CN100441941C - Light source device and light monitor used thereof - Google Patents
Light source device and light monitor used thereof Download PDFInfo
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- CN100441941C CN100441941C CNB2004100794074A CN200410079407A CN100441941C CN 100441941 C CN100441941 C CN 100441941C CN B2004100794074 A CNB2004100794074 A CN B2004100794074A CN 200410079407 A CN200410079407 A CN 200410079407A CN 100441941 C CN100441941 C CN 100441941C
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- light quantity
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- lamp
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- 238000001514 detection method Methods 0.000 claims description 42
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- 239000000463 material Substances 0.000 claims description 6
- 230000003760 hair shine Effects 0.000 claims description 5
- 238000012216 screening Methods 0.000 claims description 5
- 238000002834 transmittance Methods 0.000 claims 1
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- 230000002093 peripheral effect Effects 0.000 abstract description 4
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- 230000008676 import Effects 0.000 description 3
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- 229910052987 metal hydride Inorganic materials 0.000 description 3
- 150000004681 metal hydrides Chemical class 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/42—Measurement or testing during manufacture
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
- F21V9/40—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters with provision for controlling spectral properties, e.g. colour, or intensity
- F21V9/45—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters with provision for controlling spectral properties, e.g. colour, or intensity by adjustment of photoluminescent elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2101/00—Point-like light sources
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
Abstract
To maintain an irradiative light quantity as a constant by detecting irradiative light quantity variations correctly, even if whether they happen due to the light quantity of a lamp or the variations of distribution pattern of light quantity. When light of the lamp (4) is emitted from a light exit port (6) by focusing light with a reflecting mirror (5) to irradiate toward irradiated objects directly or indirectly, in a light quantity monitor (M) detecting irradiative light quantity irradiating toward irradiated objects and a light source apparatus (1) equipped with a light quantity controller (7) controlling in feedback manner the irradiative light quantity depending on the detected light quantity, the light quantity monitor (M) consists of a light guide rod (8) as an optical path for leading light focused with the reflecting mirror (5) toward the light exit port (6); and of an optical sensor (9) detecting the leaked light quantity from the peripheral surface (8a) of the light guide rod (8) as the irradiative light quantity.
Description
Technical field
The present invention relates to have the light supply apparatus of light controller, be applicable to that particularly resembling the image that uses CCD camera etc. handles and must keep the light source of certain light quantity to the testing fixture of checking the target object irradiation the testing fixture etc.
Background technology
For example in the manufacturing process of display floater, as what technology was formerly used be, to as the glass plate of checking target object be coated with the face irradiates light of coating, by CCD camera etc. they are observed to detect such as the image of the defective at bad place in cut and the coating process or the like and to handle testing fixture.
At this moment, for example can enumerate as the desired condition of light supply apparatus: according in the review time, can not changing at least, and can shine the light of the light quantity of necessity that the speed performance class with used camera adapts to the light quantity of checking target object (irradiated object).
Handle the light source of checking with light supply apparatus as image, use Halogen lamp LED, the solid optical element of LED or the like, the discharge lamp of mercury vapor lamp and metal hydride lamp etc., wherein, because it is the discharge lamp of mercury vapor lamp and metal hydride lamp etc. can obtain high light quantity the rise time lentamente, therefore optimum as this light source.
But, because the light quantity decay slowly that these discharge lamp illuminations were shone to the inspection target object after 1000-2000 hour therefore when in use, must change with respect to the brightness of camera one side its irradiation light quantity is adjusted.
Thus, in technology formerly, as shown in Figure 11, the light ejecting end 33out that will import the mixing rod 33 the pencil optical fiber 32 from the light light quantity distribution that sees through from infrared ray intercepting filter 37 that lamp 31 irradiates equably is connected with the end of detection with optical fiber 34, based on being connected the photo-sensitive cell 35 detected light quantities of this detection with the other end of optical fiber 34, control is outputed to the service voltage of lamp 31 by drive circuit 36.
[patent document 1] spy opens 2001-307523.
