CN100411810C

CN100411810C - Substrate positioning device

Info

Publication number: CN100411810C
Application number: CNB2005100649249A
Authority: CN
Inventors: 金田充弘; 冈部修三
Original assignee: American High Electromechanical Systems Ltd By Share Ltd; Mitsubishi Electric Corp
Current assignee: Mitsubishi Electric Corp
Priority date: 2004-11-08
Filing date: 2005-04-04
Publication date: 2008-08-20
Anticipated expiration: 2025-04-04
Also published as: JP4491650B2; TW200615075A; TWI271255B; KR100693696B1; CN1772434A; JP2006134143A; KR20060045361A

Abstract

To provide a substrate positioning device capable of reducing processing defects caused by misalignment and inclinations of optical axes of two processing heads in a two-head type laser processing machine. The substrate positioning device comprises a table 33 where a substrate is placed and a table holding stand 34 holding the table, an X-axis directional stopper 37 and a Y-axis directional stopper 36 which make the substrate position by bringing into contact with two orthogonal sides of the substrate, an X-axis directional stopper position switching device 47 for switching an X-axis directional position of the X-axis directional stopper 37 against the table holding stand 34 to a predetermined reference position and an offset position, a Y-axis directional stopper position switching device 41 for switching a Y-axis directional position of the Y-axis directional stopper 36 against the table holding stand 34 to a predetermined reference position and an offset position, and a table driving device 50 for making the substrate bring into contact with the X-axis directional stopper 37 and Y-axis directional stopper 36 by horizontally moving the table 33 in a slanting direction slantly intersected with the X axis and Y axis.

Description

Base positioner

Technical field

The present invention relates to the base positioner that substrate that the conveyance of subtend laser machine supplies with positions in the conveyance way.

Background technology

On substrate (printed base plate), carry out in the laser processing device of blind hole perforation processing etc. of path, position being arranged at the substrate that this XY platform of station place, the location subtend laser machine of substrate in the substrate transferring path of the XY of laser machine platform conveyance is supplied with.This is that the inconsistency of the placement location when preventing that substrate is placed on the XY platform is excessive, as the base positioner of being located on this location station, generally speaking, use following base positioner, promptly, drive the substrate be positioned on the positioning table, press on the retainer on the vertical side that is fixed on positioning table by 2 limit portions and position (reference, for example Patent Document 1) with alignment pin substrate.

Patent Document 1: Japanese kokai publication hei 10-328863 communique (the 3rd page, Fig. 4)

Be the production efficiency of the Laser Processing that improves this substrate, can consider to adopt place with state arranged side by side on 1 XY platform 2 substrates, with possess be located at each substrate directly over the dual-headed laser processing machine of 2 processing heads carry out method for processing simultaneously.And, these 2 substrates must position in the conveyance way of supplying with to the XY platform equally, for example for be used on the X-direction with 2 occasions that processing head carries out Laser Processing setting of fixed spacing P, successively 2 substrates are positioned with above-mentioned base positioner, on the X-direction with fixed spacing P it is positioned on the XY platform, then present the laying state of 2

substrate

60a, 60b shown in Fig. 8 (a) (using in the explanation of the following embodiment of the invention).

Yet, in the occasion that adopts this pair processing head, because the position deviation of the optical axis that the installation accuracy of the lens of each processing head and speculum etc. causes or inclination etc. can cause the position deviation of processing stand, promptly, the processing stand (laser beam 1 shines and the machining hole center of generation) of supposing 2 reality on the substrate is J, K, when being benchmark with processing stand J, as shown above, Δ X, Δ Y position deviation take place in processing stand K relative standard processing stand Ko.Its result, if with the position of this substrate 60a is that benchmark is to XY platform 25 location and carry out Laser Processing, then the processing stand of substrate 60b departs from the machining hole group's of each machining area (being 20 groups of machining areas in this example) that causes substrate 60b position deviation, cause all perforate operations of the machining area of the top portion that is positioned at of substrate 60b among for example last figure and the right portion to carry out, cause process quality issue.Yet in above-mentioned positioner in the past, substrate only is positioned on certain position by the retainer that is positioned on the fixed position, thereby, at all can not corresponding above-mentioned processing stand depart from and the position location of substrate is changed.

Summary of the invention

The present invention carries out for addressing the above problem a little, with provide can alleviate because of the position deviation of the optical axis of 2 processing heads on the dual-headed laser processing machine or the base positioner of the process quality issue that inclination causes be purpose.

