CN100468678C - Method for detecting package carrier and its apparatus - Google Patents
Method for detecting package carrier and its apparatus Download PDFInfo
- Publication number
- CN100468678C CN100468678C CNB2006100789380A CN200610078938A CN100468678C CN 100468678 C CN100468678 C CN 100468678C CN B2006100789380 A CNB2006100789380 A CN B2006100789380A CN 200610078938 A CN200610078938 A CN 200610078938A CN 100468678 C CN100468678 C CN 100468678C
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- China
- Prior art keywords
- package carrier
- sheet
- printing opacity
- measurement pattern
- checkout gear
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Links
- 238000000034 method Methods 0.000 title abstract description 12
- 238000005538 encapsulation Methods 0.000 claims abstract description 17
- 238000005259 measurement Methods 0.000 claims description 69
- 238000007639 printing Methods 0.000 claims description 42
- 238000001514 detection method Methods 0.000 claims description 13
- 239000002390 adhesive tape Substances 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 14
- 239000013078 crystal Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000012797 qualification Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000004100 electronic packaging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Abstract
The invention discloses a detecting method of encapsulation carrier, a translucidus measuring piece which marks the measuring graph is aimed at a encapsulation carrier, the relative ubiety of detail conformation of said encapsulation carrier and said measuring graph of translucidus measuring piece is detected. Where the detail conformation is poor of said encapsulation carrier can be judged by said relative ubiety.
Description
Technology neck city
The present invention relates to a kind of detection method and device thereof of package carrier, relate in particular to a kind of method and measurement mechanism thereof that is used to detect the physical dimension and the location specification of the detail structure on the package carrier.
Background technology
Semiconductor grain needs to be fixed in a package carrier more in most of encapsulation procedure, for example: conductive metal frames (leadframe) or coil type encapsulation (Tape Carrier Package; TCP) adhesive tape.Yet no matter when entering the rewinding of encapsulation factory or the input encapsulation procedure that rolls off the production line, package carrier all needs to be inspected outward appearance again and again or check significant dimensions, so can guarantee the qualification rate and the equal conformance with standard of unit interval quantum of output at each station in the encapsulation procedure.
Whether especially before bonding wire (wire bonding) operation of standing, quality inspection personnel or operating personnel can need to have access to bonding wire figure, and crooked or other defective arranged at the interior pin of magnifying glass or microscopically contrast lead frame.If interior pin is crooked surpass to be allowed (receipts) specification then will certainly influence the bonding wire quality, perhaps cause bonding equipment shutdown and have a strong impact on the unit interval quantum of output again and again.Yet above-mentioned way of contrast is inaccuracy not only, and can not contain the detection of too many thin portion size in finite time.The general factory that encapsulates can adopt more accurate projector to detect the thin portion size of lead frame mostly when receiving inspection, yet leading portion encapsulation procedure (cutting to bonding wire from wafer) is stood most these kinds that are not provided with than expensive equipment in factory, and promptly accurate measurement can't directly be carried out on production line.
Fig. 1 be a conventional package carrier on look schematic diagram.Package carrier 10 can be to separate the lead frame of strip or be continuous adhesive tape, lead frame or adhesive tape all have a plurality of encapsulation units 11, each encapsulation unit 11 can engage with a crystal grain, and on 10 liang of long sides of package carrier a plurality of location holes 12 or transfer port is arranged.
Fig. 2 is the enlarged drawing of A part among Fig. 1.Described package carrier 10 is the carrier of a lead frame pattern, and the crystal grain in the middle of semiconductor grain can be fixed in carries seat (die pad) 111, and can will be centered around the interior pin (inner lead) 112 and crystal grain electric connection on next door by plain conductor.As shown in Figure 2, extending to crystal grain by the diagonal angle, to carry other interior pin 112 length of seat 111 the longest, therefore is easier to produce crooked in lead frame processing procedure or encapsulation procedure.When interior pin 112 has when crooked, bonding wire equipment is bonding wire accurately, and the image identification that perhaps exceeds its machine vision is set and autostop.Especially get over for a long time when the pin number (pin count) of lead frame, for example be used for the lead frame of 160 or 208 high pin number encapsulation, the detection of meticulous interior pin seems important and difficult more.