Yet, experiment by the inventor is found, though under the occasion of detection by the light quantity of the light of the light ejecting end 33out ejaculation of mixing rod 33, can detect the variation of the luminous quantity of lamp body 31 accurately, but in fact when preparing to use on production line, be not subjected to shining restriction, have the occasion of the variation that can not detect this irradiation light quantity yet to the variation of the irradiation light quantity of checking target object.
When further pursuing reason, find the reason that conduct decays in time towards the irradiation light quantity of checking target object, it is subjected to the variation of the luminous quantity of lamp 31 self, not equal to it is subjected to the variation in the discharge place that the variation along with electrode causes, luminous point leaves first focus etc., the intense influence that is caused by the variation of the light quantity distribution figure of lamp.
In other words, even in fact the luminous quantity of lamp 31 does not change,, also produced variation to the irradiation light quantity of checking the target object irradiation by pencil optical fiber etc. because light quantity distribution figure changed.
In the occasion that will go out from the photoconduction of the light ejecting end 33out of mixing rod 33 and its light quantity is detected, because departing from first focus etc., luminous point also make the irradiation light quantity that variation has taken place, even the luminous quantity of lamp 31 self does not have the time of variation to detect it, the result is to have produced and can not keep with certain light quantity to the critical defect of checking the target object irradiation.
This believes it also is the reason that a part from the high light of lamp 31 irradiation shines directly into the part that is connected with optical fiber 34 with the detection of light ejecting end 33out.
Now, in this device, even have when the light quantity distribution figure that is caused by lamp 31 is different, incide the light quantity of pencil optical fiber 32 and detect the characteristic that does not also change with the ratio between the light quantity of optical fiber, want the variation of irradiation light quantity that the variation by light quantity distribution figure is caused to detect the end or impossible.
Therefore problem to be solved by this invention is, no matter is the variation of the irradiation light quantity that causes of light quantitative changeization, and still the variation of the irradiation light quantity that causes of light quantity distribution figure variation can both be carried out correct detection, and can be stable keep this irradiation light quantity.
Summary of the invention
In order to address this problem, the invention provides a kind of have the light of lamp can penetrated from optical emission exit by coalescence by speculum, when directly or indirectly advancing to such an extent that shine facing to irradiated object, detect the light quantity monitor of the irradiation light quantity of the light that is radiated on the irradiated object, with the light supply apparatus of FEEDBACK CONTROL corresponding to the light controller of the irradiation light quantity of this detection light quantity, it is characterized in that: described light quantity monitor, have by constituting the light that speculum is assembled and import to the lamp guide of light path of optical emission exit and the optical sensor that will detect as described irradiation light quantity from the light leak amount of all sides of this lamp guide.
Because countless internal flaws is not only arranged on lamp guide, on its outer surface, also there is trickle cut, when therefore the light of assembling by speculum incides lamp guide, cause diffuse reflection by internal defects and cut, the part of this light spills from all sides.
So experiment through the inventor, by on all sides of this lamp guide, optical sensor being set, detect the light quantity that spills from lamp guide, with from the front end of the pencil optical fiber that is connected with the optical emission exit of lamp guide according to the irradiation light quantity of irradiated object the time, do not mention the variation of the irradiation light quantity that the variation by the luminous quantity of lamp body causes, even the variation of the irradiation light quantity that is caused by the variation of light quantity distribution figure also can correctly detect.
In other words, even there is unknown cause, also can correctly detect the irradiation light quantity of the light that shines on the irradiated object.
Therefore, when detected light quantity changes, if, can stably keep light quantity by adjusting the light quantity that incides lamp guide from lamp.
In this occasion, the adjustment of light quantity can be like this, controls incident light quantity towards lamp guide changeably by the light modulation filter.
And with in all sides of the lamp guide of light quantity monitor, the part except detect the part that exports to outside light leak with optical sensor covers it with light screening material, can not be subjected to correctly detecting light quantity from the influence of the light of outside incident.
In addition, the configuration that the light detection faces of optical sensor is relative with all sides of lamp guide, all sides of lamp guide and the space between the light detection faces form by the light diffusingsurface around the light diffusion space, because the light that spills homogenising in this light diffusion space is so can more correctly detect.
