CN100563091C - Supersonic motor - Google Patents

Supersonic motor Download PDF

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Publication number
CN100563091C
CN100563091C CNB2005100799104A CN200510079910A CN100563091C CN 100563091 C CN100563091 C CN 100563091C CN B2005100799104 A CNB2005100799104 A CN B2005100799104A CN 200510079910 A CN200510079910 A CN 200510079910A CN 100563091 C CN100563091 C CN 100563091C
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mentioned
oscillator
rotor
stator
oscillators
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CN1713504A (en
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岸政典
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Olympus Corp
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Olympus Corp
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Abstract

A kind of have a circular ring structure, can improve efficiency of motor, and the also little supersonic motor of the restriction of arrangement space.Supersonic motor of the present invention (40) assembling back has: stator (15) as the drive source of lens barrel; The rotor of ring-type (16); A pair of oscillator (41); The oscillator retainer (22) of supporting oscillator; The oscillator pressing plate (23) of the bolster (46) of supporting oscillator; Holddown spring (24), by the oscillator pressing plate to oscillator to the rotor one side application of force, it can be free to slide; Ball (21) can rollably embed in the fitting portion of stator and rotor.A pair of oscillator is installed in the recess (15b) of stator by oscillator retainer etc., and the actuator of oscillator (44) carries out clamping to rotor under the state of the outer circumference surface of pushing rotor all the time and inner peripheral surface.When oscillator is encouraged, when actuator is done elliptical vibration, just drive rotor rotation.

Description

Supersonic motor
Technical field
The present invention relates to use the supersonic motor of the oscillator that has encouraged the ultrasonic wave elliptic motion.
Background technology
In the past, in patent documentation 1 or patent documentation 2 etc., disclose the mounting structure of supersonic motor, this supersonic motor relatively moves oscillator and driven member, described oscillator produces the ultrasonic elliptically vibrating that is formed by synthesizing of crooked stationary wave vibration and extensional vibration, and described driven member contacts with this oscillator and to its application of force.This supersonic motor is the supersonic motor of linear drive mode.
In addition, disclosed supersonic motor in patent documentation 3 is the rotary-type supersonic motor that utilize to produce the oscillator of ultrasonic elliptically vibrating, is the motor that adopts the rotor with the rotary shaft by the center.
No. the 2871768th, [patent documentation 1] Japanese patent gazette.
Open the flat 8-182365 of communique number of [patent documentation 2] Japan Patent.
No. the 3401097th, [patent documentation 3] Japanese patent gazette.
, disclosed linear ultrasound motor in patent documentation 1,2 is compared with the supersonic motor of circular ring type, exists to be difficult to guarantee to keep moment of torsion, and is difficult to improve the problems such as resolution of stop position.
On the other hand, disclosed supersonic motor in patent documentation 3 though be rotary-type, must have the central shaft by central part, and for example, being difficult to be applied in central part such as lens barrel needs in the device in very big space.In addition, because fixedly the framework of oscillator itself has the effect of force application spring,, be difficult to stably fix rotor and oscillator so there is the problem of rigidity aspect in said frame.To also have, in order suppressing by the friction loss that active force caused of pushing down oscillator, need to arrange a plurality of opposed oscillators in the outside of rotor, the position of oscillator is restricted, and in addition, electric wiring is also complicated.
Summary of the invention
The present invention puts forward in order to address the above problem, and its objective is provides a kind of supersonic motor that utilizes the oscillator that has encouraged the ultrasonic wave elliptic motion, and it has circular ring structure, can improve efficiency of motor, and the space of arranging is not restricted yet.
The described supersonic motor of one of the present invention has: at least two oscillators, and each described oscillator has a pair of actuator, and this a pair of actuator produces the ultrasonic elliptically vibrating that is formed by the synthetic of crooked stationary wave vibration and extensional vibration; Circular rotor is arranged in the effect of elliptical vibration of the above-mentioned oscillator at the regulation position on the circumference, moves relative to rotating with respect to above-mentioned oscillator; Stator, support above-mentioned rotor, and this rotor can be rotated, described stator also supports above-mentioned at least two oscillators, and limit above-mentioned at least two oscillators in the rotation direction of above-mentioned rotor and the position on the circumferencial direction, and, make between above-mentioned at least two oscillators each opposed and can contact with internal face with the outside wall surface that the footpath of above-mentioned rotor makes progress to actuator, and above-mentioned at least two oscillators can upwards move freely in the footpath of above-mentioned rotor, and this radially is the direction perpendicular to the rotation of above-mentioned rotor; Application of force unit is to the radially application of force of above-mentioned at least two oscillators towards above-mentioned rotor, so that on the outside wall surface and internal face that the footpath that above-mentioned at least two oscillators are crimped on above-mentioned rotor all the time makes progress, this radially is the direction perpendicular to the rotation of above-mentioned rotor.
The present invention's two described supersonic motors have: a pair of oscillator produces the ultrasonic elliptically vibrating that is formed by the synthetic of crooked stationary wave vibration and extensional vibration; Circular rotor is arranged in the effect of elliptical vibration of the above-mentioned oscillator at the regulation position on the circumference, with respect to above-mentioned oscillator relative to rotating and moving; Stator supports above-mentioned rotor, and it can be rotated; The oscillator retainer, be arranged to be fixed on the said stator, above-mentioned oscillator as the bolster of the neutral axis of resultant vibration on the above-mentioned a pair of oscillator of restriction in the rotation direction of above-mentioned rotor and the position of circumferencial direction, and support above-mentioned a pair of oscillator and make it can radially moving freely along above-mentioned rotor; The oscillator compacting part utilizes the bolster as the neutral axis of resultant vibration of above-mentioned oscillator that a pair of oscillator is bearing on the above-mentioned oscillator retainer; And application of force unit, by above-mentioned oscillator compacting part, above-mentioned a pair of oscillator is made progress towards the footpath at above-mentioned rotor the direction application of force near each other; Above-mentioned a pair of oscillator has following structure, promptly, outside wall surface and internal face that the footpath of above-mentioned rotor makes progress are clamped, and contacting with internal face with described outside wall surface all the time and described outside wall surface and internal face are pushed, wherein said radially is direction perpendicular to the rotation of above-mentioned rotor.
