CN100451657C - Body of microdiaphragm accelerating sensor and production thereof - Google Patents
Body of microdiaphragm accelerating sensor and production thereof Download PDFInfo
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- CN100451657C CN100451657C CNB2005100076321A CN200510007632A CN100451657C CN 100451657 C CN100451657 C CN 100451657C CN B2005100076321 A CNB2005100076321 A CN B2005100076321A CN 200510007632 A CN200510007632 A CN 200510007632A CN 100451657 C CN100451657 C CN 100451657C
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Abstract
The present invention relates to a body of a miniature diaphragm type acceleration sensor and a preparing method. The body comprises a silicon diaphragm, an upper cover, a lower cover, gold electrodes and a leading wire encapsulating structure, wherein the centers of the upper and the lower surfaces of the silicon diaphragm are provided with round mass blocks, and the circumference of the silicon diaphragm is provided with a raised round ring. The symmetrical position of the inner side of the raised round ring and the outer side of each of the mass blocks is provided with two pairs of one-dimensional or two-dimensional nanometer materials. The circumference of the upper cover or the lower cover is provided with a raised round ring, and the center point in the upper cover or the lower cover is provided with a raised protecting block. N pairs of gold electrodes and leading wires are made on the diaphragm and a nanometer sensing element, and the diaphragm is positioned between the upper cover and the lower cover and is bonded together. By using bonding technology, a conducting wire is led out. The manufacture technology of the present invention comprises that under the induction of centrifugal force or an electrode electric field, the orientation and the controllable growth of the nanometer materials on a microstructure are realized by using chemical vapor deposition technology. The miniature diaphragm type acceleration sensor of the present invention has the advantage of very high sensitivity and can be produced in batch.
Description
Technical field
The present invention relates to the body and the manufacture method of mini inertial sensor, particularly relate to a kind of body construction and manufacture method thereof of the diaphragm micropump formula acceleration transducer based on nano material.
Technical background
Acceleration transducer is a sensor important in inertial navigation, kinematic parameter and the attitude measurement, miniature acceleration sensor particularly, have advantages such as size is little, in light weight, cost is low, it is integrated to be convenient to, can produce in batches, have a wide range of applications in fields such as Aero-Space, military affairs, automobiles.
In recent years, develop rapidly along with micromachining technology, multiple miniature acceleration sensor has appearred, can be divided into according to the metering system difference: piezoresistive strain type, dynamic balance type, capacitor type, dynamic balance capacitor type, piezo-electric type, tunnel type, heat-conduction-type, latch-type, multiaxis integrated-type and accelerometer array or the like automatically, and develop to high precision, integrated direction.
The invention belongs to the accelerometer of piezoresistive strain type, this class accelerometer produces early, simple and reliable for structure, flexural deformation by pressure drag component causes the change of himself resistance value, cause Wheatstone bridge output correspondent voltage signal (Tao Baoqi etc. resistance strain type sensor. National Defense Industry Press, 1993.).The structure of general miniature piezoresistive strain type accelerometer semi-girder commonly used or support beam, traditional pressure drag component are to adopt paster or micro-processing technology to be spread on the girder construction, and temperature influence is big, needs circuit compensation.
Nano material is a focus of present material science research, the corresponding nanometer technology that grows up then be acknowledged as 21 century have most future scientific research field and will cause a new industrial revolution.It is of a great variety that nano material comprises, distinguishes according to space dimensionality, and what belong to the zero dimension material has nano particle and a powder, nanotube, nano wire being arranged and belong to the nano belt of two-dimensional material and nano thin-film or the like of one dimension.Because characteristic dimension is nanometer, nano material has that conventional materials such as unique electrology characteristic, mechanical property and size effect, surface effect, quantum effect do not have receive effect (Zhu waits quietly. nano material and device. publishing house of Tsing-Hua University, 2003.).For example, carbon nano-tube has very high Young modulus, tensile strength: its theoretical tensile strength is 100 times of steel, and density only is 1/6 of steel, and chemical property is stable, be difficult for reacting with other material, and physical strength height, good toughness.And according to the difference of helicity and diameter, carbon nano-tube can show metallicity, semiconductive and semimetal.There are some researches show, the conductivity of carbon nano-tube increases generation with strain and descends significantly (when STRESS VARIATION 3.2%, conductivity reduces 2 orders of magnitude), and current capacity is very big, the temperature coefficient of resistance minimum (Thomas W.Tombler, Chongwu Zhou, Leo Alexseyev.Reversibleelectromechanical characteristics of carbon nanotubes under local-probe manipulation.Nature, 2000,405 (6): 769～772).Therefore, utilize the character of nano material uniqueness and, for the research of hypersensitivity sensor provides a new thinking in conjunction with present miniature sensitive structure.