Further, be contained in outside and form the light diffusion space that constitutes by annular recess on the inner surface of the shading pipe on the lamp guide, optical sensor is installed in the words on this light diffusion space, the light that spills from the whole surface of lamp guide spreads in the light diffusion space, owing to can therefore improve accuracy of detection by these whole light leak amounts of light sensors.
Owing on the end face peripheral part of lamp guide, be easy to generate big defective and cut, and because the existence of these defectives and cut influences accuracy of detection, therefore, if the light inlet side end face at lamp guide is equipped with the diaphragm that is formed by the light transmission part with diameter also littler than the bore of lamp guide, cover this end face peripheral part, can interdict the light that sees through from this defective and cut, consequently improve accuracy of detection.
Also have in addition, the roughening that applies of the life of the irradiates light volume production on the light exit side face of lamp guide effect is not handled, the part of the light that sees through from lamp guide is got back to lamp guide inside, the light that goes back causes diffuse reflection in the inside of lamp guide by defective and cut, because its part becomes light leak, increase the light quantity of light leak, improved accuracy of detection.
Description of drawings
Fig. 1 illustrates the schematic diagram of light supply apparatus of the present invention.
Fig. 2 illustrates the schematic diagram of light modulation filter.
Fig. 3 illustrates the schematic diagram of light quantity monitor.
Fig. 4 illustrates the schematic diagram of light quantity monitor.
Fig. 5 illustrates the schematic diagram of light quantity monitor.
Fig. 6 illustrates the schematic diagram of light quantity monitor.
Fig. 7 illustrates the schematic diagram of light quantity monitor.
Fig. 8 illustrates the schematic diagram of light quantity monitor.
Fig. 9 shows by roughening and handles the light loss that causes and detect light quantity and the graph of a relation of irradiation light quantity.
Figure 10 shows the irradiation light quantity and detects the graph of a relation of light quantity.
Figure 11 illustrates the schematic representation of apparatus of technology formerly.
The explanation of symbol
1 light supply apparatus
4 lamps
5 speculums 5
6 optical emission exits 6
M (M1-M6) light quantity monitor
7 light controllers
8 lamp guides
8a week side
9 optical sensors
9a light detection faces
10 light modulation filters
12a, 16a light diffusingsurface
13,15 shading pipes (light screening material) 13
14,17 smooth diffusion space
16 annular recess
18 diaphragms
The specific embodiment
In the present embodiment, realized it no matter being the variation of the irradiation light quantity that causes of the variation at the luminous quantity of lamp self with very simple structure, or under the situation of the variation of the irradiation light quantity that the variation of light quantity distribution figure causes, can both carry out correct detection, and stably keep the scheme of irradiation light quantity.
Fig. 1 is the schematic diagram that light supply apparatus of the present invention is shown, Fig. 2 is the schematic diagram that the light modulation filter is shown, Fig. 3-Fig. 8 is the schematic diagram that the light quantity monitor is shown, Fig. 9 shows by roughening and handles the light loss that causes and detect light quantity and the graph of a relation of irradiation light quantity, and Figure 10 shows the irradiation light quantity and detects the graph of a relation of light quantity.
Light supply apparatus 1 shown in Fig. 1, for example be used for made a video recording in the surface of checking target object (irradiated object) and handle by image carry out product examination in, by pencil optical fiber 2 to checking target object irradiating illumination light.
This light supply apparatus 1, the light that is configured in metal hydride lamp 4 irradiations in the housing 3 is assembled by elliptical reflector 5, see through infrared ray intercepting filter 20, penetrate, shine by the pencil optical fiber 2 that is connected with optical emission exit 6 and check that target object gets on from optical emission exit 6.
In addition, in housing 3 inside, dispose the light quantity monitors M of detection, to shining the light controller 7 that light quantity is carried out FEEDBACK CONTROL accordingly with this detection light quantity to the irradiation light quantity of the light of checking the target object irradiation, outside also dispose the lighting circuit 21 of lamp 4, cooling fan 22.
The light quantity monitors M comprises the lamp guide 8 that is made of the light path that will import optical emission exit 6 by the light that speculum 5 is assembled and the light-to-current inversion type optical sensor 9 of the silicon photovoltaic element that will detect as the irradiation light quantity from the light leak amount of all side 8a of this lamp guide 8 etc.