In sum, Electronic Packaging circle needs a kind of method and relevant survey tool that can effectively detect physical dimension specification on the package carrier in a hurry, can promote the encapsulation qualification rate by this and keep interior high yield output of unit interval.
Summary of the invention
The method for quick and the device thereof that the purpose of this invention is to provide a kind of package carrier, by a light transmission piece that indicates measurement pattern is stacked and placed on the package carrier, and by the comparing result of described package carrier and measurement pattern being judged immediately the bad place of package carrier.
Another object of the present invention provides a kind of low-cost detection method and device thereof of package carrier, does not need expensive measuring equipment just can accurately find out the bad place of package carrier.
For achieving the above object, the present invention discloses a kind of detection method of package carrier, it measures sheet in alignment with on the package carrier with a printing opacity that indicates measurement pattern, and inspect the relativeness that each detail structure and described printing opacity on the described package carrier are measured measurement pattern on the sheet, but being the correct thin portion size of described package carrier, wherein said measurement pattern adds the pattern of permissible error scope.Bad where the size that can judge each detail structure on the described package carrier according to described relative position relation is.
The present invention discloses a kind of checkout gear of package carrier in addition, is to be used for inspecting thin portion size on the package carrier, and it comprises a printing opacity and measures a sheet and a load bearing seat.Described package carrier places on the load bearing seat, again described printing opacity is measured the sheet aligning and is stacked and placed on the described package carrier.Inspect on the described package carrier thin portion's size and described printing opacity and measure the relative position relation of measurement pattern on the sheet, can judge carefully bad where portion's size is on the described package carrier.
Described checkout gear comprises a upper cover body in addition, and described upper cover body can be pressed together on described printing opacity and measure on the sheet, makes described printing opacity measure sheet and fits fully and be aligned in described package carrier surface.
Described load bearing seat is provided with stepped a plurality of breasting faces, can be individually fixed in for the described package carrier of different in width on the corresponding described breasting face.Each described breasting face is provided with a plurality of tips of leading can measure the sheet fixed position for described package carrier and described printing opacity.
Description of drawings
Fig. 1 be a conventional package carrier on look schematic diagram;
Fig. 2 is the enlarged drawing of A part among Fig. 1;
Fig. 3 is the schematic perspective view of the checkout gear of package carrier of the present invention;
Fig. 4 (a) and 4 (b) are the comparing result schematic diagram of a measurement pattern and interior pin;
Fig. 5 is the comparing result schematic diagram of another measurement pattern and interior pin;
Fig. 6 is the comparing result schematic diagram of a measurement pattern and adhesive tape;
Fig. 7 is the schematic diagram that a printing opacity is measured sheet;
Fig. 8 measures the schematic diagram of sheet for another printing opacity; With
Fig. 9 measures the schematic diagram of sheet for another printing opacity.
Embodiment
Fig. 3 is the schematic perspective view of the checkout gear of package carrier of the present invention.Checkout gear 30 comprises a load bearing seat 31, a printing opacity is measured a sheet 32 and a upper cover body 33.The upper surface of load bearing seat 31 has stepped a plurality of breasting faces, and it comprises the first breasting face 311 and the second breasting face 312, can supply the package carrier 80 of different in width to be fixed on the corresponding breasting face respectively.On the first breasting face 311, be provided with first and lead the tip 314 (guide pin), on the second breasting face 312, be provided with second in addition again and lead the tip 315.Lead the tip 314 or second by first and lead the tip 315 and passed through location hole 81 on the package carrier 80, just can be accurately the fixing relative position of package carrier 80 and load bearing seat 31.
