CN100440715C - Vibration wave motor - Google Patents
Vibration wave motor Download PDFInfo
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- CN100440715C CN100440715C CNB2005100690972A CN200510069097A CN100440715C CN 100440715 C CN100440715 C CN 100440715C CN B2005100690972 A CNB2005100690972 A CN B2005100690972A CN 200510069097 A CN200510069097 A CN 200510069097A CN 100440715 C CN100440715 C CN 100440715C
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Abstract
An ultrasonic motor includes rotors and an annular stator, which are integrated in the rotational direction, a rectangular parallelepiped multilayer piezoelectric transducer, a support shaft, and a transducer with drivers. The support shaft is attached to the outer circumference of the stator and arranged along the radial direction, and the drivers are abutted by a spring urging force to the rotors arranged on both sides of the stator in the axial direction, and are clamped with the rotors. When the transducer is driven so as to excite an elliptical movement produced by combining a bending standing-wave vibration with a longitudinal vibration with the drivers, the rotors are rotated relatively to the stator. Since the drivers are clamped with the integrated rotors, the ultrasonic motor can be driven with small frictional loss and improved conversion efficiency.
Description
Technical field
The present invention relates to utilize the vibration wave motor of oscillator, this oscillator has encouraged the elliptic motion that is formed by the synthetic of crooked stationary wave vibration and extensional vibration.
Background technology
In the past, relate to the vibration wave motor that utilizes oscillator, the supersonic motor of being put down in writing in patent documentation 1 or patent documentation 2 (vibration wave motor) is a linear ultrasound motor, this linear ultrasound motor makes elastomer contact by oscillator that piezoelectric element constituted and to its application of force, thereby make driven member relatively move, the elliptic motion that above-mentioned oscillator excitation is formed by the synthetic of crooked stationary wave vibration and extensional vibration.In this linear ultrasound motor, exist to be difficult to guarantee to keep moment of torsion, be difficult to improve the problems such as resolution of stop position.
Therefore, as the supersonic motor that drives rotary body, the vibrating motor that puts forward in patent documentation 3 (vibration wave motor) is the circular ring type supersonic motor that utilizes the row ripple, and is a kind of motor that is applicable to barrel.Above-mentioned barrel has: the stationary magazine creel with cylindrical portion; By stator and the supersonic motor (vibration wave motor) that constitutes as the rang ring of rotary body; And the movable mirror head of advancing and retreat by above-mentioned rang ring driving.
No. the 2871768th, [patent documentation 1] patent gazette
[patent documentation 2] patent disclosure communique flat 8-182365 number
[patent documentation 3] patent announcement communique flat 7-48087 number
In the circular ring type vibration wave motor of the utilization row ripple of being put down in writing in above-mentioned patent documentation 3, the piezoelectrics that form oscillator are made annular, when motor size not simultaneously, the configuration shape of piezoelectrics also has nothing in common with each other.In addition, because utilization is the row ripple,, be difficult to obtain to reduce electric efficiency to vibrating the not stable pressing structure of influence so there is not the node (neutral point) of vibration.Also have, above-mentioned annular supersonic motor has in the past only utilized the vibration of a side of oscillator as actuating force, the effective installation method of can not saying so.In addition, can not avoid the lip-deep friction loss of the reaction force that is under pressure, the main cause that this point has also become efficient to reduce.
Summary of the invention
The present invention puts forward for addressing the above problem, and its objective is that a kind of friction loss is provided is few and electric efficiency is high, and has good structural vibrations ripple motor as the drive source of rotary body.
One of the present invention's vibration wave motor has following parts: at least one oscillator, its excitation are synthesized by crooked stationary wave vibration and extensional vibration and the elliptic motion that forms; The support unit that keeps above-mentioned oscillator; First rotary body can freely rotate with respect to above-mentioned support unit around the pivot axis, and is configured to and can contacts with an end in two ends of above-mentioned oscillator on the pivot axis direction; Second rotary body, it is supported to and can rotates integratedly with above-mentioned first rotary body, and can freely rotate with respect to above-mentioned support unit, and be configured to and contact with another end in two ends of above-mentioned oscillator on the pivot axis direction around the pivot axis; Application of force unit, it is along axially applying active force, so that above-mentioned first rotary body and above-mentioned second rotary body are connected on the above-mentioned oscillator all the time.
The present invention's two vibration wave motor, in one of the present invention's vibration wave motor, above-mentioned oscillator is installed and is bearing on the above-mentioned support unit in the mode that the position of its circumferencial direction and position radially are restricted.
