CN100437921C - Wafer cleaning and drying apparatus - Google Patents
Wafer cleaning and drying apparatus Download PDFInfo
- Publication number
- CN100437921C CN100437921C CNB2005100598726A CN200510059872A CN100437921C CN 100437921 C CN100437921 C CN 100437921C CN B2005100598726 A CNB2005100598726 A CN B2005100598726A CN 200510059872 A CN200510059872 A CN 200510059872A CN 100437921 C CN100437921 C CN 100437921C
- Authority
- CN
- China
- Prior art keywords
- flow
- water
- rinse bath
- discharge
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The present invention discloses a wafer cleaning and drying device. The flow field control of an open type cleaning groove which supplies water on the lower part is used for generating disturbed flow, liquid discharge flow speed which is constant is kept, and precise and continuous cleaning and drying device is obtained. The drying device uses the mode that liquid volatile solvent (such as isopropanol IPA) replaces water for making a wafer rapidly and cleanly dried. The drying device at least comprises a cleaning tank, an overflow plate which tilts outwards in an angle, a plurality of overflow ports which are used for rapidly discharging pollutants a plurality of water inlets which are convexly arranged in the cleaning tank to make inlet water form disturbed flow, and a plurality of flow control valves which are used for making program control flow from the disturbed flow to help users to clean wafers, wherein the vertical water inlets are also water discharge outlets. The water discharge keeps definite flow and can smoothly discharge water under the control of the flow control valves at the time of water discharge; liquid levels can stably descend.
Description
Technical field
The present invention is relevant for a kind of semi-conductor processing equipment, and particularly relevant wafer cleans and dry device.Especially from the flow field control of the open rinse bath of below feedwater with the shape that produces flow-disturbing and utilize leakage fluid dram with keep flow velocity be the discharge opeing flow velocity of constant get accurate and continuous cleaning and pumping equipment dry.
Background technology
Cleaning and drying device that open (open type) arranged, as shown in Figure 1, Fig. 1 is the stereogram of existing open cleaning and drying device 100.Rinse bath 102 can store up full pure water and immerse wafer, pure water flows into from water pipe 104 and 106 during cleaning, pure water flows in the groove from the discharge orifice 105 of water pipe, with clean wafers, treat to be disposed to outside overfall 112 spouts on overflow plate 110 when water is expired the position discharging feeder (not icon) and drain into sewage treatment equipment or the use of recirculation after filtering from delivery pipe (not icon) again.But the quantity not sufficient that the pure water of this kind conventional device flows into, and form the dead angle, not good to the cleaning performance of wafer, and inhomogeneous.And overfall 112 fails particulate and chemicals are discharged fast, influences cleaning speed.If desire increases inflow, then the overflow water discharging is too late, and the flood level inequality makes the discharge of particulate and chemicals more wayward; Because of water flows out from undersurface overfall, particulate is still in the event of topmost surface.During draining if extract with pumping, control difficulty, and equipment increases, flow velocity is directly proportional with liquid level if discharge then by water pipe automatically, liquid level reduces, flow velocity is slowly reduction also, influences drain age velocity.Therefore, the utmost point needs a kind of device, can discharge particulate and chemicals fast; And still overflow and particulate is stayed fast when inflow increases; Can make into water and draining keep certain flow rate in order to cleaning and dry; And utilize the flow-disturbing water inlet pipe, making into, the impulse force of water forms flow-disturbing and assists to clean.
Summary of the invention
Purpose of the present invention is providing a kind of wafer to clean and drying device, utilizes the overfall of inclination, makes particulate and the chemicals can quicker discharge.When inflow increases, still overflow and do not make the flood level inequality fast.
An of the present invention purpose utilized the disturbed flow type water inlet pipe providing a kind of wafer to clean and drying device, and making into, the impulse force of water forms flow-disturbing to assist cleaning.
A further object of the present invention is providing a kind of wafer to clean and drying device, utilizes sequencing control water intake velocity and the flow field is controlled, and current are changed and helps cleaning.
Another object of the present invention is providing a kind of wafer to clean and drying device, utilizes flow controller (aspirator) control drainage speed, when drying liquid level is steadily descended, and reaches effect dry and that decontaminate with the row of horizontal stability that increases cleaning fluid.