The printing opacity measurement sheet 32 that indicates measurement pattern 322 is stacked and placed on the package carrier 80.Because printing opacity is measured the dual-side of sheet 32 and is provided with a plurality of measurement and positionings hole 321, therefore lead the tip 314 or second by first equally and lead the tip 315 and passed through measurement and positioning hole 321, just can accurately aim at the relative position that printing opacity is measured sheet 32 and package carrier 80.As long as inspect on the package carrier 80 relativeness of corresponding measurement pattern 322 on thin portion size and the printing opacity measurement sheet 32, just can judge bad where at least one detail structure is on the package carrier 80.
Described checkout gear 30 comprises a upper cover body 33 in addition, pressing portion 332 by upper cover body 33 is pressed on the printing opacity measurement sheet 32, can make printing opacity measure sheet 32 and fit fully and be aligned in package carrier 80 surfaces, so measurement pattern 322 could valid metric package carriers 80 at least one detail structure.A plurality of observation forms 333 are arranged in the middle of the upper cover body 33, just can know from observation form 333 and inspect comparing result.For making the upper cover body 33 can slippage on load bearing seat 31, can utilize the loam cake that protrudes on the shoulder 316 of load bearing seat 31 to lead the tip 313 and insert in the loam cake location hole 331 of upper cover body 33 and fixed position.For avoiding first to lead the tip 314 or second and lead the pressing portion 332 that the tip 315 interferes with upper cover body 33, can be drilled with first location hole 334 and second location hole 335 is led the protrusion end that the tip 314 and second is led the tip 315 to hold first respectively at upper cover body 33 sides.
For strengthening the light luminance of thin portion's size and printing opacity measurement sheet 32 on the contrast package carrier 80, one light-emitting component 35 can be set for 31 times in load bearing seat.In addition, when on the package carrier 80 fixedly during crystal grain 84, crystal grain 84 can be beneficial to printing opacity towards load bearing seat 31 and measure sheet 32 and still tightly fit on the package carrier 80.
Fig. 4 (a) and 4 (b) are the comparing result of a measurement pattern 323 and interior pin 112, can measure the position of related features of each detail structure on the package carrier.When interior pin 112 crooked amounts surpassed the permission specification, the outline line meeting and the measurement pattern 323 of its end were intersected; Otherwise it is interior or overlapping that whole interior pins 112 can drop on measurement pattern 323, shown in Fig. 4 (b).Described measurement pattern 323 is correct interior pin 112 sizes to be drawn form.
In addition, also be a measuring position tolerance schematic diagram as shown in Figure 5, can be by more simple measurement pattern 324 (indicating the scope of permissible error) and 325 to simplify the contrast operation.The circular described measurement pattern 324 of the end of pin 112 contact in the left side, the and when end of pin 112 is relatively away from described measurement pattern 324 on the right side in, survey crew just can be judged the skew of all turning right of interior pin 112 ends.Certainly whether pin 112 roots also had the phenomenon of skew in leg-of-mutton described measurement pattern 325 can be used to judge.
Fig. 6 is the comparing result schematic diagram of a measurement pattern 326 and adhesive tape 60, also is a measuring position tolerance schematic diagram.Circle position, 61 hole or circuit on the adhesive tape 60 are significant dimensions, therefore measure the broken circle zone of sheet 32 the above measurement pattern 326 by printing opacity, just can compare whether circle 61 has exceeded the permission specification on the adhesive tape 60, present embodiment not only is defined in measures employed adhesive tape in the winding carrier package, more applicable to lead frame or other detail structure that need contrast, so long as important position, hole or circuit all can be applicable to embodiments of the invention.Above-mentioned detection method not only is simple and easy to implement, and more can avoid the ruler conversion and contrast bonding wire figure repeatedly.
Fig. 7 is the schematic diagram that a printing opacity is measured sheet, can be used for measuring the dimensional tolerance of each detail structure on the package carrier, adds the pattern of permissible error scope but wherein said measurement pattern is the correct thin portion size of described package carrier.Printing opacity is measured on the sheet 32 except circular measurement pattern 326 is arranged, and also has the less measurement pattern 326 of a diameter ' and bigger measurement pattern 326 ＂ of a diameter.Behind the centrally aligned of the center of position, hole to be measured or circular bond pad and measurement pattern 326, just can by measurement pattern 326 ' and the circumference range of measurement pattern 326 ＂ determine position, described hole or circular bond pad whether actual diameter be too small or excessive.If the diameter that make the position, hole is too small, then can drop on measurement pattern 326 ' in; On the contrary, if the diameter that make the position, hole is excessive, then can drop on outside measurement pattern 326 ＂.
Fig. 8 is the schematic diagram of another printing opacity measurement sheet, can be used for measuring the dimensional tolerance and the position of related features of each detail structure on the package carrier.Printing opacity is measured sheet 32 ' two groups of measurement pattern about having, and each is organized all a measuring basis mark 328 and 328 '.Can guarantee to aim at mutually with package carrier to be measured by described measuring basis mark 328, the central point of measuring basis mark 328 ' can guarantee and treat gaging hole position is aimed at again.Can measure earlier by the measuring basis mark 328 on measurement pattern 327 and the right and to treat whether position deviation of gaging hole position, if measurement pattern 327 and 327 ' between, then expression drops within the admissible position of related features.When measuring basis mark 328 ' when aligning is treated the central point of gaging hole position, and measurement pattern 326,326 ' and 326 ＂ again, whether the actual diameter that just can further confirm position, described hole conformance with standard, promptly whether make bad and cause diameter excessive (exceed measurement pattern 326 ＂ circumference outer) or too small (fall within measurement pattern 326 ' week in week in), use the identification dimensional tolerance.
Fig. 9 is the schematic diagram of another printing opacity measurement sheet, can be used for measuring the dimensional tolerance and the position of related features of each detail structure on the package carrier.Two groups of measurement pattern about printing opacity measurement sheet 32 ＂ have are suitable for measuring different structure to be measured (is that position, hole and is interior pin) respectively, and each is organized all a measuring basis mark 328 ' and 328 ＂.The explanation of the measuring process of two groups of measurement pattern such as Fig. 8 and Fig. 4 (a) discloses, so not in this detailed description.
Technology contents of the present invention and technical characterstic disclose as above, yet the those skilled in the art still may be based on teaching of the present invention and announcement and made all substitutions and modifications that do not deviate from spirit of the present invention.Therefore, protection scope of the present invention should be not limited to the content that embodiment discloses, and should comprise the various substitutions and modifications of the present invention that do not deviate from, and is contained by appending claims.
Claims (18)
1. the detection method of a package carrier comprises the following step:
One printing opacity that indicates measurement pattern is measured sheet in alignment with a package carrier;
Inspect at least one detail structure and described printing opacity on the described package carrier and measure the relativeness of the described measurement pattern of sheet; With
Judge according to described relativeness whether described package carrier is bad.
2. the detection method of package carrier according to claim 1, wherein said package carrier are the adhesive tape of conductive metal frames or coil type encapsulation.
3. the detection method of package carrier according to claim 2, the wherein bad crooked or size of size of interior pin that comprises described conductive metal frames.
4. the detection method of package carrier according to claim 2, position, hole or the offset of circuit or the size of position, described hole or wire sizes on the wherein said bad adhesive tape that comprises described coil type encapsulation.
5. the detection method of package carrier according to claim 2, wherein said bad comprise position, hole or the offset of circuit or the size of position, described hole or wire sizes on the described conductive metal frames.
6. the detection method of package carrier according to claim 1 adds the pattern of permissible error scope but wherein said measurement pattern is the correct thin portion size of described package carrier.