The present invention's three vibration wave motor, in one of the present invention's vibration wave motor, above-mentioned oscillator is bearing on the above-mentioned support unit, and can freely rotate around the axis of the pivot axis direction that is approximately perpendicular to above-mentioned first and second rotary bodies.
The present invention's four vibration wave motor, in one of the present invention's vibration wave motor, on the circumferencial direction of above-mentioned first and second rotary bodies, with the arranged spaced of approximate equality a plurality of above-mentioned oscillators.
The present invention's five vibration wave motor, in the present invention's four vibration wave motor, on the circumferencial direction of above-mentioned first and second rotary bodies, with 120 ° of arranged spaced roughly three above-mentioned oscillators.
The present invention's six vibration wave motor, in one of the present invention's vibration wave motor, above-mentioned application of force unit is arranged to rotate integratedly with above-mentioned first and second rotary bodies all the time.
The present invention's seven vibration wave motor, in one of the present invention's vibration wave motor, above-mentioned oscillator forms the length that has given size on pivot axis direction, and disposes one on the circumferencial direction of above-mentioned rotary body at least; In addition, also has at least one isolated part on the circumferencial direction that is configured in above-mentioned rotary body, the afore mentioned rules size of the length dimension of this isolated part and above-mentioned oscillator is roughly the same, and be configured on the above-mentioned support unit, and be clamped on above-mentioned first rotary body and second rotary body, contact with second rotary body with above-mentioned first rotary body all the time; On the circumferencial direction of above-mentioned first and second rotary bodies, above-mentioned oscillator and above-mentioned isolated part are arranged with the arranged spaced of approximate equality.
The present invention's eight vibration wave motor, in the present invention's seven vibration wave motor, above-mentioned isolated part is to be configured to overlapping a plurality of and the ball shape that constitutes or the rolling element of roller shape on the pivot axis direction of above-mentioned first and second rotary bodies.
The present invention's nine vibration wave motor is in one of the present invention's vibration wave motor, and above-mentioned oscillator is on the node part at the neutral point of the resultant vibration of crooked stationary wave vibration and extensional vibration only, fixes and is bearing on the above-mentioned support unit.
The present invention's ten vibration wave motor has following parts: at least one oscillator, its excitation are synthesized by crooked stationary wave vibration and extensional vibration and the elliptic motion that forms; The support unit that keeps above-mentioned oscillator; First rotary body can freely rotate with respect to above-mentioned support unit around axis, and is configured to and can contacts with an end in two ends of above-mentioned oscillator on the axis direction; Second rotary body, be bearing on above-mentioned first rotary body, all the time rotate with respect to above-mentioned support unit around axis integratedly with above-mentioned first rotary body, and can be with respect to above-mentioned first rotary body along axially moving freely, be configured to and can contact with another end in two ends of above-mentioned oscillator on the axis direction; Force application part is supported to all the time and rotates integratedly with above-mentioned first and second rotary bodies, and along axially to the above-mentioned second rotary body application of force, so that above-mentioned first rotary body and above-mentioned second rotary body are connected on the above-mentioned oscillator all the time.
According to the present invention, vibration wave motor can be provided, this vibration wave motor and drive source rotary body that electric efficiency high little as friction loss has good structure.
Description of drawings
Fig. 1 is the sectional arrangement drawing that has comprised the optical axis of barrel, and this barrel is assembled with the vibration wave motor of one embodiment of the present of invention;
Fig. 2 is the exploded perspective view of the vibration wave motor in the barrel that is assembled among Fig. 1;
Fig. 3 is the oscillator in the vibration wave motor of Fig. 2 and the exploded perspective view of stator;
Fig. 4 is the exploded perspective view that expression is installed in the oscillator in the vibration wave motor of Fig. 2 the state on the stator;
Fig. 5 is the fragmentary cross-sectional view along the A-A line among Fig. 2, represents above-mentioned oscillator situation on every side;
Fig. 6 is the profile along the B-B line among Fig. 2, the section around the expression roller part;
Fig. 7 is the profile along the C-C line among Fig. 2, the section around the expression connecting pin;
Fig. 8 be along the arrow G direction among Fig. 6 to view, represent the contact condition of above-mentioned roller part;
Fig. 9 sees from the bolster direction, flexible print wiring board is fastened on the figure of the state on the oscillator of Fig. 3;
Figure 10 be along the arrow D direction among Fig. 9 to view;
Figure 11 sees from the bolster direction, the figure of the state that the oscillator of flexible print wiring board from Fig. 9 disassembled;
Figure 12 be along the arrow E among Figure 11 to view;
Figure 13 be along the arrow F among Figure 12 to view;
Figure 14 is piezoelectric element part and the exploded perspective view of insulation board before sintering processes that constitutes the oscillator among Figure 11;
Figure 15 is the figure that the resultant vibration state of the crooked stationary wave vibration of the oscillator among Figure 11 and extensional vibration is amplified the back expression, and the expression oscillator is deformed to the situation of contraction state of case of bending, Figure 15 (D) of elongation state, Figure 15 (C) of Figure 15 (B) successively from the case of bending of Figure 15 (A).
