CN100429541C - 三维光子晶体和包括三维光子晶体的功能器件 - Google Patents
三维光子晶体和包括三维光子晶体的功能器件 Download PDFInfo
- Publication number
- CN100429541C CN100429541C CNB200610142443XA CN200610142443A CN100429541C CN 100429541 C CN100429541 C CN 100429541C CN B200610142443X A CNB200610142443X A CN B200610142443XA CN 200610142443 A CN200610142443 A CN 200610142443A CN 100429541 C CN100429541 C CN 100429541C
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- photon crystal
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- 239000004038 photonic crystal Substances 0.000 title abstract description 21
- 230000000737 periodic effect Effects 0.000 claims abstract description 84
- 239000013078 crystal Substances 0.000 claims description 81
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 230000007547 defect Effects 0.000 claims description 9
- 230000002950 deficient Effects 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 20
- 238000010586 diagram Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 238000001459 lithography Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 238000010606 normalization Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 239000002096 quantum dot Substances 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000002910 structure generation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002547 anomalous effect Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002159 nanocrystal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Integrated Circuits (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005-311260 | 2005-10-26 | ||
| JP2005311260A JP4636996B2 (ja) | 2005-10-26 | 2005-10-26 | 3次元フォトニック結晶およびそれを有する機能素子 |
| JP2005311260 | 2005-10-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1959451A CN1959451A (zh) | 2007-05-09 |
| CN100429541C true CN100429541C (zh) | 2008-10-29 |
Family
ID=37734251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200610142443XA Expired - Fee Related CN100429541C (zh) | 2005-10-26 | 2006-10-26 | 三维光子晶体和包括三维光子晶体的功能器件 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7302147B2 (enExample) |
| EP (1) | EP1780563B1 (enExample) |
| JP (1) | JP4636996B2 (enExample) |
| CN (1) | CN100429541C (enExample) |
| AT (1) | ATE407377T1 (enExample) |
| DE (1) | DE602006002578D1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4637071B2 (ja) * | 2005-10-26 | 2011-02-23 | キヤノン株式会社 | 3次元フォトニック結晶及びそれを用いた機能素子 |
| JP4910495B2 (ja) * | 2006-06-20 | 2012-04-04 | 富士ゼロックス株式会社 | 3次元構造体およびその製造方法 |
| JP4769658B2 (ja) * | 2006-07-31 | 2011-09-07 | キヤノン株式会社 | 共振器 |
| JP4956119B2 (ja) * | 2006-09-27 | 2012-06-20 | キヤノン株式会社 | 発光素子およびそれを用いた表示素子 |
| WO2009018846A1 (en) | 2007-08-09 | 2009-02-12 | Carl Zeiss Smt Ag | Method of structuring a photosensitive material |
| FR2921498B1 (fr) | 2007-09-25 | 2010-08-13 | Commissariat Energie Atomique | Dispositif optique dispersif a cristal photonique tridimensionnel. |
| CN102520480B (zh) * | 2011-12-08 | 2014-09-03 | 西安交通大学 | 多介质耦合三维光子晶体及其设计制造方法 |
| JP6158248B2 (ja) * | 2014-05-27 | 2017-07-05 | ザ・ボード・オブ・トラスティーズ・オブ・ザ・ユニバーシティ・オブ・イリノイThe Board Of Trustees Of The University Of Illinois | ナノ構造材料の方法および素子 |
| CN106597605A (zh) * | 2017-01-19 | 2017-04-26 | 河南师范大学 | 一种反常色散的单腔双通道光子晶体滤波器 |
| CN110568470B (zh) * | 2019-08-29 | 2020-12-08 | 华中科技大学 | 一种优化多面体探测器中离散晶体布局的方法 |
| US11693153B2 (en) * | 2019-11-26 | 2023-07-04 | Hrl Laboratories, Llc | Omnidirectional and thermally durable infrared reflectors, and methods for making the same |
| CN111025431B (zh) * | 2019-12-11 | 2021-08-10 | 深圳市光科全息技术有限公司 | 三维光子晶体及其应用 |
| CN111308582B (zh) * | 2020-03-06 | 2021-10-01 | 中南民族大学 | 二维光子晶体平板、设计方法及利用此平板的光器件 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001074954A (ja) * | 1999-08-31 | 2001-03-23 | Nippon Telegr & Teleph Corp <Ntt> | 3次元フォトニック結晶構造体の作製方法 |