7. the checkout gear of a package carrier is used for detecting the thin portion size of a package carrier, comprises:
One printing opacity is measured sheet, is stacked and placed on described package carrier surface, and described printing opacity measurement sheet surface marking has at least one measurement pattern; With
One load bearing seat, but support and fixing described package carrier;
Thin portion size by inspecting described package carrier and described printing opacity are measured the relativeness of the described measurement pattern of sheet, judge whether at least one detail structure is bad on the described package carrier.
8. the checkout gear of package carrier according to claim 7 adds the pattern of permissible error scope but wherein said measurement pattern is the correct thin portion size of described package carrier.
9. the checkout gear of package carrier according to claim 7, wherein said printing opacity are measured the position of related features that measurement pattern on the sheet is used for measuring at least one detail structure on the described package carrier.
10. the checkout gear of package carrier according to claim 7, wherein said printing opacity are measured the dimensional tolerance that measurement pattern on the sheet is used for measuring at least one detail structure on the described package carrier.
11. the checkout gear of package carrier according to claim 7, the measurement pattern on the wherein said printing opacity measurement sheet is used for measuring the position of related features and the dimensional tolerance of at least one detail structure on the described package carrier.
Have at least two measurement pattern 12. the checkout gear of package carrier according to claim 7, wherein said printing opacity are measured on the sheet, but wherein a measurement pattern is the measurement size tolerance, but another measurement pattern then is the measuring position tolerance.
13. the checkout gear of package carrier according to claim 12, described at least two measurement pattern on the wherein said printing opacity measurement sheet are used for measuring the position of related features and the dimensional tolerance of same detail structure on the described package carrier respectively.
14. the checkout gear of package carrier according to claim 12, described at least two measurement pattern that wherein said printing opacity is measured on the sheet are used for measuring the position of related features of first detail structure on the described package carrier and the dimensional tolerance of second detail structure respectively.
15. the checkout gear of package carrier according to claim 7, it comprises a upper cover body in addition, and described upper cover body is pressed together on described printing opacity and measures on the sheet, makes described printing opacity measure sheet and fits fully and be aligned in described package carrier surface.
16. the checkout gear of package carrier according to claim 15, wherein said upper cover body have a plurality of observation forms, measure relative position relation between the measurement pattern of sheet for inspecting each described package carrier and corresponding described printing opacity.
17. the checkout gear of package carrier according to claim 7, wherein said load bearing seat are provided with stepped a plurality of breasting faces, supply the described package carrier of different in width to be individually fixed on the corresponding described breasting face.
18. the checkout gear of package carrier according to claim 7, it comprises the light-emitting component of being located at described load bearing seat below in addition, and the irradiate light that described light-emitting component sends is measured sheet to described package carrier and described printing opacity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100789380A CN100468678C (en) | 2006-04-27 | 2006-04-27 | Method for detecting package carrier and its apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100789380A CN100468678C (en) | 2006-04-27 | 2006-04-27 | Method for detecting package carrier and its apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101064266A CN101064266A (en) | 2007-10-31 |
| CN100468678C true CN100468678C (en) | 2009-03-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100789380A Expired - Fee Related CN100468678C (en) | 2006-04-27 | 2006-04-27 | Method for detecting package carrier and its apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN100468678C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103050481A (en) * | 2012-12-28 | 2013-04-17 | 日月光半导体（昆山）有限公司 | Printing detection tool |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101567322B (en) * | 2008-04-21 | 2010-11-17 | 南茂科技股份有限公司 | Encapsulating structure and encapsulating method of chip |
-
2006
- 2006-04-27 CN CNB2006100789380A patent/CN100468678C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103050481A (en) * | 2012-12-28 | 2013-04-17 | 日月光半导体（昆山）有限公司 | Printing detection tool |
| CN103050481B (en) * | 2012-12-28 | 2015-07-15 | 日月光半导体（昆山）有限公司 | Printing detection tool |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101064266A (en) | 2007-10-31 |
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Granted publication date: 20090311 Termination date: 20200427 |