The present invention's three described supersonic motors, be on the basis of one of the present invention or two described supersonic motors, also have the rotor compacting part on the said stator of being installed in, it above-mentioned rotor with said stator clamping on the rotation direction can rotate it.
The present invention's four described supersonic motors are on the basis of one of the present invention or two described supersonic motors, above-mentioned rotor and said stator radially between, have a plurality of rolling elements that contact along circumferential directions and with both.
The present invention's five described supersonic motors are that said stator forms with the part that above-mentioned rolling element contacts with above-mentioned rotor on the basis of the present invention's four supersonic motor, and the position limit of rotation direction that makes above-mentioned rotor is on assigned position.
The present invention's six described supersonic motors have: a plurality of oscillators produce the ultrasonic elliptically vibrating that is formed by the synthetic of crooked stationary wave vibration and extensional vibration; Circular rotor is arranged in the effect of elliptical vibration of the above-mentioned oscillator at the regulation position on the circumference, relatively rotates mobile with respect to above-mentioned oscillator; Stator supports above-mentioned rotor, and it can be rotated; The oscillator retainer, be arranged to be fixed on the said stator, above-mentioned oscillator as the bolster of the neutral axis of resultant vibration on the above-mentioned a plurality of oscillators of restriction in the rotation direction of above-mentioned rotor and the position of circumferencial direction, and support above-mentioned a plurality of oscillator and make it can radially moving freely along above-mentioned rotor; The oscillator compacting part utilizes the bolster as the neutral axis of resultant vibration of above-mentioned oscillator that above-mentioned a plurality of oscillators are bearing on the above-mentioned oscillator retainer; And application of force unit, by above-mentioned oscillator compacting part, above-mentioned a plurality of oscillators are made progress towards the footpath at above-mentioned rotor the direction application of force near each other; Above-mentioned a plurality of oscillator has following structure, promptly, outside wall surface and internal face that the footpath of above-mentioned rotor makes progress are clamped, and contacting with internal face with above-mentioned outside wall surface all the time and above-mentioned outside wall surface and internal face are pushed, above-mentioned radially is direction perpendicular to the rotation of above-mentioned rotor.
According to the present invention, a kind of supersonic motor that utilizes the oscillator that has encouraged the ultrasonic wave elliptic motion is provided, it has circular ring structure, and the footpath that makes at least two oscillators be crimped on rotor makes progress, and can improve efficiency of motor thus, and the restriction that arrangement space is subjected to is also seldom.
Description of drawings
Fig. 1 is the skiagraph of optical axis that comprises the lens barrel of the supersonic motor of having assembled the first embodiment of the present invention;
Fig. 2 is the exploded perspective view that is assembled in the supersonic motor in the lens barrel of Fig. 1;
Fig. 3 is the sectional drawing along the A-A line among Fig. 1;
Fig. 4 is the B portion enlarged drawing among Fig. 3;
Fig. 5 is the stereogram of the outward appearance of the oscillator of the supersonic motor in the presentation graphs 2 and oscillator retainer;
Fig. 6 is the oscillator of the supersonic motor among Fig. 2 and the exploded perspective view of oscillator retainer;
Fig. 7 is the amplification profile diagram of the C-C part among Fig. 3;
Fig. 8 is the amplification profile diagram around the magnetic transducing portion in the supersonic motor of Fig. 2;
Fig. 9 sees, flexible print wiring board is fastened on the figure of the state on the oscillator of supersonic motor of Fig. 2 from the bolster direction;
Figure 10 be along the arrow D direction among Fig. 9 to view;
The figure of the state that Figure 11 sees, flexible print wiring board is disassembled from the oscillator of Fig. 9 from the bolster direction;
Figure 12 be along the arrow E direction among Figure 11 to view;
Figure 13 be along the arrow F direction among Figure 11 to view;
Figure 14 is piezoelectric element portion and the exploded perspective view of insulation board before sintering processes that constitutes the oscillator of Figure 11;
Figure 15 is the figure that the resultant vibration state of the crooked stationary wave vibration of the oscillator of Figure 11 and extensional vibration is amplified the back expression, and the expression oscillator is deformed to the situation of contraction state of case of bending, Figure 15 (D) of elongation state, Figure 15 (C) of Figure 15 (B) successively from the case of bending of Figure 15 (A);
Figure 16 is the amplification profile diagram with respect to the portion of the chimeric mechanism of stator rotor of the variation of the chimeric mechanism of stator rotor of the supersonic motor of Fig. 2;
Figure 17 is an amplification profile diagram of having used the vibrator component mounting portion in the supersonic motor of portion of the chimeric mechanism of stator rotor of variation of Figure 16;
Figure 18 is the skiagraph of oscillator installment state of the supersonic motor of the expression second embodiment of the present invention;
Figure 19 is the stereogram of the vibrator component in the supersonic motor of Figure 18.
Symbol description
15 stators; 16 rotors (circular rotor); 16a rotor outer circumference surface (outside wall surface); 16b rotor inner peripheral surface (internal face); 18 rotor pressing plates (rotor compacting part); 21 balls (rolling element); 22 oscillator retainers; 23 oscillator pressing plates (oscillator compacting part); 24 holddown springs (application of force unit); 40,40B supersonic motor; 41 oscillators.
Embodiment
Below, with reference to the description of drawings embodiments of the invention.