For reaching above-mentioned purpose, record and narrate base positioner in claim 1, it is characterized in that possessing:

Place the workbench of substrate and the workbench that this workbench keeps is kept platform;

Bump X-direction retainer and the Y direction retainer that connects, aforesaid substrate is positioned with the 2 perpendicular limits of aforesaid substrate;

X-direction retainer position-switching device, this X-direction retainer position-switching device at above-mentioned X-direction retainer with respect to above-mentioned workbench keep platform in the position of X-direction, fixed reference position with switch between the quantitative offset position of setovering with institute with respect to this reference position;

Y direction retainer position-switching device, this Y direction retainer position-switching device at above-mentioned Y direction retainer with respect to above-mentioned workbench keep platform in the position of Y direction, fixed reference position with switch between the quantitative offset position of setovering with institute with respect to this reference position;

Make above-mentioned workbench move horizontally, make aforesaid substrate and above-mentioned X-direction retainer and Y direction retainer to bump the Working table driving device that connects to diagonal direction with X-direction and Y direction oblique.

In addition, record and narrate base positioner in claim 2, in the base positioner that claim 1 is recorded and narrated, has following feature, promptly, the upper surface of above-mentioned workbench is set side by side with and above-mentioned Working table driving device drives the movable workbench direction that causes, that is: several grooves of extending of diagonal direction with paralleling.

In addition, record and narrate base positioner, it is characterized in that possessing in claim 3:

Place the workbench of substrate;

X-direction retainer position-switching device, this X-direction retainer position-switching device at above-mentioned X-direction retainer with respect to above-mentioned workbench in the position of X-direction, fixed reference position and with respect to this reference position and with quantitatively switch between the offset position of biasing;

Y direction retainer position-switching device, this Y direction retainer position-switching device at above-mentioned Y direction retainer with respect to above-mentioned workbench in the position of Y direction, fixed reference position and with respect to this reference position and quantitatively switch between the offset position of biasing; The 2 limit portions relative with above-mentioned 2 limits to aforesaid substrate push, make aforesaid substrate and above-mentioned X-direction retainer and above-mentioned Y direction retainer to bump the substrate drive unit that connects.

The present invention is by X-direction retainer position-switching device and Y direction retainer position-switching device, can between reference position and offset position, switch respectively the position of X-direction retainer and Y direction retainer, thereby, in the dual-headed laser processing machine, by the suitable offset position of positional offset amount above-mentioned offset position is set with the processing stand of 2 substrates causing with the position deviation of the optical axis of 2 processing heads or inclination etc., can another piece substrate be positioned on the offset position with amount of bias suitable with respect to substrate wherein on the XY platform with above-mentioned processing stand positional offset amount, thus, to in each machining area of 2 substrates the perforation processing of fixed number, can depart from this machining area ground hardly processes simultaneously, the generation of perforation processing quality problems can be prevented, the process quality issue of dual-headed laser processing machine can be alleviated.

In addition, except that above-mentioned effect, record and narrate in the invention of claim 1, to the driving in the level of base plate face on the workbench is that the mode that the diagonal with the workbench that substrate carried out surface bearing drives is carried out, thereby, even for the thin occasion of substrate, substrate is under the stable status to be transferred it reliably, and substrate can not connect the back and deform because of excessive feeding force bumping with retainer, thereby can obtain good positioning accuracy.

In addition, except that above-mentioned various effects, record and narrate in the invention of claim 2, the several grooves that extend along workbench diagonal direction are set by the upper surface at workbench, prevent that substrate from connecting airtight mutually with the upper surface of workbench, can prevent substrate and retainer bump when connecing aftertable and continuing diagonal and move connect airtight the base plate deformation that causes mutually because of above-mentioned substrate and workbench or be out of shape after bounce-back, can obtain more good positioning accuracy.

Brief Description Of Drawings

Fig. 1 is the front view of the formation of the laser processing device integral body of the embodiment 1 of expression example of the present invention.

Fig. 2 is the vertical view of formation of the laser processing device of presentation graphs 1.

Fig. 3 is the substrate stow supply unit side side view of formation of the laser processing device of presentation graphs 1.

Fig. 4 is the vertical view of the base positioner of Fig. 1.

Fig. 5 wants portion's vertical view under the workbench dismounting state of base positioner of Fig. 4.

Fig. 6 is an A-A line amplification sectional view among Fig. 4.

