CN100422888C - Batch-to-batch control system and method for reaction chamber level - Google Patents

Abstract

A batch-to-batch control system and method for a chamber level is provided, wherein the control system includes a tool having a plurality of chambers and an information system, the information system calculates optimized control parameters for each chamber of the tool, and screens out executable parameters according to whether the chamber is in an executable state, and transmits the result to the tool, such that the batch-to-batch control system and method for a chamber level can be applied to a parallel mode process and a serial mode process.

Description

Batch-to-batch control system and method at reaction chamber level

technical field

The present invention relates to an inter-batch control system and method thereof, and in particular to a reaction chamber-level inter-batch control system and method thereof.

Background technique

With the development of the semiconductor manufacturing industry, the chip area is increasing day by day, while the electronic components are shrinking day by day. Accurate process control has become a necessary technology. To achieve accurate process control, information systems must be relied on, such as the factory operation control system (Manufacturing Execution System (MES) is often used in the semiconductor manufacturing industry with high variability in the production process. In order to improve the utilization rate of machine equipment, the factory operation control system can be used to collect various data on the manufacturing site, and organize and analyze the data. To provide managers with correct and timely information. In addition, due to the accumulation of wear and tear over time or the accumulation of materials, many processes have unavoidable variations. At this time, the control parameters of the machine equipment and the process formula can be adjusted by using the control between batches (Run-to-Run control) to eliminate or reduce The impact of disturbance factors such as process drift on the wafer, at present, the batch-to-batch control technology has become an important technology to improve manufacturing efficiency and manufacturing quality.

The known chamber level Run-to-Run control technology has the following disadvantages, that is, the factory operation control system cannot load appropriate control parameters according to the state of the reaction chamber of the machine equipment, and the machine equipment Unable to receive additional control parameters from the plant operation control system, thus causing equipment with multiple reaction chambers to use the same control parameters for all reaction chambers, and causing the equipment to adopt batch-to-batch control technology at the chamber level When performing production operations, only the parallel mode process can be used, but the serial mode process cannot be used. However, the output efficiency of the serial mode process is higher than that of the parallel mode process.

How to enable the batch-to-batch control technology at the reaction chamber level to adopt a serial mode process to improve the productivity of semiconductor manufacturing is a current development topic for the batch-to-batch control technology.

Contents of the invention

The purpose of the present invention is to provide a batch-to-batch control system at the reaction chamber level, which overcomes the problem that the known technology cannot be applied to the serial mode process, so as to improve the productivity of semiconductor manufacturing.

Another object of the present invention is to provide a reaction chamber-level batch-to-batch control method for controlling a machine equipment, so that the machine equipment can apply the reaction chamber-level batch-to-batch control technology in a serial mode process , thereby improving the productivity of semiconductor manufacturing.

The present invention proposes a reaction chamber-level inter-batch control system, which includes: a machine equipment and an information system, the machine equipment has a plurality of reaction chambers, and there is a first between the information system and the machine equipment Data link, the information system calculates the reaction chamber control parameters for each reaction chamber, and selects at least one executable parameter from the plurality of reaction chamber control parameters according to whether the plurality of reaction chambers are in an executable state , selecting at least one executable formula according to whether the plurality of reaction chambers are in the executable state, and transmitting the executable parameters and the executable formula to the machine equipment through the first data link.

According to the batch-to-batch control system at the reaction chamber level described in the preferred embodiment of the present invention, the information system, for example, includes a factory operation control system module and a batch-to-batch controller module, the factory operation control system module and There is a second data link between the inter-batch controller modules, and the factory operation control system module or the inter-batch controller module includes a parameter screening module.

The present invention proposes a batch-to-batch control method at the reaction chamber level, which is used to control a machine equipment with multiple reaction chambers. The control method includes: obtaining state information of the multiple reaction chambers; calculating the control parameters of the reaction chambers; according to whether the plurality of reaction chambers are in the executable state, screening the plurality of reaction chamber control parameters to generate at least one executable parameter; according to whether the plurality of reaction chambers are in the executable state state, selecting at least one executable recipe; and sending the executable parameters and the executable recipe to the machine equipment and other steps.

Based on the above, the control system and method of the present invention calculates the reaction chamber control parameters for each reaction chamber, and screens the plurality of reaction chamber control parameters according to whether the plurality of reaction chambers are in an executable state, and selects at least An executable recipe enables different control parameters to be used for different chambers, thereby applying chamber-level batch-to-batch control techniques to a serial mode process.

In order to make the above and other objects, features and advantages of the present invention more comprehensible, preferred embodiments will be described in detail below together with the accompanying drawings.

Description of drawings

Fig. 1 shows the structure diagram of the batch-to-batch control system at the reaction chamber level of the present invention.

FIG. 2 shows a flowchart of the batch-to-batch control method at the reaction chamber level of the present invention.

Fig. 3 shows a system structure diagram of a preferred embodiment of the present invention.

Fig. 4 shows a system structure diagram of another preferred embodiment of the present invention.

Description of main component symbols

10: machine equipment

11: The first reaction chamber

12: The second reaction chamber

20: Information Systems

21: Factory operation control system module

211: Parameter screening unit

22: Batch-to-batch controller module

221: Parameter screening unit

31: First data link

32: Second data link

Step S2: The step of obtaining the status information of the reaction chamber

Step S4: For each reaction chamber, the step of calculating its optimal reaction chamber control parameters

Step S6: A step of screening the control parameters of the reaction chamber to generate at least one executable parameter according to whether the reaction chamber is in the executable state

Step S8: A step of selecting at least one executable formula according to whether the reaction chamber is in an executable state

Step S10: The step of transmitting the above-mentioned executable parameters and the above-mentioned executable formula to the machine equipment

Detailed ways

Please refer to Fig. 1, Fig. 1 shows the structural diagram of the batch-to-batch control system of the reaction chamber level of the present invention, a machine equipment 10 has a first reaction chamber 11 and a second reaction chamber 12, an information system 20 and the machine The devices 10 transmit data to each other through a first data link 31. The first data link 31 uses, for example, an RS232 connection line, and adopts a semiconductor equipment communication standard (Semiconductor Equipment Communication Standard, SECS) to transmit data to each other, or for example uses An Ethernet line, and use TCP/IP communication protocol and high-speed SECS Message Services (High-Speed SECS Message Services, HSMS) to transmit data to each other.

In a process, the information system 20 obtains the state information of the first reaction chamber 11 and the second reaction chamber 12 through the first data link 31, and calculates the optimized control parameters of the first reaction chamber and the control parameters of the second reaction chamber respectively. parameter, then, the information system 20 screens out at least one executable parameter from the above-mentioned reaction chamber control parameters according to whether the plurality of reaction chambers 11, 12 are in the executable state, for example, the state of the first reaction chamber 11 is in the executable state, If the state of the second reaction chamber 12 is in an unexecutable state, then the information system 20 screens out the above-mentioned first reaction chamber control parameter as an executable parameter, and the above-mentioned second reaction chamber control parameter is filtered out, and then, the information system 20 is also based on Whether the plurality of reaction chambers 11, 12 are in an executable state, select at least one executable recipe, because the information system 20 selects the process recipe of the first reaction chamber 11 as an executable recipe, and transmits the above-mentioned recipe through the first data link 31 The executable parameters and the above-mentioned executable formula are sent to the machine equipment 10. At this time, the machine equipment 10 uses the first reaction chamber 11 to carry out the processing process with the above-mentioned executable parameters and the above-mentioned executable formula. In this way, since the information system 20 has a screening reaction chamber The function of control parameters can transmit the control parameters of a single reaction chamber to the equipment 10, so that the first reaction chamber 11 and the second reaction chamber 12 can adopt different control parameters.

