CN100464873C - 狭缝喷嘴 - Google Patents
狭缝喷嘴 Download PDFInfo
- Publication number
- CN100464873C CN100464873C CNB200610149985XA CN200610149985A CN100464873C CN 100464873 C CN100464873 C CN 100464873C CN B200610149985X A CNB200610149985X A CN B200610149985XA CN 200610149985 A CN200610149985 A CN 200610149985A CN 100464873 C CN100464873 C CN 100464873C
- Authority
- CN
- China
- Prior art keywords
- bolt
- hole
- halfbody
- groove
- gap nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Nozzles (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Description
Claims (2)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005312998 | 2005-10-27 | ||
JP2005312998A JP4804873B2 (ja) | 2005-10-27 | 2005-10-27 | スリットノズル |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1954924A CN1954924A (zh) | 2007-05-02 |
CN100464873C true CN100464873C (zh) | 2009-03-04 |
Family
ID=38062593
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200610149985XA Active CN100464873C (zh) | 2005-10-27 | 2006-10-25 | 狭缝喷嘴 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4804873B2 (zh) |
KR (1) | KR100766216B1 (zh) |
CN (1) | CN100464873C (zh) |
TW (1) | TWI346346B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5587531B2 (ja) * | 2007-07-19 | 2014-09-10 | ノードソン コーポレーション | スロットノズル組立体、スロットコートガン、及び幅広の帯状に発泡性溶融体を押し出す方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11274071A (ja) * | 1998-01-19 | 1999-10-08 | Tokyo Ohka Kogyo Co Ltd | 塗布用ノズル |
JP2000033312A (ja) * | 1998-07-15 | 2000-02-02 | Dainippon Printing Co Ltd | 塗布装置 |
JP2003001145A (ja) * | 2001-06-18 | 2003-01-07 | Tokai Gokin Kogyo Kk | スリットノズル |
JP2004113934A (ja) * | 2002-09-26 | 2004-04-15 | Tokyo Ohka Kogyo Co Ltd | スリットノズル洗浄装置及び洗浄方法 |
CN1611304A (zh) * | 2003-10-27 | 2005-05-04 | 东京応化工业株式会社 | 狭缝喷嘴 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60129507U (ja) * | 1984-02-10 | 1985-08-30 | 三菱重工業株式会社 | ボルト締結構造 |
JPS61108601U (zh) * | 1984-12-21 | 1986-07-10 | ||
JPS6298011A (ja) * | 1985-10-21 | 1987-05-07 | 株式会社日立製作所 | 締結構造 |
KR100871343B1 (ko) * | 2002-03-29 | 2008-12-01 | 주식회사 케이씨텍 | 2유체 혼합물에 의한 기판 세정용 노즐 |
JP2004314053A (ja) * | 2003-03-28 | 2004-11-11 | Dainippon Printing Co Ltd | 塗布液吐出用ダイヘッド |
JP2005137974A (ja) * | 2003-11-04 | 2005-06-02 | Toyo Knife Co Ltd | 塗布ヘッド及び塗布装置 |
-
2005
- 2005-10-27 JP JP2005312998A patent/JP4804873B2/ja active Active
-
2006
- 2006-09-27 TW TW095135824A patent/TWI346346B/zh active
- 2006-10-25 CN CNB200610149985XA patent/CN100464873C/zh active Active
- 2006-10-26 KR KR1020060104293A patent/KR100766216B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11274071A (ja) * | 1998-01-19 | 1999-10-08 | Tokyo Ohka Kogyo Co Ltd | 塗布用ノズル |
JP2000033312A (ja) * | 1998-07-15 | 2000-02-02 | Dainippon Printing Co Ltd | 塗布装置 |
JP2003001145A (ja) * | 2001-06-18 | 2003-01-07 | Tokai Gokin Kogyo Kk | スリットノズル |
JP2004113934A (ja) * | 2002-09-26 | 2004-04-15 | Tokyo Ohka Kogyo Co Ltd | スリットノズル洗浄装置及び洗浄方法 |
CN1611304A (zh) * | 2003-10-27 | 2005-05-04 | 东京応化工业株式会社 | 狭缝喷嘴 |
Also Published As
Publication number | Publication date |
---|---|
TWI346346B (en) | 2011-08-01 |
TW200727333A (en) | 2007-07-16 |
JP2007117877A (ja) | 2007-05-17 |
CN1954924A (zh) | 2007-05-02 |
JP4804873B2 (ja) | 2011-11-02 |
KR100766216B1 (ko) | 2007-10-10 |
KR20070045939A (ko) | 2007-05-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230608 Address after: Ibaraki Patentee after: Ameco Technology Co.,Ltd. Address before: Kanagawa, Japan Patentee before: Process Equipment Business Division Preparation Co.,Ltd. Effective date of registration: 20230608 Address after: Kanagawa, Japan Patentee after: Process Equipment Business Division Preparation Co.,Ltd. Address before: Kanagawa Patentee before: TOKYO OHKA KOGYO Co.,Ltd. |
|
TR01 | Transfer of patent right |