Fig. 1 is the skiagraph of optical axis that comprises the lens barrel of the supersonic motor of having assembled the first embodiment of the present invention; Fig. 2 is the exploded perspective view of above-mentioned supersonic motor, but is the stereogram of seeing from imaging one side of optical axis direction; Fig. 3 is the sectional drawing along the A-A line among Fig. 1; Fig. 4 is the B portion enlarged drawing of Fig. 3, represents the oscillator installment state of above-mentioned supersonic motor portion; Fig. 5 is the stereogram that above-mentioned oscillator is assembled in the vibrator component under the state of oscillator retainer; Fig. 6 is the exploded perspective view of above-mentioned vibrator component; Fig. 7 is the amplification profile diagram of the C-C part among Fig. 3, expression oscillator installment state; Fig. 8 is the magnetic transducing portion amplification profile diagram on every side of above-mentioned supersonic motor.
In addition, in the following description, be the Z direction with the direction parallel with the optical axis O of first group～the 4th group of phtographic lens that lens were constituted of above-mentioned lens barrel, with a side of subject be+, with imaging one side be-.With the radial direction with respect to optical axis O is the R direction, is the T direction with the tangential direction of the circumferencial direction of optical axis O.In addition, optical axis O is roughly consistent with the axis of rotation of stator described later, rotor etc.
As shown in Figure 1, the lens barrel 1 of present embodiment has following part: fixed frame 2; Be bearing in the cam ring 3 on the outer circumference portion of fixed frame 2; Zoom ring 4 in the excircle of embedding cam ring 3; The first group of lens-mount 5 that keeps first group of lens 35; At the rear of first group of lens-mount 5, keep second group of lens-mount 6 of second group of lens 36; At the rear of second group of lens-mount 6, keep the 3rd group of lens-mount 7 of the 3rd group of lens 37; At the rear of the 3rd group of lens-mount 7, keep the 4th group of lens-mount 8 as the 4th group of lens 38 of condenser lens; And as the supersonic motor 40 of drive source.
Fixed frame 2 is ring-shaped frame parts, has at its annulus: circumference gathering sill 2c; Directly advance gathering sill 2a along the Z direction; And with respect to the cam path 2b of Z direction diagonal; In addition, it is fastening with end face portion 2d with focus on actuating arm and run through and use breach 2f also to be provided with stator at the back quadrate part of fixed frame 2.And, end plate 31 and installing rack 33 are fastened on the rearward end of fixed frame 2 by screw 55.Also have, tighten intrinsic outside framework 32 at end plate 31.
Cam ring 3 is ring-shaped frame parts, embed on the excircle of fixed frame 2, the protuberance 3c of its inner periphery one side then embeds and is bearing among the circumference gathering sill 2c of fixed frame 2, make state support that cam ring 3 is restricted with the motion in the Z direction on fixed frame 2, and can freely rotate.In annulus portion, be provided with two cam path 3a, 3b with respect to Z direction diagonal.
Zoom ring 4 is ring-shaped frame parts, embeds the excircle of cam ring 3, all becomes as a whole with it on Z direction and direction of rotation.Operation rubber ring 4a is installed on the outer circumference portion of zoom ring 4.
First group of lens-mount 5 is fastening and be bearing on the leading section of fixed frame 2.
Second, third group lens-mount 6,7 embeds and is bearing on the inner periphery of fixed frame 2, is fastened with cam follower 11,12 on their excircle respectively. Cam follower 11,12 directly advances gathering sill 2a with what advance directly that the guiding state runs through fixed frame 2, and can embed among cam path 3a, the 3b of cam ring 3 with being free to slide.Therefore, when the zoom rotating operation driving cam ring 3 by zoom ring 4 rotates, just pass through cam path 3a, 3b via cam follower 11,12, drive second, third group lens-mount 6,7, move it on each zoom position of optical axis O direction to the Z direction.
The 4th group of lens-mount 8 embeds and is bearing on the inner periphery of fixed frame 2, tightens set cam follower 13 at its excircle.Cam follower 13 can embed among the cam path 2b of fixed frame 2 with being free to slide.On this 4th group of lens-mount 8, be provided with gathering sill 8a along the Z direction.Be fastened on the leading section of focusing actuating arm 9 of the rotor 16 of supersonic motor 40 sides, embed sliding freely among the gathering sill 8a.As mentioned below, when focusing on driving, when the rotor 16 that drives supersonic motor portion 40 rotates, just rotate with respect to fixed frame 2 by focusing on the 4th group of lens-mount 8 of actuating arm 9 drivings.By this rotation, cam follower 13 slides on cam path 2b, thus just rotation on one side of the 4th group of lens-mount 8, to each focal position of Z direction (optical axis O direction) move on one side.
Supersonic motor 40 is that drive unit is used in the focusing driving that drives the 4th group of lens-mount 8 advance and retreat, and as shown in Figure 1, 2, it has following part: stator 15; Circular rotor 16; Rotor pressing plate 18 as the rotor compacting part; Six bearing balls 21 of the rolling member of using as stator rotor radial support mechanism; The vibrator component described later (block) (Fig. 5,6) that comprises oscillator 41; Magnetic transducing portion that constitutes by transducer support plate 27, magnetic sensor 28 etc.
As shown in Figure 2, rotor 16 is circle shape parts, is to make with the good material of anti-wear performance, in addition, is pasting on the end face of+Z one side with the magnetic sensor of the ring-type of polyester film protection with magnetic belt 19.
As shown in Figure 2, stator 15 is circle shape parts, and it has following part: the flange part 15a of inner periphery one side; Oscillator on-Z side is installed and is used recess 15b; Ball on-Z side inner circumference portion inserts breach 15c; Transducer support plate on+Z side is installed recess 15f.Stator 15 is gone up by the end face portion 2d that its flange part 15a+Z side end face is connected to fixed frame 2 and is fixed.