In a semiconductor process, a production batch (lot) usually includes the manufacture of a plurality of wafers. Using the control system of the present invention, the plurality of wafers can be selectively sent into the first reaction chamber 11, and can also be selected into the second reaction chamber 12. Because the first reaction chamber 11 and the second reaction chamber 12 can be used for processing at the same time, for example, the first wafer is processed in the first reaction chamber 11, the second wafer is processed in the second reaction chamber 12, and the first wafer is processed in the second reaction chamber 12. After the processing of one wafer is completed, the third wafer is processed in the first reaction chamber 11, and so on, that is, a serial mode process is adopted for processing. In addition, the same reaction chamber can also be selected to process wafers of the same production batch. Another batch of wafers is processed using another chamber, ie, a parallel mode process is used.

Please refer to FIG. 2. FIG. 2 shows a flow chart of the batch-to-batch control method at the reaction chamber level of the present invention. The control method uses an information system 20 to control a machine equipment 10, wherein the machine equipment 10 has a first reaction chamber 11 and a second reaction chamber 12, there is a first data link 31 between the information system 20 and the machine equipment 10, first, the information system 20 obtains the status of the multiple reaction chambers 11, 12 through the first data link 31 Information step S2, and respectively calculate the optimized control parameters of the first reaction chamber and the second reaction chamber. A reaction chamber control parameter and a second reaction chamber control parameter generate at least one executable parameter step S6, and then, also according to whether the plurality of reaction chambers 11, 12 are in an executable state, select at least one executable recipe step S8, and finally , the information system 20 transmits the above-mentioned executable parameters and the above-mentioned executable formula to the machine equipment 10 in step S10.

Please refer to Fig. 3, Fig. 3 represents the system structure diagram of a preferred embodiment of the present invention, a machine equipment 10 has a first reaction chamber 11 and a second reaction chamber 12, and an information system 20 includes a factory operation control system The module 21 and the inter-batch controller module 22, the factory operation control system module 21 and the machine equipment 10 transmit data to each other through a first data link 31, the factory operation control system module 21 and the inter-batch controller module 22 There is a second data link 32 between batches, wherein the controller module 22 between batches has a parameter screening unit 221. In a process, the machine equipment 10 transmits a request command (request) to the factory through the first data link 31 The operation control system module 21, the content of the request command includes the status information of the first reaction chamber 11 and the second reaction chamber 12, and then, the factory operation control system module 21 transmits the multiple reaction chambers 11, 12 through the second data link 32 12 state information to the inter-batch controller module 22, and then, the inter-batch controller module 22 respectively calculates the optimized first reaction chamber control parameters and the second reaction chamber control parameters, and according to the plurality of reaction chambers 11 , 12 Whether it is in an executable state, use the parameter screening unit 221 to screen out at least one executable parameter, for example, the state of the first reaction chamber 11 is in the executable state, and the state of the second reaction chamber 12 is in the non-executable state, then the parameter screening The unit 221 screens out the above-mentioned first reaction chamber control parameter as an executable parameter, and the above-mentioned second reaction chamber control parameter is filtered out, and then, the batch-to-batch controller module 22 transmits the above-mentioned executable parameter to the The factory operation control system module 21, the factory operation control system module 21 selects the recipe of the first reaction chamber 11 as the executable recipe according to the first reaction chamber 11 being in an executable state, and transmits the above-mentioned executable parameters through the first data link 31 and the above-mentioned executable recipe to the machine equipment 10, at this moment, the machine equipment 10 uses the first reaction chamber 11 to perform the processing process with the above-mentioned executable parameters and the above-mentioned executable recipe.

Please refer to Fig. 4, Fig. 4 represents the system structure diagram of another preferred embodiment of the present invention, a machine equipment 10 has a first reaction chamber 11 and a second reaction chamber 12, an information system 20 includes a factory operation control The system module 21 and the batch-to-batch controller module 22, the factory operation control system module 21 and the machine equipment 10 transmit data to each other through a first data link 31, the factory operation control system module 21 and the batch-to-batch controller module There is a second data link 32 between 22, wherein the factory operation control system module 21 has a parameter screening unit 211, in a process, the machine equipment 10 sends a request command to the factory operation control system through the first data link 31 After the module 21', the factory operation control system module 21 transmits another request instruction to the inter-batch controller module 22 through the second data link 32, and the contents of the plurality of request instructions include the first reaction chamber 11 and the second reaction chamber 11. chamber 12 status information, and then, the batch-to-batch controller module 22 respectively calculates the optimized first reaction chamber control parameters and the second reaction chamber control parameters, and uses the second data link 32 to transmit the above-mentioned first reaction chamber control parameters The parameters and the above-mentioned second reaction chamber control parameters are sent to the factory operation control system module 21, and the factory operation control system module 21 uses the parameter screening unit 211 to screen out those in the non-executable state according to whether the plurality of reaction chambers 11, 12 are in the executable state The control parameters of the reaction chambers, and retain at least one executable parameter, for example, the state of the first reaction chamber 11 is in the executable state, and the state of the second reaction chamber 12 is in the non-executable state, then the parameter screening unit 211 screens out the second Reaction chamber control parameters, while retaining the first reaction chamber control parameters as executable parameters, then, the factory operation control system module 21 selects the recipe of the first reaction chamber 11 as the executable recipe according to the first reaction chamber 11 being in an executable state, And transmit the above-mentioned executable parameters and the above-mentioned executable recipe to the machine equipment 10 through the first data link 31 , at this time, the machine equipment 10 uses the first reaction chamber 11 to carry out the processing process with the above-mentioned executable parameters and the above-mentioned executable recipe.

To sum up, the control system and method of the present invention calculate the optimal reaction chamber control parameters for the first reaction chamber 11 and the second reaction chamber 12 respectively, and according to whether the plurality of reaction chambers 11, 12 are in Executable state, screening and transmitting the control parameters of the above reaction chambers, because the control parameters of a single reaction chamber can be transmitted to the machine equipment 10, so that the first reaction chamber 11 and the second reaction chamber 12 have different control parameters, and then the application reaction Room-level batch-to-batch control techniques in a serial mode process.

Although the present invention is disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope is as defined by the appended claims.

Claims (9)

1. A chamber-level batch-to-batch control system comprising: A piece of equipment, the piece of equipment has a plurality of reaction chambers; and An information system, with a first data link between the information system and the machine equipment, the information system calculates the reaction chamber control parameters for each of the reaction chambers, and according to whether the plurality of reaction chambers are in an executable state , selecting at least one executable parameter from the plurality of reaction chamber control parameters, selecting at least one executable formula according to whether the plurality of reaction chambers are in an executable state, and transmitting the executable parameter and The executable recipe is sent to the machine device. 2. The control system as claimed in claim 1, wherein the information system includes a factory operation control system module and a batch-to-batch controller module, and a first batch is provided between the factory operation control system module and the batch-to-batch controller module Two data links. 3. The control system as claimed in claim 2, wherein the batch-to-batch controller module has a parameter screening unit for screening out the executable parameters. 4. The control system as claimed in claim 3, wherein the factory operation control system module transmits the status information of the plurality of reaction chambers to the batch-to-batch controller module through the second data link, and through the batch-to-batch control After the operation of the controller module, the inter-batch controller module transmits the executable parameter to the factory operation control system module through the second data link. 5. The control system as claimed in claim 2, wherein the factory operation control system module has a parameter screening unit for screening out the executable parameters. 6. The control system as claimed in claim 5, wherein the factory operation control system module transmits a data request command to the inter-batch controller module through the second data link, and after the operation of the inter-batch controller module Afterwards, the inter-batch controller module transmits the plurality of reaction chamber control parameters to the factory operation control system module through the second data link. 7. The control system as claimed in claim 1, wherein the machine equipment adopts a serial mode process. 8. The control system as claimed in claim 1, wherein the machine equipment adopts a parallel mode process. 9. A batch-to-batch control method at the reaction chamber level, used to control a piece of equipment, the machine equipment has a plurality of reaction chambers, the control method comprising: Obtain status information of the plurality of reaction chambers; For each of the reaction chambers, calculating its reaction chamber control parameters; Screening the plurality of reaction chamber control parameters to generate at least one executable parameter according to whether the plurality of reaction chambers are in an executable state; Selecting at least one executable recipe according to whether the plurality of reaction chambers are in an executable state; and Sending the executable parameters and the executable formula to the machine equipment.

Images