CN100401515C - Semiconductor device with inverted chip packer coating and its production thereof - Google Patents

Semiconductor device with inverted chip packer coating and its production thereof Download PDF

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Publication number
CN100401515C
CN100401515C CNB2004100915740A CN200410091574A CN100401515C CN 100401515 C CN100401515 C CN 100401515C CN B2004100915740 A CNB2004100915740 A CN B2004100915740A CN 200410091574 A CN200410091574 A CN 200410091574A CN 100401515 C CN100401515 C CN 100401515C
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China
Prior art keywords
chip
flip
bearing part
semiconductor device
laminar substrate
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CNB2004100915740A
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Chinese (zh)
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CN1779972A (en
Inventor
普翰屏
黄建屏
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Siliconware Precision Industries Co Ltd
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Siliconware Precision Industries Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73203—Bump and layer connectors
    • H01L2224/73204—Bump and layer connectors the bump connector being embedded into the layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

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Abstract

The present invention relates to a semiconductor device coated with an inverted chip packer and a manufacturing method of the semiconductor device. The semiconductor device comprises a load bearing piece, an inverted chip packer, second chips, welding wires and a second packing glue body. The semiconductor device has the manufacturing method that the tested inverted chip packer is connected to the top surface of the load bearing piece, and the inverted chip packer is electrically connected with the load bearing piece by a plurality of first conductive components; at least one second chip is connected to the inverted chip packer, and the second chips are electrically connected with the load bearing piece by a plurality of second conductive components; then, a plurality of solder balls are implanted on the bottom surface of the load bearing piece after the packing glue body which is used for coating the inverted chip packer and the second chips is formed on the load bearing piece, so that the first chips and the second chips are electrically connected with the outside by the solder balls. The present invention has the advantage that the qualification rate of finished products can be enhanced; the load bearing piece does not need making of layer increasing base plates, so the packing cost can be reduced.

Description

Be coated with the semiconductor device and the method for making thereof of Flip-Chip Using part
Technical field
The invention relates to a kind of ball grid array (BGA) semiconductor package and method for making thereof, particularly about a kind of ball grid array (BGA) semiconductor package and method for making thereof with multicore sheet.
Background technology
Electronic product now also will be taken into account the raising of function and the quickening of processing speed except wanting compact outside the pale of civilization; For cooperating the demand, the chip that electronic product adopts must improve integrated level (Integration).But the raising of chip integration, the quantity that is used to electrically connect the I/O link (I/O Connections) of chip extremely chip carrier on the expression chip can increase.Be subject to wiring space with commonly used as bonding wire (Bonding Wires) the electric connection chip of gold thread and the mode of chip carrier, can't be suitable for.So the chip of high integration often will be in the mode of flip-chip (Flip Chip), the solder bump (Solder Bumps) that is laid in by a plurality of one-tenth array way on the action face (ActiveSurface) of chip is electrically connected on the chip carrier.Yet, become the bump pitch (Bump Pitch) of array way laying solder bump very little on the chip action face, generally be 150 μ m to 250 μ m, increase laminar substrate (Build-upSubstrate) so chip carrier will use, the convex pads (BumpPads) of respective amount and spacing could be provided on chip carrier; But increase the cost height of laminar substrate, packaging cost is also high, and the bump pitch of solder bump is very little, so, with solder bump reflow (Reflow) to the processing procedure that increases on the laminar substrate, have the generation that solder bump produces bridge joint (Bridge) phenomenon, solder bump produces the bridge joint phenomenon then can cause short circuit, causes the manufactured goods acceptance rate of flip-chip semiconductor package (Flip Chip Package) often lower.
In addition, though flip-chip semiconductor package can meet the package requirements of highly integrated chip, but still can't effectively solve the performance requirement of high-end product.Because can't increase chip by enlarging substrate area in the electronic product confined space, the someone proposes the structure of stacked another chips on flip-chip, as the 5th, 815, No. 372 United States Patent (USP) discloses the semiconductor package part with stack chip.As shown in figure 10.Form this semiconductor package part with stack chip 1 ' processing procedure be with first chip 10 ' with flip chip borrow a plurality of solder bumps 11 ' connect put increase laminar substrate 12 ' on, use again resin material 13 ' bottom filler (Under fill) first chip 10 ' and substrate 12 ', by this resin material 13 ' coat fully solder bump 11 '; Then, this first chip 10 ' on connect put second chip 14 ', and with many gold threads 15 ' with second chip 14 ' be electrically connected to substrate 12 ' on be positioned at the bottom extra-regional a plurality of weld pads of filler (Bond Pads) 120 '; This substrate 12 ' on be formed for coating this first chip 10 ', second chip 14 ' and gold thread 15 ' packing colloid (Encapsulant) 16 ' after, this substrate 12 ' the bottom surface on plant the soldered ball (Solder Balls) 17 that connects a plurality of one-tenth array way and lay ' promptly finish.
