CN100397056C - 用于辐射热测量计阵列的高吸收宽带像素 - Google Patents

用于辐射热测量计阵列的高吸收宽带像素 Download PDF

Info

Publication number
CN100397056C
CN100397056C CNB018229131A CN01822913A CN100397056C CN 100397056 C CN100397056 C CN 100397056C CN B018229131 A CNB018229131 A CN B018229131A CN 01822913 A CN01822913 A CN 01822913A CN 100397056 C CN100397056 C CN 100397056C
Authority
CN
China
Prior art keywords
pixel
resistor
platform
substrate
platform body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB018229131A
Other languages
English (en)
Chinese (zh)
Other versions
CN1492992A (zh
Inventor
B·E·科尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25021543&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN100397056(C) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of CN1492992A publication Critical patent/CN1492992A/zh
Application granted granted Critical
Publication of CN100397056C publication Critical patent/CN100397056C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Radiation Pyrometers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
CNB018229131A 2000-12-29 2001-12-20 用于辐射热测量计阵列的高吸收宽带像素 Expired - Lifetime CN100397056C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/751,338 2000-12-29
US09/751,338 US6621083B2 (en) 2000-12-29 2000-12-29 High-absorption wide-band pixel for bolometer arrays

Publications (2)

Publication Number Publication Date
CN1492992A CN1492992A (zh) 2004-04-28
CN100397056C true CN100397056C (zh) 2008-06-25

Family

ID=25021543

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB018229131A Expired - Lifetime CN100397056C (zh) 2000-12-29 2001-12-20 用于辐射热测量计阵列的高吸收宽带像素

Country Status (8)

Country Link
US (1) US6621083B2 (https=)
EP (1) EP1346196A2 (https=)
JP (1) JP2004527731A (https=)
KR (2) KR20030063489A (https=)
CN (1) CN100397056C (https=)
IL (2) IL156693A0 (https=)
TW (1) TW561249B (https=)
WO (1) WO2002055973A2 (https=)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2826725B1 (fr) * 2001-06-28 2004-02-27 Commissariat Energie Atomique Microbolometres resistants aux temperatures de scenes elevees.
JP2006518464A (ja) * 2003-01-31 2006-08-10 マイクロン インフラレッド インコーポレイテッド 赤外線撮像装置
US7378655B2 (en) * 2003-04-11 2008-05-27 California Institute Of Technology Apparatus and method for sensing electromagnetic radiation using a tunable device
FR2875298B1 (fr) * 2004-09-16 2007-03-02 Commissariat Energie Atomique Detecteur thermique de rayonnement electromagnetique comportant une membrane absorbante fixee en suspension
JP4721141B2 (ja) 2006-03-17 2011-07-13 日本電気株式会社 熱型赤外線固体撮像素子
WO2007139123A1 (en) * 2006-05-25 2007-12-06 Panasonic Electric Works Co., Ltd. Infrared sensor
KR100785738B1 (ko) * 2006-06-19 2007-12-18 한국과학기술원 볼로미터
US9027025B2 (en) 2007-04-17 2015-05-05 Oracle International Corporation Real-time database exception monitoring tool using instance eviction data
US7825381B2 (en) * 2007-06-29 2010-11-02 Agiltron, Inc. Micromechanical device for infrared sensing
DE102007031959B4 (de) 2007-07-10 2009-11-26 Institut Für Photonische Technologien E.V. Terahertz-Videokamera
DE102008017585B4 (de) * 2008-04-07 2010-03-04 Diehl Bgt Defence Gmbh & Co. Kg Bildsensorsystem
US8123815B2 (en) 2008-11-24 2012-02-28 Biomet Manufacturing Corp. Multiple bearing acetabular prosthesis
US7842533B2 (en) * 2009-01-07 2010-11-30 Robert Bosch Gmbh Electromagnetic radiation sensor and method of manufacture
US9128895B2 (en) * 2009-02-19 2015-09-08 Oracle International Corporation Intelligent flood control management
US8308810B2 (en) 2009-07-14 2012-11-13 Biomet Manufacturing Corp. Multiple bearing acetabular prosthesis
US9165086B2 (en) 2010-01-20 2015-10-20 Oracle International Corporation Hybrid binary XML storage model for efficient XML processing
KR101713280B1 (ko) 2011-03-03 2017-03-08 삼성전자주식회사 전기 에너지 발생장치
FR2977937B1 (fr) 2011-07-15 2013-08-16 Centre Nat Rech Scient Detecteur bolometrique a performances ameliorees
EP2581721B1 (en) 2011-10-10 2019-05-08 Samsung Electronics Co., Ltd Infrared thermal detector and method of manufacturing the same
KR101861147B1 (ko) 2011-11-08 2018-05-28 삼성전자주식회사 적외선 검출기
US9274005B2 (en) * 2012-08-23 2016-03-01 Robert Bosch Gmbh Device and method for increasing infrared absorption in MEMS bolometers
US9006661B1 (en) 2012-10-31 2015-04-14 Exelis, Inc. Compact THz focal plane imaging array with integrated context imaging sensors and antennae matrix
US9297700B2 (en) * 2012-12-03 2016-03-29 Analog Devices, Inc. Photonic sensor and a method of manufacturing such a sensor
KR101902920B1 (ko) 2012-12-11 2018-10-01 삼성전자주식회사 광대역 표면 플라즈몬 공진기를 포함하는 적외선 검출기
KR102040149B1 (ko) 2013-02-01 2019-11-04 삼성전자주식회사 적외선 검출기
US9195048B1 (en) 2013-03-05 2015-11-24 Exelis, Inc. Terahertz tunable filter with microfabricated mirrors
US9234797B1 (en) 2013-03-05 2016-01-12 Exelis, Inc. Compact THz imaging detector with an integrated micro-spectrometer spectral tuning matrix
CN103263255B (zh) * 2013-05-25 2014-09-24 慈溪迈思特电子科技有限公司 人体红外温度传感器的数据处理方法
US9945729B2 (en) 2014-06-04 2018-04-17 Flir Systems, Inc. Systems and methods for enhanced bolometer response
US10222265B2 (en) * 2016-08-19 2019-03-05 Obsidian Sensors, Inc. Thermomechanical device for measuring electromagnetic radiation
KR101776027B1 (ko) * 2017-01-09 2017-09-07 ㈜시리우스 마이크로 볼로미터를 포함하는 공유 앵커 구조의 적외선 센서
FR3097046B1 (fr) * 2019-06-05 2021-05-21 Lynred Microbolomètre ayant un pas de pixel réduit
FR3097047B1 (fr) * 2019-06-05 2021-05-14 Lynred Microbolomètre muni d’une fonction de filtrage
TWI724708B (zh) 2019-12-24 2021-04-11 財團法人工業技術研究院 具有阻擋元件的微機電紅外光感測裝置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0534768A1 (en) * 1991-09-27 1993-03-31 Texas Instruments Incorporated Uncooled infrared detector and method for forming the same
US5688699A (en) * 1996-01-16 1997-11-18 Raytheon Company Microbolometer
WO2000012985A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer including an absorber made of a material having a low deposition-temperature and a low heat-conductivity
CN1251945A (zh) * 1998-10-21 2000-05-03 李韫言 微细加工热辐射红外传感器
WO2000033040A1 (en) * 1998-11-27 2000-06-08 Daewoo Electronics Co., Ltd. Bolometer with a zinc oxide bolometer element