Summary of the invention
One of purpose of the present invention provide a kind of on silicon diaphragm growth of one-dimensional or two-dimensional nano material as sensitive element, form the sensor body structure that micro-nano combines with the upper and lower cover encapsulation, utilize new effects such as nano material is highly sensitive, temperature coefficient is little, realize the high-acruracy survey of diaphragm type acceleration transducer.
Two of purpose of the present invention is, a kind of preparation method with micro-nano in conjunction with the diaphragm micropump formula acceleration transducer body construction of characteristics is provided.
The body of diaphragm micropump formula acceleration transducer provided by the invention comprises diaphragm, gold electrode and leaded packages; It is characterized in that, also comprise: loam cake, lower cover, be positioned at the mass on the diaphragm, and on diaphragm one dimension or two-dimensional nano material arranged evenly; Wherein establishing a thickness at the upper and lower centre of surface of described diaphragm is 10 μ m-250 μ m, and radius is the mass of 50 μ m-6mm circles; Periphery at diaphragm has a protruding circular ring, and width is: 100 μ m-10mm, thickness are 10 μ m-250 μ m; Inboard and symmetrical place, the mass outside is provided with two pairs or more described one dimension or two-dimensional nano material respectively at protruding circular ring; Described loam cake or lower cover are identical with the silicon diaphragm diameter, at its periphery one protruding circular ring is arranged, it highly is 10 μ m-500 μ m, width is identical with the protruding circular ring of diaphragm, and a projection protection piece is established in the center in loam cake and lower cover, this protection tile height is 1 μ m-100 μ m, and radius is 50 μ m-6mm; On described diaphragm and described one dimension or two-dimensional nano material, make N to gold electrode and lead-in wire; Diaphragm is between loam cake, the lower cover, is bonded together, and adopts bond technology to draw lead.
In above-mentioned technical scheme, described diaphragm, loam cake and lower cover silicon wafer to manufacture, three's diameter is identical.
In above-mentioned technical scheme, the radius of described diaphragm is 100 μ m-10mm.
In above-mentioned technical scheme, described N is to gold electrode, and wherein N is an integer.
In above-mentioned technical scheme, described one dimension or two-dimensional nano material comprise nanotube, nano wire and nano belt that carbon or metallic compound (for example zinc paste, gallium oxide, gallium nitride etc.) form, and its length is 10nm-100 μ m; Described M is a positive integer more than 2 to the M of one dimension or two-dimensional nano material.
In above-mentioned technical scheme, described one dimension or the position distribution of two-dimensional nano material on diaphragm, each point is radially arranged with the numerical value of tangential strain on the diaphragm that is subjected to causing behind the acceleration signal according to mass.
The present invention also provides the manufacturing process of diaphragm micropump formula acceleration transducer body, may further comprise the steps:
1) choose 3 of the silicon chips of twin polishing, respectively as lower cover, the substrate of loam cake and diaphragm, with hot oxygen method respectively at lower cover, the one side of loam cake and at the two sides of the substrate of making diaphragm growthing silica mask layer 7;
2) the upper and lower surface of substrate of silicon dioxide mask is arranged in step 1) growth, adopt photolithography patterning and anisotropic etch process, a circular mass that protrudes in the middle of making and be etched into a protruding annulus at the circumference of this silicon chip, the film thickness between mass and the annulus is 1 μ m-50 μ m;
3) dissolve silicon dioxide mask layer on the silicon chip, obtain having the diaphragm of mass;
4) membrane surface of making in step 3) is evenly grown layer of silicon dioxide as electric insulation layer, guarantees the electrode of follow-up making and go between to realize normal function;
5) lower cover of step 1) being made that has silicon dioxide layer and loam cake respectively with photoresist as mask, adopt RIE technology etching silicon dioxide, form the silicon dioxide mask layer, remove photoresist after etching finishes;
6) lower cover that step 5) is obtained and loam cake carry out anisotropic etching, etch the dark hole of 10 μ m-400 μ m at silicon chip surface, remove silicon dioxide mask layer 7 then;
7) at lower cover and loam cake superficial growth 300nm silicon dioxide, photolithography patterning, the processing mask of protection piece in the middle of forming; Adopt anisotropic etching, working depth 1 μ m-100 μ m forms the hole of 10 μ m-500 μ m; Remove silicon dioxide mask layer 7;
8) utilize centrifugal force to induce, make the nanometer sensitive element:
(a) get the diaphragm that step 4) makes, select the correspondence position of intermediate coat lamella to begin operation;
(b) utilize aluminium oxide as mask, four pairs of iron films that evaporation 5nm is thick on diaphragm are as the catalyzer of carbon nano-tube, and the distance of every pair of iron film is 10nm-100 μ m;
(c) making whole microstructure is the axle rotation with the center, under the inducing of centrifugal force, utilizes chemical vapor deposition (hereinafter to be referred as CVD) method at the intermembranous sensitive elements such as carbon nano-tube, or nano wire, nano belt that grow of iron;