Though this existing semiconductor package part with stack chip can coat the chip that splices mutually more than two, and can satisfy the demand of high-performance electronic product, yet still there is following shortcoming in it under the area that does not increase substrate.
At first, this semiconductor package part uses increase laminar substrate 12 ' area bigger, can borrow solder bump 11 ' with first chip 10 ' electric connection and by means of gold thread 15 ' be as the criterion with second chip 14 ' electric connection.Owing to increase the laminar substrate costliness, the size of using greatly promptly can increase packaging cost.
Have, this semiconductor package part is just can test after encapsulation is finished again, thus this first chip 10 ' with flip chip connect put substrate 12 ' on after, can't confirm this first chip 10 ' whether be non-defective unit (Known Good Die, KGD); Just, if this first chip 10 ' be not non-defective unit, must wait until that encapsulation procedure finishes and could find when testing,, also can increase the packaging cost of integral body so can cause the acceptance rate decline of manufactured goods.Therefore, can detect this first chip 10 ' whether be non-defective unit, then can avoid second chip 14 ' and the waste of successive process, can also improve the acceptance rate of manufactured goods and the reduction of packaging cost if can be located at first chip 10 ' preceding at second chip 14 ' connect.
Simultaneously, in the program with resin material 13 ' carry out bottom filler, resin material 13 ' can pollute to substrate 12 ' on weld pad 120 ', weld pad 120 ' suffer pollution can cause gold thread 15 ' can't be soldered to smoothly weld pad 120 ' on, make second chip 14 ' and substrate 12 ' electric connection imperfect, also cause the decline of manufactured goods acceptance rate and the raising of overall package cost.
In addition, as previously mentioned, adjacent solder bump 11 ' since spacing very little, so reflow this solder bump 11 ' to substrate 12 ' program carry out, easily cause adjacent solder bump 11 ' formation bridge joint phenomenon, make first chip 10 ' and substrate 12 ' electric connection be short-circuited, cause the acceptance rate of manufactured goods to descend and increase whole packaging cost.
At last, semiconductor package part 1 ' be coated with simultaneously first chip 10 ' with second chip 14 ', heighten at the heat of chip generation in service, if can not efficiently radiates heat, then can cause the semiconductor package part shortening in useful life.For addressing the above problem, in the prior art, the existing the 6th, 472, No. 471 United States Patent (USP) presss from both sides the packaging part of establishing a metal fin at two chip chambers, yet, because the difference of the thermal coefficient of expansion (Coefficient ofThermal Expansion) between the metal material of chip material and formation fin is very big, establish a fin at the chip chamber folder, can cause the rhegma (Crack) of chip because of the thermal stress that thermal expansion coefficient difference (CTE Mismatch) produces.Therefore, the heat dissipation problem of this semiconductor package part is not effectively solved.
Summary of the invention
Main purpose of the present invention is to provide a kind of semiconductor device that is coated with the Flip-Chip Using part and method for making thereof that can improve the manufactured goods acceptance rate and reduce the overall package cost.
Another object of the present invention is to provide a kind of large scale of must not using to increase semiconductor device that is coated with the Flip-Chip Using part and method for making thereof that laminar substrate can reduce the overall package cost.
A further object of the present invention is to provide a kind of can confirm in advance that first chip is to carry out follow-up encapsulation procedure behind the good sheet again, can improve the semiconductor device that is coated with the Flip-Chip Using part and the method for making thereof of manufactured goods acceptance rate.
Another purpose of the present invention is to provide a kind of semiconductor device that is coated with the Flip-Chip Using part and the method for making thereof that can not pollute weld pad on the bearing part, can improve the manufactured goods acceptance rate.
A further object of the present invention is to provide a kind of semiconductor device that is coated with the Flip-Chip Using part and method for making thereof that can improve radiating efficiency.
For reaching above-mentioned and other purpose, the invention provides a kind of semiconductor device that is coated with the Flip-Chip Using part.This semiconductor device that is coated with the Flip-Chip Using part comprises: the bearing part with end face and relative bottom surface; Connect the Flip-Chip Using part of establishing to this bearing part end face, wherein, this Flip-Chip Using part borrows these a plurality of soldered balls to be electrically connected to this bearing part; At least one connects second chip of putting on this Flip-Chip Using part; A plurality ofly be used to electrically connect the bonding wire of this second chip to this bearing part; And be formed on this bearing part end face, coat second packing colloid of this Flip-Chip Using part, second chip and bonding wire.
