CN100395512C - 表面形貌测量用触针及其制备方法 - Google Patents
表面形貌测量用触针及其制备方法 Download PDFInfo
- Publication number
- CN100395512C CN100395512C CNB2004100279800A CN200410027980A CN100395512C CN 100395512 C CN100395512 C CN 100395512C CN B2004100279800 A CNB2004100279800 A CN B2004100279800A CN 200410027980 A CN200410027980 A CN 200410027980A CN 100395512 C CN100395512 C CN 100395512C
- Authority
- CN
- China
- Prior art keywords
- contact pilotage
- measuring surface
- surface form
- groove
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012876 topography Methods 0.000 title abstract description 3
- 238000000034 method Methods 0.000 title description 9
- 238000003466 welding Methods 0.000 claims abstract description 15
- 238000002360 preparation method Methods 0.000 claims abstract description 14
- 239000003795 chemical substances by application Substances 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 7
- 238000003754 machining Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000010979 ruby Substances 0.000 claims description 4
- 229910001750 ruby Inorganic materials 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 238000003801 milling Methods 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 10
- 239000000853 adhesive Substances 0.000 abstract description 3
- 230000001070 adhesive effect Effects 0.000 abstract description 3
- 238000004441 surface measurement Methods 0.000 abstract description 3
- 210000005239 tubule Anatomy 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
Claims (17)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2004100279800A CN100395512C (zh) | 2004-07-02 | 2004-07-02 | 表面形貌测量用触针及其制备方法 |
JP2005014657A JP2006017693A (ja) | 2004-07-02 | 2005-01-21 | 表面形状測定触針及びその製造方法 |
US11/170,533 US20060000101A1 (en) | 2004-07-02 | 2005-06-29 | Measurement probe for profilometer and method for manufacturing same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2004100279800A CN100395512C (zh) | 2004-07-02 | 2004-07-02 | 表面形貌测量用触针及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1715826A CN1715826A (zh) | 2006-01-04 |
CN100395512C true CN100395512C (zh) | 2008-06-18 |
Family
ID=35512429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100279800A Expired - Lifetime CN100395512C (zh) | 2004-07-02 | 2004-07-02 | 表面形貌测量用触针及其制备方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20060000101A1 (zh) |
JP (1) | JP2006017693A (zh) |
CN (1) | CN100395512C (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008180557A (ja) * | 2007-01-23 | 2008-08-07 | Tohoku Univ | 接触式変位センサのスタイラス及びその製造装置並びに接触式変位センサ |
DE102012003223A1 (de) * | 2012-02-20 | 2013-08-22 | Carl Zeiss 3D Automation Gmbh | Kugel-Schaft-Verbindung |
JP6229959B2 (ja) * | 2016-03-08 | 2017-11-15 | パナソニックIpマネジメント株式会社 | スタイラス及び測定方法 |
DE102016107135A1 (de) * | 2016-04-18 | 2017-10-19 | Jenoptik Industrial Metrology Germany Gmbh | Messanordnung |
CN108020180B (zh) * | 2017-11-22 | 2020-06-09 | 江苏万力机械股份有限公司 | 一种表面粗糙度快速检测装置 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3644985A (en) * | 1968-08-24 | 1972-02-29 | Hermann Koltgen | Process for producing probe heads, and probe head for internal comparison measurements |
US3909951A (en) * | 1971-07-16 | 1975-10-07 | Premisura Ag Instr Fur Prazisi | Internal measuring apparatus |
US5355589A (en) * | 1992-05-28 | 1994-10-18 | Wolfgang Madlener | Sensing head for the three-dimensional sensing of workpiece |
CN2182388Y (zh) * | 1993-11-09 | 1994-11-09 | 哈尔滨工业大学 | 一种高精度接触式三维测头 |
US5517124A (en) * | 1989-07-26 | 1996-05-14 | Extrude Hone Corporation | Stylus probe for measuring workpiece surface characteristics |
US6370788B1 (en) * | 1999-01-29 | 2002-04-16 | Renishaw Plc | Probe with vibration damped stylus |
US6609308B2 (en) * | 2001-11-02 | 2003-08-26 | Q-Mark Manufacturing, Inc. | Drilled silicon nitride ball |
US6633051B1 (en) * | 1999-04-06 | 2003-10-14 | Renishaw Plc | Surface sensing device with optical sensor |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2490483A (en) * | 1946-08-22 | 1949-12-06 | Samuel B Simer | Locating device |