Rotor pressing plate 18 is the annular with breach 18a, has screw through hole 18d.Screw 51 tighten be fixed on stator 15-the screw 15e of Z side end face in.Breach 18a becomes the portion that withdraws from of above-mentioned vibrator component.
Ball 21 is parts pivoting friction, that constitute stator rotor radial support mechanism that are used to reduce stator and rotor, and the ball that it can rollably embed stator shown in Figure 3 15 inserts among the breach 15c.The external diameter of above-mentioned ball protrudes to the inner circumferential side of stator 15 a little, and when inserting the outer circumference surface 16a of rotor 16 in the stator 15, stator 15 and rotor 16 just support to not relatively rotating loosely under the state of ball 21 in the centre.In addition, embed the rotor in the stator, under the state of the flange portion 15a of the inner circumferential side by stator 15 and 18 clampings of rotor pressing plate, be restricted along the mobile of Z direction.In addition, also can use the rolling member of roller shape to replace ball 21.
Have transducer support plate 27, be fastened on by screw 54 among the recess 15f of stator 15 as the magnetic sensor 28 of above-mentioned magnetic transducing portion.Under above-mentioned installment state, magnetic belt 19 sliding contacts of magnetic sensor 28 and rotor one side, the amount of spin of detection rotor 16.In the sectional drawing of Fig. 8, represented this sliding contact state.
Shown in Fig. 2,3, above-mentioned vibrator component is mounted in the oscillator of stator 15 and installs with the assembly among the recess 15b, constitute by following part: become a pair of (two) oscillator 41 of drive source, encouraged the ultrasonic wave elliptic motion that forms by the synthetic of crooked stationary wave vibration and extensional vibration; The oscillator retainer 22 that keeps oscillator 41; A pair of oscillator pressing plate 23 as the oscillator compacting part; Be used for the application of force unit to oscillator 41 application of forces, promptly holddown spring 24; Flexible substrate 48 (Fig. 5,6).
Shown in Fig. 5,6 etc., oscillator 41 has following part: stacked piezoelectrics 42; Actuator 44; Bolster 46 as neutral axis.
Bolster 46 connects the node of oscillations (neutral axial region) of stacked piezoelectrics 42 along stacked direction (the Z direction under the installment state), and is adhesively fixed thereon, and the axle two ends then protrude from stacked piezoelectrics 42.
Actuator 44 is made of a pair of projection, this a pair of projection with an end face of the stacked piezoelectrics 42 of bolster 46 orthogonal directions on, be fixed on the end of length direction (the T direction under the installment state).
In addition, further detailed structure and effect about oscillator 41 will describe with reference to Fig. 9～15 below.
Oscillator retainer 22 has along two through hole 22a of R direction and the screw through hole 22d on two ends of T direction, these two through hole 22a can make two oscillators 41 slide opposite one another and insert wherein, and cut apart layout with the state with central space portion.On through hole 22a, on two sides of Z direction, be provided with breach 22c respectively, this breach 22c is used for not inserting loosely along the R direction bolster 46 of oscillator, and it can freely be rotated.In addition, the A/F of the Z direction of through hole 22a make can be not the step part of the root of clamping bolster 46 width in the axial direction loosely.
Oscillator pressing plate 23 has the bending part 23a of Z direction both sides and the bending part 23b of T direction both sides.In addition, on dogleg section 23a, be provided with the axle supporting breach 23c that embeds bolster 46.This piece oscillator pressing plate 23 can be installed under the state on the outer circumference portion of the through hole 22a that bending part 23a, 23b is entrenched in oscillator retainer 22.
Holddown spring 24 is made with sheet material by spring, and it has the compressed part 24a that is in configuration state and convex that can strain in R direction end; On T direction both ends, has screw through hole 24d.
In above-mentioned vibrator component, shown in Fig. 5,6, two oscillators 41 are under the opposed state at actuator 44 separately, insert the through hole 22a of oscillator retainer 22 from the upper and lower outside of R direction, bolster 46 is embedded among the breach 22c of oscillator retainer 22, just be housed in the oscillator retainer 22.Then, oscillator pressing plate 23 is covered in the back side of the R of above-mentioned oscillator 41 direction one side (side opposite with actuator), and be entrenched in the profile portion of through hole 22a of oscillator retainer 22.At this moment, bolster 46 embeds among the axle supporting breach 23c of oscillator pressing plate 23.And then, the compressed part 24a of holddown spring 24 is connected on upper and lower two outsides of oscillator pressing plate 23 (state shown in Figure 5).
Vibrator component under the above-mentioned assembled state is assembled on the stator 15 in the mode that radially clips rotor 16, and this rotor 16 embeds on the inner periphery of the stator 15 that is fastened on the lens barrel side across ball 21.Promptly, the actuator 44 of the oscillator 41 of one side is connected on the outer circumference surface 16a as the outside wall surface of rotor 16, the actuator 44 of the oscillator 41 of opposite side then is connected on the inner peripheral surface 16b as the internal face of rotor 16, under such state, above-mentioned vibrator component is inserted among the recess 15b of stator 15.Make screw 52 run through screw through hole 24d, 22d, be screwed into again among the screw 15d of stator 15 1 sides, thus above-mentioned vibrator component is installed on the stator 15.
Under above-mentioned installment state, the bolster 46 of a pair of oscillator 41, under the state of Z direction, notch part supporting by the oscillator pressing plate 23 of fixing and be bearing in stator 15 1 sides and oscillator retainer 22, and, a pair of oscillator 41 two actuators 44 separately are crimped on respectively on the outer circumference surface 16a and inner peripheral surface 16b of rotor 16 all the time, are in along the state of R direction (radially) clamping.Its crimp force makes the axle supporting breach 23c (bottom) of oscillator pressing plate 23 and bolster 46 butts of oscillator 41 by pushing of holddown spring 24, and is delivered to actuator 44 1 sides.
As mentioned above, by above-mentioned vibrator component is installed on stator 15, the rotor 16, just supersonic motor 40 has been assembled on the lens barrel 1.
The structure and the effect of oscillators 41 here, are described with reference to Fig. 9～15.
Fig. 9 sees, flexible substrate is fastened on the figure of the state on the above-mentioned oscillator from the bolster direction; Figure 10 be along the arrow D direction among Fig. 9 to view; The figure of the state that Figure 11 sees, the oscillator of flexible substrate from Fig. 9 disassembled from the bolster direction; Figure 12 be along the arrow E direction among Figure 11 to view; Figure 13 be along the arrow F direction among Figure 11 to view; Figure 14 is piezoelectric element portion and the exploded perspective view of insulation board before sintering processes that constitutes above-mentioned oscillator; Figure 15 (A)～(D) is the figure that the resultant vibration state of the crooked stationary wave vibration of above-mentioned oscillator and extensional vibration is amplified the back expression, and the expression oscillator is deformed to the situation of contraction state of case of bending, Figure 15 (D) of elongation state, Figure 15 (C) of Figure 15 (B) successively from the case of bending of Figure 15 (A).
Shown in Figure 11,14 etc., the oscillator 41 that constitutes above-mentioned supersonic motor 40 has following part: by a plurality of two kinds of piezoelectric sheet 42X, 42Y and two stacked piezoelectrics 42 that insulation board 43A, 43B constitute; Electrode 47a, the 47b, 47c, 47d, 47a ', the 47b ' that constitute by the conductivity silver paste; A bolster 46; And a pair of actuator 44.
Two kinds of piezoelectric sheet 42X, 42Y are that rectangle piezoelectric element about 100 μ m constitutes by thickness respectively.On piezoelectric sheet 42X, in being divided into four zones of insulation, arranged the first internal electrode 42Xa, 42Xc, 42Xc ', 42Xa ', it is silver-palladium alloy about 10 μ m that the front of the described first internal electrode 42Xa, 42Xc, 42Xc ', 42Xa ' is coated with apposition thickness.The upper side end of above-mentioned each internal electrode extends on the endface position of piezoelectric element length direction (T direction) (seeing Figure 14) always.
On the other hand, on piezoelectric sheet 42Y, in being divided into four zones of insulation, arranged the second internal electrode 42Yb, 42Yd, 42Yd ', 42Yb ', it is silver-palladium alloy about 10 μ m that the front of the described second internal electrode 42Yb, 42Yd, 42Yd ', 42Yb ' is coated with apposition thickness.The downside end of above-mentioned each internal electrode extends on the endface position of piezoelectric element length direction (T direction) (seeing Figure 14) always.
The first internal electrode 42Xa, 42Xc, 42Xc ', the 42Xa ' of above-mentioned these piezoelectric sheets 42X, 42Y adjacent to each other are identical with the shape of the second internal electrode 42Yb, 42Yd, 42Yd ', 42Yb ', but electrode tip is made opposite up and down, when stacked, the electrode surface of rectangle is arranged on the position that overlaps each other.Alternately stacked about 40 layers of two kinds of piezoelectric sheet 42X, 42Y with such internal electrode.
As shown in figure 14, on the left end face of the piezoelectric element after stacked, formed internal electrode exposed division (not shown), this internal electrode exposed division makes the end of the first internal electrode 42Xa, 42Xc and the second internal electrode 42Yb, 42Yd expose with stacked state.On its right end face of the piezoelectric element after stacked, formed internal electrode exposed division (not shown), this internal electrode exposed division makes the end of the first internal electrode 42Xc ', 42Xa ' and the second internal electrode 42Yd ', 42Yb ' expose (not shown) with stacked state.Further, on above-mentioned internal electrode exposed division,, each four independently outer electrode, this outer electrode and above-mentioned internal electrode conducting (seeing Figure 12) of making have been formed respectively by the conductivity silver paste two side surface part.
Front-back at above-mentioned piezoelectric element after stacked has disposed insulation board 43A, 43B that identical rectangular shape is arranged with piezoelectric sheet 42X, 42Y, has formed the stacked piezoelectrics 42 of rectangular shape.In front on the surface of the insulation board 43A of a side, formed electrode 47a, the 47b, 47c, 47d, 47a ', the 47b ' that make by the conductivity silver paste shown in Figure 11.
Electrode 47a, 47b, 47c, 47d, 47a ', 47b ' on the above-mentioned insulation board 43A, respectively be exposed to each the stacked two sides piezoelectric sheet both sides, that be in stacked state internal electric of above-mentioned each sheet and be connected.That is, the first internal electrode 42Xa is electrically connected on electrode 47a.The second internal electrode 42Yb is electrically connected on electrode 47b.The first internal electrode 42Xc and the first internal electrode 42Xc ' are electrically connected on electrode 47c.The second internal electrode 42Yd and the second internal electrode 42Yd ' are electrically connected on electrode 47d.The first internal electrode 42Xa ' is electrically connected on electrode 47a '.The second internal electrode 42Yb ' is electrically connected on electrode 47b '.
Insulation board 43A, 43B are overlapped on piezoelectric sheet 42X, the 42Y that is in behind above-mentioned electrode connection status stacked, the stacked piezoelectrics under this state 42 are carried out sintering processes, and utilize above-mentioned each electrode to polarize, become oscillator 41 thus.
On the end face portion of the R of oscillator 41 direction (with the direction of stacked direction quadrature), on the end position of T direction, bonding fastening a pair of actuator 44.In addition, this actuator 44 is dispersed in aluminium dioxide in the macromolecular material and forms.
Also have, substantial middle portion at oscillator 41, promptly, at the vibration neutral point of oscillator, promptly become on the position of node, be provided with the through hole that runs through stacked direction (Z direction), the neutral axis made from stainless steel material etc., be that bolster 46 connects this through hole along the Z direction, and be adhesively fixed (Figure 12) therein.
Be arranged on each electrode 47a on the insulation board 43A of oscillator 41,47b, 47c, 47d, 47a ', the 47b ', the state to be electrically connected with each electrode is installed with the flexible substrate 48 with winding diagram.Flexible substrate 48 is connected on the printed circuit board (PCB) 49 with oscillator drive circuit.
In addition, above-mentioned oscillator drive circuit has oscillating circuit portion, phase-shift circuit portion, drive circuit portion or the like, and is applied on the oscillator 41 by the driving voltage that drive circuit portion is controlled phase place.
Be applied in the oscillator 41 of driving voltage through flexible substrate 48, just produce crooked stationary wave vibration and the synthetic vibration of extensional vibration shown in Figure 15 (A), (B), (C), (D), make the front end of actuator 44 produce the elliptical vibration (the track E1 shown in Fig. 9, the elliptic motion of E2) of phase deviation.Because driven member, be the inside and outside periphery of rotor 16 by on the front end that is pressed in actuator 44, relatively rotate to the direction of rotation of elliptical vibration so drive rotor 16 by actuator 44.
In the lens barrel 1 of present embodiment with said structure, under the situation of carrying out zoom, when cam ring 3 is rotated, just make the direction advance and retreat of second, third group lens-mount 6,7 along optical axis O by cam follower 11,12, carry out zoom drive.On the other hand, focusing under the situation of driving, when being driven a pair of oscillator 41 respectively by above-mentioned oscillator drive circuit, actuator 44 just is driven along elliptical orbit and vibrates.When driving actuator 44 and make elliptical vibration, just be driven with the rotor 16 of actuator 44 butts and doing relative rotation to some directions with respect to stator 15.By the rotation of above-mentioned rotor 16, drive 8 rotations of the 4th group of lens-mount via focusing on actuating arm 9, and move to optical axis O direction along the cam path 2b of fixed frame 2, focus on.
Lens barrel 1 according to the supersonic motor 40 of having assembled above-described present embodiment, the actuator 44 of a pair of oscillator 41, with the opposed state of inside and outside periphery of rotor 16 under butt thereon, and, above-mentioned oscillator 41 is supported to by oscillator retainer 22 can be with respect to rotor 16 to radially doing small moving, and utilize the active force of holddown spring 24 to push and keep.Therefore, because the butt power of actuator 44 can not be offset with respect to rotor 16,, can suppress to rotate the friction loss when driving so rotor can radially stably supported.
Because above-mentioned vibrator component centralized arrangement is on a position of stator 15, so the layout of this vibrator component is very convenient, the layout of flexible substrate can be not complicated yet, thereby can make the structure of lens barrel very compact.
In addition, except lens barrel, the supersonic motor 40 of present embodiment also goes on the rotating machinery in the space of the very big spaciousness of rotor center portion needs.
Below, with reference to the enlarged drawing of portion of the chimeric mechanism of the stator rotor among Figure 16 and the oscillator installation portion amplification profile diagram among Figure 17, the variation of the chimeric mechanism of stator rotor of the supersonic motor 40 of first embodiment is described.
It is different that this variation just is arranged in supporting structure and the foregoing description of the ball in the fitting portion between the stator and rotor in the chimeric mechanism of stator rotor.In addition, all give with the same label of first embodiment for identical component parts and illustrating.
As shown in figure 16, in this variation, in the back of stator 15A (Z side), pressing plate 20 that can fastening ring-type on the junction surface of stator 15A and pressing plate 20, is respectively equipped with tangent plane 15Af, 20f along circumferencial direction.In addition, in rotor 16A one side, be furnished with opposed and along the V-shaped groove 16Af of circumferencial direction with above-mentioned junction surface.Under situation about assembling, the bearing ball 21A as rotating part is inserted among the V-shaped groove 16Af, the rotor 16A under this state is inserted the inner circumference portion of stator 15A.So, when the rear surface that pressing plate 20 is connected to stator 15A and with screw 56 when fastening, ball 21A just is in the state by V-shaped groove 16Af and tangent plane 15Af, 20f supporting, and rotor 16A is restricted in the position of Z direction with respect to stator 15A, and is supported to and can rotate loosely.In addition, ball 21A has arranged a plurality of in a circumferential direction, and is keeping with the retainer of not representing among the figure.
In addition, employed vibrator component has same structure among the vibrator component and first embodiment, and as shown in figure 17, uses with the same method of first embodiment it is assembled with respect to stator 15A, rotor 16A.
Under the assembled state of portion of the chimeric mechanism of said stator rotor, can rotate with respect to stator 15A across ball 21A in the middle of rotor 16A is supported to, and 15A is in the position of Z direction for rotor 16A relative stator, is supported and is limited by ball 21A.Therefore, just do not need to use in first embodiment employed rotor pressing plate 18 to come restrict rotor 16A in the position of Z direction, as shown in figure 16, be provided with the gap in the stator 15A of rotor 16A one side, can make rotor 16A-Z side (side opposite with stator) is in release condition.
According to this variation, rotor 16A is limited by the ball 21A that rolls with respect to axial (thrust) location of stator 15A, so, can under the very little state of rotary load, rotate, reduced friction loss, the efficient height of conversion, and then the supersonic motor that rotor is carried out the high accuracy rotating drive can be provided.In addition, do not need to be arranged in rotor pressing plate rotor 16A side, that restriction Z direction position is used yet.
The supersonic motor of second embodiment of the invention then, is described with reference to Figure 18,19.