The semiconductor device that another kind of the present invention is coated with the Flip-Chip Using part comprises: the bearing part with end face and relative bottom surface; Connect the Flip-Chip Using part of establishing to this bearing part end face, wherein, this Flip-Chip Using part has the laminar substrate of increasing, and makes this Flip-Chip Using part increase the external contact of laminar substrate mode up with this connecing and establish to this bearing part end face; At least one connects to put at this Flip-Chip Using part and increases second chip on the laminar substrate second surface; A plurality of conducting elements that electrically connect this second chip and Flip-Chip Using part respectively and electrically connect this Flip-Chip Using part and bearing part; And be formed on this bearing part end face, coat second packing colloid of this Flip-Chip Using part, second chip and bonding wire.
Wherein, above-mentioned Flip-Chip Using part is by having increasing laminar substrate, first chip, being used to electrically connect this first chip and increasing a plurality of solder bumps on the laminar substrate first surface and be formed on this to this and increase first packing colloid that coats this first chip on the laminar substrate first surface and constitute of first surface and opposing second surface.
The method for making that is coated with the semiconductor device of Flip-Chip Using part of the present invention comprises: at first the Flip-Chip Using part is connect and establish to bearing part, wherein, this bearing part has end face and opposed bottom surface; This Flip-Chip Using part is by having increasing laminar substrate, first chip, being used to electrically connect this first chip and increasing a plurality of solder bumps on the first surface of laminar substrate, be formed to coat first packing colloid of this first chip on this first surface that increases laminar substrate and plant at these a plurality of soldered balls that increase on the second surface of laminar substrate and constitute to this of first surface and opposing second surface, wherein, this Flip-Chip Using part is electrically connected to this bearing part by these a plurality of soldered balls; Secondly, at least one second chip is connect be located on this Flip-Chip Using part; Then, at least one second chip is electrically connected to this bearing part with this by many bonding wires; And second packing colloid that on this bearing part, forms coating this Flip-Chip Using part, second chip and bonding wire.
Realize that the another kind of method for making that is coated with the semiconductor device of Flip-Chip Using part of the present invention comprises: at first, the Flip-Chip Using part connect be located on the bearing part, wherein, this Flip-Chip Using part is by having increasing laminar substrate, first chip, electrically connecting this first chip and increase a plurality of solder bumps on the laminar substrate first surface, be formed on this and increase laminar substrate first surface top and coat first packing colloid of this first chip and plant at these a plurality of soldered balls that increase on the laminar substrate second surface and constitute to this of first surface and opposing second surface; Wherein, the non-action face of this first chip exposes outside this first packing colloid, and this Flip-Chip Using part is electrically connected to this bearing part by these a plurality of soldered balls; Secondly, a bonding fin makes the non-action face of this first chip directly touch this fin to this Flip-Chip Using part; Subsequently, at least one second chip connect establish to this fin, make this fin be folded between first chip and second chip; Then, at least one second chip is electrically connected to this bearing part with this by many bonding wires; And second packing colloid that on this bearing part, forms coating this Flip-Chip Using part, second chip and bonding wire.
At the semiconductor device that is coated with the Flip-Chip Using part of the present invention following different embodiment can be arranged.
In one embodiment of this invention, the non-action face of this first chip (Inactive Surface) exposes outside first packing colloid of this Flip-Chip Using part, make this at least one second chip directly be bonded on the non-action face of this first chip, to reduce the whole height of semiconductor device of the present invention.
In another embodiment of the present invention, the non-action face of this first chip exposes outside first packing colloid of this Flip-Chip Using part, put on this Flip-Chip Using part for fin is directly sticking, directly contact with the non-action face of this first chip, and this at least one second chip is also directly connect put on this fin, the heat that makes this first chip and second chip directly loss improves radiating efficiency of the present invention to this fin.
In another embodiment of the present invention, the non-action face of this first chip exposes outside first packing colloid of this Flip-Chip Using part, makes this first chip and at least one second chip can direct contact to this fin; Simultaneously, this second chip can borrow many first ground connection bonding wires to be grounded to this fin, also borrows many second ground connection bonding wires to be grounded to this bearing part, as ground plane (Ground Plane), improves the electric property of semiconductor device of the present invention by this fin.
In an embodiment more of the present invention, sticking second chip that is equipped with two horizontal arrangement on this Flip-Chip Using part, or two second chips that splice, make these two second chips electrically connect the allomeric function of the semiconductor device of the present invention that further increases by many bonding wires.
In another embodiment of the present invention, this Flip-Chip Using part is to stick on this bearing part to increase the external contact of laminar substrate mode up, this at least one second chip is directly glued put increasing on the laminar substrate at the Flip-Chip Using part, at least one second chip is electrically connected to this and increases laminar substrate with this by many second bonding wires, and by many first bonding wires this is increased laminar substrate and be electrically connected to this bearing part.
In an embodiment more of the present invention, this Flip-Chip Using part is to stick on this bearing part to increase the external contact of laminar substrate mode up, simultaneously, make this first chip expose outside first packing colloid of this Flip-Chip Using part, the non-action face that makes this first chip expose outside first packing colloid can directly be bonded on this bearing part, effectively reduces the whole height of manufactured goods.