(d) utilize photolithography patterning, and adopt metal sputtering technology, the carbon nanotubes grown two ends make N to gold electrode and lead-in wire on diaphragm, and wherein N is an integer, gold electrode width 1 μ m-10 μ m, and thickness 300nm, the distance of every pair of electrode is 10nm-100 μ m; By lead-in wire N is connected according to the electric bridge form the electrode at nanometer sensitive element two ends, and be arranged as two external power ports (positive and negative electrode) and two signal output ports at the outer lug annulus place of intermediate coat lamella;
9) ready-made diaphragm, loam cake and the lower cover that has mass is bonded together, and adopts bond technology to draw lead, finish the making of sensor body.
One dimension or two-dimensional nano material are fixed in the method on the diaphragm, comprise that direct catalytic growth of original position or the nano material that will prepare separately migrate on the diaphragm.
The method of direct catalytic growth one dimension of described original position or two-dimensional nano material, be included in oriented growth between the electrode of diaphragm and go out nano material as detecting element, making whole microstructure simultaneously is the axle rotation with the center, under the inducing of centrifugal force, utilize chemical gaseous phase depositing process between electrode, to grow nano material.
The method of direct catalytic growth one dimension of described original position or two-dimensional nano material is included in and makes a microflute on the microstructure, and makes pair of electrodes in two sides of microflute.Between electrode, add certain voltage, make the direction of an electric field of generation consistent, under the inducing of electric field force, utilize chemical gaseous phase depositing process between electrode, to grow nano material with the direction of the nano material that will grow.
The middle diaphragm that has mass is the core of sensor body, and according to the needs of different occasions, the radius of mass can be designed as 50 μ m-6mm, and corresponding, the radius of diaphragm can be selected at 100 μ m-10mm.The size of nanometer sensitive element becomes according to diaphragm size, generally between 10nm-100 μ m.The effect of the upper and lower cover of sensor body is that middle diaphragm is encapsulated, and provides overload protection to the mass on the diaphragm, prevents that diaphragm from causing fracture failure owing to deflection is excessive.
Circular film with Fig. 1 is an example, and the concrete composition of above-mentioned diaphragm micropump formula acceleration transducer and detection principle are described as follows:
Yardstick is the accurately strain in the very low range on the measuring diaphragm of nano material of nanometer scale, and therefore, arranging of nano material seems extremely important.If diaphragm adopts isotropic material, internal diameter and the external diameter of establishing diaphragm are respectively b and a, the distribution curve of the radial strain of each point such as Fig. 2 on the diaphragm.As we know from the figure, radial strain reaches positive maximal value (establish stretching strain for just) when r=b, reach negative maximal value during r=a, and the vanishing of answering of any is arranged in [b, a] interval.
According to the strain distribution state of Fig. 2, if adopt four nano materials (R1, R2, R3 and R4) as sensitive element, r=b that is distributed in diaphragm and r=a place (as shown in Figure 1) that can they are radially symmetrical.When extraneous acceleration affacts mass, mass will drive the displacement that circular film produces vertical direction, thus make strain that nano material produces radial strain: R1 and R3 on the occasion of, the strain of R2 and R4 is a negative value.For the ease of showing and write down the size of strain value, can realize that the most frequently used a kind of method of this conversion is to adopt bridge diagram nano material because the resistance variations that strain produces be converted to the variation of voltage or electric current.Fig. 3 is the reduced graph of dc bridge circuit, 4 resistance R
1～R
4Represent the resistance of 4 nano materials respectively.A diagonal line cut-in operation voltage U of electric bridge, then another diagonal line is an output voltage U
0If the thickness of diaphragm is t, Poisson ratio is μ, K
dBe the gage factor of nano material, M is the equivalent mass of motion parts, and E is the Young film amount of diaphragm material, the then output voltage U of electric bridge
0With the overall strain ε of four nano materials and the pass of acceleration a be:
By following formula as can be known, acceleration signal is directly proportional with the output voltage of the direct current bridge that nano material is formed, as long as therefore measure output voltage, just can measure the size of acceleration.Compare with the strainometer of routine, nano material has the gage factor of extra small size and superelevation, and the layout of nano material done computation optimization, and therefore this diaphragm micropump formula sensitive structure has very high sensitivity.In addition, because structural symmetry, so the strain of diaphragm is even, has higher impact resistance.