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286976A (en) * 1988-11-07 1994-02-15 Honeywell Inc. Microstructure design for high IR sensitivity
US5288649A (en) 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
FR2736654B1 (fr) 1995-07-13 1997-08-22 Commissariat Energie Atomique Procede de fabrication d'elements de microstructures flottants rigides et dispositif equipe de tels elements
US6144285A (en) * 1999-09-13 2000-11-07 Honeywell International Inc. Thermal sensor and method of making same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0534768A1 (en) * 1991-09-27 1993-03-31 Texas Instruments Incorporated Uncooled infrared detector and method for forming the same
US5688699A (en) * 1996-01-16 1997-11-18 Raytheon Company Microbolometer
WO2000012985A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer including an absorber made of a material having a low deposition-temperature and a low heat-conductivity
CN1251945A (zh) * 1998-10-21 2000-05-03 李韫言 微细加工热辐射红外传感器
WO2000033040A1 (en) * 1998-11-27 2000-06-08 Daewoo Electronics Co., Ltd. Bolometer with a zinc oxide bolometer element

Also Published As

Publication number Publication date
JP2004527731A (ja) 2004-09-09
US20030020017A1 (en) 2003-01-30
WO2002055973A2 (en) 2002-07-18
KR20030063489A (ko) 2003-07-28
EP1346196A2 (en) 2003-09-24
IL156693A (en) 2007-03-08
KR20080093165A (ko) 2008-10-20
IL156693A0 (en) 2004-01-04
TW561249B (en) 2003-11-11
WO2002055973A3 (en) 2003-02-06
CN1492992A (zh) 2004-04-28
US6621083B2 (en) 2003-09-16

Similar Documents

Publication Publication Date Title
CN100397056C (zh) 用于辐射热测量计阵列的高吸收宽带像素
US7491938B2 (en) Multi-spectral uncooled microbolometer detectors
EP0865672B1 (en) Infrared radiation detector having a reduced active area
US9171885B2 (en) Infrared detector and infrared image sensor including the same
CA2417924C (en) Advanced high speed, multi-level uncooled bolometer and method for fabricating same
EP2084501B1 (en) Dual band imager with visible or swir detectors combined with uncooled lwir detectors
US5900799A (en) High responsivity thermochromic infrared detector
CN103930755B (zh) 具有改进性能的微测热辐射计阵列
US7462831B2 (en) Systems and methods for bonding
US7667202B2 (en) Multilayer-structured bolometer and method of fabricating the same
JP2001215151A (ja) 熱型赤外線検出器およびその製造方法
WO2010033142A1 (en) Detection beyond the standard radiation noise limit using spectrally selective absorption
US9261411B2 (en) Uncooled microbolometer detector and array for terahertz detection
JP2000205944A (ja) 複数の赤外波長帯を検出する熱型赤外アレイセンサ
US20080265164A1 (en) Thermal detector for electromagnetic radiation and infrared detection device using such detectors
CN102575961A (zh) 包括电容耦合天线的太赫兹检测器
US8067737B1 (en) Photonic detector, imaging system and method employing plasmonic resonance absorption
US7262413B2 (en) Photoconductive bolometer infrared detector
CA2800779C (en) Uncooled microbolometer detector and array for terahertz detection
Malyarov Uncooled thermal IR arrays

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20080625