This light modulation filter 10 is (with reference to the figure 2) that become the row configuration to form on circumference by a plurality of slits that aperture opening ratio slowly changes, and increases gradually/reduces gradually through light quantity along with rotation and with its direction of rotation is correspondingly feasible.
Fig. 3-Fig. 8 illustrates light quantity monitors M of the present invention
1-M
6Example.
The light quantity monitors M that Fig. 3 (a) illustrates
1All side 8a of lamp guide 8 are connected with the light detection faces 9a of optical sensor 9.
Like this, the light that sees through in the lamp guide 8, shown in Fig. 3 (b) like that, defective C in running into this lamp guide 8, and light carries out in the total reflection in lamp guide 8, light runs into the cut on all side 8a and when producing diffuse reflection, because wherein a part of light goes out from optical sensor 9 side leakages, can detect by the leakage of 9 pairs of these light of optical sensor.
The light quantity monitors M that Fig. 4 (a) illustrates
2Be to constitute like this: being formed with of will connecting on tube wall 13a is used to install outside the shading pipe (light screening material) 13 of installing hole 12 of optical sensor 9 and is contained in lamp guide 8, except covering all side 8a of lamp guide 8 with light screening material by the part of optical flame detector 9 detected light leaks to the outside derivation.
Like this, with the light quantity monitors M that detects the light leak amount by optical sensor 9
1Same, the such all side 8a shown in Fig. 4 (b) can not be subjected to the brightness variation beyond the lamp guide 8 and leak the influence that enters the exterior light in the housing 3.
In addition, on the inner surface of installing hole 12, form light diffusingsurface 12a, when the light detection faces 9a of optical sensor 9 installs with respect to all side 8a of lamp guide 8, the space between all side 8a of light detection faces 9a and lamp guide 8 (for example 8mm degree) form by light diffusingsurface 12a around light diffusion space 14.
Like this, owing to the light at random and homogenising in light diffusion space 14 that spills from installing hole 12, believe and further to improve accuracy of detection.
The light quantity monitors M that illustrates as Fig. 5 (a)
3Be to constitute like this: be contained in outside on the inner surface of the shading pipe 15 on the lamp guide 8, formation is with the inner surface that is formed with annular recess 16 along its circumferencial direction light diffusion space 17 as the ring-type of light diffusingsurface 16a, and optical sensor 9 is installed on the light diffusion space 17 with pre-fixed gap (for example degree of 8mm) that all sides with lamp guide 8 are oppositely arranged.
Like this, shown in Fig. 5 (b) like that, in the whole circumference scope of all side 8a of lamp guide 8, form light diffusion space 17, make not only in the part relative with optical sensor 9, and in light diffusion space 17, spread from the light leak of the whole peripheral surface of lamp guide 8, because light leak amount that can these are whole detects by optical sensor, has improved accuracy of detection.
Light quantity monitors M shown in Fig. 6 (a)
4Constitute like this: in described light quantity monitors M
3The light-incident end 8in of lamp guide 8 on the diaphragm 18 that forms the light transmission part 18a with diameter also littler than the bore of lamp guide 8 on it is installed, and cover the surrounding edge part 8b of the light inlet side end face of lamp guide 8 thus.
Like this, shown in Fig. 6 (b) like that, even on the end face surrounding edge part 8b of lamp guide 8, produced bigger defective and cut, owing to the light that is seen through by these defectives and cut can be cut off, can avoid accuracy of detection is produced ill effect, consequently improve accuracy of detection.
Light quantity monitors M shown in Fig. 7 (a)
5Constitute like this: in described light quantity monitors M
3The light exit side face 8out of lamp guide 8 go up to implement roughening and handle, not making the significantly reduced degree of irradiation light quantity, will turn back to the inside of lamp guide 8 through the part of the light of lamp guide 8.
Like this, shown in Fig. 7 (b) like that, to turn back to the inside of lamp guide 8 through the part of the light of lamp guide 8, the light that returns produces diffuse reflection by the defective and the cut of the inside of lamp guide 8, because its part becomes light leak, make the light leak amount increase, improved accuracy of detection accordingly.