The present invention has the following advantages with respect to existing: the structure of general miniature piezoresistive strain type accelerometer semi-girder commonly used or support beam, the present invention adopts the mode of circular membrane strain, improves degree of strain and reliability of structure.Traditional pressure drag component is to adopt paster or micro-processing technology to be spread on the girder construction, and temperature influence is big, needs circuit compensation.The present invention adopts nano material to make pressure drag component, is subjected to the influence of environment temperature little, and higher sensitivity and precision can be provided.
The sensor that utilizes body construction provided by the invention to make, acceleration (power) signal acts on and makes diaphragm generation strain on the mass, utilizes the nano material on the diaphragm to measure strain, thereby can draw the numerical value of tested acceleration signal.
1. the present invention is a kind of body construction of miniature acceleration sensor spare, adopts the micro-nano new structure form that combines; Compact conformation, size are little.
2. the sensor that utilizes body construction provided by the invention to make is influenced by ambient temperature little, and very high detection sensitivity and precision can be provided.
3. the body method for making technology of miniature acceleration sensor spare provided by the invention, main proposition employing electric field is induced the new method with centrifugal force induced growth carbon nanomaterial.
Description of drawings
Fig. 1 a is the body construction principal section figure of diaphragm micropump formula acceleration transducer of the present invention, and dimensional units is a micron among the figure
Fig. 1 b is the body construction A-A sectional view of diaphragm micropump formula acceleration transducer of the present invention
Fig. 2 be the present invention by the circular film center that calculates when stressed, each point radial strain distribution figure
Fig. 3 is the dc bridge circuit sketch that the present invention uses
Fig. 4 is the manufacture craft that has the middle diaphragm of mass among the embodiment 3, and dimensional units is a micron among the figure
Fig. 5 is the dimensional drawing and the manufacture craft of lower cover among the embodiment 3, and dimensional units is a micron among the figure
Fig. 6 is the manufacture craft process flow diagram of one dimension or two-dimensional nano material in the diaphragm micropump formula acceleration transducer made of embodiment 3
Fig. 7 is an another embodiment of the present invention, the making process flow diagram of the sensor body of embodiment 4
Fig. 8 is the layout of membrane surface electrode and lead-in wire
The drawing explanation:
1, loam cake; 2, nano material; 3, diaphragm;
4, mass; 5, protection piece; 6, lower cover;
7, earth silicon mask layer; 8, middle layer silicon chip; 9, catalyzer iron film;
10, gold electrode; 11, carbon nano-tube; 12, insulation course;
13, the silicon chip of loam cake or lower cover; 14, hole;
15, protruding circular ring 16, edge
Embodiment
The present invention will be described in detail below in conjunction with embodiment and accompanying drawing:
Embodiment 1
With reference to figure 1, make the body of a diaphragm micropump formula acceleration transducer, the silicon chip, that comprises 3 twin polishings is the silicon chip of lower cover 6, another piece twin polishing substrate as diaphragm 3 for loam cake 1, one; The silicon chip thickness of diaphragm 3 is 240 μ m, radius 12mm; At the upper and lower centre of surface of this silicon chip one thickness being set is 240 μ m, and radius is the circular mass 4 of 5.6mm; Periphery at this silicon chip has a protruding circular ring 15, and its annulus is wide to be 2400 μ m, and thickness is 100 μ m, forms diaphragm 3; In protruding circular ring 15 inboards and symmetrical place, mass 4 outsides two pairs of carbon nano-tube 11 are set.Described loam cake 1 or lower cover 6 are identical with diaphragm 3 diameter of silicon, periphery at loam cake 1 or lower cover 6 has a projection along 16, it highly is 100 μ m, width along 16 is identical with the protruding circular ring of silicon diaphragm 15, and a projection protection piece 5 is established in the center in loam cake 1 or lower cover 6, this protection piece 5 highly is 40 μ m, and radius is 5.6mm; Make 4 pairs of gold electrodes 10 and lead-in wire on diaphragm 3 and carbon nano-tube sensitive element 11, the width of gold electrode 10 is 10 microns, and thickness 300 nanometers, the distance of every pair of electrode are 2 microns; Diaphragm 3 is between loam cake 1 and the lower cover 6, is bonded together.By wires guides, and adopt bond technology to draw lead, the electrode at four pairs of nanometer sensitive element two ends is pressed the electric bridge form connect, as shown in Figure 3; Arrange at place, the outer of diaphragm 3 two external power ports (positive and negative electrode, as shown in Figure 8) and two signal output ports.