Label declaration
15: stator (support component)
16: rotor (first rotary body)
17: rotor (second rotary body)
20: application of force leaf spring (application of force unit, force application part)
23: roller (isolated part, rotor)
40: vibration wave motor
41: oscillator
O: optical axis (rotary middle spindle)
Embodiment
Below, with reference to the description of drawings embodiments of the invention.
Fig. 1 is the sectional arrangement drawing that has comprised the barrel optical axis of the vibration wave motor that is assembled with one embodiment of the invention; Fig. 2 is the exploded perspective view of above-mentioned vibration wave motor; Fig. 3 is the oscillator of above-mentioned vibration wave motor and the exploded perspective view of stator; Fig. 4 is the exploded perspective view that expression is installed in above-mentioned oscillator the state on the stator; Fig. 5 is the fragmentary cross-sectional view along the A-A line among Fig. 2, the situation around the expression oscillator; Fig. 6 is the profile along the B-B line among Fig. 2, the section around the expression roller part; Fig. 7 is the profile along the C-C line among Fig. 2, the section around the expression connecting pin; Fig. 8 be along the arrow G direction among Fig. 6 to view, the contact condition of expression roller part.
In addition, in the following description, will be by first group～the 4th group phtographic lens optical axis that lens constituted as optical axis O, direction that will be parallel with optical axis O is as the Z direction, with a side of subject as+, with imaging one side as one.Will be with respect to the radial direction of optical axis O as the R direction, will be with respect to the tangential direction of the circumferencial direction of optical axis O as the T direction.In addition, optical axis O overlaps with axis of rotation such as stator described later, rotors basically.
As shown in Figure 1, the barrel 1 of present embodiment has following part: fixed frame 2; Be bearing in the cam ring 3 on the outer circumference portion of fixed frame 2; Zoom ring 4 in the excircle of embedding cam ring 3; The first group of lens-mount 5 that keeps first group of lens 35; At the rear of first group of lens-mount 5, keep second group of lens-mount 6 of second group of lens 36; At the rear of second group of lens-mount 6, keep the 3rd group of lens-mount 7 of the 3rd group of lens 37; At the rear of the 3rd group of lens-mount 7, keep the 4th group of lens-mount 8 as the 4th group of lens 38 of condenser lens; Vibration wave motor portion (vibration wave motor) 40 as drive source.
Fixed frame 2 is frame partss of ring-type, has at its annulus: circumference gathering sill 2c; Directly advance gathering sill 2a along the Z direction; Cam path 2b with respect to Z direction diagonal; In addition, the rearward end at frame parts is provided with: the slip outer circumference portion 2d of the chimeric usefulness of rotor of vibration wave motor; Link slot 2e along the Z direction; The focusing actuating arm runs through uses breach 2f.And the rearward end of fixed frame 2 forms an integral body by end plate 31, installing rack 33, screw 55.Outside framework 32 is fastened on the end plate 31.
Zoom ring 4 is ring-shaped frame parts, and its embeds the excircle of cam ring 3, all becomes as a whole with it on Z direction and T direction.Excircle at zoom ring 4 has partly tightened operation rubber ring 4a.
First group of lens-mount 5 is fastening and be bearing on the leading section of fixed frame 2.
Second, third group lens-mount 6,7 embeds also and is bearing on the inner periphery of fixed frame 2, fastening respectively cam follower 11,12 on its excircle.Cam follower 11,12 directly advances gathering sill 2a with what advance directly that the guiding state runs through fixed frame 2, and can embed among cam path 3a, the 3b of cam ring 3 with being free to slide.Therefore, when the zoom rotating operation driving cam ring by zoom ring 43 rotates, via cam follower 11,12, make second, third group lens-mount 6,7 advance or retreat, move on each zoom position along optical axis O by means of cam path 3a, 3b.