For reaching above-mentioned purpose and other purpose, the present invention proposes that a kind of wafer cleans and dry device, in order to clean wafers and remove moisture with solvent, comprises a rinse bath, on opening is arranged for overflow, a plurality of water inlets, one or more discharge outlet are arranged down; A slice overflow plate is located on the opening of rinse bath upper end the outward-dipping angle of this overflow plate; A plurality of overfalls, cleaning fluid and contaminant particle that overflows in order to discharge and the solvent that floats on the cleaning fluid surface are with quick emission; A plurality of water inlets protrude in the rinse bath to become water column, and wherein a part is horizontally disposed with, and another part vertically is provided with, and make into that water forms flow-disturbing, and vertical water inlet also is a discharge outlet, and discharge outlet is provided with the draining aperture in rinse bath; A plurality of flow controllers are connected to water inlet, with program control flow, make inflow controlled with the adjustment intake pressure, the formation flow-disturbing, and its flow field is controlled, and assists the cleaning of wafer; Displacement is controlled and keep certain flow during draining, and draining reposefully makes solvent-stable ground replacement cleaning fluid.
Above and other purpose of the present invention and advantage with reference to following with reference to icon and most preferred embodiment explanation and easilier understand fully.
Description of drawings
Fig. 1 (having now) is the stereogram of existing open cleaning and drying device.
Fig. 2 is the cleaning of preferred embodiment of the present invention and the stereogram of drying device.
Fig. 3 (having now) is the schematic diagram of the same overflow area when upright with cell body of overflow plate.
Fig. 4 is the schematic diagram of overflow plate overflow area when outward-dipping.
Fig. 5 is the schematic diagram of current when cleaning according to a preferred embodiment of the present invention.
Fig. 6 is the profile when using according to the wafer drying device of one embodiment of the invention.
Fig. 7 is the profile of the connected mode of the row, the water inlet pipe that are installed on rinse bath according to the flow controller (aspirator) of one embodiment of the invention.
[primary clustering symbol description]
100 existing open cleaning and drying devices
102 rinse baths, 104 water pipes
105 discharge orifices, 106 water pipes
110 overflow plates, 112 overfalls
200 cleaning of the present invention and drying devices
202 cell bodies, 204 water inlet pipes
206 water inlet pipes, 208 water inlet and drainage pipes
210 overflow plates, 212 head pieces
214 laminar flow plates 302 clean liquid level
502 clean liquid level 504 overflows
602 wafer case, 604 wafers
608 clean liquid level 610 apertures
Embodiment
Content of the present invention can be given announcement via the elaboration of following preferred embodiment and its relevant icon.The present invention does not describe whole cleaning and drying system, and only just wherein cleaning-drying groove is illustrated.In each figure, identical assembly is represented with same code name.
Fig. 2 is the cleaning of preferred embodiment of the present invention and the stereogram of drying device 200.Cell body 202 is to make with the material of acid and alkali-resistance and solvent, as PFA etc.That its shape can be is square, circle etc., to cooperate the size shape of wafer and card casket.In an embodiment, outward-dipping overflow plate 210 is arranged at the top of cell body 202, and the size of flow velocity is looked and different in its angle of inclination, and flow velocity is bigger, and it is also bigger to tilt, to increase spillway discharge.Overflow plate 210 is established overfall 212, is generally triangle, but also can be shapes such as circular or trapezoidal, square.The 3rd figure (having now) is the schematic diagram of the same overflow area when upright with cell body of overflow plate 110.If cleaning fluid liquid level 302 is h apart from the height of overfall bottom, the subtended angle of overfall 112 is Φ, and then overflow area ABC is:
Area A BC=(1/2) a h*2
＝h
2tan(Φ/2) (1)
With reference to the 2nd, 4 figure, Fig. 4 is the schematic diagram of overflow plate overflow area when outward-dipping.With horizontal plane θ at angle, establishing and cleaning liquid level 302 is h apart from overfall bottom height if overflow plate is outward-dipping, and the subtended angle of overfall 212 is Φ, and then length of side c is
c＝h/sinθ (2)
Inclination area ABC is
Inclination area ABC=(h/sin θ) sin (Φ/2) (h/sin θ) cos (Φ/2)
＝(h
2/sin2θ)sin(Φ/2)cos(Φ/2) (3)
So the inclination area is greater than the area that do not tilt.That is do not increase at liquid level under the situation of perimeter of section, the area of overflow increases, and makes the outflow velocity increase and the pollutant and the chemicals on surface can be overflowed rinse bath, and cleaning performance is increased, and pollutes and reduces.
