CN100415927C - Fliming clamp mask and its filming apparatus - Google Patents

Fliming clamp mask and its filming apparatus Download PDF

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Publication number
CN100415927C
CN100415927C CNB2004100884494A CN200410088449A CN100415927C CN 100415927 C CN100415927 C CN 100415927C CN B2004100884494 A CNB2004100884494 A CN B2004100884494A CN 200410088449 A CN200410088449 A CN 200410088449A CN 100415927 C CN100415927 C CN 100415927C
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CN
China
Prior art keywords
film coating
coating jig
shield
shade
filming
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Expired - Fee Related
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CNB2004100884494A
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Chinese (zh)
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CN1766155A (en
Inventor
徐振源
陈明华
李思贤
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Prodisc Technology Inc
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Prodisc Technology Inc
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Priority to CNB2004100884494A priority Critical patent/CN100415927C/en
Publication of CN1766155A publication Critical patent/CN1766155A/en
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Publication of CN100415927C publication Critical patent/CN100415927C/en
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Abstract

The present invention relates to a filming clamp mask and a filming apparatus thereof. The filming clamp mask is used for shielding a filming clamp arranged on the filming apparatus, the filming clamp clamps at least one base plate so as to carry out a filming process, and at least one filming layer is formed on the base plate. The filming clamp mask comprises a first shielding plate, at least two second shielding plates and a third shielding plate, wherein the second shielding plates are respectively connected with both opposite side edges of the first shielding plate; the third shielding plate is provided with at least one opening which is connected with the second shielding plates, and the third shielding plate is arranged oppositely to the first shielding plate; the first shielding plate, the second shielding plates and the third shielding plate form containing space for containing the filming clamp. The opening at least exposes a part of the base plate, and the thickness of the filming layer formed on the base plate can be amended in the filming process by the method that the filming clamp mask is provided with at least one opening; simultaneously, the non-filming surface of the base plate is prevented from being filmed, and the base plate is prevented from being scratched. Thereby, the uniform efficiency of the filming layer of the base plate can be effectively increased under the condition of the rotation of the filming apparatus at a high speed, so that the good rate of the filming base plate can be improved.