Because this Flip-Chip Using part is a packaging part completely, so can when encapsulation is finished, test earlier, after first chip of confirming this Flip-Chip Using part coating is non-defective unit, carry out successive process again, so can improve the acceptance rate of manufactured goods and reduce packaging cost.And this Flip-Chip Using part is to be electrically connected on this bearing part by the soldered ball that general ball grid array (BGA) semiconductor package adopts, because the spacing (Ball Pitch) between adjacent solder balls is much larger than the spacing between solder bump, this bearing part uses the pressing substrate (Subtractive that generally subtracts layer, LaminatedSubstrate) get final product, must not adopt the expensive laminar substrate that increases, so though the present invention uses a small size to increase laminar substrate and the large-area laminar substrate that subtracts, the large tracts of land that its cost still is lower than available technology adopting increases the cost of laminar substrate, so, can reduce the overall package cost.Have, this Flip-Chip Using part is electrically connected on the bearing part by soldered ball again, as mentioned above, because the spacing between soldered ball is bigger, thus do not have the problem that bridge joint takes place soldered ball in reflow process, thus can improve the acceptance rate of manufactured goods; And borrow soldered ball because of the Flip-Chip Using part and be electrically connected on the bearing part, need not the gap of filler between Flip-Chip Using part and bearing part, bottom, so the weld pad for bonding wire welding usefulness can not polluted on the bearing part, can further improve the acceptance rate of manufactured goods.
Description of drawings
Figure 1A to Fig. 1 E is the cutaway view and the method for making flow process cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 1;
Fig. 2 is the cutaway view and the method for making flow process cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 2;
Fig. 3 is the cutaway view and the method for making flow process cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 3;
Fig. 4 is the cutaway view and the method for making flow process cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 4;
Fig. 5 is the cutaway view and the method for making flow process cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 5;
Fig. 6 is the cutaway view and the method for making flow process cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 6;
Fig. 7 is the cutaway view and the method for making flow process cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 7;
Fig. 8 is the cutaway view and the method for making flow process cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 8;
Fig. 9 is the cutaway view and the method for making flow process cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 9; And
Figure 10 is existing cutaway view with semiconductor package part of stack chip.
Embodiment
Embodiment 1
Figure 1A is the cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 1, and Figure 1B to Fig. 1 E is the schematic flow sheet of method for manufacturing semiconductor device shown in Figure 1A.
Shown in Figure 1A, the semiconductor device that is coated with the Flip-Chip Using part 1 of the embodiment of the invention 1 mainly comprises: Flip-Chip Using part 10; Connect the bearing part 11 of putting and electrically connecting with it for this Flip-Chip Using part 10; Be bonded to second chip 12 on this Flip-Chip Using part 10; This second chip 12 is electrically connected to many gold threads 13 of this bearing part 11; Be formed on second packing colloid 14 that coats this Flip-Chip Using part 10, second chip 12 and many gold threads 13 on this bearing part 11; And planting becomes a plurality of soldered balls 15 of array way laying on this bearing part 11.
This Flip-Chip Using part 10 comprises: what have first surface 100a and opposing second surface 100b increases laminar substrate 100; First chip 101 with action face 101a and relative non-action face 101b; The action face 101a that is welded on this first chip 101 goes up and becomes a plurality of solder bumps 102 of array way laying, this first chip 101 by this solder bump 102 with its action face 101a towards the mode that increases laminar substrate 100, be electrically connected on the first surface 100a that increases laminar substrate 100; Also have the resin material 103 of filling one bottom filler (under fill) in this first chip 101 and the gap that increases between the laminar substrate 100 to coat this solder bump 102; Being formed on this increases on the laminar substrate 100 to coat first packing colloid 104 of this first chip 101; And plant at this and increase a plurality of soldered balls 105 on the second surface 100b of laminar substrate 100.
Because this Flip-Chip Using part 10 is same as the prior art, so its generation type and architectural characteristic are not given unnecessary details at this.(ChipSize Package, CSP), just, its size only must be slightly larger than the size of chip, increases the size of laminar substrate 100 with reduction, reduces cost but this Flip-Chip Using part 10 is preferably chip size packages.
Simultaneously, be a complete packaging part after this Flip-Chip Using part 10 forms, so can directly test, confirm whether first chip 101 that is coated is non-defective units.After confirming that this first chip 101 is non-defective unit, just this Flip-Chip Using part 10 is soldered on this bearing part 11 by these a plurality of soldered balls 105.