In another embodiment, please refer to Fig. 2, the bottom of cell body 202 is provided with three water inlet pipes 204,206, water inlet and drainage pipe 208, and water inlet pipe 204 and 206 is introduced cleaning fluid, for example pure water (D.I.water) from the right and left.Make the ejection of current direction central part form flow-disturbing.These two water inlet pipes all are connected to flow controller (not icon), program-controlled its flow, and water inlet and 208 in drainage pipe are located at the central authorities of bottom, make on the current direction to spray.Regulate and formation laminar flow upwards through laminar flow plate 214.Into water and drainage pipe 208 responsible drainings are only arranged when draining, can discharge the water of bottom because of the part of this pipe in cell body has aperture, and water inlet and drainage pipe 208 are connected to a flow controller, program-controlled its drain discharge during draining.This method is with existing to control flow with the openings of sizes of controlling a valve be good, and if because of with valve control, flow velocity will be proportional to liquid level, and flow is very little when hanging down liquid level, and flow velocity was too big again when liquid level was high.Another is existing to be with matter current control (mass flow meter), but the scope that can control is too little, and also difficulty is closed practicality.Supplied water with certain flow by water inlet pipe 204,206 and water inlet and drainage pipe 208, then the control in flow field is very accurate, adjustable seamless power to be to form different flow fields, drainage pipe 206 enlargement discharges on the left side for example, and then the hydraulic pressure in left side increases, otherwise the hydraulic pressure on right side increases, all can be by program control.For example be used for cleaning on one side earlier, clean another side again.Or dirtier one side of cleaning.Certain because of flow velocity during draining again, not different because of the height of water level, thus can guarantee solvent/solution when dry, after for example isopropyl alcohol (IPA) can replace the moisture content of wafer surface stably, continuously, volatilization and reach dry purpose, also reason liquid level decrease speed is different and produce to pollute and increase.Certain because of flow velocity again, the negative pressure in the groove is also certain, and the reason flow velocity does not change and changes negative pressure, produces and pollutes.And flow velocity control is accurate and continuous, and is honest and clean than the pump boot, stable.But water inlet and drainage pipe are not limit three, the size that also visual cleaning is poor and increase for example 4,5,6 etc.
Fig. 5 is the schematic diagram of current when cleaning according to a preferred embodiment of the present invention.Cleaning fluid from about two water inlet pipes 204,206 enter in the groove with certain flow rate, impulse produces flow-disturbing mutually, and water inlet pipe 208 forms laminar flow upwards with upwards ejection of cleaning fluid through 214 adjustings of laminar flow plate, liquid level with held stationary, but the liquid level downside has flow-disturbing to assist cleaning, and cleaning liquid level 502 rests on apart from the height of the lower end h of overfall 212 constant, and cleaning fluid is with the overflow that is directed downwards of arrow 504, collect the back discharging by overflow launder (not icon), or recycling after treatment.Because water inlet is controlled by sequencing, therefore flow is certain, and liquid level is steady, help the discharge of pollutant, and overfall 212 is because of overflow plate 210 tilts to strengthen, can keep liquid level not reason change flow and rise, can guarantee the eliminating of pollutant, make cleaning more certain effectively.
Fig. 6 is the profile when using according to the wafer drying device of one embodiment of the invention.At first, the wafer 604 in the wafer case 602 promptly stops to flow into from water inlet pipe 204,206 after cleaning finishes, and changes into from water inlet and drainage pipe 208 drainings, because of water inlet and drainage pipe 208 are connected to flow controller, are subjected to program control and keep certain flow, draining reposefully.Horizontal plane 608 also in company with descending, leaves wafer 604 until horizontal plane 608.
Fig. 7 is the profile of the connected mode of the water inlet that is installed on rinse bath according to the flow controller (aspirator) of one embodiment of the invention and drainage pipe.Pure water or nitrogen (N
2) supply flows into from the import 706 of flow controller 702, after flow controller acceptance is program control, inject, shown in arrow 708, with the flow of program control draining, pure water in the rinse bath 202 promptly drains into leakage fluid dram via drainage pipe 208 from outlet 704, shown in arrow 710.Be subjected to program controlly because of discharge capacity this moment, so displacement be certain, and the smooth decreasing of cleaning liquid level 606 is continuous, is of the present invention one big advantage.