Description

Film coating jig shade and filming equipment thereof
Technical field
The present invention relates to a kind of film coating jig shade and filming equipment thereof, particularly relate to a kind of film coating jig shade and filming equipment (MASK FOR COATING JIG AND COATING APPARATUS THEREOF) thereof of seizing the film coating jig of colored drum spectral filter (color drum filter) on both sides by the arms.
Background technology
Film-plating process is extremely wide in the application of industry member, and general normal use is in metal-processing industry, semi-conductor industry and opto-electronics or the like.In recent years, again because developing rapidly of semi-conductor industry and opto-electronics makes coating technique that great progress also be arranged.
Seeing also shown in Figure 1ly, is the structural representation of an existing known filming equipment.Existing known filming equipment 1, it comprises a motor 11, a parachute kit formula load bearing seat 12, a shield 13 and a coating source 14.Wherein, parachute kit formula load bearing seat 12 is the axle center that are located in motor 11, and the shape of parachute kit formula load bearing seat 12 is similar umbrellas, it is made up of four load bearing seats usually, therefore, this filming equipment 1 is called parachute kit formula film coating equipment again, and shield 13 is the positions that are arranged at contiguous parachute kit formula load bearing seat 12; And coating source 14 is relative with parachute kit formula load bearing seat 12 and establish.Wherein, filming equipment 1 is to be applicable on flat substrate 60 to form coatings, to make flat colored filter.
From the above, when using filming equipment 1 to carry out film-plating process, normally earlier a plurality of substrates 60 are fixed on the parachute kit formula load bearing seat 12, starter motor 11 utilizes modes such as vacuum evaporation mode or sputtering way that coating source 14 is plating on these substrates 60 with rotation parachute kit formula load bearing seat 12 at last more then; As shown in Figure 1, because the material in the coating source 14 is to advance just to run into these substrates 60 then in three-dimensional space, and be plated on these substrates 60, represent because the direct of travel of the material of coating source 14 is as shown in Figure 1 arrows, so the thickness of the coatings that each substrate 60 plated just can be different according to the position of each substrate 60.
In order to address the above problem, know the convenient situation of as far as possible avoiding the coatings uneven thickness of each substrate 60 with the design of shield 13 of this operator.For example, the shape of shield 13 is that the material according to coating source 14 decides in the concentration of the different positions of parachute kit formula load bearing seat 12, and its shape is generally similar shaped-like leaf.
From the above, flat colored filter is in order to constitute existing known colour wheel (colorwheel), it is one of critical elements of making DLP formula projector, yet, along with science and technology constantly develops evolution, researchdevelopment at present goes out a kind of optical element that is different from general colour wheel structure, it does not adopt existing known colored filter, and be to use new-type colored drum spectral filter 20 (colordrum filter), see also shown in Figure 2, be the structural representation of an existing known colored drum spectral filter, this colour drum spectral filter 20 is the spectral filters that have a globoidal structure design for; Found that, use colored drum spectral filter 20 can make DLP formula projector significantly promote its durability, brightness and contrast gradient, and can effectively strengthen the tolerance range and the saturation ratio of colors of image.
Therefore, filming equipment manufacturers has set about researching and developing the filming equipment that can seize colored drum spectral filter on both sides by the arms at present, and concentrates on studies simultaneously and how to improve the homogeneity of substrate film coating layer.
This shows that above-mentioned existing filming equipment obviously still has inconvenience and defective, and demands urgently further being improved in structure and use.In order to solve the problem that filming equipment exists, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but do not see always that for a long time suitable design finished by development, and common product does not have appropriate structure to address the above problem, this obviously is the problem that the anxious desire of relevant dealer solves.
In sum as can be known, how a kind of film coating jig shade is provided, is applied to seize on both sides by the arms the filming equipment of colored drum spectral filter, make filming equipment when high speed rotating, raising plated film material is formed at the homogeneity on the substrate, is one of important topic of current film-plating process technology really.
Because the defective that above-mentioned existing filming equipment exists, the inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and expertise, and the utilization of cooperation scientific principle, actively studied innovation, in the hope of founding a kind of film coating jig shade and filming equipment thereof of novel texture, can improve general existing filming equipment, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, create the present invention who has practical value finally.
Summary of the invention
The objective of the invention is to, overcome the defective that existing filming equipment exists, and a kind of novel texture is provided can effectively improve inhomogeneity film coating jig shade of film-plating process and filming equipment thereof, thereby be suitable for practicality more.
The object of the invention to solve the technical problems realizes by the following technical solutions.A kind of film coating jig shade according to the present invention's proposition, be to be used to hide a film coating jig, this film coating jig is arranged in the filming equipment, and this film coating jig is seized at least one substrate on both sides by the arms to carry out film-plating process, and forming at least one coatings on this substrate, this film coating jig shade comprises: one first shield; At least two second shields, it is connected with the relative dual-side in this first shield respectively; And one the 3rd shield, it has at least one opening, and be connected with described second shield respectively, wherein the 3rd shield is relative with this first shield and establish, this first shield, described second shield and the 3rd shield form a spatial accommodation, ccontaining this film coating jig of this spatial accommodation, this opening are this substrates that exposes part at least.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid film coating jig shade, wherein said film coating jig shade is to link this filming equipment with a connection piece.
Aforesaid film coating jig shade, wherein said film coating jig shade are swivel bearings that links this filming equipment, and this swivel bearing drives this film coating jig, and this film coating jig and this film coating jig shade are for relatively rotating.
Aforesaid film coating jig shade, wherein said opening are in order to revising the thickness of this coatings, and this opening is to be a slit.
Aforesaid film coating jig shade, it more comprises a cover plate, and it is an end that is arranged at this spatial accommodation, and this cover plate has a perforate.