This bearing part 11 has end face 110 and opposed bottom surface 111, and the central part on this end face 110 is formed with a plurality of solder ball pads (Ball Pads) 112 that correspond to this soldered ball 105, and is formed with a plurality of weld pads 113 outside these solder ball pad 112 laying zones.After the soldered ball 105 of this Flip-Chip Using part 10 is soldered to solder ball pad 112 on this bearing part 11, even this Flip-Chip Using part 10 is electrically connected to this bearing part 11; Because the spacing of the soldered ball 105 on this Flip-Chip Using part 10 generally is 500 μ m to 800 μ m, so bearing part 11 can adopt the existing laminar substrate that subtracts, spacing that must bump pads (Bump Pads) is the laminar substrate that increases of 150 μ m to 250 μ m.Thereby, even the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 11 must use a undersized laminar substrate 100 and the large-sized bearing part 11 that subtracts laminar substrate of increasing, but because of increasing the costliness of laminar substrate, this undersized cost summation that increases laminar substrate 100 and large-sized bearing part 11, it is low still to use large scale to increase the cost of laminar substrate than conventional semiconductor packages part, so can reduce packaging cost.
This second chip 12 is put after on the Flip-Chip Using part 10 sticking, just gold thread 13 is welded on 113 of the weld pads of second chip 12 and bearing part 11, thereby borrows gold thread 13 to be electrically connected to bearing part 11.
Refer again to Figure 1B to Fig. 1 E, details are as follows for the method for making of the semiconductor device that is coated with the Flip-Chip Using part 1 of the embodiment of the invention 1.
Shown in Figure 1B, the Flip-Chip Using part of earlier encapsulation being finished 10 (shown in Figure 1A) is soldered on the end face 110 of bearing part 11, make this Flip-Chip Using part 10 by being laid in a plurality of soldered balls 105 that increase on the laminar substrate 100 second surface 100b, be electrically connected to this bearing part 11, form electrical connection via solder bump 102, the path that increases laminar substrate 100 and soldered ball 105 and bearing part 11 for first chip 101 that is coated in this Flip-Chip Using part 10.It is noted that this Flip-Chip Using part 10 is before being soldered to this bearing part 11, test earlier, after confirming that this first chip 101 is non-defective unit, just carry out the welding of this Flip-Chip Using part 10 and bearing part 11, so can make successive process can not produce the acceptance rate that waste also can improve manufactured goods.Moreover, as mentioned above, the spacing of the soldered ball 105 of this Flip-Chip Using part 10 generally is at 500 μ m to 800 μ m, when so this soldered ball 105 is soldered on the bearing part 11, the problem that adjacent solder balls produces bridge joint can not take place, and the relative spacing of the solder ball pad 112 that welds for soldered ball 105 on this bearing part 11 is also big, so traditional pressing substrate that subtracts layer as double layer substrate (Dual-LayerSubstrate) all is applicable to this bearing part 11.
Then, shown in Fig. 1 C, with second chip, 12 sticking putting on this Flip-Chip Using part 10.This second chip 12 can be finished with any suitable mode and sticky material with the bonding of Flip-Chip Using part 10, since same as the prior art, so do not give unnecessary details at this yet.
Shown in Fig. 1 D, carry out routing processing procedure (Wire Bonding Process), utilize many gold threads 13 to electrically connect this second chip 12 and bearing part 11.Because this Flip-Chip Using part 10 is to be soldered on the bearing part 11 by soldered ball 105, the gap that makes 11 of Flip-Chip Using part 10 and bearing parts must the bottom filler, therefore, weld pad 113 on these bearing part 11 end faces 110 can be not contaminated, this gold thread 13 can fully be soldered on the weld pad 113, so can further improve the acceptance rate of manufactured goods.
Shown in Fig. 1 E, after finishing the electric connection of second chip 12 and bearing part 11, carry out mold pressing processing procedure (Molding Process), on this bearing part 11, be formed for coating second packing colloid 14 of this Flip-Chip Using part 10, second chip 12 and gold thread 13.This mold pressing processing procedure and the resin material that forms this second packing colloid 14 are prior art, so also repeat no more.
At last, on these bearing part 11 bottom surfaces 111, weld the soldered ball 15 of establishing a plurality of one-tenth array way arrangements, promptly finish the encapsulation procedure of the semiconductor device that is coated with the Flip-Chip Using part 1 shown in Figure 1A with the existing ball processing procedure (Ball ImplantingProcess) of planting.
Embodiment 2
Fig. 2 is the cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 2.
As shown in the figure, the structure and the structure described in the embodiment 1 of the semiconductor device that is coated with the Flip-Chip Using part 2 of embodiment 2 are roughly the same, difference is the non-action face 201b of first chip 201 in the Flip-Chip Using part 20 among the embodiment 2, expose outside first packing colloid 204 on the laminar substrate 200 of increasing that is used to carry this first chip 201, after making this Flip-Chip Using part 20 be soldered on the bearing part 21, second chip 22 directly can be sticked on the non-action face 201b of this first chip 201.So, can make the whole height of the semiconductor device of making 2, be lower than embodiment 1 described semiconductor device 1.