Though the present invention has given exposure with certain embodiments, the personage who knows this skill will understand and can the form and the details of this specific embodiment be changed slightly, not break away from spirit of the present invention and theory
Modification of being done and change are all scope of the present invention, and the above embodiment that is narrated of the present invention only makes illustrative purpose, rather than in order to limit the scope that claim is protected.
Claims (14)
1. a wafer cleans and dry device, reaches in order to clean wafers and removes moisture with solvent, comprises at least:
A rinse bath, on opening is arranged for overflow, a plurality of water inlets, a plurality of discharge outlet are arranged down;
A slice overflow plate is located on the opening of rinse bath upper end;
A plurality of overfalls are located on the overflow plate, the cleaning fluid that overflows with discharge;
It is characterized by: a plurality of water inlets are fed water by the below, and these a plurality of water inlets stretch in the rinse bath to form water column, and wherein a part is horizontally disposed with, and another part vertically is provided with, and making into, water forms flow-disturbing; A plurality of flow control valves are connected to water inlet, with program control flow, make inflow controlled with the adjustment intake pressure, the formation flow-disturbing, and its flow field is controlled; Flow-disturbing forms laminar flow with clean wafers through a slice laminar flow plate.
2. a wafer cleans and dry device, reaches in order to clean wafers and removes moisture with solvent, comprises at least:
A rinse bath, on opening is arranged for overflow, a plurality of water inlets, a plurality of discharge outlet are arranged down;
A slice overflow plate is located on the opening of rinse bath upper end;
A plurality of overfalls are located on the overflow plate, the cleaning fluid that overflows with discharge;
It is characterized by: by the top draining, the outward-dipping angle of this overflow plate makes these a plurality of overfalls can discharge the cleaning fluid that overflows fast during cleaning, and contaminant particle and float on the solvent on cleaning fluid surface is with quick emission.
3. the described device of claim 2 is characterized in that, the outward-dipping angle of this overflow plate is 15 ° to 75 °.
4. the described device of claim 2 is characterized in that, this overfall is leg-of-mutton opening.
5. the described device of claim 2 is characterized in that, this overfall is circular opening.
6. the described device of claim 2 is characterized in that, this overfall is square opening.
7. a wafer cleans and dry device, reaches in order to clean wafers and removes moisture with solvent, comprises at least:
A rinse bath, on opening is arranged for overflow, a plurality of water inlets, a plurality of discharge outlet are arranged down;
A slice overflow plate is located on the opening of rinse bath upper end;
A plurality of overfalls are located on the overflow plate, the cleaning fluid that overflows with discharge;
It is characterized by: cleaned by the below draining, (Bernulli ' s) principle determines the size of draft, by a slice overflow plate, is located on the opening of rinse bath upper end with Bernoulli Jacob during draining;
The control of a plurality of flow controllers makes displacement controlled and keep certain flow, draining reposefully, and the height because of liquid level does not change.
8. the described device of claim 7 is characterized in that, this flow controller programmable control drain discharge.
9. claim 1,2 or 7 described devices is characterized in that, this cleaning fluid is a pure water.
10. claim 1,2 or 7 described devices is characterized in that, this rinse bath is cylindrical.
11. claim 1,2 or 7 described devices is characterized in that this rinse bath is square.
12. claim 1,2 or 7 described devices is characterized in that this rinse bath is a rectangle.
17. claim 1,2 or 7 described devices is characterized in that, this rinse bath is with the made of acid and alkali resistance and solvent.
