light emitting diode and method for manufacturing the same |
| US20050279990A1 (en) * | 2004-06-17 | 2005-12-22 | Yu-Chuan Liu | High brightness light-emitting device and manufacturing process of the light-emitting device |
Non-Patent Citations (1)
| Title |
|---|
| 倒装结构大功率蓝光LEDs的研制. 伊晓燕。郭金霞，马龙，王立彬，陈宇，刘志强，王良辰.光电子·激光，第17卷第6期. 2006 * |
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