Figure 18 is and the corresponding sectional drawing of Fig. 3 of first embodiment, is the skiagraph of oscillator installment state of the supersonic motor of expression present embodiment.Figure 19 is the stereogram of the vibrator component in the present embodiment.
The quantity of the oscillator that the supersonic motor 40 of the lens barrel 1 among the supersonic motor 40B of present embodiment and above-mentioned first embodiment is assembled is different.That is be to be arranged to make three oscillators to be connected to supersonic motor on the inside and outside circumferential part of rotor 16.For example, be suitable for using two situations that the oscillator driving torque is not enough.Except the vibrator component that comprises oscillator, the situation of other the structure and first embodiment is roughly the same, and, be marked with same label for identical component parts and describe.
Shown in Figure 18,19, the vibrator component of supersonic motor 40B in the present embodiment, the oscillator that is mounted in stator 15 is installed with the parts among the recess 15b, same oscillator among the use and first embodiment, it is made of following part: three oscillators 41, become drive source, encouraged synthetic and elliptic motion that form by crooked stationary wave vibration and extensional vibration; The oscillator retainer 22B that keeps three oscillators 41; Three oscillator pressing plates 23 as the oscillator compacting part; Be used for application of force unit, i.e. holddown spring 24B to three oscillator 41 application of forces; Oscillator drives with printed circuit board (PCB) 49.
Oscillator retainer 22B has: three through holes that can allow oscillator 41 insert respectively, i.e. the through hole 22Ba1 of R direction upside, through hole 22Ba2, the 22Ba3 of R direction downside; And the screw through hole 22Bd on the T direction end.Between through hole 22Ba2, the 22Ba3 of the through hole 22Ba1 of upside and downside, formed the spatial portion that can allow rotor 16 insert along circumferencial direction.
Be provided with breach 22Bc1,22Bc2,22Bc3 on two Z sides of through hole 22Ba1, a2, a3, the bolster 46 of oscillator has no to insert loosely in these breach along the R direction, and can freely rotate.In addition, the A/F on the Z direction of through hole 22Ba1, a2, a3 is made and can be distinguished not the width of the stage portion of clamping bolster 46 roots loosely.
Holddown spring 24B makes with spring sheet material, has: corresponding with through hole 22Bc1, c2, c3, can strain outside the R direction, on the inner end, pressing section 24Ba1, the a2 of three convexs, a3; And the screw through hole on the T direction end.In addition, in Figure 19, do not represent this holddown spring 24B.
In above-mentioned vibrator component, as shown in figure 19, three oscillators 41 make under the actuator 44 opposed states respectively, insert through hole 22Ba1, a2, the a3 of oscillator retainer 22B from the outside of R direction, and each bolster 46 is embedded among breach 22Bc1,22Bc2, the 22Bc3 of oscillator retainer 22B, thereby be housed in the oscillator retainer 22B.Then, three oscillator pressing plates 23 are covered the back side one side (side opposite) of the R direction of above-mentioned each oscillator 41, just embed through hole 22Ba1, the a2 of oscillator retainer, the profile portion of a3 has suffered with actuator.At this moment, each bolster 46 embeds among the axle supporting breach 23c of oscillator pressing plate 23.In addition, make compressed part 24Ba1, a2, the a3 of holddown spring 24 be connected to the outside of three oscillator pressing plates 23.
The vibrator component of above-mentioned assembled state is assembled between the rotor 16 of stator 15 that is anchored on the lens barrel side and the inner periphery that embeds this stator 15 across ball 21.Promptly, allowing the actuator 44 of oscillator 41 of external diameter one side be connected on the outer circumference surface 16a of rotor 16, and allow the actuator 44 of two oscillators 41 of internal diameter one side be connected under the state on the inner peripheral surface 16b of rotor 16, above-mentioned vibrator component is inserted among the recess 15b of stator 15.Make screw run through the screw through hole of oscillator retainer 22B and holddown spring 24B, and be tightened among the screw 15d of stator 15 1 sides, above-mentioned thus vibrator component just has been installed on the stator 15.
Under above-mentioned installment state, three oscillators 41 bolster 46 separately is under the state of Z direction, supported by the notch part of oscillator pressing plate 23 that is fixedly supported upon stator 15 1 sides and oscillator retainer 22B.And, the actuator 44 of an oscillator 41 of external diameter one side is crimped on the outer circumference surface 16a of rotor 16 all the time, and each actuator 44 of two oscillators 41 of internal diameter one side, then along the circumferencial direction of inner peripheral surface 16b, all the time crimping makes rotor 16 be in the state that R direction (radially) is held thereon respectively.Its crimp force by pushing of holddown spring 24B, makes the axle supporting breach 23c (bottom) of oscillator pressing plate 23 and bolster 46 butts of oscillator 41, thereby passes to actuator 44 1 sides.
As mentioned above, by above-mentioned vibrator component being installed on stator 15, the rotor 16, supersonic motor 40B just has been in the state that is assembled on the lens barrel 1.
In the lens barrel of the supersonic motor 40B that the present embodiment with said structure has been installed, focusing under the situation of driving, three oscillators 41 are driven by the oscillator drive circuit respectively, vibrate along elliptical orbit thereby drive actuator 44.When actuator 44 was done elliptic motion, the rotor 16 of 44 butts of actuator just had been driven with respect to stator 15 and is relatively rotating to some directions.In addition, under the situation that drives rotor 16, must supply the driving voltage of different voltage waveforms respectively with two internal side diameter oscillators 41 by an outside diameter oscillator 41 in above-mentioned three oscillators 41, so that the mutual track in the opposite direction of direction of the elliptical vibration of their actuators 44 is separately vibrated.