Roughening is handled, and makes light exit side face 8out form and has coarse surface, handles the light diffuse reflection that makes by light exit side face 8out by carrying out roughening, produce light loss, but because this part light quantity has improved the detection light quantity.
Fig. 9 shows relatively and handles the detection light quantity of the light loss that causes and the figure that shines the variation of light quantity by roughening, transverse axis is the light loss that sees through light of lamp guide when having carried out the roughening processing, the scale on the longitudinal axis left side is the irradiation light quantity, the scale on longitudinal axis the right is to detect light quantity, all shows as 100% o'clock light quantity with the occasion (light loss 0) of not carrying out the roughening processing.
Like this, the rough surface of handling by roughening makes light loss increase really, increases the detection light quantity and has improved accuracy of detection, but reduced the irradiation light quantity from pencil optical fiber 2.
Therefore, for example, detect light quantity, must handle the degree that the light loss that causes is suppressed at 4.5-5.5% by roughening more than 200% in order to ensure shining light quantity more than 90%.
Further, the light quantity monitors M shown in Fig. 8 (a)
6Constitute like this: in described light quantity monitors M
5The light-incident end 8in of lamp guide 8 on, the diaphragm 18 that is applicable to light quantity monitors M 4 is installed.
Like this, shown in Fig. 8 (b) like that, remove external disturbance by diaphragm 18, and then handle by roughening and to increase the light leak amount, further improve accuracy of detection.
Figure 10 shows each light quantity monitors M of having used such formation
1-M
6, from the irradiation light quantity and the light quantity monitors M of pencil optical fiber 2 irradiations
1-M
6The figure of detection light quantity.
The variation of irradiation light quantity, the light quantity that mainly is divided into lamp 4 changes occasion that causes and the occasion that is caused by pencil optical fiber 2 quantity of incident light changes in distribution.
The corresponding light quantity monitors M of irradiation light quantity when wherein, mensuration changes with the light quantity that incides lamp guide 8 from lamp 4
1-M
6The detection light quantity time, measure with respect to since relatively the position deviation of second focus of speculum 5 the detection light quantity of the irradiation light quantity the variation of the light quantity distribution that causes of the center of lamp guide 8 time.
The transverse axis of figure represents to shine light quantity, the longitudinal axis represents to detect light quantity, the irradiation light quantity is when lighting lamp 4 by rated voltage, the value that the light quantity that the light sensors of the light exit side by being configured in pencil optical fiber 2 goes out quantizes as 100 standard, detecting light quantity is by the light quantity monitors M when the irradiation light quantity is 100
1-M
6The value that detected light quantity quantizes as 100 standard.
Dotted line L
0Illustrate with rotary light adjustment filter 10 and make the corresponding light quantity monitors M of irradiation light quantity when the incident light quantity of lamp guide 8 changes
1-M
6The detection light quantity.
In this occasion, any light quantity monitors M
1-M
6Measurement result all the same, detect light quantity correctly according to the irradiation light quantity.
In addition, solid line L1-L6, the variation that the irradiation light quantity that changes with center owing to the position deviation lamp guide 8 of second focus of speculum 5 is shown is corresponding, the light quantity monitors M
1-M
6The variation of detection light quantity.
In this occasion, on the light-incident end 8in of lamp guide 8, aperture 18 is installed, on light exit side face 8out, carries out the light quantity monitors M that roughening is handled
6The detection light quantity correct according to the irradiation light quantity (with reference to solid line L6).
Therefore, light quantity monitors M
6Change under the occasion that causes and under the occasion that causes by the light quantity distribution variation and the light leak amount can both be detected as the irradiation light quantity in the light quantity of the variation of shining light quantity by lamp 4.
Other light quantity monitors M
1-M
5Even, can not in gamut, make detect light quantity correct according to the irradiation light quantity, near the scope irradiation light quantity 100%, can with the light quantity monitors M
6The same, make and detect the correct foundation irradiation light quantity (with reference to solid line L1-L5) of light quantity.