With reference to figure 1, make the body of a diaphragm micropump formula acceleration transducer, the silicon chip, that comprises 3 twin polishings is the silicon chip of lower cover 6, another piece twin polishing substrate as diaphragm 3 for loam cake 1, one; The structure of its loam cake 1, lower cover 6 and diaphragm 3 is with embodiment 1, and difference is:
The silicon chip thickness of diaphragm 3 is 12 μ m, radius 600 μ m, and at the upper and lower centre of surface of silicon chip one thickness being set is 12 μ m, radius is the circular mass 4 of 280 μ m; Protruding circular ring 15 is wide to be 120 μ m, and thickness is 5 μ m; In protruding circular ring 15 inboards and symmetrical place, mass 4 outsides two pairs of carbon nano-tube 11 are set respectively.The peripheral projection one of loam cake 1 or lower cover 6 highly be 5 μ m along 16; Protection piece 5 highly is 2 μ m, and radius is 280 μ m; Make 4 pairs of gold electrodes 10 and lead-in wire on diaphragm 3 and carbon nano-tube 11, the width of gold electrode 10 is 1 micron, and thickness 300 nanometers, the distance of every pair of electrode are 100 nanometers.
Present embodiment further specifies structure of the present invention in conjunction with concrete manufacturing step:
1. adopt photoetching and etching technics, get on the silicon chip of 3 twin polishings, produce the microstructure diaphragm 3 that has mass for one: diaphragm 3 inside and outside footpath sizes (Ri, Ro) are respectively 2.8 millimeters and 4.8 millimeters, and diaphragm 3 thickness are 20 microns, and the thickness of mass 4 is 120 microns.Concrete processing step following (as Fig. 4 (a)～(e)):
(a) with the two sides of hot oxygen method at the silicon chip 8 of twin polishing, the earth silicon mask layer 7 of each one deck 300nm that grows is shown in Fig. 4 (a);
(b) whirl coating photoetching: on the ready-made mask layer 7 of step (a), get rid of one deck photoresist and, adopt RIE technology etching silicon dioxide mask layer 7, remove photoresist with acetone after etching finishes graphically as mask;
(c) use KOH solution to carry out anisotropic etch, go out 50 microns dark holes 14 in the upper and lower surface etch of substrate;
(d) use HF solution corrosion falls the silicon dioxide mask layer 7 on the silicon chip, forms the diaphragm 3 that has mass 4;
(e) diaphragm 3 upper surfaces that obtain in step (d) are evenly grown the thick silicon dioxide of one deck 200nm as insulation course 12, guarantee that the gold electrode 10 of follow-up making and lead-in wire can realize normal function.
2. adopt above-mentioned processing step to make the loam cake 1 of body, lower cover 6: wherein the size of loam cake and lower cover are identical, as shown in Figure 5;
(a) be on the silicon chip 13 of 200 μ m with hot oxygen method at the thickness of twin polishing, the earth silicon mask layer 7 of growth 300nm;
(b) whirl coating photoetching: on the mask layer 7 of silicon chip 13, get rid of one deck photoresist, adopt RIE technology etching silicon dioxide mask layer 7, remove photoresist with acetone after etching finishes as mask layer.