Supersonic motor 40B according to above-mentioned present embodiment, can obtain with above-mentioned first embodiment in the same effect of supersonic motor 40, but, in the present embodiment, because can assemble three oscillators, so be specially adapted to the device of the lens barrel of the high driving torque of needs.Perhaps, can also provide and use three more small-sized oscillators, but can obtain the drive unit of driving torque identical when using two oscillators.In addition, also can be the oscillator of a plurality of outside diameters of assembling, the oscillator of internal side diameter is then assembled one or two drive unit.
According to supersonic motor of the present invention, be a kind of supersonic motor that utilizes the oscillator that has encouraged the ultrasonic wave elliptic motion, it has circular ring structure, can improve efficiency of motor, and the restriction of arrangement space is also seldom.

Claims (6)

1. supersonic motor is characterized in that having:
At least two oscillators, each described oscillator has a pair of actuator, and this a pair of actuator produces the ultrasonic elliptically vibrating that is formed by the synthetic of crooked stationary wave vibration and extensional vibration;
Circular rotor is arranged in the effect of elliptical vibration of the above-mentioned oscillator at the regulation position on the circumference, moves relative to rotating with respect to above-mentioned oscillator;
Stator, support above-mentioned rotor, and this rotor can be rotated, described stator also supports above-mentioned at least two oscillators, and limit above-mentioned at least two oscillators in the rotation direction of above-mentioned rotor and the position on the circumferencial direction, and, make between above-mentioned at least two oscillators each opposed and can contact with internal face with the outside wall surface that the footpath of above-mentioned rotor makes progress to actuator, and above-mentioned at least two oscillators can upwards move freely in the footpath of above-mentioned rotor, and this radially is the direction perpendicular to the rotation of above-mentioned rotor;
Application of force unit is to the radially application of force of above-mentioned at least two oscillators towards above-mentioned rotor, so that on the outside wall surface and internal face that the footpath that above-mentioned at least two oscillators are crimped on above-mentioned rotor all the time makes progress, this radially is the direction perpendicular to the rotation of above-mentioned rotor.
2. supersonic motor is characterized in that having:
A pair of oscillator produces the ultrasonic elliptically vibrating that is formed by the synthetic of crooked stationary wave vibration and extensional vibration;
Circular rotor is arranged in the effect of elliptical vibration of the above-mentioned oscillator at the regulation position on the circumference, moves relative to rotating with respect to above-mentioned oscillator;
Stator supports above-mentioned rotor, and it can be rotated;
The oscillator retainer, be arranged to be fixed on the said stator, above-mentioned oscillator as the bolster of the neutral axis of resultant vibration on the above-mentioned a pair of oscillator of restriction in the rotation direction of above-mentioned rotor and the position of circumferencial direction, and support above-mentioned a pair of oscillator and make it can radially moving freely along above-mentioned rotor;
The oscillator compacting part utilizes the bolster as the neutral axis of resultant vibration of above-mentioned oscillator that a pair of oscillator is bearing on the above-mentioned oscillator retainer;
And application of force unit, by above-mentioned oscillator compacting part, above-mentioned a pair of oscillator is made progress towards the footpath at above-mentioned rotor the direction application of force near each other;
Above-mentioned a pair of oscillator has following structure, promptly, outside wall surface and internal face that the footpath of above-mentioned rotor makes progress are clamped, and contacting with internal face with described outside wall surface all the time and described outside wall surface and internal face are pushed, wherein said radially is direction perpendicular to the rotation of above-mentioned rotor.
3. supersonic motor according to claim 1 and 2 is characterized in that, also has the rotor compacting part on the said stator of being installed in, and it above-mentioned rotor with said stator clamping on the rotation direction can rotate it.
4. supersonic motor according to claim 1 and 2 is characterized in that, above-mentioned rotor and said stator radially between, have along circumferential directions and become a plurality of rolling elements contact with both.
5. supersonic motor according to claim 4 is characterized in that, said stator forms with the part that above-mentioned rolling element contacts with above-mentioned rotor, and the position limit of rotation direction that makes above-mentioned rotor is on assigned position.
6. supersonic motor has:
A plurality of oscillators produce the ultrasonic elliptically vibrating that is formed by the synthetic of crooked stationary wave vibration and extensional vibration;
Circular rotor is arranged in the effect of elliptical vibration of the above-mentioned oscillator at the regulation position on the circumference, carries out relative rotation with respect to above-mentioned oscillator and moves;
Stator supports above-mentioned rotor, and it can be rotated;
The oscillator retainer, be arranged to be fixed on the said stator, above-mentioned oscillator as the bolster of the neutral axis of resultant vibration on the above-mentioned a plurality of oscillators of restriction in the rotation direction of above-mentioned rotor and the position on the circumferencial direction, and support above-mentioned a plurality of oscillator and make it can radially moving freely along above-mentioned rotor;
The oscillator compacting part utilizes the bolster as the neutral axis of resultant vibration of above-mentioned oscillator that above-mentioned a plurality of oscillators are bearing on the above-mentioned oscillator retainer;
And application of force unit, via above-mentioned oscillator compacting part, above-mentioned a plurality of oscillators are made progress towards the footpath at above-mentioned rotor the direction application of force near each other;
Above-mentioned a plurality of oscillator has following structure, promptly, outside wall surface and internal face that the footpath of above-mentioned rotor makes progress are clamped, and contacting with internal face with above-mentioned outside wall surface all the time and above-mentioned outside wall surface and internal face are pushed, above-mentioned radially is direction perpendicular to the rotation of above-mentioned rotor.
CNB2005100799104A 2004-06-25 2005-06-27 Supersonic motor Expired - Fee Related CN100563091C (en)

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JP6386665B2 (en) * 2015-05-21 2018-09-05 シャープ株式会社 Ultrasonic actuator
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JP6659193B2 (en) * 2019-02-06 2020-03-04 キヤノン株式会社 motor
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