The object of the invention to solve the technical problems also adopts following technical scheme to realize.According to a kind of filming equipment that the present invention proposes, it comprises: a film coating jig, and it is to seize at least one substrate on both sides by the arms carrying out film-plating process, and forms at least one coatings on this substrate; An and film coating jig shade, it has one first shield, at least two second shields and one the 3rd shield, described second shield is connected with the relative dual-side in this first shield respectively, the 3rd shield has at least one opening, and be connected with described second shield respectively, wherein the 3rd shield is relative with this first shield and establish, this first shield, described second shield and the 3rd shield are to form a spatial accommodation, ccontaining this film coating jig of this spatial accommodation, this opening are this substrates that exposes part at least.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid filming equipment, it more comprises a connection piece, and it is to be adjacent to this film coating jig shade, and wherein this film coating jig shade links this filming equipment with this web member.
Aforesaid filming equipment, wherein said film coating jig shade are swivel bearings that links this filming equipment, and this swivel bearing drives this film coating jig, and this film coating jig and this film coating jig shade are for relatively rotating.
Aforesaid filming equipment, wherein said opening are in order to revising the thickness of this coatings, and this opening is to be a slit.
Aforesaid filming equipment more comprises a cover plate, and it is an end that is arranged at this spatial accommodation, and this cover plate has a perforate.
The object of the invention to solve the technical problems also adopts following technical scheme to realize.According to a kind of filming equipment that the present invention proposes, it comprises: a film coating jig, and it is to seize at least one substrate on both sides by the arms to carry out film-plating process; And a film coating jig shade, it has an at least one opening and a spatial accommodation, and ccontaining this film coating jig of this spatial accommodation forms at least one coatings on this substrate to see through this opening.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
Aforesaid filming equipment, it more comprises a connection piece, and it is to be adjacent to this film coating jig shade, and wherein this film coating jig shade is to link this filming equipment with this web member.
Aforesaid filming equipment, wherein said film coating jig shade are swivel bearings that links this filming equipment, and this swivel bearing drives this film coating jig, and this film coating jig and this film coating jig shade are for relatively rotating.
Aforesaid filming equipment, wherein said opening are in order to controlling the thickness of this coatings, and this opening is to be a slit.
Aforesaid filming equipment, wherein said spatial accommodation are for a rectangular parallelepiped or are a right cylinder.
The present invention compared with prior art has tangible advantage and beneficial effect.By above technical scheme as can be known, in order to reach aforementioned goal of the invention, major technique of the present invention thes contents are as follows:
The present invention proposes a kind of film coating jig shade, it is to be used to hide a film coating jig, this film coating jig is arranged in the filming equipment, and this film coating jig is seized at least one substrate on both sides by the arms to carry out film-plating process, and forming at least one coatings on substrate, this film coating jig shade comprises one first shield, at least two second shields and one the 3rd shield.Wherein, second shield is the relative dual-side that is connected with respectively in first shield; The 3rd shield is to have at least one opening, and be connected with described second shield respectively, wherein the 3rd shield is relative with first shield and establish, first shield, described second shield and the 3rd shield are to form a spatial accommodation, this spatial accommodation is ccontaining film coating jig, and opening then is the substrate that exposes part at least.
Again, in order to achieve the above object, the present invention proposes a kind of filming equipment, and it comprises a film coating jig and a film coating jig shade, and wherein film coating jig is to seize at least one substrate on both sides by the arms carrying out film-plating process, and forms at least one coatings on substrate; The film coating jig shade has one first shield, at least two second shields and one the 3rd shield, described second shield is connected with the relative dual-side in first shield respectively, the 3rd shield is to have at least one opening, and be connected with described second shield respectively, wherein the 3rd shield is relative with first shield and establish, first shield, described second shield and the 3rd shield are to form a spatial accommodation, and this spatial accommodation is ccontaining film coating jig, and this opening is the substrate that exposes part at least.
Again, for reaching above-mentioned purpose, the present invention also proposes a kind of filming equipment, and it comprises a film coating jig and a film coating jig shade, and wherein, film coating jig is to seize at least one substrate on both sides by the arms to carry out film-plating process; The film coating jig shade is to have an at least one opening and a spatial accommodation, and this spatial accommodation is ccontaining film coating jig, forms at least one coatings on substrate to see through opening.
By technique scheme, film coating jig shade of the present invention and filming equipment thereof have following advantage at least: according to film coating jig shade of the present invention and filming equipment thereof, its film coating jig shade is in order to hide the film coating jig in the filming equipment, film coating jig then is in order to seize at least one substrate on both sides by the arms, this film coating jig shade utilizes at least one opening correction of its 3rd shield to be formed at the thickness of the coatings on the substrate, thereby can be issued to the inhomogeneity purpose of effective increase substrate film coating layer at the filming equipment high speed rotating, first shield of film coating jig shade and second shield then are to be plated to and the scratch of substrate in order to the non-plated film face that prevents substrate in addition, and have further increased the yield of coated basal plate.
In sum, what the invention provides a kind of novel texture can effectively improve inhomogeneity film coating jig shade of film-plating process and filming equipment thereof, this filming equipment comprises one in order to hide the film coating jig shade of a film coating jig, wherein, the film coating jig shade has at least one being opened on and revises the thickness that is formed at coatings on the substrate in the film-plating process, the also available scratch that is plated to and prevents substrate with the non-plated film face that prevents substrate simultaneously, thereby can be issued to the inhomogeneity purpose of effective increase substrate film coating layer, and then can improve the yield of coated basal plate at the filming equipment high speed rotating.It has above-mentioned many advantages and practical value, and in like product, do not see have similar structure design to publish or use and really genus innovation, no matter it all has bigger improvement on product structure or function, have technically than much progress, and produced handy and practical effect, and more existing filming equipment has the multinomial effect of enhancement, thus be suitable for practicality more, and have the extensive utility value of industry, really be a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technique means of the present invention, and can be implemented according to the content of specification sheets, and for above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, below especially exemplified by preferred embodiment, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is the structural representation of an existing known filming equipment.