In addition, for further reducing the thickness of this Flip-Chip Using part 20, after the encapsulation procedure of this Flip-Chip Using part 20 is finished, grind at the top of the non-action face 201b that this Flip-Chip Using part 20 is exposed with grinder commonly used, removes first packing colloid 204 and first chip 201 of preset thickness.
Embodiment 3
Fig. 3 is the cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 3.
As shown in the figure, the structure and the structure described in the embodiment 2 of the semiconductor device that is coated with the Flip-Chip Using part 3 of this embodiment 3 are roughly the same, its difference be in, after this Flip-Chip Using part 30 forms, be fin 36 sticking the putting on this Flip-Chip Using part 30 that to make by metal material, make non-action face 301b that first chip 301 in this Flip-Chip Using part 30 exposes outside first packing colloid 304 directly on bonding this fin 36.After welding on the big bearing part 31 by soldered ball 305 this Flip-Chip Using part 30 that is bonded with fin 36, second chip 32 can directly glue to be put on this fin 36, making first chip 301 of this semiconductor device 3 and second chip 32 all directly connect is located on the fin 36, so the heat that first chip 301 and second chip 32 produce can directly be passed to this fin 36, make the radiating efficiency of semiconductor device 3 of embodiment 3 improve.
Embodiment 4
Fig. 4 is the cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 4.
As shown in the figure, the structure and the structure described in the embodiment 3 of the semiconductor device that is coated with the Flip-Chip Using part 4 of this embodiment 4 are roughly the same, its difference be in, this is folded in the fin 46 of 42 of first chip 401 and second chips, except as the heat eliminating medium, can also become the ground plane of first chip 401 and second chip 42, for making this fin 46 produce the ground connection effect, then this second chip 42 must weld many first ground connection gold thread 43a in addition, with with these second chip, 42 ground connection at this fin 46, and must weld many second ground connection gold thread 43b to connect this fin 46 and bearing part 41, make this first chip 401 and second chip 42 borrow this fin 46 to be grounded on bearing part 41 simultaneously, and utilize this fin 46 to be ground plane, so can improve the electric property of this semiconductor device 4.
Embodiment 5
Fig. 5 is the cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 5.
As shown in the figure, the semiconductor device that is coated with the Flip-Chip Using part 5 of this embodiment 5 is roughly the same in the structure described in structure and the embodiment 1, its difference be in, the mode that sets with level on the Flip-Chip Using part 50 is glued and is equipped with two identical second chip 52a that separate, 52b, these two second chip 52a, 52b is except borrowing many gold thread 53a respectively, outside 53b and bearing part 51 electrically connect, for strengthening electrically, these two chip 52a, electrically connect by many gold thread 53c behind the 52b, and make this semiconductor device 5 can coat the chip of a greater number, meet the demand of different high-end electronic products.
Embodiment 6
Fig. 6 is the cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 6.
As shown in the figure, the semiconductor device that is coated with the Flip-Chip Using part 6 of this embodiment 6 is structurally roughly the same with the structure described in the embodiment 5, its difference be in, be to glue in stacked mode to be provided with two second chip 62a, 62b on the Flip-Chip Using part 60 in this semiconductor device 6, this second chip 62b borrows many gold thread 63b to be electrically connected to this second chip 62a, and this second chip 62a borrows many gold thread 63a to be electrically connected to bearing part 61, makes these two second chip 62a, 62b all can form electrical connection with bearing part 61.
Embodiment 7
Fig. 7 is the cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 7.
As shown in the figure, the semiconductor device that is coated with the Flip-Chip Using part 7 of this embodiment 7 is structurally roughly the same with the structure described in the embodiment 1, its difference be in, the Flip-Chip Using part 70 that is coated in this semiconductor device 7 sticks on the bearing part 71 to increase laminar substrate 700 external contacts mode up, just, first packing colloid 704 that this Flip-Chip Using part 70 borrows it to coat first chip 701 is bonding with bearing part 71, so gluing, second chip 72 puts increasing on the laminar substrate 700 at this Flip-Chip Using part 70, and borrow this second chip 72 of many gold threads 73 electric connections and increase laminar substrate 700, and this increases laminar substrate 700 and borrows many gold threads 705 to be electrically connected to bearing part 71, thereby makes this first chip 701 and second chip 72 all form electrical connection with bearing part 71.
Embodiment 8
Fig. 8 is the cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 8.