The 4th group of lens-mount 8 embeds and is bearing on the inner periphery of fixed frame 2, tightens set cam follower 13 at its excircle.Cam follower 13 can embed among the cam path 2b of fixed frame 2 with being free to slide.On this 4th group of lens-mount 8, be provided with gathering sill 8a along the Z direction, the leading section that focuses on actuating arm 9 can embed among this gathering sill 8a with being free to slide, and described focusing actuating arm 9 is fastened on the rotor 16 of vibration wave motor portion 40 1 sides.Therefore, when focusing on driving, rotate,, drive the 4th group of lens-mount 8 and rotate with respect to fixed frame 2 then via focusing on actuating arm 9 if drive the rotor 16 of vibration wave motor portion 40.Because above-mentioned this rotation, cam follower 13 slides in cam path 2b and moves, so the 4th group of lens-mount 8 just rotates on one side, move to the focal position of optical axis O direction on one side.
Vibration wave motor portion 40 is the drive units that are made of the supersonic motor that the 4th group of lens-mount 8 of driving moves forward and backward when focusing on, and as shown in Figure 1, 2, it has following part: as the stator 15 of support unit; Rotor 16 as first rotary body; Rotor 17 as second rotary body; Oscillator 41, its excitation are synthesized by crooked stationary wave vibration and extensional vibration and the elliptic motion that forms; As a pair of roller 23 of roller shape rotor, it is for isolating (spacer) parts; Three pairs of bearing balls 21; Application of force leaf spring 20 as application of force unit (force application part); Spring bearer plate 18; Spring force is regulated with dividing plate 19; Magnetic sensor portion that constitutes by transducer support plate 27, magnetic sensor 28 etc.
The application of force is made with leaf spring 20 usefulness spring sheet materials, ringwise, which is provided with by incision erect form, can be along three 20a of strain portion of axial generation strain, and two lug boss 20b that protrude in inner circumferential side.
Shown in Fig. 2,3, stator 15 is parts of annular, is provided with following parts: the oscillator on two positions of outer circumference portion is installed and is used recess 15a; Connect slotted hole 15b, it connects these recess central authorities on the R direction, and is long slightly hole on the Z direction; Roller insertion through slot 15d along the Z direction; The breach 15e that cuts from the two ends of this through slot 15d; Along three the ball gathering sill 15cs of Z direction at inner periphery one side opening.
A pair of roller 23 shown in Fig. 2,8, can embed the state among the breach 15e of stator 15 with rotating freely and inserts roller and insert with among the through slot 15d with the axial region 23a of this roller 23.Under this insertion state, two rollers are mutual butt in the inboard, and the outer diameter part of two rollers protrudes a little from two end faces of the Z direction of stator 15.In addition, two rollers 23 can move freely together along the Z direction.In addition, roller 23 is not limited in a pair of, so long as be made of just passable even number.Why will make above-mentioned roller a pair of or even number, be because said as the back, keeps the rolling contact condition when making these rollers on being connected to rotor rotated 16,17.
As shown in Figure 3, three pairs of balls 21 are embedding under the state of retainer 22 among the ball gathering sill 15c respectively.The external diameter of above-mentioned ball protrudes a bit a little in the inboard of stator 15, and in the time of on the outer circumference portion that stator 15 is embedded rotor 16, rotor 16 and stator 15 relatively rotate under the state of ball 21 in the centre.
The transducer support plate 27 of above-mentioned magnetic sensor portion is to be fastened on the excircle of stator 15 by screw.Under above-mentioned installment state, the magnetic protective film 16f sliding contact of magnetic sensor 28 and rotor one side is with the anglec of rotation of detection rotor 16.
Two oscillators 41 form the drive division of vibration wave motor portion 40, and as shown in Figure 4, oscillator 41 has stacked piezoelectrics 42, actuator 44,45, bolster 46 etc.
As shown in Figure 5, bolster 46 has axial region, flange part 46a and the threaded portion 46b on the flange side end of perforation, on the position of the node of oscillations that becomes stacked piezoelectrics 42 (neutral position), above-mentioned perforation axial region is connected along stacked direction, and it is adhesively fixed.
As shown in Figure 4, actuator 44 and actuator 45 are made of a pair of projection respectively, and are configured along the length direction (T direction) of stacked piezoelectrics 42 on the end face of the both sides of Z direction with bolster 46 orthogonal directions.In addition, under the mounted state of stator, actuator 44 and actuator 45 only protrude a little than the end face (Z direction) of stator 15.And, the diameter addition of the size between the actuator 44,45 (size of Z direction) and two rollers 23 measure-alike.