GB1401034A (en) * | 1971-07-07 | 1975-07-16 | Dea Spa | Tridimensional universal tracer point for continuous high-speed copying of profiles of models |
GB1593682A (en) * | 1977-01-20 | 1981-07-22 | Rolls Royce | Probe for use in mearusing apparatus |
FR2406835A1 (fr) * | 1977-10-22 | 1979-05-18 | Renishaw Electrical Ltd | Sonde de detection de contact |
DE2938810A1 (de) * | 1979-09-25 | 1981-04-09 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum einkoppeln von strahlung in einen optischen wellenleiter |
JPS5777902U (zh) * | 1980-10-30 | 1982-05-14 | ||
US4694184A (en) * | 1980-11-14 | 1987-09-15 | Diffracto Ltd. | Coordinate measuring method and device using a contact member |
JPS59166106U (ja) * | 1983-04-22 | 1984-11-07 | 双葉電子工業株式会社 | タツチセンサ |
JPS62181354U (zh) * | 1986-05-12 | 1987-11-17 | ||
US5168638A (en) * | 1990-04-20 | 1992-12-08 | Barton David W | Sensor for detecting the location of a discontinuity |
DE19547977A1 (de) * | 1995-12-21 | 1997-06-26 | Zeiss Carl Fa | Tastsystem für Koordinatenmeßgeräte |
JP4794753B2 (ja) * | 2001-06-04 | 2011-10-19 | パナソニック株式会社 | 形状測定方法 |
-
2004
- 2004-07-02 CN CNB2004100279800A patent/CN100395512C/zh not_active Expired - Lifetime
-
2005
- 2005-01-21 JP JP2005014657A patent/JP2006017693A/ja active Pending
- 2005-06-29 US US11/170,533 patent/US20060000101A1/en not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3644985A (en) * | 1968-08-24 | 1972-02-29 | Hermann Koltgen | Process for producing probe heads, and probe head for internal comparison measurements |
US3909951A (en) * | 1971-07-16 | 1975-10-07 | Premisura Ag Instr Fur Prazisi | Internal measuring apparatus |
US5517124A (en) * | 1989-07-26 | 1996-05-14 | Extrude Hone Corporation | Stylus probe for measuring workpiece surface characteristics |
US5355589A (en) * | 1992-05-28 | 1994-10-18 | Wolfgang Madlener | Sensing head for the three-dimensional sensing of workpiece |
CN2182388Y (zh) * | 1993-11-09 | 1994-11-09 | 哈尔滨工业大学 | 一种高精度接触式三维测头 |
US6370788B1 (en) * | 1999-01-29 | 2002-04-16 | Renishaw Plc | Probe with vibration damped stylus |
US6633051B1 (en) * | 1999-04-06 | 2003-10-14 | Renishaw Plc | Surface sensing device with optical sensor |
US6609308B2 (en) * | 2001-11-02 | 2003-08-26 | Q-Mark Manufacturing, Inc. | Drilled silicon nitride ball |
Also Published As
Publication number | Publication date |
---|---|
JP2006017693A (ja) | 2006-01-19 |
CN1715826A (zh) | 2006-01-04 |
US20060000101A1 (en) | 2006-01-05 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: HONGFUJIN PRECISE INDUSTRY CO., LTD. Effective date: 20150421 Owner name: JIZHUN PRECISION INDUSTRY (HUIZHOU) CO., LTD. Free format text: FORMER OWNER: HONGFUJIN PRECISE INDUSTRY (SHENZHEN) CO., LTD. Effective date: 20150421 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 518109 SHENZHEN, GUANGDONG PROVINCE TO: 516100 HUIZHOU, GUANGDONG PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20150421 Address after: 516100 Guangdong County of Boluo Province town of Huizhou city dragon Xia Liao Village Gate Village Group Twelve ditch area Patentee after: JI ZHUN PRECISION INDUSTRY (HUI ZHOU) Co.,Ltd. Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Patentee before: HONG FU JIN PRECISION INDUSTRY (SHENZHEN) Co.,Ltd. Patentee before: HON HAI PRECISION INDUSTRY Co.,Ltd. |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160111 Address after: 048026 No. 1216 orchid Road, Jincheng Economic Development Zone, Shanxi, China Patentee after: JINCHENG HONGREN TECHNOLOGY Co.,Ltd. Address before: 516100 Guangdong County of Boluo Province town of Huizhou city dragon Xia Liao Village Gate Village Group Twelve ditch area Patentee before: JI ZHUN PRECISION INDUSTRY (HUI ZHOU) Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 048000 No. 1216, Lanhua Road, Jincheng Development Zone, Shanxi Province Patentee after: Jincheng Fulian Hongren Technology Co.,Ltd. Address before: 048026 No. 1216 Lanhua Road, Jincheng Economic Development Zone, Shanxi Province Patentee before: JINCHENG HONGREN TECHNOLOGY Co.,Ltd. |
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CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20080618 |