In other words, by optical sensor 9 detected light leak amounts,, therefore shining the occasion that the light quantity variation of light quantity by lamp 4 causes owing to be with corresponding from the irradiation light quantity of pencil optical fiber 2 irradiations, with the occasion that causes by the light quantity distribution variation, can both be with of the detection of light leak amount as the irradiation light quantity.
Above-mentioned is an example of the present invention, and next the effect to it describes.
Owing in the irradiation light quantity of illumination after 1500-2000 hour, reduced 40% in the anticipation, when beginning, just the light quantity of lamp 4 is reduced to 60% by light modulation filter 10 with the initial stage light amount ratio.
Light quantity monitors M (M in this state
1-M
6) being stored in light controller 7 by optical sensor 9 detected detection light quantity Q0 as 100% value, rotary light adjustment filter 10 when detecting light quantity Q and changing makes it to be equal to the detection light quantity Q of storage originally
0.
Have the trend that reduces along with effluxion owing to detect light quantity Q, when for example detecting light quantity Q and reduce by 1/%, light modulation filter 10 makes the light quantity adjustment that detects light quantity Q=100 (%) towards the direction rotation that slit 10a is increased.
In this occasion, detect light quantity Q and maintain 100 (%) usually,, therefore, use any light quantity monitors M owing to, detect light quantity Q and near 100%, change usually whenever the light quantity adjustment is just carried out in the variation that detects light quantity Q generation 1%
1-M
6Occasion can both be correct detect the irradiation light quantity variation.
And no matter its reason is that light quantity by lamp 4 changes and causes, still causes that by the variation of light quantity distribution what be not subjected to its reason restriction can correctly detect the irradiation light quantity.
Like this, by using the incident light quantity of light modulation filter 10 increase slowly accordingly towards lamp guide 8 with detecting light quantity, even through after 1500-2000 hour the illumination, also can be to shine with irradiation light quantity light quantity about equally originally.
And in the above description, what use as light controller 7 is the variable control light modulation filter 10 towards the incident light quantity of lamp guide 8, but the invention is not restricted to this, uses the light adjusting circuit of variable control light amount also passable.
In addition, the invention is not restricted to use the occasion of the lamp 4 that shines visible light, be equally applicable to use ultraviolet lamp, infrared lamp is as the light irradiation device of light source.
As mentioned above, in light supply apparatus of the present invention, because the irradiates light quantitative changeization that causes by the variation of light amount and can both similar detection come out by the irradiates light quantitative changeization that the variation of light quantity distribution causes, therefore can carry out the irradiation light quantity is maintained the control of a definite value based on this detection light quantity that detects, obtain very good effect.
The present invention handles the purposes of the light supply apparatus of testing fixture etc. etc. applicable to image, and can satisfy such requirement, make towards the light quantity of checking target object (irradiated object) and in the review time, do not change at least, in addition, can shine light with the corresponding necessary light quantity of the photosensitive property rank of the camera that uses.
Claims (8)
1. light supply apparatus, comprise: the light of lamp is converged from optical emission exit by speculum penetrate, it is direct or indirect when irradiated object shines, detection is radiated at the light quantity monitor of the irradiation light quantity of the light on the irradiated object, and to detecting light quantity, to shining the light controller that light quantity is carried out FEEDBACK CONTROL, it is characterized in that:
Described light quantity monitor comprises: constitute the light that speculum is converged and be directed to the lamp guide of light path of optical emission exit and the optical sensor that will detect as described irradiation light quantity from the light leak amount of all sides of this lamp guide.
2. light supply apparatus as claimed in claim 1, described light controller comprise that the incident light quantity to lamp guide carries out the light modulation filter of variable control.
3. a detection is from the light quantity monitor of the irradiation light quantity that is radiated at the light on the irradiated object of light source outgoing, it is characterized in that: comprise, constitute the lamp guide of light path of the light of guiding light source outgoing, and the optical sensor that will detect as described irradiation light quantity from the light leak amount of all sides of this lamp guide.
4. light quantity monitor as claimed in claim 3 is characterized in that: the part except deriving to the outside by the light leak of light sensors with all sides of described lamp guide covers with light screening material.
5. light quantity monitor as claimed in claim 3, it is characterized in that: with the light detection faces of described optical sensor and relative configuration the in all sides of lamp guide, the gap between light detection faces and all sides of lamp guide forms the light diffusion space that is surrounded by the reflecting light diffusingsurface simultaneously.
6. light quantity monitor as claimed in claim 3, it is characterized in that: be contained in outside on the shading pipe internal surface on the described lamp guide, with the inner surface of the annular recess that forms along the circumferencial direction of this inner surface is that the mode of light diffusingsurface forms the light diffusion space, and all sides of described optical sensor and described lamp guide relatively are installed in this light diffusion space.
7. light quantity monitor as claimed in claim 3 is characterized in that: by the diaphragm of the transmittance section that is formed with the diameter littler than the bore of described lamp guide, cover the surrounding edge part of the light inlet side end face of lamp guide.
8. light quantity monitor as claimed in claim 3 is characterized in that: carry out roughening and handle on the light exit side face of described lamp guide, make a part that will see through the light of lamp guide turn back to lamp guide inside.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003190430 | 2003-07-02 | ||
| JP190430/2003 | 2003-07-02 | ||
| JP2004015767 | 2004-01-23 | ||
| JP15767/2004 | 2004-01-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1576690A CN1576690A (en) | 2005-02-09 |
| CN100441941C true CN100441941C (en) | 2008-12-10 |
Family
ID=34593882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100794074A Expired - Fee Related CN100441941C (en) | 2003-07-02 | 2004-07-02 | Light source device and light monitor used thereof |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4604572B2 (en) |
| KR (1) | KR100655638B1 (en) |
| CN (1) | CN100441941C (en) |
| TW (1) | TWI268326B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4728732B2 (en) * | 2005-08-02 | 2011-07-20 | 株式会社モリテックス | Lighting device |
| JP4853823B2 (en) * | 2005-12-15 | 2012-01-11 | 岩崎電気株式会社 | Light intensity monitor and light source device using the same |
| JP2008305710A (en) * | 2007-06-08 | 2008-12-18 | Olympus Corp | Light source device for illumination |
| US7984999B2 (en) | 2007-10-17 | 2011-07-26 | Xicato, Inc. | Illumination device with light emitting diodes and moveable light adjustment member |
| JP2014000301A (en) * | 2012-06-20 | 2014-01-09 | Fujifilm Corp | Light source device and endoscope system |
| CN108375023B (en) * | 2016-11-16 | 2020-02-07 | 财团法人车辆研究测试中心 | Intelligent laser car lamp system and detection method thereof |
| CN106525234A (en) * | 2016-12-08 | 2017-03-22 | 中国科学院合肥物质科学研究院 | Multi-wing shaped deuterium lamp UV light source |
| CN107782733B (en) * | 2017-09-30 | 2021-03-16 | 中国船舶重工集团公司第七一九研究所 | Image recognition nondestructive detection device and method for metal surface defects |
| CN112567172B (en) * | 2018-08-28 | 2022-12-06 | 三菱电机株式会社 | Light irradiation device |
| JP7198659B2 (en) * | 2018-12-26 | 2023-01-04 | 株式会社オーク製作所 | Exposure device |
| CN115614692B (en) * | 2022-12-15 | 2023-05-23 | 宁波精华电子科技股份有限公司 | Vehicle-mounted atmosphere lamp capable of intelligently changing brightness |
| CN116001679B (en) * | 2023-01-09 | 2023-06-27 | 浙江百康光学股份有限公司 | Method and system for controlling atmosphere lamp in vehicle |
| CN116242481B (en) * | 2023-05-12 | 2023-08-29 | 中国计量科学研究院 | Deuterium lamp light source system and calibration method |
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- 2004-06-30 TW TW093119386A patent/TWI268326B/en not_active IP Right Cessation
- 2004-07-02 KR KR1020040051423A patent/KR100655638B1/en not_active IP Right Cessation
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI268326B (en) | 2006-12-11 |
| KR100655638B1 (en) | 2006-12-11 |
| JP2005233927A (en) | 2005-09-02 |
| JP4604572B2 (en) | 2011-01-05 |
| TW200502508A (en) | 2005-01-16 |
| KR20050004094A (en) | 2005-01-12 |
| CN1576690A (en) | 2005-02-09 |
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