As shown in the figure, the semiconductor device that is coated with the Flip-Chip Using part 8 of this embodiment 8 is structurally roughly the same with the structure described in the embodiment 7, its difference be in, the non-action face 801b of first chip 801 in the Flip-Chip Using part 80 that this semiconductor device 8 is coated, expose outside first packing colloid 804 of this Flip-Chip Using part 80, so in that this Flip-Chip Using part 80 is sticking when establishing to bearing part 81, the non-action face 801b of this first chip 801 also can directly contact bearing part 81.This non-action face 801b with first chip 801 exposes outside the design of first packing colloid 804, can make the whole height reduction of this semiconductor device 8, and helps the raising of radiating efficiency.
Embodiment 9
Fig. 9 is the cutaway view of the semiconductor device that is coated with the Flip-Chip Using part of the embodiment of the invention 9.
As shown in the figure, the semiconductor device that is coated with the Flip-Chip Using part of this embodiment 9 is structurally roughly the same with the structure described in the embodiment 8, its difference is, second chip 92 of this semiconductor device 9 is to borrow solder bump 93 to be electrically connected to increasing on the laminar substrate 900 of Flip-Chip Using part 90, make second chip 92 the same with first chip 901, all connect to put and increasing on the laminar substrate 900 with flip chip, and electrically connect this by many gold threads 905 and increase laminar substrate 900 to bearing part 91, make this first chip 901 and second chip 92 and bearing part 91 formation electrical connections.

Claims (28)

1. a semiconductor device that is coated with the Flip-Chip Using part is characterized in that, this device comprises:
Bearing part with end face and relative bottom surface;
Connect the Flip-Chip Using part of establishing to this bearing part end face, wherein, this Flip-Chip Using part is by having increasing laminar substrate, first chip, being used to electrically connect this first chip and increasing a plurality of solder bumps on the laminar substrate first surface, be formed on this and increase to coat first packing colloid of this first chip on the laminar substrate first surface and plant these a plurality of soldered balls that increase on the laminar substrate second surface and constitute to this of first surface and opposing second surface, and this Flip-Chip Using part borrows these a plurality of soldered balls to be electrically connected to this bearing part;
At least one connects second chip of putting on this Flip-Chip Using part;
A plurality ofly be used to electrically connect the bonding wire of this second chip to this bearing part; And
Be formed on this bearing part end face, coat second packing colloid of this Flip-Chip Using part, second chip and bonding wire.
2. semiconductor device as claimed in claim 1 is characterized in that, this device also comprises a plurality of soldered balls that plant on this bearing part bottom surface.
3. semiconductor device as claimed in claim 1 is characterized in that, this first chip is coated by this first packing colloid fully.
4. semiconductor device as claimed in claim 1 is characterized in that, the non-action face of this first chip exposes outside this first packing colloid, and this second chip is directly sticking to be put on the non-action face of this first chip.
5. semiconductor device as claimed in claim 1, it is characterized in that, the non-action face of this first chip exposes outside this first packing colloid, and a fin is sticking establishes to this Flip-Chip Using part, this first chip and second chip is all directly connect be located on this fin.
6. semiconductor device as claimed in claim 5 is characterized in that, this second chip is to be grounded to this fin by many second ground connection bonding wires, and this fin is grounded to this bearing part by many first ground connection bonding wires.
7. semiconductor device as claimed in claim 1 is characterized in that, sets with level on this Flip-Chip Using part that mode is sticking to be provided with two apart from one another by second chip of opening.
8. semiconductor device as claimed in claim 7 is characterized in that, this device comprises that also many are used to electrically connect these two bonding wires apart from one another by second chip of opening.
9. semiconductor device as claimed in claim 1 is characterized in that, be provided with two mutual second bonding chips so that the mode of splicing is sticking on this Flip-Chip Using part, and these two the mutual second bonding chips is electrically connected to each other.
10. semiconductor device as claimed in claim 1 is characterized in that, this bearing part is the pressing substrate that subtracts layer.
11. semiconductor device as claimed in claim 1 is characterized in that, this Flip-Chip Using part is established to the bearing part connecing, and is through test and confirms that first chip in this Flip-Chip Using part is a non-defective unit.
12. a method for making that is coated with the semiconductor device of Flip-Chip Using part is characterized in that this method for making comprises the following steps:
The Flip-Chip Using part connect establish to bearing part, wherein, this bearing part has end face and opposed bottom surface; This Flip-Chip Using part is by having increasing laminar substrate, first chip, being used to electrically connect this first chip and increasing a plurality of solder bumps on the first surface of laminar substrate, be formed to coat first packing colloid of this first chip on this first surface that increases laminar substrate and plant at these a plurality of soldered balls that increase on the second surface of laminar substrate and constitute to this of first surface and opposing second surface, wherein, this Flip-Chip Using part is electrically connected to this bearing part by these a plurality of soldered balls;
At least one second chip connect be located on this Flip-Chip Using part;
At least one second chip is electrically connected to this bearing part with this by many bonding wires; And
On this bearing part, form second packing colloid that coats this Flip-Chip Using part, second chip and bonding wire.
13. method for making as claimed in claim 12 is characterized in that, this method for making also is included in this Flip-Chip Using part and connects and establish to this bearing part, the step that this Flip-Chip Using part is tested.
14. method for making as claimed in claim 12 is characterized in that, this bearing part is the pressing substrate that subtracts layer.
15. method for making as claimed in claim 12 is characterized in that, this method for making also comprise on this bearing part form second packing colloid after, on the bottom surface of this bearing part, plant the step of a plurality of soldered balls.
16. a method for making that is coated with the semiconductor device of Flip-Chip Using part is characterized in that this method for making comprises the following steps:
The Flip-Chip Using part connect be located on the bearing part, wherein, this Flip-Chip Using part is by having increasing laminar substrate, first chip, electrically connecting this first chip and increase a plurality of solder bumps on the laminar substrate first surface, be formed on this and increase laminar substrate first surface top and coat first packing colloid of this first chip and plant at these a plurality of soldered balls that increase on the laminar substrate second surface and constitute to this of first surface and opposing second surface; Wherein, the non-action face of this first chip exposes outside this first packing colloid, and this Flip-Chip Using part is electrically connected to this bearing part by these a plurality of soldered balls;
A bonding fin makes the non-action face of this first chip directly touch this fin to this Flip-Chip Using part;
At least one second chip connect establish to this fin, make this fin be folded between first chip and second chip;
At least one second chip is electrically connected to this bearing part with this by many bonding wires; And
On this bearing part, form second packing colloid that coats this Flip-Chip Using part, second chip and bonding wire.
17. method for making as claimed in claim 16 is characterized in that, this method for making also is included in the Flip-Chip Using part and connects and establish to this bearing part, the step that this Flip-Chip Using part is tested.
18. method for making as claimed in claim 16 is characterized in that, this bearing part is to subtract laminar substrate.
19. method for making as claimed in claim 16 is characterized in that, after this method for making also is included in and forms second packing colloid on this bearing part, plants the step of a plurality of soldered balls on the bottom surface of this bearing part.
20. method for making as claimed in claim 16, it is characterized in that, when this method for making also is included in and electrically connects this second chip to bearing part by these many bonding wires, the step of a plurality of ground connection bonding wires of welding connects this second chip, fin and bearing part ground connection between this second chip and fin and between this fin and bearing part.
21. a semiconductor device that is coated with the Flip-Chip Using part is characterized in that, this device comprises:
Bearing part with end face and relative bottom surface;
Connect the Flip-Chip Using part of establishing to this bearing part end face, wherein, this Flip-Chip Using part is by having increasing laminar substrate, first chip, electrically connecting this first chip and increase a plurality of solder bumps on the laminar substrate first surface to this of first surface and opposing second surface, and be formed on this and increase on the laminar substrate first surface first packing colloid that coats this first chip and constitute, and make this Flip-Chip Using part increase the external contact of laminar substrate mode up connecing and establish to this bearing part end face with this;
At least one connects to put at this Flip-Chip Using part and increases second chip on the second surface of laminar substrate;
A plurality of conducting elements that electrically connect this second chip and Flip-Chip Using part respectively and electrically connect this Flip-Chip Using part and bearing part; And
Be formed on this bearing part end face, coat second packing colloid of this Flip-Chip Using part, second chip and bonding wire.
22. semiconductor device as claimed in claim 21 is characterized in that, this device also comprises a plurality of soldered balls that plant on this bearing part bottom surface.
23. semiconductor device as claimed in claim 21 is characterized in that, this first chip is coated by this first packing colloid fully.
24. semiconductor device as claimed in claim 21 is characterized in that, the non-action face of this first chip exposes outside this first packing colloid, the non-action face of this first chip is directly connect put on the end face of this bearing part.
25. semiconductor device as claimed in claim 21 is characterized in that, this bearing part is the pressing substrate that subtracts layer.
26. semiconductor device as claimed in claim 21 is characterized in that, this Flip-Chip Using part is established to the bearing part connecing, and is through test and confirms that first chip in this Flip-Chip Using part is a non-defective unit.
27. semiconductor device as claimed in claim 21 is characterized in that, this conducting element is a bonding wire.
28. semiconductor device as claimed in claim 21, it is characterized in that, this conducting element is bonding wire and solder bump, borrows solder bump to be electrically connected to the laminar substrate that increases of this Flip-Chip Using part by this second chip, and electrically connects this by this bonding wire and increase laminar substrate to this bearing part.
CNB2004100915740A 2004-11-19 2004-11-19 Semiconductor device with inverted chip packer coating and its production thereof Expired - Fee Related CN100401515C (en)

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JP2002151644A (en) * 2000-09-04 2002-05-24 Fujitsu Ltd Laminated semiconductor device and manufacturing method thereof
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