The substrate orientation workshop section that Fig. 7 (a)～Fig. 7 (f) positions substrate with base positioner in the laser processing device of Fig. 1 for expression wants portion's front view.

Fig. 8 (a) and Fig. 8 (b) are positioned over the vertical view of the position of 2 substrates on the XY platform of laser processing device of Fig. 1 for expression.

Fig. 9 is the vertical view of other examples of workbench of the base positioner of presentation graphs 4.

Figure 10 is the B-B line amplification sectional view of Fig. 9.

Figure 11 represents the embodiment of the invention 2, and is suitable with Fig. 4.

Implement preferred embodiment of the present invention

Below, the embodiment 1 according to being shown in Fig. 1～Fig. 8 b describes example of the present invention.Fig. 1～Fig. 3 represents just to use the integral body of the laser processing device of positioner of the present invention, numbering 1 expression is carried out the substrate stow supply unit that lamination is supplied with to the substrate 60 before processing, the dual-headed laser processing machine that numbering 2 expressions are carried out Laser Processing to substrate 60, the base positioner that numbering 3 expressions position the substrate 60 before processing, numbering 4 expressions are carried out the substrate stow recoverer that lamination reclaims to the substrate 60 after processing, in addition, substrate transferring feeder 5 before the numbering 5 expression processing, substrate transferring discharger after the numbering 6 expression processing is numbered the guide rail 7 along the Y direction extension that 7 pairs of these feeders and discharger lead.

At substrate stow supply unit 1 supply chassis 11 is set, is provided with at substrate stow recoverer 4 and reclaims chassis 12.Laser machine 2 possesses on Y direction 2

processing heads

21,22 with spacing P arranged spaced, to make this light beam difference be the light path 24 of two fens mirrors (half mirror) etc. of 2 bundles to the laser beam that laser oscillator 23 penetrates by possessing, supply with to processing

head

21,22, by being the laser of distribution, 2

substrates

60,60 on the XY platform 25 are processed simultaneously by the current scanning in each processing head (galvanoscan).The optical axis of numbering 26,27 each

processing head

21,22 of expression.

Base positioner 3, can on Y direction, be subjected to the supporting of guide rail 31 freely movably, under the effect of drive unit 32, can between the top position of supplying with chassis 11 and the retreating position of keeping out of the way about shown in Figure 1 from this top position, back and forth be driven the distance P that equates with the installing space P of above-mentioned processing head (below, abbreviation distance P).The details of relevant base positioner 3, narration hereinafter.

Feeder 5 installs by 2 absorbing

units

17,18 are separated spacing P ground on the driving platform 13 that is back and forth driven along guide rail 7 in institute's set a distance, support and constitute, wherein, above-mentioned 2 absorbing

units

17,18 constitute with being used for the lifting platform portion that this framework carries out the hydraulic cylinder 16 of the tape guide parts that lifting drives is connected with the framework 15 of sucker 14 by possessing the substrate vacuum suction.Because discharger 6 also has the formation identical with above-mentioned feeder 5, in the accompanying drawing same section is adopted same numbering and detailed.In addition, the temporary transient mounting table of numbering 19 expressions is fixed, is equipped on the position to be kept away (among Fig. 2 absorbing unit 17 under position) of XY platform 25 sides that reclaim chassis 12 tops.

Then, Fig. 4～Fig. 6 represents base positioner 3,33rd, puts the workbench of the resin plate system of substrate 60, remains in workbench sliding freely and keeps platform 34.Workbench keeps platform 34 to have the guide block 35 that is directed by described

guide rail

31,31, and the described drive unit 32 that the hydraulic cylinder by the tape guide parts constitutes back and forth drives distance P on Y direction.

In addition, numbering 36,37 is represented Y direction retainer and X-direction retainer respectively, keeps the 2 perpendicular limits of platform 34 to be provided with along workbench respectively.Y direction retainer 36, constitute by the plate body that is provided with perpendicularly with Y direction, an end is fixed in the

guide rod

38,38 on this plate body and is fixed in

guideway

39,39 tablings that workbench keeps the bottom surface of platform 34 by inciting somebody to action wherein, thereby can be supported on movably freely on the Y direction on the workbench maintenance platform 34.The hydraulic cylinder that numbering 40 expressions drive along Y direction Y direction retainer 36, its hydraulic cylinder portion is fixed in workbench and keeps on the platform 34.