18. claim 1,2 or 7 described devices is characterized in that, this water inlet and discharge outlet are 3 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100598726A CN100437921C (en) | 2005-03-31 | 2005-03-31 | Wafer cleaning and drying apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100598726A CN100437921C (en) | 2005-03-31 | 2005-03-31 | Wafer cleaning and drying apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1841670A CN1841670A (en) | 2006-10-04 |
| CN100437921C true CN100437921C (en) | 2008-11-26 |
Family
ID=37030611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100598726A Active CN100437921C (en) | 2005-03-31 | 2005-03-31 | Wafer cleaning and drying apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100437921C (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101210769B (en) * | 2006-12-25 | 2010-04-07 | 中芯国际集成电路制造(上海)有限公司 | Method and device for drying wafer |
| CN101635322B (en) * | 2009-08-26 | 2011-01-05 | 北京中联科伟达技术股份有限公司 | Method and device for chain velvet making of multi-crystalline solar cell |
| CN102836840A (en) * | 2011-06-23 | 2012-12-26 | 苏州五方光电科技有限公司 | Uniform cleaning device |
| CN102768972B (en) * | 2012-07-11 | 2015-02-18 | 清华大学 | Wafer drying device |
| JP6235070B2 (en) * | 2015-07-06 | 2017-11-22 | 芝浦メカトロニクス株式会社 | Substrate processing apparatus and substrate processing method |
| CN106449475A (en) * | 2016-09-29 | 2017-02-22 | 无锡宏纳科技有限公司 | Import structure for wafers |
| CN107398454A (en) * | 2017-08-11 | 2017-11-28 | 中山市美科美五金电器有限公司 | A kind of cleaning prevented heat-generating pipe and electrically punctured |
| CN108480305A (en) * | 2018-04-12 | 2018-09-04 | 绍兴文理学院 | A kind of photovoltaic silicon wafer cleaning equipment |
| TWI658877B (en) * | 2018-05-29 | 2019-05-11 | 政漢電子科技有限公司 | Batch wet etching rinsing device and batch wet etching rinsing method |
| CN111940387A (en) * | 2020-09-02 | 2020-11-17 | 睿科集团(厦门)股份有限公司 | Continuous back flushing tool bit device |
| CN115582338A (en) * | 2022-09-05 | 2023-01-10 | 上海中欣晶圆半导体科技有限公司 | Method for enhancing silicon wafer cleaning effect |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11145100A (en) * | 1997-11-04 | 1999-05-28 | Dainippon Screen Mfg Co Ltd | Substrate treatment equipment |
| JP2001223193A (en) * | 2000-02-08 | 2001-08-17 | Smt:Kk | Washing method and device of substrate |
| KR20040045198A (en) * | 2002-11-22 | 2004-06-01 | 김경진 | Apparatus for cleaning and drying a wafer |
-
2005
- 2005-03-31 CN CNB2005100598726A patent/CN100437921C/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11145100A (en) * | 1997-11-04 | 1999-05-28 | Dainippon Screen Mfg Co Ltd | Substrate treatment equipment |
| JP2001223193A (en) * | 2000-02-08 | 2001-08-17 | Smt:Kk | Washing method and device of substrate |
| KR20040045198A (en) * | 2002-11-22 | 2004-06-01 | 김경진 | Apparatus for cleaning and drying a wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1841670A (en) | 2006-10-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100437921C (en) | Wafer cleaning and drying apparatus | |
| CN110047788B (en) | Wafer cleaning device and wafer cleaning system | |
| EP1210158A4 (en) | Chlorination apparatus and method | |
| JP2011020025A (en) | Oil-water separator | |
| US20100193445A1 (en) | Foaming of liquids | |
| DE69220645T2 (en) | Foam overflow for flotation device and flotation device, which contains such an overflow | |
| CN205241332U (en) | Run by gravity membrane bioreactor | |
| CN206676107U (en) | A kind of High-rate sedimentation filter | |
| JP4215548B2 (en) | Oil / water separator | |
| CN110885107A (en) | Movable filter plate type filter material intercepting device | |
| KR100680104B1 (en) | Washing/Drying Apparatus for Semiconductor Substrate | |
| US5738137A (en) | Apparatus for creating surges in an aquarium | |
| US10981803B2 (en) | Regulating tank of wastewater treatment system | |
| CN210001712U (en) | multistage recycle device of kind of waste water | |
| KR100964178B1 (en) | Auto-seperation draining apparatus | |
| KR100323046B1 (en) | One square tank made one axis multi-liquid chemicals input equipment filtration plant and sewage works | |
| CN207259196U (en) | Air supporting removal of impurities water purifier | |
| CN207313290U (en) | Integrated high-efficiency air supporting and filtration apparatus | |
| JP2011189308A (en) | Active-sludge treatment apparatus and operation method thereof | |
| CN114096361A (en) | Device for preventing floating objects from mixing into free surface of steel ladle and tundish in continuous casting process | |
| JPH04210201A (en) | Oil separating system | |
| RU2568720C2 (en) | Water treatment plant based on delta-filtration technology | |
| CN210419341U (en) | Dissolve gas pitcher, circular air supporting system and square air supporting system | |
| CN2579880Y (en) | Oil field waste water treating device | |
| CN219098786U (en) | Equipment for circularly treating concentrated solution for UF membrane processing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |