CN100452341C - 中电流注入设备与标准机械接口的通讯和控制方法 - Google Patents
中电流注入设备与标准机械接口的通讯和控制方法 Download PDFInfo
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- CN100452341C CN100452341C CNB2006100299964A CN200610029996A CN100452341C CN 100452341 C CN100452341 C CN 100452341C CN B2006100299964 A CNB2006100299964 A CN B2006100299964A CN 200610029996 A CN200610029996 A CN 200610029996A CN 100452341 C CN100452341 C CN 100452341C
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2006100299964A CN100452341C (zh) | 2006-08-11 | 2006-08-11 | 中电流注入设备与标准机械接口的通讯和控制方法 |
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CNB2006100299964A CN100452341C (zh) | 2006-08-11 | 2006-08-11 | 中电流注入设备与标准机械接口的通讯和控制方法 |
Publications (2)
Publication Number | Publication Date |
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CN101123199A CN101123199A (zh) | 2008-02-13 |
CN100452341C true CN100452341C (zh) | 2009-01-14 |
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CNB2006100299964A Expired - Fee Related CN100452341C (zh) | 2006-08-11 | 2006-08-11 | 中电流注入设备与标准机械接口的通讯和控制方法 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11176912A (ja) * | 1997-12-08 | 1999-07-02 | Mitsubishi Electric Corp | 半導体基板処理装置及びその制御方法 |
US20030046023A1 (en) * | 2001-08-31 | 2003-03-06 | Daifuku Co., Ltd. | Load storage apparatus |
JP2003188128A (ja) * | 2001-12-18 | 2003-07-04 | Sumitomo Electric Ind Ltd | ウエハ搬送装置 |
JP2003209149A (ja) * | 2001-11-02 | 2003-07-25 | Ebara Corp | 検査装置を内蔵する半導体製造装置および該製造装置を用いるデバイス製造方法 |
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2006
- 2006-08-11 CN CNB2006100299964A patent/CN100452341C/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11176912A (ja) * | 1997-12-08 | 1999-07-02 | Mitsubishi Electric Corp | 半導体基板処理装置及びその制御方法 |
US20030046023A1 (en) * | 2001-08-31 | 2003-03-06 | Daifuku Co., Ltd. | Load storage apparatus |
JP2003209149A (ja) * | 2001-11-02 | 2003-07-25 | Ebara Corp | 検査装置を内蔵する半導体製造装置および該製造装置を用いるデバイス製造方法 |
JP2003188128A (ja) * | 2001-12-18 | 2003-07-04 | Sumitomo Electric Ind Ltd | ウエハ搬送装置 |
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CN101123199A (zh) | 2008-02-13 |
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C14 | Grant of patent or utility model | ||
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140108 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20140108 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090114 Termination date: 20180811 |