CN100436658C - 直拉法单晶硅生长过程中的熔体液面位置检测方法 - Google Patents
直拉法单晶硅生长过程中的熔体液面位置检测方法 Download PDFInfo
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Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101748478B (zh) * | 2008-12-15 | 2013-07-31 | 有研半导体材料股份有限公司 | 一种测量坩埚中硅熔体水平面相对高度的方法 |
JP5639078B2 (ja) * | 2009-01-06 | 2014-12-10 | シーメンス・ヘルスケア・ダイアグノスティックス・インコーポレーテッドSiemens Healthcare Diagnostics Inc. | 画像化を使用して容器内の液体レベルを測定するための方法および装置 |
CN102419198A (zh) * | 2011-09-04 | 2012-04-18 | 长春理工大学 | 一种液位高精度实时激光三角测量方法及测量装置 |
CN102677157A (zh) * | 2012-06-04 | 2012-09-19 | 曾泽斌 | 一种直拉硅单晶炉的硅熔体液面相对位置的测量方法 |
CN104278320A (zh) * | 2013-07-04 | 2015-01-14 | 有研新材料股份有限公司 | 一种用于测量直拉硅单晶炉中硅熔体液面位置的装置 |
CN103628131B (zh) * | 2013-12-06 | 2016-05-04 | 西安德伍拓自动化传动系统有限公司 | 一种单晶硅拉晶炉的熔融硅液面检测方法及测量装置 |
CN104005083B (zh) * | 2014-05-20 | 2016-06-29 | 北京工业大学 | 一种测量单晶炉熔硅液面高度的装置与方法 |
CN105488845B (zh) * | 2014-09-17 | 2018-09-25 | 宏碁股份有限公司 | 产生三维图像的方法及其电子装置 |
CN105350071B (zh) * | 2015-10-23 | 2017-09-22 | 西安理工大学 | 一种可抑制波动的直拉硅单晶炉液位检测方法 |
CN108823634A (zh) * | 2018-06-01 | 2018-11-16 | 上海汉虹精密机械有限公司 | 半导体单晶炉液面位置控制装置及方法 |
CN110082655A (zh) * | 2019-05-13 | 2019-08-02 | 国网北京市电力公司 | 可视化设备检测方法及仪器及其在智能电网中的应用 |
CN110363786A (zh) * | 2019-06-12 | 2019-10-22 | 西安理工大学 | 基于贝叶斯融合的单晶炉液位检测激光光斑中心定位方法 |
CN110284184A (zh) * | 2019-07-26 | 2019-09-27 | 内蒙古中环协鑫光伏材料有限公司 | 一种直拉单晶液位保护系统及其控制方法 |
CN110554055A (zh) * | 2019-09-06 | 2019-12-10 | 安徽师范大学 | 一种基于激光反射图像的罐头胀罐在线检测设备 |
CN112595385A (zh) * | 2020-11-25 | 2021-04-02 | 创新奇智(南京)科技有限公司 | 一种目标物高度获取方法以及装置 |
CN113026090B (zh) * | 2021-02-08 | 2022-03-08 | 杭州富加镓业科技有限公司 | 一种籽晶杆抖动检测装置的检测方法及晶体生长方法 |
CN115821391A (zh) * | 2022-12-15 | 2023-03-21 | 常州臻晶半导体有限公司 | 一种液相法生长碳化硅热场及其工作方法 |
CN117626411A (zh) * | 2023-12-14 | 2024-03-01 | 中能兴盛(香河)机电设备有限公司 | 晶体炉真空控制系统及真空度控制方法 |
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CN1323364A (zh) * | 1998-10-14 | 2001-11-21 | Memc电子材料有限公司 | 控制硅晶体生长的方法和系统 |
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CN1020482C (zh) * | 1987-05-05 | 1993-05-05 | 无比太阳能公司 | 生长管状晶体的控制设备 |
CN1323364A (zh) * | 1998-10-14 | 2001-11-21 | Memc电子材料有限公司 | 控制硅晶体生长的方法和系统 |
CN1324414A (zh) * | 1998-11-03 | 2001-11-28 | Memc电子材料有限公司 | 提拉工艺装料时测量多晶块大小和分布的方法和设备 |
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Effective date of registration: 20200729 Address after: E2-002, Science Park, Xi'an University of technology, No.26, gazeng Road, Zhangba Street office, hi tech Zone, Xi'an City, Shaanxi Province Patentee after: Xi'an yisiwei Equipment Technology Co.,Ltd. Address before: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Co-patentee before: Xi'an core magnetic intelligent technology partnership (limited partnership) Patentee before: Xi'an Polytechnic Asset Management Co.,Ltd. Effective date of registration: 20200729 Address after: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Patentee after: Xi'an Polytechnic Asset Management Co.,Ltd. Address before: 710048 Shaanxi city of Xi'an Province Jinhua Road No. 5 Patentee before: XI'AN University OF TECHNOLOGY Effective date of registration: 20200729 Address after: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Co-patentee after: Liu Ding Patentee after: Xi'an Polytechnic Asset Management Co.,Ltd. Co-patentee after: Zhao Yue Co-patentee after: Jiao Shangbin Co-patentee after: Jiang Lei Co-patentee after: Liang Yanming Co-patentee after: Wu Shihai Co-patentee after: Jiang Jian Address before: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Patentee before: Xi'an Polytechnic Asset Management Co.,Ltd. Effective date of registration: 20200729 Address after: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Co-patentee after: Xi'an core magnetic intelligent technology partnership (limited partnership) Patentee after: Xi'an Polytechnic Asset Management Co.,Ltd. Address before: 710077 Shaanxi city of Xi'an province high tech Zone gazelle Road No. 26 Co-patentee before: Liu Ding Patentee before: Xi'an Polytechnic Asset Management Co.,Ltd. Co-patentee before: Zhao Yue Co-patentee before: Jiao Shangbin Co-patentee before: Jiang Lei Co-patentee before: Liang Yanming Co-patentee before: Wu Shihai Co-patentee before: Jiang Jian |
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Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Patentee after: Xi'an Xinhui Equipment Technology Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. Patentee before: Xi'an yisiwei Equipment Technology Co.,Ltd. |