To be installed to two oscillators 41 on the stator 15, at first, the oscillator that oscillator 41 inserts stator 15 be installed with the recess 15a, and the threaded portion 46b of bolster 46 is inserted among the perforation slotted hole 15b from cylindrical side Monday.Nut 25 is screwed in from inner periphery one side on the threaded portion 46b of bolster 46, and the state that connects slotted hole 15b by the flange part 46a of bolster 46 and the flange part 25a clamping of nut 25,46b is adhesively fixed the threaded portion.Be installed in oscillator 41 on the stator 15 and be bearing in bolster 46, and can rotate freely, and on the Z direction, can move a bit a little with respect to stator 15 around bolster 46 along the R direction.But, it is being supported with the state that the position on T direction and R direction is restricted.In addition, as shown in Figure 3, on stator 15 circumferencial directions, above-mentioned two oscillators 41 and above-mentioned a pair of roller 23 are configured in respectively with respect to the axle center and carry out on the position of trisection with the hexagonal angle degree.
In addition, further detailed structure and effect about above-mentioned oscillator 41 will be described hereinafter.
As mentioned above, assembled the stator 15 of oscillator 41, roller 23, bearing ball 21 etc., embedded from-Z end face one side on the outer circumference portion of rotor 16.And, from stator 15-Z end face one side, with among the breach 16d that lug boss 17a, 20b is embedded rotor 16 and be in the state that is restricted that rotates, rotor 17, the application of force are embedded on the rotors 16 with leaf spring 20.In addition, insert spring force and regulate, and pressing plate 18 is crimped on its back side one side, the screw 10 that runs through screw through hole 18a is screwed among the screw 16e of rotor 16 fixes again with dividing plate 19 with desired thickness.By so fixing, rotor 16 is with 17 just under the state of stator 15 in clamping, be connected with the state that can slide slightly on the Z direction and relative rotation is restricted.
As mentioned above, in the vibration wave motor portion 40 that assembles, rotor 16 be with 17 one-tenth as a whole states of rotor under, contact and can be supported with relatively rotating with the inner circumferential portion of stator 15 via ball 21.In addition, rotor 17 is subjected to the application of force with the directed force F 0 of leaf spring 20, and stressed to stator 15 1 sides of+Z direction, and, with 16 one-tenth as a whole states that are rotated of rotor under, be supported to can relatively move along the Z direction (Fig. 8).
Shown in the section of the clamp position of above-mentioned oscillator 41 among Fig. 5,6 and roller 23, the actuator 44,45 of oscillator 41 and the external diameter of a pair of roller 23 on the Z direction by becoming as a whole rotor 16,17 clampings.And, as shown in Figure 3, two oscillators 41 and one group of roller 23 are configured on the circumferencial direction trisection posistion of stator 15, because they are supported to respectively only can be mobile a little in the Z direction, so the actuator 44,45 of oscillator 41 and a pair of roller 23 be by becoming as a whole rotor 17 and 16 clampings, and be subjected to the directed force F 0 of the Z direction of approximate equality.
Vibration wave motor portion 40 with said structure can embed the inner circumference portion of its rotor 16 rotatably among the slip outer circumference portion 2d of back quadrate part of fixed frame 2, thereby be assembled in the barrel 1.When carrying out this assembling, embed the oil scupper that runs through rotor 16 and (Fig. 7) connecting pin 14 that is screwed on the inner circumference portion of stator 15 the link slot 2e of fixed frame 2 from-Z one side.Stator 15 is supported to fixed frame 2 by means of connecting pin 14 and becomes as a whole state on direction of rotation.In addition, rotor 16,17 is supported on the slip outer circumference portion 2d of fixed frame 2 and can rotates.But, be clamped under the step part and the state between the end plate 31 at fixed frame 2 rears at pressing plate 18 and rotor 16, the position of rotor 16 on the Z direction is restricted.In addition, focus on actuating arm 9 by means of screw 53 fastening and be installed in rotor 16+the Z side end face on, the leading section of this actuating arm 9 can embed among the gathering sill 8a of the 4th group of lens-mount 8 with being free to slide.
Under the state that above-mentioned vibration wave motor portion 40 is assembled on the barrel 1, when oscillator 41 is driven and has encouraged elliptical vibration, be driven with the rotor 16,17 of actuator 44,45 butts, and rotate, thereby the 4th group of lens-mount 8 rotated via focusing on actuating arm 9 with respect to stator 15 (fixed frame 2).Because this rotation, the 4th group of lens-mount 8 just is driven, and moves to the focal position of optical axis O direction along the cam path 2b of fixed frame 2.
The structure and the effect of oscillators 41 here, are described with reference to Fig. 9～15.
Fig. 9 sees from the bolster direction, flexible print wiring board 48 is fastened on the figure of the state on the above-mentioned oscillator; Figure 10 be among Fig. 9 arrow D direction to view; Figure 11 sees from the bolster direction, the figure of the state that the oscillator of flexible print wiring board 48 from Fig. 9 disassembled; Figure 12 be among Figure 11 the arrow E direction to view; Figure 13 be among Figure 11 arrow F direction to view; Figure 14 is piezoelectric element part and the exploded perspective view of insulation board before sintering processes that constitutes above-mentioned oscillator; Figure 15 is the figure that the resultant vibration state of the crooked stationary wave vibration of above-mentioned oscillator and extensional vibration is amplified expression, and the expression oscillator is deformed to the situation of contraction state of case of bending, Figure 15 (D) of elongation state, Figure 15 (C) of Figure 15 (B) successively from the case of bending of Figure 15 (A).
Shown in Figure 11,14 etc., the oscillator 41 that constitutes above-mentioned vibration wave motor portion 40 has following part: stacked piezoelectrics 42 are made of a plurality of two kinds of piezoelectric sheet 42X, 42Y and two insulation board 43A, 43B; Electrode 47a, the 47b, 47c, 47d, 47a ', the 47b ' that make by the conductivity silver paste; A bolster 46; A pair of actuator 44; And a pair of actuator 45.
Two kinds of piezoelectric sheet 42X, 42Y are that rectangle piezoelectric element about 100 μ m constitutes by thickness respectively.On piezoelectric sheet 42X, in being divided into four zones of insulation, disposing the first internal electrode 42Xa, 42Xc, 42Xc ', 42Xa ', it is silver-palladium alloy about 10 μ m that the front of the described first internal electrode 42Xa, 42Xc, 42Xc ', 42Xa ' is coated with apposition thickness.The upper side end of above-mentioned each internal electrode extends to the endface position (seeing Figure 14) of piezoelectric element length direction (T direction) always.
On the other hand, on piezoelectric element 42Y, in being divided into four zones of insulation, disposed the second internal electrode 42Yb, 42Yd, 42Yd ', 42Yb ', it is silver-palladium alloy about 10 μ m that the front of the described second internal electrode 42Yb, 42Yd, 42Yd ', 42Yb ' is coated with apposition thickness.The downside end of above-mentioned internal electrode extends on the endface position of piezoelectric element length direction (T direction) (seeing Figure 14) always.
The first internal electrode 42Xa of above-mentioned piezoelectric sheet 42X, 42Y adjacent to each other, 42Xc, 42Xc ', 42Xa ' are identical with the shape of the second internal electrode 42Yb, 42Yd, 42Yd ', 42Yb ', but electrode tip is made opposite up and down, when stacked, the electrode surface of rectangle is configured on the position that overlaps each other.Alternately stacked about 40 layers of two kinds of piezoelectric sheet 42X, 42Y with such internal electrode.
As shown in figure 14, on the left end face of stacked piezoelectric element, formed the internal electrode exposed division (not shown) that ends of electrode 42Xa, 42Xc and the second internal electrode 42Yb, 42Yd is all exposed with stacked state.On its right end face of stacked piezoelectric element, formed the internal electrode exposed division (not shown) that expose with stacked state the end that makes the first internal electrode 42Xc ', 42Xa ' and the second internal electrode 42Yd ', 42Yb '.And then, on two lateral parts of above-mentioned internal electrode exposed division, formed constitute by the conductivity silver paste each four independently outer electrodes respectively, and this outer electrode and above-mentioned internal electrode conducting (Figure 12).
On the front-back of above-mentioned stacked piezoelectric element, disposed insulation board 43A, 43B that identical rectangular shape is arranged with piezoelectric sheet 42X, 42Y, thereby formed stacked piezoelectrics 42.In front on the surface of the insulation board 43A of a side, formed electrode 47a, 47b, 47c, 47d, 47a ', the 47b ' that constitutes by the conductivity silver paste shown in Figure 11.
Oscillator 41 (stacked piezoelectrics 42)-the vibration neutral point on Z one side (with the direction of the stacked direction quadrature) end face and two centre positions (anti-node location of crooked stationary wave vibration) at two ends on, a pair of actuator 44 is being adhesively fixed.In addition, on the T direction end positions on the end face of+Z one side (with the direction of stacked direction quadrature), a pair of actuator 45 is being adhesively fixed.In addition, this actuator 44,45 all is to form by alumdum is dispersed in the macromolecular material.
Also have, substantial middle part at oscillator 41, promptly, vibration neutral point at oscillator promptly becomes on the position of node, be provided with the through hole that connects at stacked direction (R direction), the perforation axial region of the bolster made from stainless steel material etc. 46 connects this through hole along the R direction, and be adhesively fixed (Figure 12) therein.
Connection flexible cable (below, be referred to as FPC) 48 with winding diagram is installed on each electrode 47a on the insulation board 43A that is arranged at oscillator 41,47b, 47c, 47d, 47a ', the 47b ' with the state that is electrically connected with each electrode.On above-mentioned winding diagram, be connected with the lead 49 (Fig. 9) that driving voltage applies usefulness.Lead 49 is connected on the oscillator drive circuit.
In addition, above-mentioned oscillator drive circuit has oscillating circuit portion, phase-shift circuit portion, drive circuit portion or the like, and the driving voltage that phase place is controlled via above-mentioned drive circuit portion imposes on oscillator 41.
The oscillator 41 that has applied driving voltage just produces by crooked stationary wave vibration shown in Figure 15 (A), (B), (C), (D) and the synthetic vibration of extensional vibration, makes the elliptical vibration (track E1, E2 among Fig. 9, E3, E4) of the front end generation phase shifts of actuator 44,45.Because driven member, promptly rotor 17,16 is pressed against on the front end of actuator 44,45, so drive rotor 17,16 becoming under the as a whole state via actuator 44,45, rotates relatively towards the direction of rotation of elliptical vibration with respect to stator 15.
In the barrel 1 of present embodiment with said structure, focusing under the situation of driving, drive by the oscillator drive circuit at oscillator 41, and actuator 44,45 is when elliptical orbit vibrates, then rotor 17,16 is just becoming under the as a whole state to be driven, and rotates to any direction with respect to stator 15 and fixed frame 2.Because the rotation of above-mentioned rotor just drives 8 rotations of the 4th group of lens-mount via focusing on actuating arm 9, and its cam path 2b along fixed frame 2 is moved on the focal position of optical axis O direction.
As mentioned above,, can obtain to have the vibration wave motor of satisfactory texture, the few and electric efficiency height of this rotary body drive source friction loss as the motor-driven source according to the vibration wave motor 40 in the barrel 1 that is assembled in present embodiment.That is, in above-mentioned vibration wave motor 40, two oscillators 41 and a pair of roller 23 are configured on the trisection posistion on the circumferencial direction of stator 15, and utilize the rotor 16 and 17 of one that oscillator and roller are clamped, and make it be subjected to directed force F 0.Therefore, rotor 16,17 and produces under the state of the friction loss that causes because of above-mentioned directed force F 0 being difficult for just under the state that is not subjected to out-of-balance force, drives this rotor.
In addition, in the above-described embodiments, on the trisection posistion of the circumferencial direction of stator 15 two oscillators 41 of configuration have been adopted and as the structure of a pair of roller 23 of isolated part, but, be not to be only limited to this a kind of structure, can adopt following structure, promptly yet, dispose oscillator at least one position in a plurality of position of halving, and on other positions, dispose the structure of roller.In addition, also can be the structure that on all position of halving, all disposes oscillator.
In addition, the oscillator 41 in the foregoing description is rectangular shapes, but also can use along the oscillator of the circular shape of the circumferencial direction of stator 15.
In addition, in the above-described embodiments, used a pair of roller 23 as isolated part, but, be not to only limit to this, also can use a pair of ball.
According to vibration wave motor of the present invention, can be used as the drive source of the little and rotary body that electric efficiency is high of friction loss.
Claims (10)
1. a vibration wave motor is characterized in that, it has following parts:
At least one oscillator, it has encouraged the elliptic motion that is formed by the synthetic of crooked stationary wave vibration and extensional vibration;
The support unit that keeps above-mentioned oscillator;
First rotary body can freely rotate with respect to above-mentioned support unit around the pivot axis, and is configured to and can contacts with an end in two ends of above-mentioned oscillator on the described pivot axis direction;
Second rotary body, be supported to and rotate integratedly with above-mentioned first rotary body, and can freely rotate with respect to above-mentioned support unit around described pivot axis, be configured on described pivot axis direction and can contact with another end in two ends of above-mentioned oscillator;
Application of force unit is along the pivot axis direction application of force, so that above-mentioned first rotary body and above-mentioned second rotary body are connected on the above-mentioned oscillator all the time.
2. vibration wave motor as claimed in claim 1 is characterized in that, above-mentioned oscillator is mounted and is bearing on the above-mentioned support unit in the mode that the position of its circumferencial direction and position radially are restricted.
3. vibration wave motor as claimed in claim 1 is characterized in that above-mentioned oscillator is bearing on the above-mentioned support unit, and can freely rotate around the axis on the described pivot axis direction that is approximately perpendicular to above-mentioned first and second rotary bodies.
4. vibration wave motor as claimed in claim 1 is characterized in that, on the circumferencial direction of above-mentioned first and second rotary bodies, with the arranged spaced of approximate equality a plurality of above-mentioned oscillators.
5. vibration wave motor as claimed in claim 4 is characterized in that, above-mentioned oscillator on the circumferencial direction of above-mentioned first and second rotary bodies, with 120 ° of arranged spaced roughly three.
6. vibration wave motor as claimed in claim 1 is characterized in that, above-mentioned application of force unit is configured to rotate integratedly with above-mentioned first and second rotary bodies all the time.
7. vibration wave motor as claimed in claim 1 is characterized in that,
Above-mentioned oscillator forms the length that has given size on described pivot axis direction, and disposes one on the circumferencial direction of above-mentioned first and second rotary bodies at least; In addition,
Also has at least one isolated part on the circumferencial direction that is configured in above-mentioned first and second rotary bodies, the afore mentioned rules size of its length dimension and above-mentioned oscillator is roughly the same, and be configured on the above-mentioned support unit, and be clamped in above-mentioned first rotary body and second rotary body, contact with second rotary body with first rotary body all the time;
Above-mentioned oscillator and above-mentioned isolated part, with the arranged spaced of approximate equality on the circumferencial direction of above-mentioned first and second rotary bodies.
8. vibration wave motor as claimed in claim 7 is characterized in that, above-mentioned isolated part is to be configured to overlapping a plurality of and the ball shape that constitutes or the rolling element of roller shape on the described pivot axis direction of above-mentioned first and second rotary bodies.
9. vibration wave motor as claimed in claim 1 is characterized in that, above-mentioned oscillator only the neutral point by the resultant vibration of crooked stationary wave vibration and extensional vibration be node partly on, be fixed and be bearing on the above-mentioned support unit.
10. a vibration wave motor is characterized in that, it has following parts:
At least one oscillator, it has encouraged the elliptic motion that is formed by the synthetic of crooked stationary wave vibration and extensional vibration;
The support unit that keeps above-mentioned oscillator;
First rotary body can freely rotate with respect to above-mentioned support unit around axis, and is configured to and can contacts with an end in two ends of above-mentioned oscillator on the axis direction;
Second rotary body, be bearing on above-mentioned first rotary body, all the time rotate with respect to above-mentioned support unit around axis integratedly with above-mentioned first rotary body, and can move freely along axis direction with respect to above-mentioned first rotary body, be configured to can with another end in contact in two ends of above-mentioned oscillator on the axis direction;
Force application part is supported to all the time and rotates integratedly with above-mentioned first and second rotary bodies, and along axis direction to the above-mentioned second rotary body application of force, so that above-mentioned first rotary body and above-mentioned second rotary body are connected on the above-mentioned oscillator all the time.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004142698 | 2004-05-12 | ||
| JP2004142698A JP4472421B2 (en) | 2004-05-12 | 2004-05-12 | Vibration wave motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1697299A CN1697299A (en) | 2005-11-16 |
| CN100440715C true CN100440715C (en) | 2008-12-03 |
Family
ID=35349865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100690972A Expired - Fee Related CN100440715C (en) | 2004-05-12 | 2005-05-10 | Vibration wave motor |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4472421B2 (en) |
| CN (1) | CN100440715C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4610544B2 (en) * | 2006-01-13 | 2011-01-12 | 太陽誘電株式会社 | Piezoelectric drive |
| CN103115058B (en) * | 2013-03-12 | 2015-05-06 | 哈尔滨工业大学 | Paster type unlockable nut of longitudinal vibration working mode of cantilever beam |
| JP7313909B2 (en) * | 2019-05-30 | 2023-07-25 | キヤノン株式会社 | vibration wave motors and electronics. |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5146129A (en) * | 1986-12-01 | 1992-09-08 | Canon Kabushiki Kaisha | Vibration wave motor |
| US5554905A (en) * | 1994-02-01 | 1996-09-10 | Imra Europe Sa | Piezoelectric rotating motor |
| CN2561162Y (en) * | 2002-06-30 | 2003-07-16 | 华中科技大学 | Supersonic electric motor |
-
2004
- 2004-05-12 JP JP2004142698A patent/JP4472421B2/en not_active Expired - Fee Related
-
2005
- 2005-05-10 CN CNB2005100690972A patent/CN100440715C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5146129A (en) * | 1986-12-01 | 1992-09-08 | Canon Kabushiki Kaisha | Vibration wave motor |
| US5554905A (en) * | 1994-02-01 | 1996-09-10 | Imra Europe Sa | Piezoelectric rotating motor |
| CN2561162Y (en) * | 2002-06-30 | 2003-07-16 | 华中科技大学 | Supersonic electric motor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4472421B2 (en) | 2010-06-02 |
| CN1697299A (en) | 2005-11-16 |
| JP2005328596A (en) | 2005-11-24 |
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