Fig. 2 is the structural representation of an existing known colored drum spectral filter.
Fig. 3 is a structural representation according to the filming equipment with film coating jig shade of preferred embodiment of the present invention.
Fig. 4 is a local enlarged diagram according to the filming equipment of preferred embodiment of the present invention.
Fig. 5 is an exploded perspective synoptic diagram according to the film coating jig shade of preferred embodiment of the present invention.
1: filming equipment 11: motor
12: parachute kit formula load bearing seat 13: shield
14: coating source 20: colored drum spectral filter
3: filming equipment 31: the film coating jig shade
312: the second shields of 311: the first shields
313: the three shield 313A: opening
314: spatial accommodation 315: cover plate
315A: perforate 32: film coating jig
33: web member 34: swivel bearing
35: coating source 36: cavity
60: substrate
Embodiment
Reach technique means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, to film coating jig shade and its embodiment of filming equipment, structure, feature and the effect thereof that foundation the present invention proposes, describe in detail as after.
Seeing also shown in Figure 3ly, is a structural representation according to the filming equipment with film coating jig shade of preferred embodiment of the present invention.The filming equipment 3 of preferred embodiment of the present invention, it comprises a film coating jig 32 and a film coating jig shade 31.
In the present embodiment, this film coating jig 32 is the top that is positioned at a cavity 36 of filming equipment 3, and film coating jig 32 is to seize at least one substrate on both sides by the arms to carry out film-plating process; This film coating jig shade 31, then in order to hide film coating jig 32, and film coating jig shade 31 has an at least one opening 313A and a spatial accommodation 314, this spatial accommodation 314 is ccontaining film coating jigs 32, and the bottom of cavity 36 has a coating source 35 relatively, see through the opening 313A of film coating jig shade 31, coating source 35 is able to by evaporation or the mode of sputter forms at least one coatings on substrate with Coating Materials.
Again, filming equipment 3 more comprises a connection piece 33, it is to be adjacent to film coating jig shade 31, wherein film coating jig shade 31 is to link filming equipment 3 with web member 33, more special, film coating jig shade 31 is swivel bearings 34 that link filming equipment 3, this swivel bearing 34 is the outer bearings for duplex bearing, cooperate with neck bearing and drive film coating jig 32 and rotate, it should be noted that swivel bearing 34 is to be fixedly arranged on filming equipment 3, therefore, film coating jig shade 31 does not rotate with film coating jig 32, but film coating jig 32 rotates relative to film coating jig shade 31.
From the above, see also shown in Figure 4, it is the partial enlarged drawing of Fig. 3 filming equipment 3, this film coating jig shade 31 is to design according to film coating jig 32 to hide it, in the present embodiment, this film coating jig shade 31 can be formed in one, and its spatial accommodation 314 can be a rectangular parallelepiped (as shown in Figure 4), also can be a right cylinder, in order to ccontaining film coating jig 32, and its opening 313A is the substrate that exposes part at least, this opening 313A be when film-plating process in order to the thickness of control basal plate coatings, in the present embodiment, this opening 313A is a slit, certainly, film coating jig shade 31 also can have plurality of openings 313A according to actual needs; Again, the shape of this opening 313A also can be irregular figure.Wherein, substrate is to be a colored drum spectral filter, and it has a recess and a protuberance, and film coating jig 32 is the recesses that can carry colored drum spectral filter, exposing the protuberance of colored drum spectral filter, be convenient to this moment form required coatings on the protuberance of colored drum spectral filter; In addition, film coating jig 32 also can carry the protuberance of colored drum spectral filter, exposing the recess of colored drum spectral filter, is convenient to this moment form required coatings on the recess of colored drum spectral filter.
Please consulting shown in Figure 5ly again, is an exploded perspective synoptic diagram according to the film coating jig shade of preferred embodiment of the present invention.According to the film coating jig shade 31 of preferred embodiment of the present invention, it comprises one first shield 311, at least two second shields 312 and one the 3rd shield 313.
In the present embodiment, first shield 311 of this film coating jig shade 31 is to be positioned at relatively on the film coating jig 32 of above-mentioned filming equipment 3 (as shown in Figure 3); Film coating jig shade 31 is to have 2 second shields 312, and the first side of each second shield 312 is connected with respectively in the relative dual-side of first shield 311; The 3rd shield 313 has at least one opening 313A, and the 3rd shield 313 is relative with first shield 311 and establish, and is connected with these second shields 312 respectively, and forms a spatial accommodation 314.Wherein, first shield 311, second shield 312 and the 3rd shield 313 are to interlink in the screw closure mode.
As mentioned above, spatial accommodation 314 is in order to ccontaining film coating jig 32, the opening 313A of the 3rd shield 313 then is the substrate that exposes part at least, in order to revise the thickness of substrate film coating layer, in the present embodiment, this opening 313A is a slit, certainly, the 3rd shield 313 also can have plurality of openings 313A according to actual needs, and the shape of this opening 313A also can be irregular figure.Again, film coating jig shade 31 more comprises a cover plate 315, and it is arranged at an end of spatial accommodation 314, and cover plate 315 has a perforate 315A, and this perforate 315A can be used as an eyesight and is formed at situation on the substrate in order to observe coatings in the film-plating process.
As mentioned above, and see also shown in Figure 4, film coating jig shade 31 is in filming equipment 3 with above-mentioned structure applications, 31 of film coating jig shades are to be linked on the filming equipment 3 with a web member 33 that is adjacent to film coating jig shade 31, more special, film coating jig shade 31 is swivel bearings 34 that link filming equipment 3, and this swivel bearing 34 is to drive film coating jig 32, revises the thickness of substrate film coating layer when the film coating jig high speed rotating by the opening 313A of film coating jig shade 31.
In sum, film coating jig shade and filming equipment thereof according to preferred embodiment of the present invention, this filming equipment comprises one in order to hide the film coating jig shade of a film coating jig, wherein, the film coating jig shade is to have at least one opening to revise the thickness that is formed at coatings on the substrate in film-plating process, the also available scratch that is plated to and prevents substrate with the non-plated film face that prevents substrate simultaneously, thereby can be issued to the inhomogeneity purpose of effective increase substrate film coating layer, and then can improve the yield of coated basal plate at the filming equipment high speed rotating.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the structure that can utilize above-mentioned announcement and technology contents are made a little change or be modified to the equivalent embodiment of equivalent variations, but every content that does not break away from technical solution of the present invention, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.