Numbering 41 expression Y direction retainer position-switching devices, prominent the establishing of central portion of the web 42 that links at the other end of above-mentioned 2

guide rods

38,38 is fixed with shaft head 43, and, in the guide plate 44a portion that hydraulic cylinder portion is installed on workbench maintenance platform hydraulic cylinder 44 34 lower surfaces, the tape guide plate, screw in benchmark dogbolt 45 and biasing dogbolt 46 along X-direction partition distance S ground, by guide plate 44a is back and forth driven in distance S along X-direction, make benchmark dogbolt 45 alternately relative with shaft head 43 with each head of biasing dogbolt 46.

In addition, under the state that workbench shown in Figure 5 33 is removed, the main portion of these position-switching devices is adapted to exposes in being located at the 34a of window portion that workbench keeps platform 34, can adjust from the top to the amount of bias Δ Y between the head of the distance Y o and the benchmark dogbolt 45 of 45 of shaft head 43 and benchmark dogbolts and the dogbolt 46 of setovering etc. by the 34a of this window portion.And, distance Y o is preestablished institute's definite value as the reference position of substrate orientation, relevant amount of bias Δ Y is set in hereinafter narration.

X-direction retainer 37 is made of the plate body that sets perpendicular to X-direction, it is supported on structure and X-direction retainer position-switching device 47 that workbench keeps platform 34, except that changing in direction on the vertical view 90 degree, has same configuration with the supporting construction and the Y direction retainer position-switching device 41 of above-mentioned Y direction retainer 36, thereby, in the accompanying drawing same section is adopted same numbering and detailed.In addition, distance X o that shaft head 43 and benchmark dogbolt are 45 and above-mentioned Yo similarly preestablish institute's definite value as the reference position of substrate orientation, about the setting of the amount of bias Δ X between the head of benchmark dogbolt 45 and biasing dogbolt 46, narrate hereinafter with above-mentioned Δ Y.

In addition, the Working table driving device that numbering 50 expressions move horizontally workbench 33 edges and the diagonal direction (being the direction that 45 degree tilt for relative two direction of principal axis in this example) of X-direction and Y direction oblique, the installing plate that upper surface is fixed, established angle is tabular 53 at the guide table 52a of the hydraulic cylinder 52 that hydraulic cylinder portion is fixedly installed in the tape guide platform on the support plate 51, wherein, support plate 51 is installed on workbench and keeps with 4 bolts 54 workbench 33 being screwed, being installed on this installing plate 53 on the platform 34.If remove these bolts 54, then workbench 33 can be kept platform 34 to take off and becomes state shown in Figure 5 from workbench.And, rely on this Working table driving device 50, can with the 2 limit portions of workbench 33 from Fig. 4 and going-back position forward drive shown in Figure 5 to, workbench 33 not with move to Y direction retainer 36 behind the position location and 37 collisions of X-direction retainer fixed progressive position, after substrate orientation, quilt is retreated is urged to illustrated position.In addition, workbench keeps platform 34 to be provided with the 34b of window portion that allows this installing plate 53 to move.

As described below by the location action that the above-mentioned base positioner that constitutes 3 carries out.Promptly, at first make Y direction retainer position-switching device 41 and X-direction retainer position-switching device 47 be in state shown in Figure 5, afterwards, so that the direction of piston rod retraction drives each

hydraulic cylinder

40,40, then Y direction retainer 36 bumps until shaft head 43 and benchmark dogbolt 45 from going-back position Ho forward travel distance Yo and connects, and stops at reference position H1, similarly, X-direction retainer 37 stops at reference position G1 from going-back position Go forward travel distance Xo.

Thus, rely on the conveyance action of following feeder 5, shown in the chain-dotted line among Fig. 4 and Fig. 5, will be as the substrate 60 of anchored object so that its 2 limit portion from workbench 33 stretch out quantitative state be positioned on the workbench 33.And, if rely on 50 pairs of workbench 33 of Working table driving device after the diagonal direction shown in the arrow R drives institute's set a distance, to make it to stop, then 2 limit portions of substrate 60 and Y direction retainer 36 and X-direction retainer 37 bump connect and stop (this bump connect after, workbench 33 still carries out to contact, to wipe moving state with substrate bottom surface that small distance is oblique to be moved), thus the benchmark positioning states that 2 limit portions are positioned reference position H1, G1 be in.The back gets final product to 25 conveyances of XY platform so need only make it with the absorption of 5 pairs of feeders to rise.Afterwards, Y direction retainer 36 and X-direction retainer 37 are returned on going-back position Ho, the Go.

In addition, in Y direction retainer position-switching device 41 and X-direction retainer position-switching device 47, rely on each

hydraulic cylinder

44,44 couples of

guide plate

44a, 44a drives apart from S to arrow T direction, make and be in biasing

dogbolt

46,46 with

shaft head

43,43 relative states, then if with the above-mentioned hydraulic cylinder 40 that similarly makes, 40 directions to its piston rod retraction drive, then Y direction retainer 36 stops at offset position H2 from going-back position Ho forward travel distance Yo+ Δ Y, similarly, X-direction retainer 37 also stops at offset position G2 from going-back position Go forward travel distance Xo+ Δ X.Then, if with above-mentioned similarly substrate 60 is positioned on the workbench 33 back along arrow R direction to workbench 33 drive fixed distance, then substrate 60 is in the offset located state that its 2 limit portion is positioned offset position H2, G2, thereby, need only this substrate be got final product to 25 conveyances of XY platform with feeder 5.Afterwards, Y direction retainer 36 and X-direction retainer 37 are returned on going-back position Ho, the Go.

Then, according to Fig. 7 (a)～Fig. 7 (f), the conveyance processing workshop section to substrate 60 of the laser processing device integral body that comprises aforesaid substrate positioner 3 is described.Supply with the substrate 60a that chassis 11 interior the top portions were raised and remained in the superiors of institute's allocation for being stacked in, absorbing unit 17 by making the feeder that is positioned at going-back position 5 that is shown in Fig. 7 (a) descend and to absorption, and remain in lifting position after the absorption, shown in Fig. 7 (b), make feeder 5 along direction of arrow forward travel distance P, absorbing unit 17 is descended (releasing is adsorbed), substrate 60a is positioned on the workbench of base positioner 3, then, shown in Fig. 7 (c), make feeder 5 return going-back position, when absorption promotes to next substrate 60b with absorbing unit 17, position by means of 3 couples of substrate 60a of base positioner in during this.

Then, shown in Fig. 7 (d), after substrate 60a absorption after will locating with absorbing unit 18 promotes, rely on drive unit 32 to make base positioner 3 along direction of arrow backway P, shown in figure (e), the substrate 60b that remains in absorbing unit 17 is positioned on the workbench of base positioner 3 and positions, shown in Fig. 7 (f), if promote with 17 pairs of these substrates of absorbing unit 60b absorption, then 2

substrate

60a, 60b that finish the location remain in lifting position with interval pitch P.So, to feeder 5 forward drive and absorbing

unit

17,18 is fallen, 2

substrate

60a, 60b are positioned on the XY platform 25 along the direction of arrow.

After being opposite to this

substrate

60a, 60b on the XY platform 25 with laser machine 2 and processing simultaneously, after 2 substrates finishing processing with 6 pairs on discharger adsorb, to reclaiming chassis 12 side conveyances, with substrate 60a be positioned over temporarily be positioned over substrate 60b on the temporary transient mounting table 19 when reclaiming in the chassis 12 after, adsorbing once more and being positioned over and reclaim chassis 12 interior getting final product with 18 pairs of absorbing units.

Be amount of bias Δ Y to aforesaid substrate positioner 3, Δ X is determined, at first before the beginning of each workshop section's operation of above-mentioned Fig. 7 (a)～(f), for example when the laser processing device overall package is over, with 2

substrate

60a, 60b is placed on the base positioner 3, do not carrying out making Y direction retainer 36 and X-direction retainer 37 lay respectively at reference position H1 under the situation about switching the retainer position, G1, to 2 substrate 60a, after 60b positions, it is positioned on the XY platform 25, shown in Fig. 8 (a), 2 substrate 60a then, 60b is with the Y direction spacing P of being separated by, the state of no off normal difference is placed on the X-direction.So, behind the position that XY platform 25 is positioned to suit, carry out a laser irradiation respectively from each

processing head

21,22 as test.Because of reasons such as the position deviation of

optical axis

26,27 or inclinations, processing stand K on the substrate 60b corresponding with processing stand J on being formed at substrate 60a is formed on the position of the position deviation that Δ X, Δ Y have taken place with respect to the original standard processing stand Ko under the situation of position deviation that does not have above-mentioned optical axis or inclination.

Then, survey with mensuration utensils such as chis (or be located on the

processing head

21,22 the illustrated video sensor of not doing), on X-direction retainer position-switching device 47 and Y direction retainer position-switching device 41, carry out biasing

dogbolt

46,46 is screwed in amount of bias Δ X, the Δ Y of operation to obtain to equate with this positional offset amount Δ X, Δ Y that is fixed in

guide plate

44a, 44a, become set condition shown in Figure 5.

And under this state, for above-mentioned substrate transferring and location workshop section, 2 substrates are carried out the retainer position to be switched, respectively, by the Y direction retainer 36 that is positioned at reference position H1, G1 and 37 pairs the 1st substrate 60a location of X-direction retainer, position by the Y direction retainer 36 that is positioned at offset position H2, G2 and 37 couples the 2nd substrate 60b of X-direction retainer, afterwards, it is positioned on the XY platform 25 with feeder 5.Shown in Fig. 8 (b), among 2 substrate 60a, the 60b, with respect to the substrate 60a that is placed on the reference position, substrate 60b is in the position relation of setovering respectively from the reference position with the bias of the above-mentioned processing stand of figure shown in (a) suitable Δ X, Δ Y, thus, processing stand J, the K that is produced by two

processing heads

21,22 moves to the original processing stand position of each

substrate

60a, 60b and exists hardly on the position of departing from (processing stand K and above-mentioned standard processing stand Ko position are almost consistent).

Thus, each

substrate

60a, 60b can overflow from this machining area when deciding the perforation processing of number in that each machining area is carried out hardly, can simultaneously 2

substrate

60a, 60b be processed, and have prevented the generation of the quality problems of perforation processing.

In addition, in this example, because the diagonal type of drive of substrate being carried out the workbench 33 of surface bearing is adopted in the driving in horizontal plane to the substrate on the workbench 33 60, thereby, even for the thin occasion of substrate, with with the pushing pin mode that 2 edge parts of substrate push driving is compared in following the 2nd example, can positively transfer substrate with stable state, in addition, do not exist retainer to bump to connect the back to cause the problem of base plate deformation yet, thereby can obtain good positioning accuracy because of excessive feeding force.

In addition, adopting upper surface in this example is plane workbench 33, and Fig. 9～Figure 10 represents the example preferably of this workbench 33.As shown in these figures, be set side by side with direction that several and above-mentioned Working table driving device 50 moves workbench 33, be the parallel groove 55 of diagonal direction R at the upper surface of workbench 33.

Because the existence of many grooves 55, when being positioned over substrate 60 on the workbench 33, can prevent almost the connecting airtight of plane of substrate 60 with whole upper surface with workbench 33.After 2 limit portions of substrate 60 and Y direction retainer 36 and X-direction retainer 37 bump and connect when workbench drives, when workbench 33 continuation diagonals move, substrate 60 prevents from sliding smoothly on the workbench 33 to connect airtight the distortion of the substrate 60 that causes and the bounce-back after the distortion because of above-mentioned, thereby can obtain more good positioning accuracy.

In addition, in above-mentioned example, as shown in figure 10, owing to adopt the cross section to be the shallow slot of part-circular as groove 55, so the upper corner 55a of groove 55 is shape in obtuse angle, even the 60c of corner portion of the rear end of the substrate 60 that the chain-dotted line in Fig. 9 is represented is bowed downward to hook-shaped, the 60c of portion opposed slot cross section, above-mentioned corner is walked crosswise under the occasion of driving when amount of bias Δ X and Δ Y are variant, hook also can not take place and stumble in the 60c of this corner portion with the upper corner 55a of groove 55, has the advantage that can position smoothly, yet, also can adopt other grooves as various cross sectional shapes such as chamfered groove or triangular grooves.

Connect down, the embodiment 2 of example of the present invention is described according to Figure 11.The base positioner 70 of this embodiment has omitted the workbench 33 in the foregoing description 1, only with the monolayer constructions will of substrate supporting portion as the workbench 71 that is equivalent to above-mentioned workbench maintenance platform 34, and, replace Working table driving device 50, be provided with, the 2 limit portions relative to 2 limits with being positioned at Y direction retainer 36 and X-direction retainer 37 sides of substrate push, make substrate and Y direction retainer 36 and X-direction retainer 37 bump the substrate drive unit 72 that connects, other constitute with the base positioner 3 of the foregoing description 1 identical, thereby, adopt same numbering for the part identical with embodiment 1, and detailed.

Constituting of substrate drive unit 72, rely on the

Rodless cylinder

73,74 on the lower surface that is equipped on workbench 71, make respectively at the pushing

75,76 that is activated on Y direction and the X-direction outstandingly upward, edges of the 2 perpendicular limit portions of these pushing

pins

75,76 and substrate are bumped connect and substrate is driven on Y direction and X-direction by being opened in

slotted hole portion

77,78 on the workbench 71.

And, the change action that relies on Y direction retainer position-switching device 41 identical and X-direction retainer position-switching device 47 to carry out with the foregoing description 1 formation, Y direction retainer 36 and X-direction retainer 37 are switched between reference position H1, G1 and offset position H2, G2, by the driving of 75,76 pairs of substrates of above-mentioned pushing pin, can carry out reference position and two kinds of location of offset position to substrate 60.This point is identical with the foregoing description 1.

The present invention is not limited to above-mentioned each example, for example, according to the direction of the processing stand K among Fig. 8 (a) with respect to the position deviation of standard processing stand Ko, sometimes both one at least among amount of bias Δ X and the Δ Y must be made as 0 or negative value (with the biasing on the rightabout of X-direction, Y direction), during this occasion, the head of the biasing dogbolt 46 of each retainer position-switching device can be arranged at the co-located (amount of bias is) of the head of benchmark dogbolt 45 at 0 o'clock or on the position of shaft head 43 side-prominent amount of bias (Δ X or Δ Y).In addition, in the above-mentioned example,, also can earlier this substrate 60a be positioned offset position though earlier the substrate 60a of location is positioned on the reference position, the substrate 60b of location, back is positioned the reference position.

In addition, as Y direction retainer position-switching device 41 and X-direction retainer position-switching device 47, employing is carried out the mode that switch the position to above-mentioned benchmark dogbolt 45 and biasing dogbolt 46, in addition, also can adopt other forms of retainer position-switching device, for example respectively Y direction retainer 36 and X-direction retainer 37 be driven on Y direction and X-direction and carry out switching of retainer position etc. with driving direct drive ram of servomotor etc.

In addition, in the above-mentioned example, base positioner 3 is constituted, back and forth driving positions 2 substrates successively apart from S on Y direction, thereby, the laser processing device set overall can be become have short length on Y direction, thereby can reduce device requisite space is set, yet, also can be with it differently, the enterprising enforcement in centre position that for example base positioner 3 is fixedly set in 2 of substrate stow supply unit 1 and laser machines is used.Also situation is identical therewith for base positioner 70.

In addition, Y direction retainer 36 and X-direction retainer 37 plate body in last example, also can be made of several pins or cam-follower etc.

Claims

1. base positioner is characterized in that possessing:

Bump X-direction retainer and the Y direction retainer that connects, described substrate is positioned with the 2 perpendicular limits of described substrate;

X-direction retainer position-switching device, this X-direction retainer position-switching device at described X-direction retainer with respect to described workbench keep platform in the position of X-direction, fixed reference position with switch between the quantitative offset position of setovering with institute with respect to this reference position;

Y direction retainer position-switching device, this Y direction retainer position-switching device at described Y direction retainer with respect to described workbench keep platform in the position of Y direction, fixed reference position with switch between the quantitative offset position of setovering with institute with respect to this reference position;

Make described workbench move horizontally, make described substrate and described X-direction retainer and Y direction retainer to bump the Working table driving device that connects to diagonal direction with X-direction and Y direction oblique.

2. base positioner according to claim 1 is characterized in that,

Be set side by side with the movable workbench direction that the driving with described Working table driving device causes at the upper surface of described workbench, that is: several grooves of extending of diagonal direction with paralleling.

3. base positioner is characterized in that possessing:

Place the workbench of substrate;

X-direction retainer position-switching device, this X-direction retainer position-switching device at described X-direction retainer with respect to described workbench in the position of X-direction, fixed reference position and with respect to this reference position and with quantitatively switch between the offset position of biasing;

Y direction retainer position-switching device, this Y direction retainer position-switching device at described Y direction retainer with respect to described workbench in the position of Y direction, fixed reference position and with respect to this reference position and with quantitatively switch between the offset position of biasing;

The 2 limit portions relative with described 2 limits to described substrate push, make described substrate and described X-direction retainer and described Y direction retainer to bump the substrate drive unit that connects.