| US6358854B1 (en) * | 1999-04-21 | 2002-03-19 | Sandia Corporation | Method to fabricate layered material compositions |
| US20030133683A1 (en) * | 2002-01-17 | 2003-07-17 | Micron Technology, Inc. | Three-dimensional photonic crystal waveguide structure and method |
| WO2003087904A1 (en) * | 2002-04-12 | 2003-10-23 | Massachusetts Institute Of Technology | Metamaterials employing photonic crystals |
| EP1574884A1 (en) * | 2004-03-08 | 2005-09-14 | Canon Kabushiki Kaisha | Three-dimensional periodic structure, functional element including the same and light-emitting device also including the same. |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5335240A (en) * | 1992-12-22 | 1994-08-02 | Iowa State University Research Foundation, Inc. | Periodic dielectric structure for production of photonic band gap and devices incorporating the same |
| US5406573A (en) * | 1992-12-22 | 1995-04-11 | Iowa State University Research Foundation | Periodic dielectric structure for production of photonic band gap and method for fabricating the same |
| US5440421A (en) * | 1994-05-10 | 1995-08-08 | Massachusetts Institute Of Technology | Three-dimensional periodic dielectric structures having photonic bandgaps |
| US5998298A (en) * | 1998-04-28 | 1999-12-07 | Sandia Corporation | Use of chemical-mechanical polishing for fabricating photonic bandgap structures |
| US6597851B2 (en) * | 2000-08-09 | 2003-07-22 | Massachusetts Institute Of Technology | Periodic dielectric structure having a complete three-dimensional photonic band gap |
| WO2005006039A1 (en) * | 2003-06-24 | 2005-01-20 | Massachusetts Institute Of Technology | Polarization-independent optical networks in 3d photonic crystals |
| JP4637071B2 (ja) * | 2005-10-26 | 2011-02-23 | キヤノン株式会社 | 3次元フォトニック結晶及びそれを用いた機能素子 |
-
2005
- 2005-10-26 JP JP2005311260A patent/JP4636996B2/ja not_active Expired - Fee Related
-
2006
- 2006-10-16 EP EP06122335A patent/EP1780563B1/en not_active Not-in-force
- 2006-10-16 DE DE602006002578T patent/DE602006002578D1/de active Active
- 2006-10-16 AT AT06122335T patent/ATE407377T1/de not_active IP Right Cessation
- 2006-10-23 US US11/551,745 patent/US7302147B2/en not_active Expired - Fee Related
- 2006-10-26 CN CNB200610142443XA patent/CN100429541C/zh not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6358854B1 (en) * | 1999-04-21 | 2002-03-19 | Sandia Corporation | Method to fabricate layered material compositions |
| JP2001074954A (ja) * | 1999-08-31 | 2001-03-23 | Nippon Telegr & Teleph Corp <Ntt> | 3次元フォトニック結晶構造体の作製方法 |
| US20030133683A1 (en) * | 2002-01-17 | 2003-07-17 | Micron Technology, Inc. | Three-dimensional photonic crystal waveguide structure and method |
| WO2003087904A1 (en) * | 2002-04-12 | 2003-10-23 | Massachusetts Institute Of Technology | Metamaterials employing photonic crystals |
| EP1574884A1 (en) * | 2004-03-08 | 2005-09-14 | Canon Kabushiki Kaisha | Three-dimensional periodic structure, functional element including the same and light-emitting device also including the same. |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1780563B1 (en) | 2008-09-03 |
| CN1959451A (zh) | 2007-05-09 |
| JP2007121523A (ja) | 2007-05-17 |
| JP4636996B2 (ja) | 2011-02-23 |
| EP1780563A1 (en) | 2007-05-02 |
| ATE407377T1 (de) | 2008-09-15 |
| US7302147B2 (en) | 2007-11-27 |
| DE602006002578D1 (de) | 2008-10-16 |
| US20070172190A1 (en) | 2007-07-26 |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
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| EXPY | Termination of patent right or utility model |