(c) carry out anisotropic etch with KOH solution, go out 30 microns dark pits in basic silicon chip 13 surface etch, shown in Fig. 5 (c);
(d) use HF solution removal silicon dioxide mask layer 7, shown in Fig. 5 (d);
(e) growth one bed thickness 300nm earth silicon mask layer 7 on the substrate that step (d) obtains again, photolithography patterning, the processing mask of protection piece 5 in the middle of forming is shown in Fig. 5 (e);
(f) proceed anisotropic etch with KOH solution, 20 microns of working depths form 2 50 microns hole respectively, and at the high protection piece 5 of one 20 μ m of intermediate projections, radius is 100 μ m, shown in Fig. 5 (f);
(g) use HF solution removal silicon dioxide mask layer, make the loam cake 1 and the lower cover 6 that have the silicon of protecting piece 5, shown in Fig. 5 (g).
3. induce down at centrifugal force, the manufacturing process steps of nano material, as shown in Figure 6.
(a) correspondence position of the ready-made diaphragm 3 of selection, the θ position shown in Fig. 6 (a) begins operation;
(b) utilize aluminium oxide as mask layer, four couple that evaporation 5nm is thick on diaphragm 3 is as the catalyzer iron film 9 of carbon nano-tube, and the distance of every pair of catalyzer iron film 9 is 1 micron, shown in Fig. 6 (b);
(c) making whole microstructure is the axle rotation with the center, under the inducing of direction centrifugal force shown in Fig. 6 (c), utilizes CVD (chemical vapor deposition) method to grow carbon nano-tube 11 9 of catalyzer iron films;
(d) utilize photoresist graphical, and adopt metal sputtering technology, carbon nanotubes grown 11 two ends make 4 pairs of gold electrodes 10 and lead-in wire on diaphragm 3,10 microns of gold electrode 10 width, and thickness 300 nanometers, the distance of every pair of electrode is 1 micron.Electrode and lead-in wire method for arranging are as shown in Figure 8.
4. diaphragm 3, loam cake 1 and the lower cover 6 that will have mass are bonded together, and adopt bond technology to draw lead, finish the making of sensor body, shown in Fig. 6 (e).
The testing circuit of present embodiment is selected the Dynamic High-accuracy electric wire strain gauge for use.
The upper limiting frequency of the diaphragm micropump formula acceleration transducer that present embodiment is made is about 300Hz; (amplitude error is less than 0.5dB; Phase shift is less than 3 degree)
Embodiment 4:
The sensitive structure overall dimension is with embodiment 3 in the present embodiment, but present embodiment adopts the method for the electric field induced carbon nanotube growth that is produced by electrode.Concrete processing step following (with reference to figure 7):
1. adopt photoetching and etching technics, use silicon wafer to manufacture to go out to have the diaphragm 3 of mass and loam cake 1, lower cover 6, size, material and processing step are with embodiment 1;
2. the method that adopts electric field to induce is made the nano material 2 that is built in diaphragm 3, and concrete processing step is shown in Fig. 7 (a)-(f).
(a) get the diaphragm 3 that has prepared, select the correspondence position of diaphragm 3, the θ position as shown in Fig. 7 (a) begins operation;
(b) adopt the dry anisotropic etching, the position of preparing nano material grown on diaphragm 3 processes the square hole that the length of side and the degree of depth are respectively 2 microns and 3 microns respectively, shown in Fig. 7 (b), and totally 4 of quantity;
(c) at diaphragm 3 upper surfaces that the have mass 4 200 nanometer titanium dioxide silicon layers of growing, as the insulation course 12 of electrode and lead-in wire;
(d) utilize photolithography patterning and metal sputtering technology, make 4 pairs of gold electrodes 10 and lead-in wire, 10 microns of gold electrode 10 width, thickness 300 nanometers at the side of diaphragm 3 and square hole;
(e) utilize photolithography patterning and peel off (lift-off) technology, at the catalyzer iron film 9 of the thick four pairs of iron films of the side evaporation 5nm of square hole, shown in Fig. 7 (e) as carbon nano-tube;
(f) between gold electrode, add certain voltage, produce by the diaphragm center and point to outer radial electric field, under the inducing of electric field force, utilize CVD (chemical vapor deposition) method to grow carbon nano-tube 11 9 of catalyzer iron films;
3. diaphragm 3, loam cake and the lower cover 6 that will have quality 4 are bonded together, and adopt bond technology to draw lead, finish the making of sensor body part, shown in Fig. 7 (g).
Claims (9)
1. the body of a diaphragm micropump formula acceleration transducer comprises diaphragm, gold electrode and leaded packages; It is characterized in that, also comprise: loam cake, lower cover, be positioned at the mass on the diaphragm, and on diaphragm one dimension or two-dimensional nano material arranged evenly; Described mass thickness is 10 μ m-250 μ m, and radius is 50 μ m-6mm, and is located at the upper and lower centre of surface of described silicon diaphragm; Periphery at diaphragm has a protruding circular ring, and width is: 100 μ m-10mm, thickness are 10 μ m-250 μ m; Inboard and symmetrical place, the mass outside is provided with two pairs or more described one dimension or two-dimensional nano material respectively at protruding circular ring; Described loam cake or lower cover are identical with the silicon diaphragm diameter, at its periphery one protruding circular ring is arranged, it highly is 10 μ m-500 μ m, width is identical with the protruding circular ring of diaphragm, and a projection protection piece is established in the center in loam cake and lower cover, this protection tile height is 1 μ m-100 μ m, and radius is 50 μ m-6mm; On described diaphragm and described one dimension or two-dimensional nano material, make N to gold electrode and lead-in wire; Diaphragm is between loam cake, the lower cover, is bonded together, and adopts bond technology to draw lead.
2. by the body of the described diaphragm micropump formula of claim 1 acceleration transducer, it is characterized in that, described diaphragm, loam cake and lower cover silicon wafer to manufacture, three's diameter is identical.
3. by the body of the described diaphragm micropump formula of claim 1 acceleration transducer, it is characterized in that described diaphragm radius is 100 μ m-10mm.
4. press the body of the described diaphragm micropump formula of claim 1 acceleration transducer, it is characterized in that described one dimension or two-dimensional nano material, comprise nanotube, nano wire or nano belt that carbon or metallic compound form, the length of its one dimension or two-dimensional nano material is 10nm-100 μ m.
5. by the body of the described diaphragm micropump formula of claim 4 acceleration transducer, it is characterized in that described metallic compound comprises zinc paste, gallium oxide or gallium nitride.
6. press the body of the described diaphragm micropump formula of claim 1 acceleration transducer, it is characterized in that each point is radially determined with the numerical value of tangential strain on the diaphragm that described one dimension or two-dimensional nano material cause after the position distribution on the diaphragm is to be subjected to acceleration signal according to mass.
7. the manufacture method of the body of the described diaphragm micropump formula of claim 1 acceleration transducer is characterized in that may further comprise the steps:
1) choose 3 of the silicon chips of twin polishing, respectively as lower cover, the substrate of loam cake and diaphragm, with hot oxygen method respectively at lower cover, the one side of loam cake and at the substrate two sides growthing silica mask layer of making diaphragm;
2) there is the upper and lower surface of the substrate of silicon dioxide mask layer to adopt photolithography patterning and anisotropic etch process in the step 1) growth, protrude a circular mass in the middle of making, with be etched into a protruding annulus at this silicon chip circumference, the film thickness between mass and the annulus is 1 μ m-50 μ m;
3) dissolve silicon dioxide mask layer on the silicon chip, obtain having the diaphragm of mass;
4) membrane surface of making in step 3) is evenly grown layer of silicon dioxide as electric insulation layer, guarantees the electrode of follow-up making and go between to realize normal function;
The lower cover of the band silicon dioxide mask layer of 5) step 1) being made and loam cake respectively with photoresist as mask, adopt RIE technology etching silicon dioxide, form the silicon dioxide mask layer, remove photoresist after etching finishes;
6) lower cover that step 5) is obtained and loam cake carry out anisotropic etching, etch the dark hole of 10 μ m-400 μ m at silicon chip surface, remove the silicon dioxide mask layer then;
7) at lower cover and loam cake superficial growth 300nm silicon dioxide, photolithography patterning, the processing mask of protection piece in the middle of forming; Adopt anisotropic etching, working depth 1 μ m-100 μ m forms the hole of 10 μ m-500 μ m; Remove silicon dioxide mask layer (7);
8) between the electrode of diaphragm, make one dimension or two-dimensional nano material: comprise that direct catalytic growth of original position or the material that will prepare separately migrate on the diaphragm;
(a) get the diaphragm that step 4) makes, select the correspondence position of intermediate coat lamella to begin operation;
(b) utilize aluminium oxide as mask, four pairs of iron films that evaporation 5nm is thick on diaphragm are as the catalyzer of carbon nano-tube, and the distance of every pair of iron film is 10nm-100 μ m;
(c) making whole microstructure is the axle rotation with the center, under the inducing of centrifugal force, utilizes chemical vapour deposition technique to grow one dimension or two-dimensional nano material between catalyst film;
(d) utilize photolithography patterning, and adopt metal sputtering technology, the carbon nanotubes grown two ends make N to gold electrode and lead-in wire on diaphragm, gold electrode width 1 μ m-10 μ m, and thickness 300 nanometers, the distance of every pair of electrode are 10nm-100 μ m; By wires guides, the electrode at four pairs of nanometer sensitive element two ends is connected according to the electric bridge form, and be arranged as two external power ports and two signal output ports at the outer lug annulus place of intermediate coat lamella;
9) ready-made diaphragm, loam cake and the lower cover that has mass is bonded together, and adopts bond technology to draw lead, finish the making of sensor body.
8. press the manufacture method of the body of the described diaphragm micropump formula of claim 7 acceleration transducer, it is characterized in that, the method of direct catalytic growth one dimension of described original position or two-dimensional nano material, comprise and utilize the oriented growth method between the electrode of diaphragm, to make nano material as detecting element, or to make whole microstructure be axle rotation with the center, under the inducing of centrifugal force, utilize chemical gaseous phase depositing process between electrode, to grow nano material.
9. press the manufacture method of the body of the described diaphragm micropump formula of claim 7 acceleration transducer, it is characterized in that, the method of direct catalytic growth one dimension of described original position or two-dimensional nano material is included in and makes a microflute on the microstructure, and makes pair of electrodes in two sides of microflute; Between electrode, add certain voltage, make the direction of an electric field of generation consistent, under the inducing of electric field force, utilize chemical gaseous phase depositing process between electrode, to grow nano material with the direction of the nano material that will grow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100076321A CN100451657C (en) | 2005-02-07 | 2005-02-07 | Body of microdiaphragm accelerating sensor and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100076321A CN100451657C (en) | 2005-02-07 | 2005-02-07 | Body of microdiaphragm accelerating sensor and production thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1818665A CN1818665A (en) | 2006-08-16 |
| CN100451657C true CN100451657C (en) | 2009-01-14 |
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| CN102183676B (en) * | 2010-12-20 | 2013-03-06 | 昆明理工大学 | Low-frequency/ultralow-frequency acceleration transducer with polyvinylidene fluoride piezoelectric films |
| CN103305137B (en) * | 2013-05-30 | 2014-08-20 | 航天科工惯性技术有限公司 | Solidifying method of adhesive in process of hoisting accelerometer |
| CN103293338B (en) * | 2013-06-27 | 2015-11-18 | 中国科学院上海微系统与信息技术研究所 | The sensing element of capacitance acceleration transducer, method for making and application thereof |
| CN104515587B (en) * | 2013-09-26 | 2018-09-28 | 同方威视技术股份有限公司 | Optical fiber raster vibration sensor |
| CN105388321B (en) * | 2015-12-25 | 2018-11-06 | 中国电子科技集团公司第二十六研究所 | A kind of acceleration measurement device and measurement method based on piezoelectron effect |
| CN105675022A (en) * | 2016-01-08 | 2016-06-15 | 南京航空航天大学 | Damage monitoring composite piezoelectric film sensor |
| CN107046228B (en) * | 2017-04-07 | 2019-08-06 | 华南师范大学 | A kind of Electroabsorption Modulated Laser and preparation method thereof |
| CN108845159B (en) * | 2018-07-05 | 2023-05-12 | 大连理工大学 | Structure angular acceleration measuring device and method based on dynamic measurement centrifugal force |
| CN111157762B (en) * | 2020-01-09 | 2021-09-24 | 大连理工大学 | High-sensitivity nanowire acceleration sensor |
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| CN1475807A (en) * | 2003-07-18 | 2004-02-18 | 清华大学 | Carbon nano pipe field emission micromachine acceleration instrument |
| JP2004069652A (en) * | 2002-08-09 | 2004-03-04 | Tamagawa Seiki Co Ltd | Silicon acceleration sensor |
| JP2004093274A (en) * | 2002-08-30 | 2004-03-25 | Japan Aviation Electronics Industry Ltd | Impact sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2004069652A (en) * | 2002-08-09 | 2004-03-04 | Tamagawa Seiki Co Ltd | Silicon acceleration sensor |
| JP2004093274A (en) * | 2002-08-30 | 2004-03-25 | Japan Aviation Electronics Industry Ltd | Impact sensor |
| CN1475807A (en) * | 2003-07-18 | 2004-02-18 | 清华大学 | Carbon nano pipe field emission micromachine acceleration instrument |
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