Claims (11)

1. film coating jig shade, be to be used to hide a film coating jig, this film coating jig is arranged in the filming equipment, and this film coating jig is seized at least one substrate on both sides by the arms to carry out film-plating process, and form at least one coatings on this substrate, it is characterized in that this film coating jig shade comprises:
One first shield;
At least two second shields, it is connected with the relative dual-side in this first shield respectively; And
One the 3rd shield, it has at least one opening, and be connected with described second shield respectively, wherein the 3rd shield is relative with this first shield and establish, this first shield, described second shield and the 3rd shield form a spatial accommodation, ccontaining this film coating jig of this spatial accommodation, this opening are this substrates that exposes part at least.
2. film coating jig shade according to claim 1 is characterized in that wherein said film coating jig shade is to link this filming equipment with a connection piece.
3. film coating jig shade according to claim 1, it is characterized in that wherein said film coating jig shade is a swivel bearing that links this filming equipment, this swivel bearing drives this film coating jig, and this film coating jig and this film coating jig shade are for relatively rotating.
4. film coating jig shade according to claim 1 is characterized in that wherein said opening is in order to revising the thickness of this coatings, and this opening is to be a slit.
5. film coating jig shade according to claim 1 is characterized in that it more comprises a cover plate, and it is an end that is arranged at this spatial accommodation, and this cover plate has a perforate.
6. filming equipment is characterized in that it comprises:
One film coating jig, it is to seize at least one substrate on both sides by the arms to carry out film-plating process;
One film coating jig shade, it has an at least one opening and a spatial accommodation, and ccontaining this film coating jig of this spatial accommodation forms at least one coatings on this substrate to see through this opening; And
A connection piece, it is to be adjacent to this film coating jig shade, wherein this film coating jig shade is to link this filming equipment with this web member.
7. filming equipment according to claim 6 is characterized in that wherein said film coating jig shade is a swivel bearing that links this filming equipment, and this swivel bearing drives this film coating jig, and this film coating jig and this film coating jig shade are for relatively rotating.
8. filming equipment according to claim 6 is characterized in that wherein said opening is in order to controlling the thickness of this coatings, and this opening is to be a slit.
9. filming equipment according to claim 6 is characterized in that wherein said spatial accommodation is for a rectangular parallelepiped or is a right cylinder.
10. filming equipment according to claim 6, it is characterized in that wherein said film coating jig shade is to have one first shield, at least two second shields and one the 3rd shield, described second shield is connected with the relative dual-side in this first shield respectively, the 3rd shield has at least one opening, and be connected with these described second shields respectively, wherein the 3rd shield is relative with this first shield and establish, this first shield, these described second shields and the 3rd shield are to form a spatial accommodation, ccontaining this film coating jig of this spatial accommodation, this opening are this substrates that exposes part at least.
11. filming equipment according to claim 6 is characterized in that it more comprises a cover plate, it is an end that is arranged at this spatial accommodation, and this cover plate has a perforate.
CNB2004100884494A 2004-10-29 2004-10-29 Fliming clamp mask and its filming apparatus Expired - Fee Related CN100415927C (en)

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Application Number Priority Date Filing Date Title
CNB2004100884494A CN100415927C (en) 2004-10-29 2004-10-29 Fliming clamp mask and its filming apparatus

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Application Number Priority Date Filing Date Title
CNB2004100884494A CN100415927C (en) 2004-10-29 2004-10-29 Fliming clamp mask and its filming apparatus

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CN1766155A CN1766155A (en) 2006-05-03
CN100415927C true CN100415927C (en) 2008-09-03

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101724813B (en) * 2008-10-14 2011-09-28 鸿富锦精密工业(深圳)有限公司 Coating fixture, coating device and coating method
CN106987820B (en) * 2017-05-19 2019-06-07 信利光电股份有限公司 A kind of film coating jig and filming equipment
CN114150278A (en) * 2021-12-07 2022-03-08 业成科技(成都)有限公司 Circular-center-symmetric 3D substrate coating method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1224152A (en) * 1998-01-21 1999-07-28 光磊科技股份有限公司 Pt resistance-temp. sensing element and its making method
JP2000194140A (en) * 1998-12-23 2000-07-14 Basf Drucksyst Gmbh Production of large size composite relief printing plate by laser alignment and successively using laser
CN1536376A (en) * 2003-04-04 2004-10-13 台达电子工业股份有限公司 Production method of colour filter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1224152A (en) * 1998-01-21 1999-07-28 光磊科技股份有限公司 Pt resistance-temp. sensing element and its making method
JP2000194140A (en) * 1998-12-23 2000-07-14 Basf Drucksyst Gmbh Production of large size composite relief printing plate by laser alignment and successively using laser
CN1536376A (en) * 2003-04-04 2004-10-13 台达电子工业股份有限公司 Production method of colour filter

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